This dissertation proposed the idea of “plasma-enhanced chemical vapor deposition on living substrates (PECVD on living substrates)” to bridge the gap between the thin film deposition technology and the biological and living substrates. This study focuses on the establishment of the knowledge and techniques necessary to perform “PECVD on living substrates” and contains three main aspects: development, characterization, and biological applications. First, a PECVD tool which can operate in ambient air and at low temperature was developed using a helium dielectric barrier discharge jet (DBD jet). It was demonstrated that various materials, such as polymeric, metallic, and composite films, can be readily synthesized through this technique. Second, the PMMA and copper films deposited using DBD jets were characterized. High-rate (22 nm/s), low-temperature (39 ºC) PMMA deposition was achieved and the film surface morphology can be tailored by altering the discharge power. Conductive copper films with an electrical resistivity lower than 1×10-7 ohm-m were obtained through hydrogen reduction. Both PMMA and copper films can be grown on temperature-sensitive substrates, such as plastics, pork skin, and even fingernail. The electrical, optical, and imaging characterization of the DBD jets was also conducted and several new findings were reported. Multiple short-duration current pulses instead of only one broad pulse per half voltage cycle were observed when a dielectric substrate was employed. Each short-duration current pulse is induced by a leading ionization wave followed by the formation of a plasma channel. Precursor addition further changed the temporal sequence of the pulses. An increase in the power led to a mode change from a diffuse DBD jet to a concentrated one. This mode change showed significant dependence on the precursor type, tube size, and electrode configuration. These findings regarding the discharge characteristics can thus facilitate the development of DBD-jet operation strategies to improve the deposition efficacy. Finally, this technique was used to grow PMMA films onto agar to demonstrate one of its potential biological applications: sterile bandage deposition. The DBD jet with the film depositing ability enabled the surface to be not only efficiently sanitized but also protected by a coating from being reached by bacteria.

The aim of this thesis is to investigate the properties of a Radio Frequency capacitive discharge at atmospheric pressure in argon. In these conditions where the pressure x distance product is around 150 Torr.cm, the discharge usually consists of several locally hot filaments. By pulsing the RF generator with an appropriate width and period, it was found possible to control the filament to glow transition in order to obtain a diffused and stable plasma.¶ The 2 mm gap between the electrodes is open to the ambient air and fed with argon via one hundred submillimetric holes regularly spread on the surface of the top electrode. This configuration allows “on-line” surface treatment of polymer films without having to turn the discharge off between successive samples. An important and lasting improvement of the polymer wettability is quickly obtained without risk of damage. The plasma diagnostic methods are emission spectroscopy and electric measurements. The Stark broadening of the Balmer β transition line of atomic hydrogen is measured to determine a plasma density of 10^15/cm3 in the filamentary mode. The glow mode density estimation was based on power balance yielding a density of 5×10^11/cm3. Emission line ratios between neutrals and Ar+ ions are used in the Saha equation to calculate the electron temperature. It results in an approximation of 1.3 eV for the glow mode and 1.7 eV for the filaments.¶ A unidimensional self-consistent fluid model is developed to gain insight into the homogeneous discharge behaviour. Poisson’s equation for the electric field is coupled to the first moments of the Boltzmann equation (continuity equation, drift-diffusion equation and energy equation). Transport and reaction coefficients are obtained from the mean energy of the electrons.¶ The model is applied to a reduced argon kinetic with the main ionization and excitation processes. Simulation results are in agreement with experimental measurements. The atmospheric pressure RF discharge is similar to a lower pressure RF discharge for which the ionization occurs mainly inside the oscillating sheaths where electrons are the most energetic

Des composés organiques volatils (COV) présents dans l'air peuvent avoir un fort impact odorant et doivent être traités. Des techniques de traitement classiques permettent de récupérer ou détruire ces composés. Cependant, ces techniques ne sont pas adaptées aux forts débits d'air et/ou aux faibles concentrations, caractéristiques de certains procédés industriels émetteurs de COV. Une alternative prometteuse est l'utilisation de plasmas non-thermiques. Ce type de plasma, obtenu par des décharges électriques hors-équilibre thermodynamique, contient des espèces réactives qui provoquent la destruction des composés organiques volatils. Cette thèse vise à concevoir, construire et tester un réacteur basé sur des plasmas non-thermiques pour le traitement de COV à l'échelle pilote, afin de démontrer la faisabilité d'un tel procédé pour le traitement d'odeurs présentes dans un effluent industriel. Les résultats obtenus montrent que, couplé à un catalyseur, le traitement d'odeurs par plasma non-thermique a un vrai potentiel d'application à l'échelle industrielle. En parallèle, cette thèse cherche à mieux comprendre le rôle des transferts de masse au sein d'un réacteur à l'aide d'un modèle analytique et de simulations numériques. Nous montrons que ces transferts peuvent devenir le processus limitant dans le traitement, et demandent donc une attention particulière lors du design d'un réacteur basé sur des plasmas non-thermiques. / Volatile organic compounds (VOC) present in the atmosphere may have a strong odour impact and, being so, must be treated. Some long-established treatment techniques may be able to recover or destruct these compounds. However, these techniques are not suitable for high flow rates and/or low concentrations, typical conditions found in certain VOC-emitting industrial processes. A promising alternative is the use of non-thermal plasmas. This kind of plasma, obtained through non-equilibrium electric discharges, produce reactive species that prompt the destruction of volatile organic compounds. This thesis aims to conceive, build and test a reactor based on non-thermal plasmas for the abatement of volatile organic compounds at pilot scale, in order to demonstrate the feasability of using such a process to treat odourous compounds present in an industrial effluent. The obtained results show that, combined with a catalyst, the use of non-thermal plasmas for odour control in industrial scale has a real potential. In parallel, this thesis seeks a better understanding of the role played by mass transfer in a non-thermal plasma reactor through the use of an analytical model and numerical simulations. We show that mass transfer may become the limiting process of the treatment, and therefore requires special care throughout the design of a non-thermal plasma reactor.

