Copper is an integral component of key metabolic enzymes. Numerous physiological processes depend on a fine balance between the biosynthetic incorporation of copper into proteins and the export of excess copper from the cell. The homeostatic control of copper requires the activity of the copper transporting ATPases (Cu-ATPases). In Wilson disease the disruption in the function of the Cu-ATPase ATP7B results in the accumulation of excess copper and a marked deficiency of copper-dependent enzymes. In this work, the structure of ATP7B has been modeled by homology using the Ca-ATPase X-ray structure, enabling a mechanism of copper transport by ATP7B to be proposed. The fourth transmembrane helix (TM4) of Ca-ATPase contains conserved residues critical to cation binding and is predicted to correspond to TM6 of the ATP7B homology model, containing the highly conserved CXXCPC motif. The interaction with Cu(I) and the importance of the 3 cysteines in TM6 of ATP7B has been shown using model peptides. ATP7B has a large cytoplasmic N-terminus comprised of six copper-binding domains (WCBD1-6), each capable of binding one Cu(I). Protein-protein interactions between WCBDs and the copper chaperone Atox1 has been shown, contrary to previous reports, to occur even in the absence of copper. 15N relaxation measurements on the apo and Cu(I)-bound WCBD4-6 show that there is minimal change in the dynamic properties and the relative orientation of the domains in the two states. The domain 4-5 linker remains flexible, and domain 5-6 is not a rigid dimer, with flexibility between the domains. Copper transfer to and between WCBD1-6 likely occurs via protein interactions facilitated by the flexibility of the domains with respect to each other. The flexible linkers connecting the domains are important in giving the domains motional freedom to interact with Atox1, to transfer copper to other domains, and finally to transfer copper to the transmembrane site for transport across the membrane.

Copper is an integral component of key metabolic enzymes. Numerous physiological processes depend on a fine balance between the biosynthetic incorporation of copper into proteins and the export of excess copper from the cell. The homeostatic control of copper requires the activity of the copper transporting ATPases (Cu-ATPases). In Wilson disease the disruption in the function of the Cu-ATPase ATP7B results in the accumulation of excess copper and a marked deficiency of copper-dependent enzymes. In this work, the structure of ATP7B has been modeled by homology using the Ca-ATPase X-ray structure, enabling a mechanism of copper transport by ATP7B to be proposed. The fourth transmembrane helix (TM4) of Ca-ATPase contains conserved residues critical to cation binding and is predicted to correspond to TM6 of the ATP7B homology model, containing the highly conserved CXXCPC motif. The interaction with Cu(I) and the importance of the 3 cysteines in TM6 of ATP7B has been shown using model peptides. ATP7B has a large cytoplasmic N-terminus comprised of six copper-binding domains (WCBD1-6), each capable of binding one Cu(I). Protein-protein interactions between WCBDs and the copper chaperone Atox1 has been shown, contrary to previous reports, to occur even in the absence of copper. 15N relaxation measurements on the apo and Cu(I)-bound WCBD4-6 show that there is minimal change in the dynamic properties and the relative orientation of the domains in the two states. The domain 4-5 linker remains flexible, and domain 5-6 is not a rigid dimer, with flexibility between the domains. Copper transfer to and between WCBD1-6 likely occurs via protein interactions facilitated by the flexibility of the domains with respect to each other. The flexible linkers connecting the domains are important in giving the domains motional freedom to interact with Atox1, to transfer copper to other domains, and finally to transfer copper to the transmembrane site for transport across the membrane.

