Gallium nitride (GaN) has been targeted for use in high power (>30 W/mm) and high frequency (>160 GHz) application due to its wide band gap and its large break down field. One of the most significant advances in GaN devices has evolved from the AlGaN/GaN high electron mobility transistor (HEMT). As a result of the large power densities being applied to these devices there can develop intense hot spots near areas of highest electric field. The hot spot phenomenon has been linked to a decrease in device reliability through a range of degradation mechanisms. In order to minimize the effect that hot spot temperatures have on device reliability a detailed understanding of relevant transport mechanisms must be developed. This study focuses on two main aspects of phonon transport within GaN devices. The first area of focus was to establish an understanding of phonon relaxation times within bulk GaN. These relaxation times were calculated from an application of Fermi's Golden Rule and explicitly conserve energy and crystal momentum. This analysis gives insight into the details behind the macroscopic thermal conductivity parameter. Once relaxation times for GaN were established a multiscale phonon transport modeling methodology was developed that allowed the Boltzmann Transport Equation to be coupled to the energy equation. This coupling overcomes some computational limits and allows for nanoscale phenomena to be resolved within a macroscopic domain. Results of the transport modeling were focused on benchmarking the coupling method as well as calculating the temperature distribution within an operating 6 finger HEMT.

The mechanisms of thermal transport in defect-free silicon nanostructures are examined using a combination of lattice dynamics (LD) calculations and the Boltzmann transport equation (BTE). To begin, the thermal conductivity reduction in thin films is examined using a hierarchical method that first predicts phonon transport properties using LD calculations, and then solves the phonon BTE using the lattice Boltzmann method. This approach, which considers all of the phonons in the first Brillouin-zone, is used to assess the suitability of common assumptions used to reduce the computational effort. Specifically, we assess the validity of: (i) neglecting the contributions of optical modes, (ii) the isotropic approximation, (iii) assuming an averaged bulk mean-free path (i.e., the Gray approximation), and (iv) using the Matthiessen rule to combine the effect of different scattering mechanisms. Because the frequency-dependent contributions to thermal conductivity change as the film thickness is reduced, assumptions that are valid for bulk are not necessarily valid for thin films. Using knowledge gained from this study, an analytical model for the length-dependence of thin film thermal conductivity is presented and compared to the predictions of the LD-based calculations. The model contains no fitting parameters and only requires the bulk lattice constant, bulk thermal conductivity, and an acoustic phonon speed as inputs. By including the mode-dependence of the phonon lifetimes resulting from phonon-phonon and phonon-boundary scattering, the model predictions capture the approach to the bulk thermal conductivity better than predictions made using Gray models based on a single lifetime. Both the model and the LD-based method are used to assess a procedure commonly used to extract bulk thermal conductivities from length-dependent molecular dynamics simulation data. Because the mode-dependence of thermal conductivity is not included in the derivation of this extrapolation procedure, using it can result in significant error. Finally, phonon transport across a silicon/vacuum-gap/silicon structure is modelled using lattice dynamics and Landauer theory. The phonons transmit thermal energy across the vacuum gap via atomic interactions between the leads. Because the incident phonons do not encounter a classically impenetrable potential barrier, this mechanism is not a tunneling phenomenon. The heat flux due to phonon transport can be 4 orders of magnitude larger than that due to photon transport predicted from near-field radiation theory.

