The main objective of this work is to develop and optimize a process for the fabrication of basic semiconductor devices in silicon using the Modu-lab toolset in the MicrON 636 Whittemore cleanroom facility. This toolset is designed to work with four-inch silicon wafers, in a class 10000 cleanroom. Early work on this process produced functioning devices, with low yield and little to no process control. Three aspects of the process were therefore selected for optimization in this work. The oxidation of the surface of the silicon wafers could not be made to follow models proposed by and accepted in the literature. By carefully changing the airflow in the oxidation furnace module, the uniformity of the oxide layer and the agreement of the growth with models increases to acceptable levels. Also, the effects of redistribution of dopant species due to growth of the oxide layer and the subsequent thermal processing are examined qualitatively. Phosphorus diffusion in single-crystal silicon has a complex diffusion mechanism involving charged-vacancies, with concentration-dependent diffusion coefficients. It is therefore a complex mathematical problem to model the diffusion of phosphorus from a solid source within the crystal. An empirical model is proposed that accurately predicts the junction depth and sheet resistance of diffused phosphorus layers within the silicon wafer. Throughout the course of the process it is necessary to monitor the characteristics of the wafers to assure proper conditions. A semiconductor parameter analyzer has been created for this purpose. Our system uses a Keithley model 2400 source meter, Signatone probe station and four-point probe stage, and a PC to measure DC I-V electrical characteristics of materials and devices. The measurements of sheet resistance, as well as device characterization of resistors, p-n junction diodes, and nMOSFETs provides feedback about the accuracy of processing steps, as well as a pedagogical tool for illustrating semiconductor device physics and operation. / Master of Science

La réalisation d’un système holographique 3D embarqué dans un véhicule nécessite le développement d’une structure d’éclairage surfacique à géométrie planaire pour générer un faisceau cohérent, directionnel et uniforme. Ce type de système a été jusque là réalisé à base de composants optiques classiques comme des lentilles et des miroirs. L’objectif de cette thèse est de proposer une solution plus compacte grâce à l’utilisation des (nano-) technologies d’intégration pour réaliser une émission cohérente, directionnelle et uniforme sur une grande surface à 633 nm en remplaçant les composants optiques volumineux par un circuit intégré photonique.Nous présentons d’abord de manière générale les applications des composants optiques et photoniques dans le domaine automobile, puis la structure planaire intégrée que nous visons pour l’éclairage du système holographique. Nous montrons ensuite l’intérêt du développement de circuits photoniques à base de guides de nitrure de silicium pour le fonctionnement dans le domaine du visible, comme requis pour la présente application. Les travaux réalisés sur les guides d’onde en Si₃N₄ pour la propagation de la lumière à 633 nm sont alors détaillés. Dans un premier temps, nous introduisons les méthodes théoriques pour analyser les modes guidés et montrons les résultats de calcul des indices des modes 1D et 2D pour dimensionner un guide rectangulaire monomode. Enfin, nous détaillons l’étude théorique et de simulation pour définir certains composants intégrés du circuit visé, comme le diviseur 1 × N de faisceau et les guides d’onde courbes. Nous présentons alors les travaux de fabrication des guides d’ondes Si₃N₄ encapsulés dans la silice, précédemment conçus, et qui présentent une dimension autour de 250 nm × 300 nm. Nous montrons les principales étapes de fabrication en salle blanche, comprenant le dépôt des diélectriques à l’aide de la PECVD, la lithographie assistée par faisceau d’électron (EBL) et la gravure ionique réactive (RIE). Les résultats de fabrication sont évalués et analysés afin d’optimiser le procédé de fabrication. Finalement, nous présentons le banc de caractérisation des guides d’onde et les résultats des pertes optiques mesurées. Le dernier chapitre est dédié à l’étude du couplage d’un mode photonique guidé à un mode plasmonique dans un système de guides d’onde, qui consiste en une chaine de nanoparticules métalliques en Au ou en Ag déposée sur le guide d’onde rectangulaire Si₃N₄. L’état de l’art et l’étude théorique sont d’abord présentés, puis nous montrons les résultats de simulation numérique de l’efficacité de couplage en fonction des tailles des nanoparticules et de la longueur d’onde dans ce système de guides d’onde couplés. / An auto-embedded 3D holographic system requires the development of a surface lighting integrateddevice to generate a coherent, directional and uniform lighting beam. Up to now, the realization of this type ofsystem is based on the conventional optical components such as lenses and mirrors. The objective of this thesis isto propose an ultra-compact solution by using the nanotechnologies, in order to realize coherent, directional and uniform light emitting at 633 nm on a large surface in replacing the bulky optical components by a photonic integrated circuit (PIC). In the beginning of the thesis, we present the automotive applications of optics and photonics, and then introduce to the integrated planar structure, which is expected to illuminate the holographic system. We present then our interest of developing silicon nitride waveguides-based PICs, which can be operated in the visible range, as required for the mentioned application. The realized research work on the Si₃N₄ waveguides for the light propagation at 633 nm are then detailed. At first, we introduce the theoretical methods for the analysis of the guided modes and present the calculated indexes of the 1D and 2D modes, which are used to design the single-mode rectangular waveguide. At last, we present exhaustively our theoretical study and simulation work to define some targeted PICs, as the 1 × N beam splitter and the bent waveguides. Then weintroduce the fabrication of the predetermined SiO₂ cladded Si₃N₄ waveguide samples, which have a cross-section size about 250 nm × 300 nm. We present main processes of the fabrication in cleanroom, including the deposition of the dielectric layers by using PECVD, the electron beam lithography (EBL) and the reactive ionicetching (RIE). The fabrication of waveguides has been evaluated and analyzed, in order to optimize the fabrication process. Finally, we present the waveguide’s characterization set-up and the measurement results ofthe optical losses. The last chapter of the thesis is dedicated to the study of the coupling effect from a guidedphotonic mode to a plasmonic mode supported by a guiding structure, which consists of a metallic nanoparticle(Au or Ag) chain deposited on top of the Si₃N₄ rectangular waveguide. The state of the art and the theoretical study are firstly introduced. Then we present the numerical simulation results of the coupling efficiency as a function of nanoparticle’s sizes and operation wavelength in this photonic-plasmonic coupled waveguide system.

