Les limites rencontrées par les dernières générations de mémoires Flash et DRAM (Dynamic Random Access Memory) nécessitent la recherche de nouvelles variables physiques (autres que la charge et la tension), de nouveaux dispositifs ainsi que de nouvelles architectures de circuits. Plusieurs dispositifs à résistance variable sont très prometteurs. Parmi eux, les OxRRAMs (Oxide Resistive Random Access Memory) et les CBRAMs (Conductive Bridge Random Access Memory) sont de sérieux candidats pour la prochaine génération de mémoire dense. Ce travail se concentre donc sur le rôle des mémoires résistives (OxRRAM et CBRAM) dans les mémoires embarquées et plus particulièrement dans les FPGAs. Pour cela, nous avons développé un modèle compact, outil indispensable à la conception de circuits intégrés. Ensuite, nous avons conçus de nouveaux circuits non volatiles tels que des flips-flops (NVFF), des tables de correspondance (NVLUT), des commutateurs 2x2 ainsi que des SRAMs (NVSRAM). Ces structures ont finalement été simulées dans le cas d’un FPGA, afin de vérifier l’impact de celles-ci sur la surface, le délai ainsi que la puissance. Nous avons comparé les résultats pour un FPGA à base de NVLUTs utilisant une structure 1T-2R composée de CBRAMs par rapport à un FPGA plus classique utilisant des SRAMs. Nous réduisons ainsi la taille de 5%, la consommation de 18% et améliorons la vitesse de fonctionnement de 24%. La thèse aborde la modélisation compacte, la conception des circuits, et l’évaluation de systèmes incluant des mémoires résistives. / The grave challenges to future of traditional memories (flash and DRAM) at 1X nm regime has resulted in increased quest for new physical state variables (other than charge or voltage), new devices and architectures offering memory and logic functions beyond traditional transistors. Many thin film devices with resistance change phenomena have been extensively reported as ’promising candidates’. Among them, Ox- ide Resistive Memory (OxRRAM) and Conductive Bridge Resistive Memory (CBRAM) are leading contenders for the next generation high density memories. In this work, we focus on the role of Resistive Memories in embedded memories and their impact on FPGAs in particular. We begin with the discussion on the compact modeling of resistive memory devices for design enabling, we have designed novel circuits of non- volatile flip-flop (NVFF), non-volatile look-up table (NVLUT), non-volatile 2x2 switch and non-volatile SRAM (NVSRAM) using Resistive Memories. We simulated the impact of these design structures on the FPGA system assessing the performance parameters of area, delay and power. By using the novel 1T-2R memory element concept of CBRAMs in FPGAs to implement Look-up Tables (NVLUT), we would scale down the area impact by 5%, enhance speed by 24% and reduce the power by 18% compared to SRAM based FPGAs. The thesis addresses aspects of compact modeling, circuit design and system evaluation using resistive memories.

