Growing needs for precise manipulation in medical surgery, manufacturing automation and structural health monitoring have motivated development of high accuracy, bandwidth and cost-effective sensing systems. Among these is a class of multi-axis electromagnetic devices where embedded magnetic fields can be capitalized for compact position estimation eliminating unwanted friction, stiction and inertia arising from dedicated and separate sensing mechanisms. Using fields for position measurements, however, is a challenging 'inverse problem' since they are often modeled in the 'forward' sense and their inverse solutions are often highly non-linear and non-unique. A general method to design a multisensor system that capitalizes on the existing magnetic field in permanent magnet (PM) actuators is presented. This method takes advantage of the structural field symmetry and meticulous placement of sensors to discretize the motion range of a PM-based device into smaller magnetic field segments, thereby reducing the required characterization domain. Within these localized segments, unique field-position correspondence is induced using field measurements from a network of multiple-axis sensors. A direct mapping approach utilizing trained artificial neural networks to attain multi-DOF positional information from distributed field measurements is employed as an alternative to existing computationally intensive model based methods which are unsuitable for real-time control implementation. Validation and evaluation of this technique are performed through field simulations and experimental investigation on an electromagnetic spherical actuator. An inclinometer was used as a performance comparison and experimental results have corroborated the superior tracking ability of the field-based sensing system. While the immediate application is field-based orientation determination of an electromagnetic actuator, it is expected that the design method can be extended to develop other sensing systems that harnesses other scalar, vector and tensor fields.

Este trabalho demonstra que o efeito de extremidade existente em atuadores eletromagnéticos lineares pode ter influência significativa nas indutâncias próprias, mútuas e síncronas, com valores dependentes da posição que podem ser utilizados para monitoração da posição axial da armadura. O estudo é aplicado a um atuador eletromagnético linear tubular de ímãs permanentes com duplo arranjo de quase-Halbach e bobina móvel, que foi concebido para fins de uso em sistemas de suspensão eletromagnética ativa e semi-ativa. A partir da revisão de literatura apresentada, classificou-se o efeito de extremidade de máquinas lineares síncronas de ímãs permanentes quanto aos tipos, causas, consequências e técnicas de mitigação (caso seja necessário). Adicionalmente, os tipos de controle sem sensores são exemplificados a fim de se identificar maneiras possíveis de adequar algum ao atuador em estudo. São apresentados casos de trabalhos na literatura que utilizam o controle sem sensores em máquinas que possuem indutâncias com comportamento semelhante. Em termos de análise, a distribuição do fluxo magnético no atuador é estudada e um modelo semianalítico é elaborado para calcular o valor das indutâncias com base nos dados de fluxo magnético obtido por simulação numérica. Logo, modelos numéricos completos e parametrizados do atuador são elaborados para simulação transiente e magnetostática e a partir destes as indutâncias são obtidas. As indutâncias também são medidas experimentalmente e na análise dos resultados as incertezas de medição são calculadas e um projeto de experimento é apresentado. Os resultados dos modelos semianalítico e numérico apresentam boa concordância com os resultados experimentais. Por fim, a adequação do atuador para futura aplicação de controle sem sensores é discutida tendo como base a variação de indutâncias devido ao efeito de extremida. / This work demonstrates that the end effect in linear electromagnetic actuators can have a significant influence on the self-, mutual and synchronous inductances, with positiondependent values that can be used to measure the axial position of the armature. The study is applied to a linear synchronous electromagnetic actuator with two arrangements of quasi- Halbach permanent magnets and moving coil, which was designed for use in active and semiactive electromagnetic suspension systems. Based on the literature review presented, the end effect of permanent magnet synchronous linear machines was classified with regard to: types, causes, consequences and mitigation techniques (if necessary). In addition, the types of sensorless control methods are exemplified in order to identify a possible method to be applied to the actuator under study. It was found in the literature that sensorless control was applied to machines that have inductances with similar behavior. In terms of analysis, the distribution of the magnetic flux in the actuator is studied and a semi-analytical model was developed to calculate the value of the inductances based on the data of magnetic flux obtained through numerical simulation. Thus, the complete parametrized numerical models of the actuator were built for transient and magnetostatic simulation, and from these the inductances were obtained. The inductances are also measured experimentally, and in the analysis of the results the measurement uncertainties are calculated and a design of experiments is presented. The results of the semi-analytical and numerical models show good agreement with the experimental results. Finally, the suitability of the actuator for future application of sensorless control is discussed based on the variation of inductances due to the end effect.