Antibiotics, oncology drugs and other products, mainly for intravenous use, are produced in facilities with very high cleanroom demands. To achieve pharmaceutical class A and ISO 4, the equipment must meet the highest demands of cleanability, sanitation and sterilization. The purpose of this master thesis is to develop a concept of an autonomous gripper to operate together with a robot in a class A environments that would replace humans. Requirements such as wireless communication, internal energy storage as well as gripping force of at least 1000 N per finger are defined. Additional, all materials in contact with the cleanroom must withstand hydrogen peroxide that is used for sterilisation without releasing particles or gases. A full-scale prototype has been manufactured to evaluate the properties of the concept. Several different concepts of grippers have been generated in this paper. A concept with an angular gripper and a bayonet clutch were selected after the concepts were discussed with the costumer and evaluated in an evaluation matrix. The gripper is driven by a stepping motor and has two gears, one planetary gear and one worm gear which together achieves a total ratio of 980:1. The gripper is wireless controlled using a Raspberry Pi which is programmed is CODESYS. Methods such as CAD and FEM has been used in the design of the gripper. The measured mean gripping force of the gripper is 1206 N and the estimated battery life of the gripper in work is 43 minutes. The prototype has the outer dimensions 400∙170∙170 mm and the mass 10.9 kg. This thesis, combined with a number of suggestions for improvements can give the gripper potential for cleanroom classification ISO 4. / Antibiotika, cancerläkemedel och andra läkemedelsklassade produkter i huvudsak för intravenöst bruk tillverkas i anläggningar med mycket höga renrumskrav. För att uppnå renrumsklassificering ISO 4 och GMP EU A ställs krav på rengörbarhet, sanitet och sterilisering av utrustningen. Syftet med detta examensarbete är att ta fram ett koncept till ett autonomt gripdon som tillsammans med en robot ska kunna ersätta människor i renrumsklass ISO 4/klass A. Krav finns på bland annat trådlös kommunikation, intern energilagring samt en gripstyrka på minst 1000 N per finger. Dessutom behöver alla material i kontakt med renrummet kunna motstå väteperoxid som används vid sterilisering utan att släppa ifrån sig partiklar eller gaser. En prototyp i full skala har tillverkats för att utvärdera konceptets egenskaper. Flera koncept på gripdon har genererats vartefter ett koncept med en vinkelgripare och bajonettkoppling valdes efter att de olika koncepten diskuterades med kund och utvärderats i en utvärderingsmatris. Gripdonet drivs av en stegmotor och har två växlar, en planetväxel och en snäckväxel som tillsammans har en total utväxling på 980:1. Gripdonen styrs trådlöst av en Raspberry Pi som är programmerad i CODESYS. Metoder som CAD och FEM har använts för att detaljutveckla gripdonet. Den uppmätta medelgripkraften för gripdonet är 1206 N och den beräknade batteritiden för gripdonet i arbete är 43 minuter. Prototypen har yttermåtten 400∙170∙170 och väger 10.9 kg. Detta arbete i kombination med en rad förbättringsförslag kan ge gripdonet potential att efter vidareutveckling uppnå renrumsklass ISO 4.