Ces dernières décennies, la constante évolution des besoins de stockage de données a mené à un bouleversement du paysage technologique qui s’est complètement métamorphosé et réinventé. Depuis les débuts du stockage magnétique jusqu’aux plus récents dispositifs fondés sur l’électronique dit d’état solide, la densité de bits stockés continue d’augmenter vers ce qui semble du point de vue du consommateur comme des capacités de stockage et des performances infinies. Cependant, derrière chaque transition et évolution des technologies de stockage se cachent des limitations en termes de densité et performances qui nécessitent de lourds travaux de recherche afin d’être surmontées et repoussées. Ce manuscrit s’articule autour d’une technologie émergeante prometteuse ayant pour vocation de révolutionner le paysage du stockage de données : la mémoire à pont conducteur ou Conductive Bridge Random Access Memory (CBRAM). Cette technologie est fondée sur la formation et dissolution réversible d’un chemin électriquement conducteur dans un électrolyte solide. Elle offre de nombreux avantages face aux technologies actuelles tels qu’une faible consommation électrique, de très bonnes performances d’écriture et de lecture et la capacité d’être intégré aux seins des interconnexions métalliques d’une puce afin d’augmenter la densité de stockage. Malgré tout, pour que cette technologie soit compétitive certaines limitations ont besoin d’être surmontées et particulièrement sa variabilité et sa stabilité thermique qui posent encore problème. Ce manuscrit propose une compréhension physique globale du fonctionnement de la technologie CBRAM fondée sur une étude expérimentale approfondie couplée à un modèle Monte Carlo cinétique spécialement développé. Cette compréhension fait le lien entre les propriétés physiques des matériaux composant la mémoire CBRAM et ses performances (Tension et temps d’écriture et d’effacement, rétention de donnée, endurance et variabilité). Un fort accent est mis la compréhension des limites actuelle de la technologie et comment les repousser. Grâce à une optimisation des conditions d’opérations ainsi qu’à un travail d’ingénierie des dispositifs mémoire, il est démontré dans ce manuscrit une forte amélioration de la stabilité thermique ainsi que de la variabilité des états écrits et effacés. / The constant evolution of the data storage needs over the last decades have led the technological landscape to completely change and reinvent itself. From the early stage of magnetic storage to the most recent solid state devices, the bit density keeps increasing toward what seems from a consumer point of view infinite storage capacity and performances. However, behind each storage technology transition stand density and performances limitations that required strong research work to overcome. This manuscript revolves around one of the promising emerging technology aiming to revolutionize data storage landscape: the Conductive Bridge Random Access Memory (CBRAM). This technology based on the reversible formation and dissolution of a conductive path in a solid electrolyte matrix offers great advantages in term of power consumption, performances, density and the possibility to be integrated in the back end of line. However, for this technology to be competitive some roadblocks still have to be overcome especially regarding the technology variability, reliability and thermal stability. This manuscript proposes a comprehensive understanding of the CBRAM operations based on experimental results and a specially developed Kinetic Monte Carlo model. This understanding creates bridges between the physical properties of the materials involved in the devices and the devices performances (Forming, SET and RESET time and voltage, retention, endurance, variability). A strong emphasis is placed on the current limitations of the technology previously stated and how to overcome these limitations. Improvement of the thermal stability and device reliability are demonstrated with optimized operating conditions and proper devices engineering.

abstract: This work investigates the effects of ionizing radiation and displacement damage on the retention of state, DC programming, and neuromorphic pulsed programming of Ag-Ge30Se70 conductive bridging random access memory (CBRAM) devices. The results show that CBRAM devices are susceptible to both environments. An observable degradation in electrical response due to total ionizing dose (TID) is shown during neuromorphic pulsed programming at TID below 1 Mrad using Cobalt-60. DC cycling in a 14 MeV neutron environment showed a collapse of the high resistance state (HRS) and low resistance state (LRS) programming window after a fluence of 4.9x10^{12} n/cm^2, demonstrating the CBRAM can fail in a displacement damage environment. Heavy ion exposure during retention testing and DC cycling, showed that failures to programming occurred at approximately the same threshold, indicating that the failure mechanism for the two types of tests may be the same. The dose received due to ionizing electronic interactions and non-ionizing kinetic interactions, was calculated for each ion species at the fluence of failure. TID values appear to be the most correlated, indicating that TID effects may be the dominate failure mechanism in a combined environment, though it is currently unclear as to how the displacement damage also contributes to the response. An analysis of material effects due to TID has indicated that radiation damage can limit the migration of Ag+ ions. The reduction in ion current density can explain several of the effects observed in CBRAM while in the LRS. / Dissertation/Thesis / Doctoral Dissertation Electrical Engineering 2018