A fully automated Temperature Dependent Hall (TDH) measurement setup has been assembled for the purposes of this study. This TDH setup is capable of measuring samples in the 20 K to 370 K temperature range. Sample sizes of up to 20 mm × 20 mm can be accommodated by the custom designed and manufactured sample holder. Samples with a resistance in the 1Ω to 250 MΩ range can be measured with this setup provided that the mobility of the sample is greater than 1 cm²/Vs. The computer program controlling the automated measurement processwas written in LabView™ version 6.1. Single crystal Zinc Oxide (ZnO) was the material under investigation in this study. Bulk ZnO samples grown by three different methods, namely pressurized melt growth, seeded chemical vapor transport (SCVT) growth and hydrothermal growth, were measured in the 20 K to 370 K range. The effect of annealing in argon atmosphere in the 550 ºC to 930 ºC range was investigated on all three ZnO types. In addition, hydrogen-implanted layers on semi-insulating hydrothermally grown ZnO were studied. These samples were annealed in the 200 ºC to 400 ºC range and Hall measurements in the 20 K to 330 K range were performed. Programs were written to fit, wherever possible, the obtained temperature dependent carrier concentration and mobility profiles to suitable theoretical models. The carrier concentration data was fitted to a multi-donor single acceptor charge balance equation for the purpose of extracting donor concentrations and activation energies. Before fitting, the data was corrected for the Hall scattering factor and, where necessary, for two-layer effects particularly a degenerate surface conduction channel that developed through annealing on the SCVT-grown and hydrothermally grown samples. The acceptor concentrations of the samples were obtained by fitting the mobility data to a model based on D.L. Rode’s method of solving the Boltzmann transport equation. Scattering mechanisms included in the model were piezoelectric and deformation potential acoustic modes, polar optic modes and ionized impurity scattering. It was found that the mobility data did not fit the model very well without assigning questionable values to other parameters, in this case the deformation potential. Plausible values for the acceptor concentration were however obtained. The carrier concentration data fitted the model well, but due to the large number of parameters to be extracted (up to six parameters in the case of three donors) there was often not much certainty in the extracted values This study shows that TDH analysis is a valuable tool to assess the quality of semiconductors. Bulk and degenerate surface (or interfacial) conduction are separated with relative ease, and shallow defect concentrations as well as compensation level concentrations could be extracted. The generally observed uncertainty in values obtained in the multi-parameter regression of carrier concentration data indicates that supplementary techniques such as photoluminescence are needed to support results obtained by the TDH technique. / Dissertation (MSc (Physics))--University of Pretoria, 2007. / Physics / MSc / unrestricted

Thermoelektrische Bauelemente ermöglichen die Erzeugung von Elektrizität aus überschüssiger Wärme, wie sie in großen Mengen in Geräten und Prozessen entsteht. Effiziente Thermoelektrika benötigen eine hohe thermoelektrische Gütezahl, die durch elektronische und thermische Transporteigenschaften der Materialien bestimmt wird. Die Dissertation untersucht zunächst die elektronischen Transporteigenschaften zweier hochaktueller thermoelektrischer Materialien, des Schichtsystems SnSe und einer komplexen Klathrat-Legierung. Deren theoretische Beschreibung benötigt unterschiedliche Methoden, die während dieses Dissertationsprojektes implementiert, erweitert oder entwickelt wurden. Die Temperaturabhängigkeit der Leitfähigkeit von SnSe wurde mittels der Boltzmann-Transportmethode in Relaxationszeitnäherung untersucht. Wir zeigen, dass nur bei gleichzeitiger Einbeziehung von thermischer Ausdehnung des Kristallgitters und Elektron-Phonon-Streuprozessen eine gute Übereinstimmung mit Experimenten erreicht wird. Die Eigenschaften des Typ-I-Klathrats Ba8AlxSi46-x sind sowohl von der Stöchiometrie als auch von der Al-Konfiguration, d.h. der Anordnung der Al-Atome im Wirtsgitter, abhängig. Für x=16 wurde der Grundzustand als hableitend bestimmt, während Konfigurationen mit höheren Energien