Two types of rotary gate microvalves are developed for flow modulation in a microfluidic system that operates at high flow rate and/or uses particulate flow. This research work encompasses design, microfabrication, and experimental evaluation of these microvalves in three distinct areas compliant micromechanism, microfluidics, and electromagnetic actuation. The microvalve consists of a suspended gate that rotates in the plane of the chip to regulate flow through the orifices. The gate is suspended by a novel fully-compliant in-plane rotary bistable micromechanism (IPRBM) that advantageously constraints the gate in all other degrees of freedom. Multiple inlet/outlet orifices provide flexibility of operating the microvalve in three different flow/port configurations. The suspended gate is made of a soft magnetic material and is electromagnetically actuated like a rotor in a variable-reluctance stepper motor. Therefore, an external electromagnetic (EM) actuation at the integrated set of posts (stator) causes the gate mass to switch from its default angular position to a second angular position. The microvalve chip is fabricated by electroplating a soft magnetic material, Permalloy (Ni80Fe20) in a sacrificial photoresist mold on a Silicon substrate. The inlet/outlet orifices are then etched into the Silicon substrate from the back-side using deep-reactive ion etch process. Finally, the gate structure is released by stripping the PR and seed layers. This research work presents the realization of a new microvalve design that is distinct from traditional diaphragm-type microvalves. The test results are encouraging and show the potential of these microvalves in effectively modulating flow in microfluidic systems that may not require a tight seal. The microvalve uses a novel in-plane rotary bistable micromechanism that may have other applications such as optical shutters, micro-locks, and passive check valves.

Este trabalho demonstra que o efeito de extremidade existente em atuadores eletromagnéticos lineares pode ter influência significativa nas indutâncias próprias, mútuas e síncronas, com valores dependentes da posição que podem ser utilizados para monitoração da posição axial da armadura. O estudo é aplicado a um atuador eletromagnético linear tubular de ímãs permanentes com duplo arranjo de quase-Halbach e bobina móvel, que foi concebido para fins de uso em sistemas de suspensão eletromagnética ativa e semi-ativa. A partir da revisão de literatura apresentada, classificou-se o efeito de extremidade de máquinas lineares síncronas de ímãs permanentes quanto aos tipos, causas, consequências e técnicas de mitigação (caso seja necessário). Adicionalmente, os tipos de controle sem sensores são exemplificados a fim de se identificar maneiras possíveis de adequar algum ao atuador em estudo. São apresentados casos de trabalhos na literatura que utilizam o controle sem sensores em máquinas que possuem indutâncias com comportamento semelhante. Em termos de análise, a distribuição do fluxo magnético no atuador é estudada e um modelo semianalítico é elaborado para calcular o valor das indutâncias com base nos dados de fluxo magnético obtido por simulação numérica. Logo, modelos numéricos completos e parametrizados do atuador são elaborados para simulação transiente e magnetostática e a partir destes as indutâncias são obtidas. As indutâncias também são medidas experimentalmente e na análise dos resultados as incertezas de medição são calculadas e um projeto de experimento é apresentado. Os resultados dos modelos semianalítico e numérico apresentam boa concordância com os resultados experimentais. Por fim, a adequação do atuador para futura aplicação de controle sem sensores é discutida tendo como base a variação de indutâncias devido ao efeito de extremida. / This work demonstrates that the end effect in linear electromagnetic actuators can have a significant influence on the self-, mutual and synchronous inductances, with positiondependent values that can be used to measure the axial position of the armature. The study is applied to a linear synchronous electromagnetic actuator with two arrangements of quasi- Halbach permanent magnets and moving coil, which was designed for use in active and semiactive electromagnetic suspension systems. Based on the literature review presented, the end effect of permanent magnet synchronous linear machines was classified with regard to: types, causes, consequences and mitigation techniques (if necessary). In addition, the types of sensorless control methods are exemplified in order to identify a possible method to be applied to the actuator under study. It was found in the literature that sensorless control was applied to machines that have inductances with similar behavior. In terms of analysis, the distribution of the magnetic flux in the actuator is studied and a semi-analytical model was developed to calculate the value of the inductances based on the data of magnetic flux obtained through numerical simulation. Thus, the complete parametrized numerical models of the actuator were built for transient and magnetostatic simulation, and from these the inductances were obtained. The inductances are also measured experimentally, and in the analysis of the results the measurement uncertainties are calculated and a design of experiments is presented. The results of the semi-analytical and numerical models show good agreement with the experimental results. Finally, the suitability of the actuator for future application of sensorless control is discussed based on the variation of inductances due to the end effect.