Les nouvelles approches de technologies mémoires permettront une intégration dite back-end, où les cellules élémentaires de stockage seront fabriquées lors des dernières étapes de réalisation à grande échelle du circuit. Ces approches innovantes sont souvent basées sur l'utilisation de matériaux actifs présentant deux états de résistance distincts. Le passage d'un état à l'autre est contrôlé en courant ou en tension donnant lieu à une caractéristique I-V hystérétique. Nos mémoires résistives sont composées d'argent en métal électrochimiquement actif et de sulfure amorphe agissant comme électrolyte. Leur fonctionnement repose sur la formation réversible et la dissolution d'un filament conducteur. Le potentiel d'application de ces nouveaux dispositifs n'est pas limité aux mémoires ultra-haute densité mais aussi aux circuits embarqués. En empilant ces mémoires dans la troisième dimension au niveau des interconnections des circuits logiques CMOS, de nouvelles architectures hybrides et innovantes deviennent possibles. Il serait alors envisageable d'exploiter un fonctionnement à basse énergie, à haute vitesse d'écriture/lecture et de haute performance telles que l'endurance et la rétention. Dans cette thèse, en se concentrant sur les aspects de la technologie de mémoire en vue de développer de nouvelles architectures, l'introduction d'une fonctionnalité non-volatile au niveau logique est démontrée par trois circuits hybrides: commutateurs de routage non volatiles dans un Field Programmable Gate Arrays, un 6T-SRAM non volatile, et les neurones stochastiques pour un réseau neuronal. Pour améliorer les solutions existantes, les limitations de la performances des dispositifs mémoires sont identifiés et résolus avec des nouveaux empilements ou en fournissant des défauts de circuits tolérants.

abstract: Programmable Metallization Cell (PMC) is a resistance-switching device based on migration of nanoscale quantities of cations in a solid electrolyte and formation of a conducting electrodeposit by the reductions of these cations. This dissertation presents electrical characterization results on Cu-SiO2 based PMC devices, which due to the na- ture of materials can be easily integrated into the current Complimentary metal oxide semiconductor (CMOS) process line. Device structures representing individual mem- ory cells based on W bottom electrode and n-type Si bottom electrode were fabricated for characterization. For the W bottom electrode based devices, switching was ob- served for voltages in the range of 500mV and current value as low as 100 nA showing the electrochemical nature and low power potential. The ON state showed a direct de- pendence on the programming current, showing the possibility of multi-bit storage in a single cell. Room temperature retention was demonstrated in excess of 105 seconds and endurance to approximately 107 cycles. Switching was observed for microsecond duration 3 V amplitude pulses. Material characterization results from Raman, X-ray diffraction, Rutherford backscattering and Secondary-ion mass spectroscopy analysis shows the influence of processing conditions on the Cu concentration within the film and also the presence of Cu as free atoms. The results seemed to indicate stress-induced void formation in the SiO2 matrix as the driving mechanism for Cu diffusion into the SiO2 film. Cu/SiO2/nSi based PMC devices were characterized and were shown to have inherent isolation characteristics, proving the feasibility of such a structure for a passive array. The inherent isolation property simplifies fabrication by avoiding the need for a separate diode element in an array. The isolation characteristics were studied mainly in terms of the leakage current. The nature of the diode interface was further studied by extracting a barrier potential which shows it can be approximated to a Cu-nSi metal semiconductor Schottky diode. / Dissertation/Thesis / Ph.D. Electrical Engineering 2011

abstract: Programmable metallization cell (PMC) technology is based on an electrochemical phenomenon in which a metallic electrodeposit can be grown or dissolved between two electrodes depending on the voltage applied between them. Devices based on this phenomenon exhibit a unique, self-healing property, as a broken metallic structure can be healed by applying an appropriate voltage between the two broken ends. This work explores methods of fabricating interconnects and switches based on PMC technology on flexible substrates. The objective was the evaluation of the feasibility of using this technology in flexible electronics applications in which reliability is a primary concern. The re-healable property of the interconnect is characterized for the silver doped germanium selenide (Ag-Ge-Se) solid electrolyte system. This property was evaluated by measuring the resistances of the healed interconnect structures and comparing these to the resistances of the unbroken structures. The reliability of the interconnects in both unbroken and healed states is studied by investigating the resistances of the structures to DC voltages, AC voltages and different temperatures as a function of time. This work also explores replacing silver with copper for these interconnects to enhance their reliability. A model for PMC-based switches on flexible substrates is proposed and compared to the observed device behavior with the objective of developing a formal design methodology for these devices. The switches were subjected to voltage sweeps and their resistance was investigated as a function of sweep voltage. The resistance of the switches as a function of voltage pulse magnitude when placed in series with a resistance was also investigated. A model was then developed to explain the behavior of these devices. All observations were based on statistical measurements to account for random errors. The results of this work demonstrate that solid electrolyte based interconnects display self-healing capability, which depends on the applied healing voltage and the current limit. However, they fail at lower current densities than metal interconnects due to an ion-drift induced failure mechanism. The results on the PMC based switches demonstrate that a model comprising a Schottky diode in parallel with a variable resistor predicts the behavior of the device. / Dissertation/Thesis / Ph.D. Electrical Engineering 2011