metallisch sind. Wir erhalten eine zuverlässige Beschreibung der elektronischen, strukturellen und Transporteigenschaften von Ba8AlxSi46-x bei endlichen Temperaturen durch Mittlungen über Konfigurationen. Mittels einer neu entwickelten Methode zur Berechnung der temperaturabhängigen effektiven Bandstruktur von Legierungen beobachten wir ein temperaturbedingtes Schließen der Bandlücke bei x=16, was mit einem Phasenübergang von partieller Ordnung zu Unordnung bei 582K einher geht. Basierend auf Gedächtnisfunktions-Modellen präsentieren wir ferner eine neue Ab-initio-Methode zur Berechnung der elektrischen Leitfähigkeit von Festkörpern mit einem Unordungspotential beliebiger Kopplungsstärke. / Thermoelectric devices convert heat into electricity, thus enabling the reuse of waste heat produced by all kinds of engines. To make this conversion process profitable, materials with a high thermoelectric figure of merit, ZT, are demanded. ZT depends on electronic and thermal transport properties. In this thesis, we study the electronic transport properties of two emerging thermoelectric materials, the layered material SnSe and a complex type-I clathrate alloy. Their reliable description requires different methodologies, that has been implemented, extended, or developed during this PhD project. For SnSe, the temperature dependence of the conductivity and the Seebeck coefficient is studied using the Boltzmann transport approach in the relaxation time approximation. We show that only by simultaneously accounting for thermal lattice expansion and electron-phonon coupling, a good agreement with experiment is reached. The properties of the type-I clathrate Ba8AlxSi46-x are determined, on the one hand, by its composition, and, on the other hand, by the configuration, i.e., the arrangement of the Al atoms in the host lattice. At the charge-compensated composition x=16, the ground-state configuration is found to be semiconducting, while configurations higher in energy are metallic. We obtain a realistic description of the electronic, structural, and transport properties of Ba8AlxSi46-x at finite temperature by using configurational thermodynamic averages. From a newly developed method to compute the finite-temperature effective band structure of alloys, we observe a temperature-driven closing of the band gap for x=16, which is concomitant with a partial order-disorder phase transition at 582K. We further present a novel ab initio memory-function approach for solids that enables the calculation of the electrical conductivity of solids in a disorder potential at arbitrary coupling strength. An application of the developed formalism is demonstrated with the example of sodium.

High power Gallium Nitride (GaN) based field effect transistors are used in many high power applications from RADARs to communications. These devices dissipate a large amount of power and sustain high electric fields during operation. High power dissipation occurs in the form of heat generation through Joule heating which also results in localized hot spot formation that induces thermal stresses. In addition, because GaN is strongly piezoelectric, high electric fields result in large inverse piezoelectric stresses. Combined with residual stresses due to growth conditions, these effects are believed to lead to device degradation and reliability issues. This work focuses on studying these effects in detail through modeling of Heterostructure Field Effect Transistors (HFETs) and metal oxide semiconductor hetero-structure field effect transistor (MOSHFETs) under various operational conditions. The goal is to develop a thorough understanding of device operation in order to better predict device failure and eventually aid in device design through modeling. The first portion of this work covers the development of a continuum scale model which couples temperature and thermal stress to find peak temperatures and stresses in the device. The second portion of this work focuses on development of a micro-scale model which captures phonon-interactions at the device scale and can resolve local perturbations in phonon population due to electron-phonon interactions combined with ballistic transport. This portion also includes development of phonon relaxation times for GaN. The model provides a framework to understand the ballistic diffusive phonon transport near the hotspot in GaN transistors which leads to thermally related degradation in these devices.