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Les plasmas froids sont des gaz partiellement ionisés, très riches d’un point de vue physico-chimique. Cette propriété se retrouve dans des plasmas froids aujourd’hui générés à pression atmosphérique et température ambiante et a été mise à profit depuis une quinzaine d’années environ pour des applications biomédicales (hématologie, dermatologie, cancérologie, odontologie etc…). L’efficacité de ces plasmas froids dans le domaine de la médecine a été prouvée par de nombreuses études. Cependant, les phénomènes biologiques mis en jeu ne sont pas encore bien compris, et il primordial de savoir quels pourraient être les éventuels effets secondaires indésirables de ces milieux ionisés réactifs. Le premier niveau d’interaction des plasmas avec le vivant est celui avec les milieux liquides, qui sont présents en surface des tissus, des cellules in vivo ou en culture. Depuis une décennie, une attention particulière a donc été portée aux interactions des plasmas avec les liquides, pour apporter un niveau de compréhension supplémentaire. La compréhension de ces interactions a constitué l’axe de ce travail. Différents réacteurs à plasmas froids (générés à pression atmosphérique et température ambiante) ont été développés, notamment afin de contrôler les interactions du plasma avec l’air ambiant qui peuvent être problématiques pour les applications visées. La nature du gaz servant à initier le plasma a été modifiée, pour connaître son influence sur la réactivité chimique de la phase gaz. Pour cela, des mesures de spectroscopie d’émission optique (SEO) ont été nécessaires. Par ailleurs, de nouveaux capteurs électrochimiques et des approches méthodologiques ont été développés pour identifier et quantifier les espèces réactives de l’oxygène et de l’azote (RONS) produites dans des milieux liquides physiologiques, exposés à ces gaz ionisés. Les analyses électrochimiques ont été combinées à de la spectroscopie d’absorption UV-visible ainsi qu’à d’autres méthodes de chimie (pH-métrie/conductimétrie). Un des objectifs visés est d’établir une corrélation entre les espèces réactives générées dans la phase gaz et dans la phase liquide. Enfin, des expérimentations nous ont permis d’analyser la production des RONS dans des liquides in situ en temps réel. Les mesures de SEO montrent qu’il existe de nombreuses espèces chimiques excitées au sein des différents plasmas (NO°, HO°, O, N2+ (FNS) etc…). Les analyses de la phase liquide ont révélé la présence d’espèces stables de l’oxygène et de l’azote (H2O2, NO2-, NO3-), directement reliées aux espèces détectées dans les plasmas. De plus, les diverses méthodologies d’analyse chimique mises en place ont permis la détection et la quantification de RONS tels que l’anion peroxynitrite ONOO-. L’ensemble des résultats obtenus devrait permettre d’appréhender de façon plus fine les effets induits par différents plasmas froids dans des milieux liquides physiologiques afin d’établir un lien avec les études menées sur des cellules en culture et sur la peau dans le cadre d’un programme de recherche financé par l’ANR, Agence Nationale de la recherche. / Cold plasmas are partially ionized gases, very rich in a physico-chemical point of view. This property characterizes cold plasmas today generated at atmospheric pressure and ambient temperature and was used since about fifteen years approximately for biomedical applications (haematology, dermatology, cancer research, odontology etc.). The efficiency of these cold plasmas in the field of the medicine was proved by numerous studies. However, the involved biological phenomena are not still well included, and it is essential to know what could be the possible unwanted side effects of these reactive ionized gases. The first level of interaction of plasmas with living matter is the one with the liquid phase, which is present on the tissue surface, in vivo cells or in culture. For a decade, a particular attention was thus worn in the interactions of plasmas with liquids, to bring a level of additional understanding. The understanding of these interactions constituted the axis of this work. Various cold plasmas reactors (generated at atmospheric pressure and ambient temperature) were developed, in order to control the interactions of these plasmas with the ambient air which can be problematic for the aimed applications. The nature of the gas used to initiate the plasma was modified, to know its influence on the chemical reactivity of the gas phase. For that purpose, measurements of optical emissive spectroscopy (OES) were necessary. Besides, new electrochemical sensors and methodological approaches were developed in order to identify and quantify the reactive nitrogen and oxygen (RONS) produced in physiological liquid media, exposed to these ionized gases. The electrochemical analyses were combined UV-visible absorption spectroscopy as well as other methods of chemistry (pH-metry/conductimetry). One of the aimed objectives is to establish a correlation between the reactive species generated in the gas phase and in the liquid phase. Finally, experiments allowed us to analyze the production of RONS in liquids in situ and in real time. OES measurements showed that there are numerous chemical species generated in various plasmas (NO°, HO°, O, N2+ (FNS) etc.). The analyses of the liquid phase revealed the presence of stable oxygen and nitrogen species (H2O2, NO2-, NO3-), directly correlated with the species detected in plasmas. Furthermore, the diverse methodologies of chemical analysis allowed the detection and quantification of RONS such as the peroxynitrite anion ONOO-. The obtained results should allow to arrest in a finer way the effects led by various cold plasmas in physiological liquid media to establish links with the studies led on cultured cells and on skin within the framework of a research program financed by the ANR, National Agency of the Research.