abstract: This work focuses on the existence of multiple resistance states in a type of emerging non-volatile resistive memory device known commonly as Programmable Metallization Cell (PMC) or Conductive Bridge Random Access Memory (CBRAM), which can be important for applications such as multi-bit memory as well as non-volatile logic and neuromorphic computing. First, experimental data from small signal, quasi-static and pulsed mode electrical characterization of such devices are presented which clearly demonstrate the inherent multi-level resistance programmability property in CBRAM devices. A physics based analytical CBRAM compact model is then presented which simulates the ion-transport dynamics and filamentary growth mechanism that causes resistance change in such devices. Simulation results from the model are fitted to experimental dynamic resistance switching characteristics. The model designed using Verilog-a language is computation-efficient and can be integrated with industry standard circuit simulation tools for design and analysis of hybrid circuits involving both CMOS and CBRAM devices. Three main circuit applications for CBRAM devices are explored in this work. Firstly, the susceptibility of CBRAM memory arrays to single event induced upsets is analyzed via compact model simulation and experimental heavy ion testing data that show possibility of both high resistance to low resistance and low resistance to high resistance transitions due to ion strikes. Next, a non-volatile sense amplifier based flip-flop architecture is proposed which can help make leakage power consumption negligible by allowing complete shutdown of power supply while retaining its output data in CBRAM devices. Reliability and energy consumption of the flip-flop circuit for different CBRAM low resistance levels and supply voltage values are analyzed and compared to CMOS designs. Possible extension of this architecture for threshold logic function computation using the CBRAM devices as re-configurable resistive weights is also discussed. Lastly, Spike timing dependent plasticity (STDP) based gradual resistance change behavior in CBRAM device fabricated in back-end-of-line on a CMOS die containing integrate and fire CMOS neuron circuits is demonstrated for the first time which indicates the feasibility of using CBRAM devices as electronic synapses in spiking neural network hardware implementations for non-Boolean neuromorphic computing. / Dissertation/Thesis / Doctoral Dissertation Electrical Engineering 2015

abstract: The Programmable Metallization Cell (PMC) is a novel solid-state resistive switching technology. It has a simple metal-insulator-metal “MIM” structure with one metal being electrochemically active (Cu) and the other one being inert (Pt or W), an insulating film (silica) acts as solid electrolyte for ion transport is sandwiched between these two electrodes. PMC’s resistance can be altered by an external electrical stimulus. The change of resistance is attributed to the formation or dissolution of Cu metal filament(s) within the silica layer which is associated with electrochemical redox reactions and ion transportation. In this dissertation, a comprehensive study of microfabrication method and its impacts on performance of PMC device is demonstrated, gamma-ray total ionizing dose (TID) impacts on device reliability is investigated, and the materials properties of doped/undoped silica switching layers are illuminated by impedance spectroscopy (IS). Due to the inherent CMOS compatibility, Cu-silica PMCs have great potential to be adopted in many emerging technologies, such as non-volatile storage cells and selector cells in ultra-dense 3D crosspoint memories, as well as electronic synapses in brain-inspired neuromorphic computing. Cu-silica PMC device performance for these applications is also assessed in this dissertation. / Dissertation/Thesis / Doctoral Dissertation Electrical Engineering 2017