Understanding thermal transport across length scales lays the foundation to developing high-performance electronic devices. Although many experiments and models of the past few decades have explored the physics of heat transfer at nanoscale, there are still open questions regarding the impact of periodic nanostructuring and coherent phonon effects, as well as the interaction of strain and thermal transport. Thermomechanical effects, as well as strains applied in flexible electronic devices, impact the thermal transport. In the simplest kinetic theory models, thermal conductivity is proportional to the phonon group velocity, heat capacity, and scattering times. Periodic porous nanostructures impact the phonon dispersion relationship (group velocity) and the boundaries of the pores increase the scattering times. Strain, on the other hand, affects the crystal structure of the lattice and slightly increases the thermal conductivity of the material under compression. Intriguingly, applying strain combined with the periodic porous structures is expected to influence both the dispersion relation and scattering rates and yield the ability to tune thermal transport actively. But often these interrelated effects are simplified in models.<br><br>This work evaluates the combination of structure and strain on thermal conductivity by revisiting some of the essential methods used to predict thermal transport for a single layer of graphene with a periodic porous lattice structure with and without applied strain. First, we use the highest fidelity method of Non-Equilibrium Molecular Dynamics (NEMD) simulations to estimate the thermal conductivity which considers the impact of the lattice structure, strain state, and phononic band structure together. Next, the impact of the geometry of the slots within the lattice is interrogated with Boltzmann Transport Equation (BTE) models under a Relaxation Time Approximation. A Monte Carlo based Boltzmann Transport Equation (BTE) solver is also used to estimate the thermal conductivity of phononic crystals with varying pore geometry. Dispersion relations calculated from continuum mechanics are used as input here. This method which utilizes a simplified pore geometry only partially accounts for the effects of scattering on the pore boundaries. Finally, a continuum level model is also used to predict the thermal conductivity and its variations under applied strain. As acoustic phonon branches tend to carry the most heat within the lattice, these continuum models and other simple kinetic theories only consider their group velocities to estimate their impact on phonon thermal conductivity. As such, they do not take into account the details of phonon transport across all wavelengths.<br><br>By comparing the results from these different methods, each of which has different assumptions and simplifications, the current work aims to understand the effects of changes to the dispersion relationship based on strain and the periodic nanostructures on the thermal conductivity. We evaluate the accuracy of the kinetic theory, ray tracing, and BTE models in comparison to the MD results to offer a perspective of the reliability of each method of thermal conductivity estimation. In addition, the effect of strain on each phononic crystal with different pore geometry is also predicted in terms of change to their in-plane thermal anisotropy values. To summarize, this deeper understanding of the nanoscale thermal transport and the interrelated effects of geometry, strain, and phonon band structure on thermal conductivity can aid in developing lattices specifically designed to achieve the required dynamic thermal response for future nano-scale thermoelectric applications.

The thermal conductivity and electrical resistivity of Zr, ZrC, and ZrN were calculated using first-principles density functional theory (DFT) and the Boltzmann transport equation. The electron-phonon scattering was modeled via the self-energy relaxation time approximation (SERTA), and the phonon-phonon scattering via the analogous single-mode relaxation time approximation (SMRTA). The results obtained from Abinit's electron-phonon coupling code EPH is in good agreement with experimental reference data for Zr and ZrN. Notably, the calculated electrical resistivity of ZrC was found to be significantly lower than the available reference data, likely due to deviations from a perfect Zr/C stoichiometric ratio in the experimental samples. Additionally, it was observed that the calculated lattice thermal conductivity was overestimated at low temperatures, possibly attributed to the neglect of electron-phonon scattering that otherwise appears in metallic systems. / Värmeledningsförmågan och den elektriska resistiviteten för Zr, ZrC och ZrN beräknades med hjälp av täthetsfunktionalteori (DFT) och Boltzmanns transportekvation. Elektron-fononspridningen modellerades via 'self-energy relaxation time approximation' (SERTA), och fonon-fononspridningen via den motsvarande 'single-mode relaxation time approximation' (SMRTA). Resultaten från Abinits elektron-fononkopplingskod EPH stämmer väl överens med experimentella referensdata för Zr och ZrN. Den beräknade elektriska resistiviteten för ZrC visade sig emellertid vara betydligt lägre än all tillgänglig referensdata, troligtvis på grund av avvikelser från ett perfekt Zr/C-stökiometriskt förhållande i de experimentella proverna. Dessutom observerades att det beräknade fononbidraget till värmeledningsförmågan överskattades vid låga temperaturer, vilket möjligen beror på försummelsen av elektron-fononspridning som annars framträder i metalliska system.