A plethora of novel scientific phenomena and practical applications, such as solid-state molecular solar cells and other optoelectronic devices for energy harvesting and lighting technologies, have catalyzed us to synthesize novel compounds with tunable properties. Synthetic routes, single crystal structures, and spectral and materials properties are described. Reactions of Ag(I) and Cu(I) precursors with various types of ligands -- including the azolates, diimines, and diiphosphines -- lead to the corresponding complexes in high yield. Varying the metal ions, ligands, synthetic methods, solvents, and/or stoichiometric ratio can change the properties including the molecular geometry or packing structure, reactivity, photophysical and photochemical properties, semiconducting behavior, and/or porosity of the functional coordination polymers obtained. For solar cells purposes, the absorption energy can be extended from the ultraviolet (UV) region, through the entire visible (Vis) region, onto a significant portion of the near-infrared (NIR) portion of the solar spectrum with high absorption coefficients due to the infinite conjugation of Cu(I) with diimine ligands. Twenty-eight crystal structures were obtained by conventional crystal growth methods from organic solvents, whereas their bulk product syntheses also included "green chemistry" approaches that precluded the use of hazardous organic solvents. The resulting products are characterized by powder x-ray diffraction (PXRD), Fouriertransform infrared (FTIR), nuclear magnetic resonance (NMR), UV/Vis/NIR absorption/diffuse reflectance/photoluminescence spectroscopies, and thermogravimetric analysis (TGA). Regarding the scientific phenomena investigated, the highlighting work in this dissertation is the discovery of novel bonding/photophysical/optoelectronic properties of the following materials: a black absorber with absorption from 200- 900 nm, a very stable compound with a bright green luminescence obtained by a solventless reaction, and a novel coordination polymer showing uncommon interaction of Ag(I) with three different types of diimine ligands simultaneously.

De acordo com a Organização Mundial de Saúde (World Health Organization - WHO), aproximadamente 40 milhões de pessoas ao redor do mundo estão infectadas com HIV/AIDS. Atualmente, a epidemia tem sido controlada em grande parte do mundo ocidental, porém, projeções sugerem que, até o fim desta década, o número de incidência da doença poderá duplicar. Apesar das significantes melhoras na morbidade e mortalidade de pacientes infectados pelo HIV, o rápido surgimento de cepas resistentes aos agentes anti-HIV, além dos efeitos adversos e o alto custo de fármacos de última geração, torna-se necessário o continuo desenvolvimento de novas classes de agentes anti-HIV. A transcrição e multiplicação do RNA viral são dependentes das interações seqüência-específica entre duas proteínas reguladoras virais essenciais, Tat e Rev, com seus respectivos sítios no RNA, TAR e RRE. Durante a última década, os aminoglicosídeos foram introduzidos como ligantes universais do RNA, sendo capazes de se ligar ao TAR e ao RRE. A literatura apresenta diversos aminoglicosídeos que são capazes de se ligar ao TAR e inibir a interação Tat-TAR bem como, inibir competitivamente a ligação da proteína Rev ao RRE, como, por exemplo, a neomicina e tobramicina. Considerando a importância dos aminoglicosídeos e análogos nucleosídicos, conhecidamente eficazes na terapia antirretroviral, o trabalho foi direcionado para a síntese de conjugados de aminociclitol, 2- desoxi-estreptramina, e adenosina, bem como, dímeros de adenosina via estratégia de click chemistry por reação de cicloadição azido-alcino catalisada por Cu(I) (CuAAC). Para a síntese destes produtos, o precursor adenosina foi convertido no derivado 5\'-azido-5\'- desoxi-adenosina, o qual foi condensado com diversos diinos terminais comerciais, contendo diferentes grupos espaçantes, com a finalidade de explorar suas influências nas propriedades eletrônicas e estéricas nos conjugados de interesse frente à atividade anti-HIV. Os derivados alcinos