No description available.

This thesis is an attempt to explore post industrial society and how modern industry can become part of the urban experience. Through the design of a nanotechnology research laboratory, I was able to discover a connection between modern architecture and nanotechnology which revolved around the topics of scale, layering and revealing. / Master of Architecture

As salas limpas são amplamente empregadas em indústrias farmacêuticas destinadas a fabricar medicamentos e dispositivos estéreis. Nós empregamos coloração de Gram e cromatografia gasosa de ésteres metílicos de ácidos graxos extraídos de células íntegras de microrganismos ambientais para caracterizar e identificar bactérias isoladas em 50 salas limpas diferentes projetadas para a fabricação de medicamentos estéreis e para fornecer um perfil de ácidos graxos das espécies mais comuns de bactérias isoladas. Uma análise estatística nos permitiu corroborar estudos anteriores e confirmar que cocos Gram positivos é o grupo mais relevante de microrganismos presentes nas salas limpas avaliadas. A espécie predominante é Micrococcus luteus, isolada de salas classe B e de pessoal, seguida de Staphylococcus cohnii em classe C, Bacillus subtilis em classe A e Staphylococcus hominis em classe D. Os perfis de ácidos graxos destas bactérias são, na maioria, consistentes com as bibliotecas padrão. Nós também tentamos estabelecer uma correlação entre a estação do ano e o nível de contaminação, embora a análise de variância tenha mostrado que não há diferença significativa entre o nível de contaminação no decorrer das estações. Além do mais, análises repetidas com um aumento gradual de massa celular nos permitiram concluir que a quantidade ótima de material celular necessário para extração de ácidos graxos varia com a espécie de bactéria. Finalmente, um estudo comparativo de algumas bactérias incubadas em diferentes temperaturas confirmou que o perfil de ácidos graxos é altamente influenciado pela temperatura. Portanto, nós acreditamos que este trabalho possa contribuir para identificar e compreender a comunidade bacteriana de algumas salas limpas farmacêuticas. / Clean rooms are largely employed in pharmaceutical companies whose purpose is to produce sterile drugs and devices. We employed Gram staining and gas chromatography of fatty acid methyl esters extracted from whole cells of environmental isolates to characterize and identify bacteria isolated in each of 50 different clean rooms designed for the manufacturing of sterile medicinal products and to provide a fatty acid profile of the most common species of isolated bacteria. Statistical analysis allowed us to corroborate previous studies and confirm that Gram-positive cocci are the most relevant group of microorganisms inside the studied clean rooms. The predominant species is Micrococcus luteus, isolated from Grade B zones and from personnel, followed by Staphylococcus cohnii in Grade C, Bacillus subtilis in Grade A and S. hominis in Grade D. Fatty acid profiles of these bacteria are, to a great extent, consistent with standard libraries. We also attempted to establish a correlation between season and level of contamination, although variance analysis showed that there is no significant difference on the level of contamination throughout seasons. Furthermore, repeated analysis with a gradual increase in cell mass allowed us to conclude that the optimal amount of cell material depends on the species of the bacteria studied. Finally, a comparative study with some bacteria incubated in different temperatures confirmed that fatty acid profile is highly influenced by temperature. Therefore, we believe that this work can contribute to identify and understand the bacterial community of some pharmaceutical clean rooms.