Cette thèse est consacrée à l’étude de la dynamique et du transport des phonons via la résolution de l’équation de transport de Boltzmann (ETB) pour les Phonons. Un ‘solveur’ Monte Carlo dédié à la résolution de l’ETB des phonons dans l’espace réciproque, prenant en compte tous les processus d’interactions Normaux et Umklapp à trois-phonons, est proposé. Une prise en compte rigoureuse des lois de conservation de l’énergie et de la quantité de mouvement est entreprise. Des relations de dispersion réalistes, intégrant tous les modes de polarisations, sont considérées. Le calcul des taux d’interactions à trois-phonons de tous les processus Normaux et Umklapp est effectué en utilisant l’approche théorique due à Ridley qui ne nécessite qu’un unique paramètre semi-ajustable pour chaque mode de polarisation, nommément : le coefficient de couplage anharmonique représenté par les constantes de Grüneisen. Les taux d’interactions ainsi calculés ne servent pas uniquement à la résolution de l’ETB des phonons, mais ont permis aussi une analyse complète des canaux de relaxation des phonons longitudinaux optiques de centre de zone. Cette analyse a montré que le canal de Vallée-Bogani est négligeable dans le GaAs, et que vraisemblablement les temps de vie des phonons LO de centre de zone dans l’InAs et le GaSb rapportés dans la littérature sont fortement sous-estimés. Pour la première fois à notre connaissance, un couplage de deux solveurs Monte Carlo indépendants l’un dédié aux porteurs de charges (Thèse E. Tea) et l’autre dédié aux phonons, est effectué. Cela permet d’étudier l’effet des phonons chauds sur le transport des porteurs de charges. Cette étude a montré que l’approximation de temps de relaxation surestime souvent l’effet bottleneck des phonons. Le ‘solveur’ Monte Carlo est étendu pour résoudre l’ETB des phonons dans l’espace réel (en plus de l’espace réciproque), cela a permet d’étudier le transport des phonons et ainsi de la chaleur. La théorie généralisée de Ridley est toujours utilisée avec des particules de simulations qui interagissent les unes avec les autres directement. Les règles de conservation de l’énergie et de la quantité de mouvement sont rigoureusement respectées. L’effet des processus Umklapp sur la quantité de mouvement totale des phonons est fidèlement traduit; tout comme l’effet des interactions sur les directions des phonons, grâce à une procédure prenant en compte les directions vectorielles respectives lors d’une interaction, au lieu, de la distribution aléatoire usuellement utilisée. Les résultats préliminaires montrent la limite de l’équation analytique de conduction de la chaleur. / This work is dedicated to the study of phonon transport and dynamics via the solution of Boltzmann Transport Equation (BTE) for phonons. The Monte Carlo stochastic method is used to solve the phonon BTE. A solution scheme taking into account all the different individual types of Normal and Umklapp processes which respect energy and momentum conservation rules is presented. The use of the common relaxation time approximation is thus avoided. A generalized Ridley theoretical scheme is used instead to calculate three-phonon scattering rates, with the Grüneisen constant as the only adjustable parameter. A method for deriving adequate adjustable anharmonic coupling coefficients is presented. Polarization branches with real nonlinear dispersion relations for transverse or longitudinal optical and acoustic phonons are considered. Zone-center longitudinal optical (LO) phonon lifetimes are extracted from the MC simulations for GaAs, InP, InAs, and GaSb. Decay channels contributions to zone-center LO phonon lifetimes are investigated using the calculated scattering rates. Vallée-Bogani’s channel is found to have a negligible contribution in all studied materials, notably GaAs. A comparison of phonons behavior between the different materials indicates that the previously reported LO phonon lifetimes in InAs and GaSb were quite underestimated in the literature. For the first time, to our knowledge, a coupling of two independent Monte Carlo solvers, one for charge carriers [PhD manuscript, E. TEA], and one for phonons, is undertaken. Hot phonon effect on charge carrier dynamics is studied. It is shown that the relaxation time approximation overestimates the phonon bottleneck effect. The phonon MC solver is extended to solve the phonon’s BTE in real space simultaneously with the reciprocal space, to study phonon and heat transport. Ridley’s generalized theoretical scheme is utilized again with simulation particles interacting directly together. Energy and momentum conservation laws are rigorously implemented. Umklapp processes effect on the total phonon momentum is thoroughly reproduced, as for the anharmonic interactions effect on resulting phonon directions. This is thanks to a procedure taking in consideration the respective vector directions during an interaction, instead of the randomization procedure usually used in literature. Our preliminary results show the limit of the analytic macroscopic heat conduction equation.