abstract: Chalcogenide glass (ChG) materials have gained wide attention because of their applications in conductive bridge random access memory (CBRAM), phase change memories (PC-RAM), optical rewritable disks (CD-RW and DVD-RW), microelectromechanical systems (MEMS), microfluidics, and optical communications. One of the significant properties of ChG materials is the change in the resistivity of the material when a metal such as Ag or Cu is added to it by diffusion. This study demonstrates the potential radiation-sensing capabilities of two metal/chalcogenide glass device configurations. Lateral and vertical device configurations sense the radiation-induced migration of Ag+ ions in germanium selenide glasses via changes in electrical resistance between electrodes on the ChG. Before irradiation, these devices exhibit a high-resistance `OFF-state' (in the order of 10E12) but following irradiation, with either 60-Co gamma-rays or UV light, their resistance drops to a low-resistance `ON-state' (around 10E3). Lateral devices have exhibited cyclical recovery with room temperature annealing of the Ag doped ChG, which suggests potential uses in reusable radiation sensor applications. The feasibility of producing inexpensive flexible radiation sensors has been demonstrated by studying the effects of mechanical strain and temperature stress on sensors formed on flexible polymer substrate. The mechanisms of radiation-induced Ag/Ag+ transport and reactions in ChG have been modeled using a finite element device simulator, ATLAS. The essential reactions captured by the simulator are radiation-induced carrier generation, combined with reduction/oxidation for Ag species in the chalcogenide film. Metal-doped ChGs are solid electrolytes that have both ionic and electronic conductivity. The ChG based Programmable Metallization Cell (PMC) is a technology platform that offers electric field dependent resistance switching mechanisms by formation and dissolution of nano sized conductive filaments in a ChG solid electrolyte between oxidizable and inert electrodes. This study identifies silver anode agglomeration in PMC devices following large radiation dose exposure and considers device failure mechanisms via electrical and material characterization. The results demonstrate that by changing device structural parameters, silver agglomeration in PMC devices can be suppressed and reliable resistance switching may be maintained for extremely high doses ranging from 4 Mrad(GeSe) to more than 10 Mrad (ChG). / Dissertation/Thesis / Ph.D. Electrical Engineering 2013

abstract: Nonvolatile memory (NVM) technologies have been an integral part of electronic systems for the past 30 years. The ideal non-volatile memory have minimal physical size, energy usage, and cost while having maximal speed, capacity, retention time, and radiation hardness. A promising candidate for next-generation memory is ion-conducting bridging RAM which is referred to as programmable metallization cell (PMC), conductive bridge RAM (CBRAM), or electrochemical metallization memory (ECM), which is likely to surpass flash memory in all the ideal memory characteristics. A comprehensive physics-based model is needed to completely understand PMC operation and assist in design optimization. To advance the PMC modeling effort, this thesis presents a precise physical model parameterizing materials associated with both ion-rich and ion-poor layers of the PMC's solid electrolyte, so that captures the static electrical behavior of the PMC in both its low-resistance on-state (LRS) and high resistance off-state (HRS). The experimental data is measured from a chalcogenide glass PMC designed and manufactured at ASU. The static on- and off-state resistance of a PMC device composed of a layered (Ag-rich/Ag-poor) Ge30Se70 ChG film is characterized and modeled using three dimensional simulation code written in Silvaco Atlas finite element analysis software. Calibrating the model to experimental data enables the extraction of device parameters such as material bandgaps, workfunctions, density of states, carrier mobilities, dielectric constants, and affinities. The sensitivity of our modeled PMC to the variation of its prominent achieved material parameters is examined on the HRS and LRS impedance behavior. The obtained accurate set of material parameters for both Ag-rich and Ag-poor ChG systems and process variation verification on electrical characteristics enables greater fidelity in PMC device simulation, which significantly enhances our ability to understand the underlying physics of ChG-based resistive switching memory. / Dissertation/Thesis / Masters Thesis Electrical Engineering 2014