presentes na posição C-5\' de adenosina, via grupo triazol, foram empregados para a síntese dos monômeros nucleosídeo-aminociclitóis, assim como, na síntese de dímeros nucleosíde0-aminociclitóis, via reação de cicloadição 1,3-dipolar, na presença de CuSO4, quantidade catalítica, e ascorbato de sódio, para geração in situ de Cu(I). Adicionalmente, alguns dos compostos, na concentração de 1mM, foram testados empregando o ensaio de ELISA para detecção da presença de proteína viral p24 em linhagem células H9 e avaliação de sua atividade antirretroviral. De acordo com o ensaio biológico, um dos compostos preparados apresentou, proporcionalmente ao crescimento da linhagem H9 (HIV) controle, atividade de inibição de formação da proteína viral p24 similar ao composto padrão zidovudina (AZT). Além disso, outros dois compostos também apresentaram um resultado relevante uma vez que suas atividades foram similares ao composto padrão lamivudina (3TC). Estes resultados sugerem que a presença de uma cadeia metilênica mais extensa, como cadeia lateral ou grupo espaçante, pode influenciar positivamente a atividade biológica por efeito hidrofóbico ou estérico. Por fim, os ensaios de viabilidade celular demonstraram que os compostos testados não foram citotóxicos nas condições testadas. / According to World Health Organization - WHO about 40 million of people are infected with HIV/AIDS. Currently, the epidemic has been controlled largely in the western world, since, projections suggest that, until this decade end, the disease incidence could increase. Despite significant improvements in morbidity and mortality of HIV-patients, quick emergence of resistant strains to anti-HIV agents, in addition to adverse effects and high cost of recent drugs, becomes necessary the ongoing development of new classes of HIV agents. Transcription and translation of the viral RNA are dependent of sequence-specific interactions among two essential viral regulatory proteins, Tat and Rev, and their corresponding TAR and RRE sites in HIV-1 RNA. Over the past decade, aminoglycosides were established as universal RNA linkers, being able to link to TAR and RRE. The literature reports several aminoglycosides that bind to TAR and inhibit Tat-TAR interaction, as well as, competitively inhibit the bind between Rev protein and RRE, such as: neomycin and tobramycin. Considering the importance of nucleosides analogs, effective in antiretroviral therapy, and aminoglycosides, the work was driven to the synthesis of aminocyclitol, 2- deoxy-streptamine, conjugated to the adenosine, as well as, conjugated dimers of adenosine by molecular duplication via click chemistry strategy involving copper-catalysed azide-alkyne cycloaddition reaction (CuAAC). For the synthesis of these products, the starting material adenosine was converted to 5\'-azide-5\'-deoxy-adenosine, which was conjugated with several commercials terminal dialkynes containing different intercalating groups in order to explore the influences of the steric and electronic properties of conjugates towards anti-HIV activity. Alkynes derivated at C-5\' position of adenosine, via triazole group, were used in the synthesis of nucleoside-linked aminocyclitols, as well as, nucleoside conjugated dimers by 1,3-dipolar cycloaddition reaction under microwave-assisted conditions (MW), using the catalytic system CuSO4/sodium ascorbate for the in situ generation of Cu(I). Additionally, several compounds, at concentration of 1mM, were tested in vitro by ELISA for detection of p24 protein in H9 cells to antiretroviral evaluation. According with the biologic assay, one of the compounds showed inhibition of p24 protein production similar to zidovudine (AZT), when compared to H9 cells line growth control, Furthermore, two compounds also showed important activities similar to lamivudine (3TC). These results suggest that the presence of a longer methylenic chain, as side chain or intercalating groups, could influence positively in the biologic activity due to hydrophobic or steric effects. Ultimately, the cell viability assays showed that compounds were not cytotoxic in the tested conditions.