First principle electronic structure theory is used to describe the effect of crystal binding on radiation detectors, electron transport properties, and structural damage induced by intense irradiation. A large database containing general electronic structure results to which data mining algorithms can be applied in the search for new functional materials, a case study is presented for scintillator detector materials. Inelastic cross sections for the generation of secondary electron cascades through impact ionization are derived from the dielectric response of an electron gas and evolved in time with Molecular Dynamics (MD). Qualitative and quantitive estimates are presented for the excitation and relaxation of a sample irradiated with Free Electron Laser pulses. A study is presented in where the structural damage on covalent bonded crystals following intense irradiation is derived from a Tight Binding approach and evolved in time with MD in where the evolution of the sample is derived from GW theory for the quasiparticle spectra and a dedicated Boltzmann transport equation for the impact ionization.

Les procédés bipolaires semi-conducteurs complémentaires à oxyde de métal (BiCMOS) peuvent être considérés comme étant la solution la plus généralepour les produits RF car ils combinent la fabrication sophistiquée du CMOSavec la vitesse et les capacités de conduction des transistors bipolaires silicium germanium(SiGe) à hétérojonction (HBT). Les HBTs, réciproquement, sontles principaux concurrents pour combler partiellement l'écart de térahertzqui décrit la plage dans laquelle les fréquences générées par les transistors etles lasers ne se chevauchent pas (environ 0.3 THz à 30 THz). A_n d'évaluerles capacités de ces dispositifs futurs, une méthodologie de prévision fiable estsouhaitable. L'utilisation d'un ensemble hétérogène d'outils et de méthodes desimulations permet d'atteindre successivement cet objectif et est avantageusepour la résolution des problèmes. Plusieurs domaines scientifiques sont combinés, tel que la technologie de conception assistée par ordinateur (TCAO),la modélisation compacte et l'extraction des paramètres.Afin de créer une base pour l'environnement de simulation et d'améliorerla confirmabilité pour les lecteurs, les modèles de matériaux utilisés pour lesapproches hydrodynamiques et de diffusion par conduction sont introduits dèsle début de la thèse. Les modèles physiques sont principalement fondés surdes données de la littérature basées sur simulations Monte Carlo (MC) ou dessimulations déterministes de l'équation de transport de Boltzmann (BTE).Néanmoins, le module de TCAO doit être aussi étalonné sur les données demesure pour une prévision fiable des performances des HBTs. L'approchecorrespondante d'étalonnage est basée sur les mesures d'une technologie depointe de HBT SiGe pour laquelle un ensemble de paramètres spécifiques àla technologie du modèle compact HICUM/L2 est extrait pour les versionsdu transistor à haute vitesse, moyenne et haute tension. En s'aidant de cesrésultats, les caractéristiques du transistor unidimensionnel qui sont généréesservent de référence pour le profil de dopage et l'étalonnage du modèle. Enélaborant des comparaisons entre les données de références basées sur les mesureset les simulations, la thèse fait progresser l'état actuel des prévisionsbasées sur la technologie CAO et démontre la faisabilité de l'approche.Enfin, une technologie future de 28nm performante est prédite en appliquantla méthodologie hétérogène. Sur la base des résultats de TCAO, leslimites de la technologie sont soulignées. / Bipolar complementary metal-oxide-semiconductor (BiCMOS) processescan be considered as the most general solution for RF products, as theycombine the mature manufacturing tools of CMOS with the speed and drivecapabilities of silicon-germanium (SiGe) heterojunction bipolar transistors(HBTs). HBTs in turn are major contenders for partially filling the terahertzgap, which describes the range in which the frequencies generated