As salas limpas são amplamente empregadas em indústrias farmacêuticas destinadas a fabricar medicamentos e dispositivos estéreis. Nós empregamos coloração de Gram e cromatografia gasosa de ésteres metílicos de ácidos graxos extraídos de células íntegras de microrganismos ambientais para caracterizar e identificar bactérias isoladas em 50 salas limpas diferentes projetadas para a fabricação de medicamentos estéreis e para fornecer um perfil de ácidos graxos das espécies mais comuns de bactérias isoladas. Uma análise estatística nos permitiu corroborar estudos anteriores e confirmar que cocos Gram positivos é o grupo mais relevante de microrganismos presentes nas salas limpas avaliadas. A espécie predominante é Micrococcus luteus, isolada de salas classe B e de pessoal, seguida de Staphylococcus cohnii em classe C, Bacillus subtilis em classe A e Staphylococcus hominis em classe D. Os perfis de ácidos graxos destas bactérias são, na maioria, consistentes com as bibliotecas padrão. Nós também tentamos estabelecer uma correlação entre a estação do ano e o nível de contaminação, embora a análise de variância tenha mostrado que não há diferença significativa entre o nível de contaminação no decorrer das estações. Além do mais, análises repetidas com um aumento gradual de massa celular nos permitiram concluir que a quantidade ótima de material celular necessário para extração de ácidos graxos varia com a espécie de bactéria. Finalmente, um estudo comparativo de algumas bactérias incubadas em diferentes temperaturas confirmou que o perfil de ácidos graxos é altamente influenciado pela temperatura. Portanto, nós acreditamos que este trabalho possa contribuir para identificar e compreender a comunidade bacteriana de algumas salas limpas farmacêuticas. / Clean rooms are largely employed in pharmaceutical companies whose purpose is to produce sterile drugs and devices. We employed Gram staining and gas chromatography of fatty acid methyl esters extracted from whole cells of environmental isolates to characterize and identify bacteria isolated in each of 50 different clean rooms designed for the manufacturing of sterile medicinal products and to provide a fatty acid profile of the most common species of isolated bacteria. Statistical analysis allowed us to corroborate previous studies and confirm that Gram-positive cocci are the most relevant group of microorganisms inside the studied clean rooms. The predominant species is Micrococcus luteus, isolated from Grade B zones and from personnel, followed by Staphylococcus cohnii in Grade C, Bacillus subtilis in Grade A and S. hominis in Grade D. Fatty acid profiles of these bacteria are, to a great extent, consistent with standard libraries. We also attempted to establish a correlation between season and level of contamination, although variance analysis showed that there is no significant difference on the level of contamination throughout seasons. Furthermore, repeated analysis with a gradual increase in cell mass allowed us to conclude that the optimal amount of cell material depends on the species of the bacteria studied. Finally, a comparative study with some bacteria incubated in different temperatures confirmed that fatty acid profile is highly influenced by temperature. Therefore, we believe that this work can contribute to identify and understand the bacterial community of some pharmaceutical clean rooms.

The main goal of this thesis is an introducing and guiding the reader with all important aspects of a proposal of ventilation system for cytostatics laboratory, from theoretical knowledge about the issue via familiarization with an appropriate legislative statute, a demonstration of relevant calculations needed for the project, a proposal in the form of technical reports as well. In this thesis the process of validation, which is needed for installed technology in the cleanroom, is also described. The thesis is supported by drawing documentation of real ventilation project for cytostatics laboratory, which follows the aforementioned technical report and calculations.