<p>This thesis describes the use of copper and palladium to mediate transformations of carboranes, especially <i>p</i>-carborane.</p><p>1-(1-<i>p</i>-carboranyl)-<i>N</i>-methyl-<i>N</i>-(2-butyl)-3-isoquinolinecarboxamide, a carborane containing analogue of the peripheral benzodiazepine receptor (PBR) ligand PK11195, has been synthesised. A key step in the reaction is the copper (I) mediated coupling of p-carborane with ethyl 1-bromo-isoquinoline-3-carboxylate. </p><p><i>p</i>-Carborane has been arylated on the 2-<i>B</i>-atom in high yields, using the Suzuki–Miyaura reaction. Thus the reaction between 2-I-<i>p</i>-carborane and various arylboronic acids [1-naphthyl-, phenyl-, 4-MeO-C₆H₄-, 3-CH₃CONH-C₆H₄-, 4-NC-C₆H₄-, 3-NO₂-C₆H₄-], gave the corresponding 2-aryl-<i>p</i>-carboranes in DME solution when reacted in the presence of cesium fluoride and the catalytic Pd₂(dba)₃–dppb system. Under the same conditions, the boron-boron bond forming reaction of two <i>p</i>-carboranylboronic esters (2-[(pinacolato)boron]-<i>p</i>-carborane and 2-[(neopentyl glycolato)boron]-p-carborane) was also shown feasible.</p><p><i>p</i>-Carborane has been vinylated on the 2-<i>B</i>-atom in high yields by use of the Heck reaction. The coupling between 2-I-<i>p</i>-carborane and various styrenes [4-H-, 4-C₆H₄-, 4-Cl , 4-Br-, 4-NO₂-, 4-CH3O- and 4 CH₃ ] resulted in the formation of the corresponding<i>trans</i>-β-(2-<i>B</i>-<i>p</i>-carboranyl) styrene in DMF solution when reacted in the presence of silver phosphate and the palladacycle Herrmann´s catalyst. The reaction was shown to proceed at higher rate with electron rich than with electron deficient olefins.</p><p>The feasibility of palladium-catalysed isotopic exchange of an iodinated closo-carborane with a radioisotope of iodine has been studied. 2-I-<i>p</i>-carborane was selected as a model compound. It was shown, that such isotopic exchange is possible and provides a high yield (83 ± 4.2 %) during 40 min long reaction. The reaction conditions were optimised, and it was demonstrated that presence of the tetra n-butylammonium hydrogensulphate is important in order to stabilise catalyst and provide reproducibility of labelling. In this work we have modified the methodology and extended the application to a wider range of iodinated carboranes. By the use of Herrmann’s catalyst in toluene at 100 °C this [¹²⁵I]-iodide labelling could be improved and extended. 2-I-<i>p</i>- 9-I-<i>m</i>-, 9-I-<i>o</i>-, 3-I-<i>o</i>-carborane, 1-phenyl-3-I-<i>o</i>-carborane and 1,2-diphenyl-3-I-<i>o</i>-carborane could be [¹²⁵I]-iodide labelled in high to excellent yields within 5 minutes.This reported palladium catalyzed radio-iodination of the uncharged closo-carboranes might find use in pharmacokinetic studies of carborane derivatives.</p>

This thesis describes the use of copper and palladium to mediate transformations of carboranes, especially p-carborane. 1-(1-p-carboranyl)-N-methyl-N-(2-butyl)-3-isoquinolinecarboxamide, a carborane containing analogue of the peripheral benzodiazepine receptor (PBR) ligand PK11195, has been synthesised. A key step in the reaction is the copper (I) mediated coupling of p-carborane with ethyl 1-bromo-isoquinoline-3-carboxylate. p-Carborane has been arylated on the 2-B-atom in high yields, using the Suzuki–Miyaura reaction. Thus the reaction between 2-I-p-carborane and various arylboronic acids [1-naphthyl-, phenyl-, 4-MeO-C6H4-, 3-CH3CONH-C6H4-, 4-NC-C6H4-, 3-NO2-C6H4-], gave the corresponding 2-aryl-p-carboranes in DME solution when reacted in the presence of cesium fluoride and the catalytic Pd2(dba)3–dppb system. Under the same conditions, the boron-boron bond forming reaction of two p-carboranylboronic esters (2-[(pinacolato)boron]-p-carborane and 2-[(neopentyl glycolato)boron]-p-carborane) was