bytransistors and lasers do not overlap (approximately 0.3THz to 30 THz). Toevaluate the capabilities of such future devices, a reliable prediction methodologyis desirable. Using a heterogeneous set of simulation tools and approachesallows to achieve this goal successively and is beneficial for troubleshooting.Various scientific fields are combined, such as technology computer-aided design(TCAD), compact modeling and parameter extraction.To create a foundation for the simulation environment and to ensure reproducibility,the used material models of the hydrodynamic and drift-diffusionapproaches are introduced in the beginning of this thesis. The physical modelsare mainly based on literature data of Monte Carlo (MC) or deterministicsimulations of the Boltzmann transport equation (BTE). However, the TCADdeck must be calibrated on measurement data too for a reliable performanceprediction of HBTs. The corresponding calibration approach is based onmeasurements of an advanced SiGe HBT technology for which a technology specific parameter set of the HICUM/L2 compact model is extracted for thehigh-speed, medium-voltage and high-voltage transistor versions. With thehelp of the results, one-dimensional transistor characteristics are generatedthat serve as reference for the doping profile and model calibration. By performingelaborate comparisons between measurement-based reference dataand simulations, the thesis advances the state-of-the-art of TCAD-based predictionsand proofs the feasibility of the approach.Finally, the performance of a future technology in 28nm is predicted byapplying the heterogeneous methodology. On the basis of the TCAD results,bottlenecks of the technology are identified. / Bipolare komplementäre Metall-Oxid-Halbleiter (BiCMOS) Prozesse bietenhervorragende Rahmenbedingungen um Hochfrequenzanwendungen zurealisieren, da sie die fortschrittliche Fertigungstechnik von CMOS mit derGeschwindigkeit und Treiberleistung von Silizium-Germanium (SiGe) Heterostruktur-Bipolartransistoren (HBTs) verknüpfen. Zudem sind HBTs bedeutendeWettbewerber für die teilweise Überbrückung der Terahertz-Lücke, derFrequenzbereich zwischen Transistoren (< 0.3 THz) und Lasern (> 30 THz).Um die Leistungsfähigkeit solcher zukünftigen Bauelemente zu bewerten, isteine zuverlässige Methodologie zur Vorhersage notwendig. Die Verwendungeiner heterogenen Zusammenstellung von Simulationstools und Lösungsansätzenerlaubt es dieses Ziel schrittweise zu erreichen und erleichtert die Fehler-_ndung. Verschiedene wissenschaftliche Bereiche werden kombiniert, wie zumBeispiel der rechnergestützte Entwurf für Technologie (TCAD), die Kompaktmodellierungund Parameterextraktion.Die verwendeten Modelle des hydrodynamischen Simulationsansatzes werdenzu Beginn der Arbeit vorgestellt, um die Simulationseinstellung zu erläuternund somit die Nachvollziehbarkeit für den Leser zu verbessern. Die physikalischenModelle basieren hauptsächlich auf Literaturdaten von Monte Carlo(MC) oder deterministischen Simulationen der Boltzmann-Transportgleichung(BTE). Für eine zuverlässige Vorhersage der Eigenschaften von HBTs muss dieTCAD Kon_guration jedoch zusätzlich auf der Grundlage von Messdaten kalibriertwerden. Der zugehörige Ansatz zur Kalibrierung beruht auf Messungeneiner fortschrittlichen SiGe HBT Technologie, für welche ein technologiespezifischer HICUM/L2 Parametersatz für die high-speed, medium-voltage undhigh-voltage Transistoren extrahiert wird. Mit diesen Ergebnissen werden eindimensionaleTransistorcharakteristiken generiert, die als Referenzdaten fürdie Kalibrierung von Dotierungspro_len und physikalischer Modelle genutztwerden. Der ausführliche Vergleich dieser Referenz- und Messdaten mit Simulationengeht über den Stand der Technik TCAD-basierender Vorhersagenhinaus und weist die Machbarkeit des heterogenen Ansatzes nach.Schlieÿlich wird die Leistungsfähigkeit einer zukünftigen Technologie in28nm unter Anwendung der heterogenen Methodik vorhergesagt. Anhand derTCAD Ergebnisse wird auf Engpässe der Technologie hingewiesen.