also shown feasible. p-Carborane has been vinylated on the 2-B-atom in high yields by use of the Heck reaction. The coupling between 2-I-p-carborane and various styrenes [4-H-, 4-C6H4-, 4-Cl , 4-Br-, 4-NO2-, 4-CH3O- and 4 CH3 ] resulted in the formation of the correspondingtrans-β-(2-B-p-carboranyl) styrene in DMF solution when reacted in the presence of silver phosphate and the palladacycle Herrmann´s catalyst. The reaction was shown to proceed at higher rate with electron rich than with electron deficient olefins. The feasibility of palladium-catalysed isotopic exchange of an iodinated closo-carborane with a radioisotope of iodine has been studied. 2-I-p-carborane was selected as a model compound. It was shown, that such isotopic exchange is possible and provides a high yield (83 ± 4.2 %) during 40 min long reaction. The reaction conditions were optimised, and it was demonstrated that presence of the tetra n-butylammonium hydrogensulphate is important in order to stabilise catalyst and provide reproducibility of labelling. In this work we have modified the methodology and extended the application to a wider range of iodinated carboranes. By the use of Herrmann’s catalyst in toluene at 100 °C this [125I]-iodide labelling could be improved and extended. 2-I-p- 9-I-m-, 9-I-o-, 3-I-o-carborane, 1-phenyl-3-I-o-carborane and 1,2-diphenyl-3-I-o-carborane could be [125I]-iodide labelled in high to excellent yields within 5 minutes.This reported palladium catalyzed radio-iodination of the uncharged closo-carboranes might find use in pharmacokinetic studies of carborane derivatives.

This article has been published online on 21st May 2014, in Journal of Vacuum Science & Technology A: Vac (Vol.32, Issue 4): http://scitation.aip.org/content/avs/journal/jvsta/32/4/10.1116/1.4878815?aemail=author DOI: 10.1116/1.4878815 This article may be accessed via the issue's table of contents at this link: http://scitation.aip.org/content/avs/journal/jvsta/32/4?aemail=author The surface chemistry of the bis(tri-n-butylphosphane) copper(I) acetylacetonate, [(nBu3P)2Cu(acac)], and the thermal atomic layer deposition (ALD) of Cu2O using this Cu precursor as reactant and wet oxygen as co-reactant on SiO2 substrates are studied by in-situ X-ray photoelectron spectroscopy (XPS). The Cu precursor was evaporated and exposed to the substrates kept at temperatures between 22 °C and 300 °C. The measured phosphorus and carbon concentration on the substrates indicated that most of the [nBu3P] ligands were released either in the gas phase or during adsorption. No disproportionation was observed for the Cu precursor in the temperature range between 22 °C and 145 °C. However, disproportionation of the Cu precursor was observed at 200 °C, since C/Cu concentration ratio decreased and substantial amounts of metallic Cu were present on the substrate. The amount of metallic Cu increased, when the substrate was kept at 300 °C, indicating stronger disproportionation of the Cu precursor. Hence, the upper limit for the ALD of Cu2O from this precursor lies in the temperature range between 145 °C and 200 °C, as the precursor must not alter its chemical and physical state after chemisorption on the substrate. 500 ALD cycles with the probed Cu precursor and wet O2 as co reactant were carried out on SiO2 at 145 °C. After ALD, in situ XPS analysis confirmed the presence of Cu2O on the substrate. Ex-situ spectroscopic ellipsometry indicated an average film thickness of 2.5 nm of Cu2O deposited with a growth per cycle of 0.05 Å/cycle. Scanning electron microscopy (SEM) and atomic force microscopy (AFM) investigations depicted a homogeneous, fine, and granular morphology of the Cu2O ALD film on SiO2. AFM investigations suggest that the deposited Cu2O film is continuous on the SiO2 substrate.

De acordo com a Organização Mundial de Saúde (World Health Organization - WHO), aproximadamente 40 milhões de pessoas ao redor do mundo estão infectadas com HIV/AIDS. Atualmente, a epidemia tem sido controlada em grande parte do mundo ocidental, porém, projeções sugerem que, até o fim desta década, o número de incidência da doença poderá duplicar. Apesar das significantes melhoras na morbidade e mortalidade de pacientes infectados pelo HIV, o rápido surgimento de cepas resistentes aos agentes anti-HIV, além dos efeitos adversos e o alto custo de fármacos de última geração, torna-se necessário o continuo desenvolvimento de novas classes de agentes anti-HIV. A transcrição e multiplicação do RNA viral são dependentes das interações seqüência-específica entre duas proteínas reguladoras virais essenciais, Tat e Rev, com seus respectivos sítios no RNA, TAR e RRE. Durante a última década, os aminoglicosídeos foram introduzidos como ligantes universais do RNA, sendo capazes de se ligar ao TAR e ao RRE. A literatura apresenta diversos aminoglicosídeos que são capazes de se ligar ao TAR e inibir a interação Tat-TAR bem como, inibir competitivamente a ligação da proteína Rev ao RRE, como, por exemplo, a neomicina e tobramicina. Considerando a importância dos aminoglicosídeos e análogos nucleosídicos, conhecidamente eficazes na terapia antirretroviral, o trabalho foi direcionado para a síntese de conjugados de aminociclitol, 2- desoxi-estreptramina, e adenosina, bem como, dímeros de adenosina via estratégia de click chemistry por reação de cicloadição azido-alcino catalisada por Cu(I) (CuAAC). Para a síntese destes produtos, o precursor adenosina foi convertido no derivado 5\'-azido-5\'- desoxi-adenosina, o qual foi condensado com diversos diinos terminais comerciais, contendo diferentes grupos espaçantes, com a finalidade de explorar suas influências nas propriedades eletrônicas e estéricas nos conjugados de interesse frente à atividade anti-HIV. Os derivados alcinos presentes na posição C-5\' de adenosina, via grupo triazol, foram empregados para a síntese dos monômeros nucleosídeo-aminociclitóis, assim como, na síntese de dímeros nucleosíde0-aminociclitóis, via reação de cicloadição 1,3-dipolar, na presença de CuSO4, quantidade catalítica, e ascorbato de sódio, para geração in situ de Cu(I). Adicionalmente, alguns dos compostos, na concentração de 1mM, foram testados empregando o ensaio de ELISA para detecção da presença de proteína viral p24 em linhagem células H9 e avaliação de sua atividade antirretroviral. De acordo com o ensaio biológico, um dos compostos preparados apresentou, proporcionalmente ao crescimento da linhagem H9 (HIV) controle, atividade de inibição de formação da proteína viral p24 similar ao composto padrão zidovudina (AZT). Além disso, outros dois compostos também apresentaram um resultado relevante uma vez que suas atividades foram similares ao composto padrão lamivudina (3TC). Estes resultados sugerem que a presença de uma cadeia metilênica mais extensa, como cadeia lateral ou grupo espaçante, pode influenciar positivamente a atividade biológica por efeito hidrofóbico ou estérico. Por fim, os ensaios de viabilidade celular demonstraram que os compostos testados não foram citotóxicos nas condições testadas. / According to World Health Organization - WHO about 40 million of people are infected with HIV/AIDS. Currently, the epidemic has been controlled largely in the western world, since, projections suggest that, until this decade end, the disease incidence could increase. Despite significant improvements in morbidity and mortality of HIV-patients, quick emergence of resistant strains to anti-HIV agents, in addition to adverse effects and high cost of recent drugs, becomes necessary the ongoing development of new classes of HIV agents. Transcription and translation of the viral RNA are dependent of sequence-specific interactions among two essential viral regulatory proteins, Tat and Rev, and their corresponding TAR and RRE sites in HIV-1 RNA. Over the past decade, aminoglycosides were established as universal RNA linkers, being able to link to TAR and RRE. The literature reports several aminoglycosides that bind to TAR and inhibit Tat-TAR interaction, as well as, competitively inhibit the bind between Rev protein and RRE, such as: neomycin and tobramycin. Considering the importance of nucleosides analogs, effective in antiretroviral therapy, and aminoglycosides, the work was driven to the synthesis of aminocyclitol, 2- deoxy-streptamine, conjugated to the adenosine, as well as, conjugated dimers of adenosine by molecular duplication via click chemistry strategy involving copper-catalysed azide-alkyne cycloaddition reaction (CuAAC). For the synthesis of these products, the starting material adenosine was converted to 5\'-azide-5\'-deoxy-adenosine, which was conjugated with several commercials terminal dialkynes containing different intercalating groups in order to explore the influences of the steric and electronic properties of conjugates towards anti-HIV activity. Alkynes derivated at C-5\' position of adenosine, via triazole group, were used in the synthesis of nucleoside-linked aminocyclitols, as well as, nucleoside conjugated dimers by 1,3-dipolar cycloaddition reaction under microwave-assisted conditions (MW), using the catalytic system CuSO4/sodium ascorbate for the in situ generation of Cu(I). Additionally, several compounds, at concentration of 1mM, were tested in vitro by ELISA for detection of p24 protein in H9 cells to antiretroviral evaluation. According with the biologic assay, one of the compounds showed inhibition of p24 protein production similar to zidovudine (AZT), when compared to H9 cells line growth control, Furthermore, two compounds also showed important activities similar to lamivudine (3TC). These results suggest that the presence of a longer methylenic chain, as side chain or intercalating groups, could influence positively in the biologic activity due to hydrophobic or steric effects. Ultimately, the cell viability assays showed that compounds were not cytotoxic in the tested conditions.

This article has been published online on 21st May 2014, in Journal of Vacuum Science & Technology A: Vac (Vol.32, Issue 4): http://scitation.aip.org/content/avs/journal/jvsta/32/4/10.1116/1.4878815?aemail=author DOI: 10.1116/1.4878815 This article may be accessed via the issue's table of contents at this link: http://scitation.aip.org/content/avs/journal/jvsta/32/4?aemail=author The surface chemistry of the bis(tri-n-butylphosphane) copper(I) acetylacetonate, [(nBu3P)2Cu(acac)], and the thermal atomic layer deposition (ALD) of Cu2O using this Cu precursor as reactant and wet oxygen as co-reactant on SiO2 substrates are studied by in-situ X-ray photoelectron spectroscopy (XPS). The Cu precursor was evaporated and exposed to the substrates kept at temperatures between 22 °C and 300 °C. The measured phosphorus and carbon concentration on the substrates indicated that most of the [nBu3P] ligands were released either in the gas phase or during adsorption. No disproportionation was observed for the Cu precursor in the temperature range between 22 °C and 145 °C. However, disproportionation of the Cu precursor was observed at 200 °C, since C/Cu concentration ratio decreased and substantial amounts of metallic Cu were present on the substrate. The amount of metallic Cu increased, when the substrate was kept at 300 °C, indicating stronger disproportionation of the Cu precursor. Hence, the upper limit for the ALD of Cu2O from this precursor lies in the temperature range between 145 °C and 200 °C, as the precursor must not alter its chemical and physical state after chemisorption on the substrate. 500 ALD cycles with the probed Cu precursor and wet O2 as co reactant were carried out on SiO2 at 145 °C. After ALD, in situ XPS analysis confirmed the presence of Cu2O on the substrate. Ex-situ spectroscopic ellipsometry indicated an average film thickness of 2.5 nm of Cu2O deposited with a growth per cycle of 0.05 Å/cycle. Scanning electron microscopy (SEM) and atomic force microscopy (AFM) investigations depicted a homogeneous, fine, and granular morphology of the Cu2O ALD film on SiO2. AFM investigations suggest that the deposited Cu2O film is continuous on the SiO2 substrate.

No description available.