Este trabalho demonstra que o efeito de extremidade existente em atuadores eletromagnéticos lineares pode ter influência significativa nas indutâncias próprias, mútuas e síncronas, com valores dependentes da posição que podem ser utilizados para monitoração da posição axial da armadura. O estudo é aplicado a um atuador eletromagnético linear tubular de ímãs permanentes com duplo arranjo de quase-Halbach e bobina móvel, que foi concebido para fins de uso em sistemas de suspensão eletromagnética ativa e semi-ativa. A partir da revisão de literatura apresentada, classificou-se o efeito de extremidade de máquinas lineares síncronas de ímãs permanentes quanto aos tipos, causas, consequências e técnicas de mitigação (caso seja necessário). Adicionalmente, os tipos de controle sem sensores são exemplificados a fim de se identificar maneiras possíveis de adequar algum ao atuador em estudo. São apresentados casos de trabalhos na literatura que utilizam o controle sem sensores em máquinas que possuem indutâncias com comportamento semelhante. Em termos de análise, a distribuição do fluxo magnético no atuador é estudada e um modelo semianalítico é elaborado para calcular o valor das indutâncias com base nos dados de fluxo magnético obtido por simulação numérica. Logo, modelos numéricos completos e parametrizados do atuador são elaborados para simulação transiente e magnetostática e a partir destes as indutâncias são obtidas. As indutâncias também são medidas experimentalmente e na análise dos resultados as incertezas de medição são calculadas e um projeto de experimento é apresentado. Os resultados dos modelos semianalítico e numérico apresentam boa concordância com os resultados experimentais. Por fim, a adequação do atuador para futura aplicação de controle sem sensores é discutida tendo como base a variação de indutâncias devido ao efeito de extremida. / This work demonstrates that the end effect in linear electromagnetic actuators can have a significant influence on the self-, mutual and synchronous inductances, with positiondependent values that can be used to measure the axial position of the armature. The study is applied to a linear synchronous electromagnetic actuator with two arrangements of quasi- Halbach permanent magnets and moving coil, which was designed for use in active and semiactive electromagnetic suspension systems. Based on the literature review presented, the end effect of permanent magnet synchronous linear machines was classified with regard to: types, causes, consequences and mitigation techniques (if necessary). In addition, the types of sensorless control methods are exemplified in order to identify a possible method to be applied to the actuator under study. It was found in the literature that sensorless control was applied to machines that have inductances with similar behavior. In terms of analysis, the distribution of the magnetic flux in the actuator is studied and a semi-analytical model was developed to calculate the value of the inductances based on the data of magnetic flux obtained through numerical simulation. Thus, the complete parametrized numerical models of the actuator were built for transient and magnetostatic simulation, and from these the inductances were obtained. The inductances are also measured experimentally, and in the analysis of the results the measurement uncertainties are calculated and a design of experiments is presented. The results of the semi-analytical and numerical models show good agreement with the experimental results. Finally, the suitability of the actuator for future application of sensorless control is discussed based on the variation of inductances due to the end effect.

Ce travail de thèse s'inscrit dans le contexte des drones vise à réaliser à terme un Nano-dispositif volant (Nano Aerial Vehicle) capable d'imiter le vol des insectes. Ce mode de locomotion est privilégié car il présente des caractéristiques très adaptées au vol en milieu confiné. La solution proposée consiste à développer un drone de la taille d'un insecte s'appuyant sur des ailes vibrantes pour se mouvoir et à utiliser les technologies MEMS pour répondre aux problématiques de fabrication et de réduction d'échelle. La réussite d'un tel projet soulève néanmoins de nombreux défis scientifiques et technologiques, en particulier, les aspects aéro-élastiques des ailes et l'autonomie du drone. Pour répondre à ces défis, nous proposons dans un premier temps de mettre en œuvre des concepts comme la résonance et la torsion passive sur des prototypes en polymère (SU-8) réalisés par photolithographie. Dans un second temps, les différents composants de la chaîne de puissance sont optimisés, notamment l'actionneur électromagnétique, la liaison et les ailes de manière à maximiser la force de portance générée. Suite à ces améliorations, nous démontrons de façon expérimentale que le prototype était capable non seulement de reproduire une cinématique complexe mais également de compenser 75% de son poids. / This manuscript reports a work which aims to develop a tiny flying robots inspired by natural flyers. Our main objective is to devise a flying robot mimicking insects in terms of kinematics and scale using MEMS technologies in order to answer the scale challenges: the large-scale manufacturing and the system's small scale. The success this project faces different challenges such as aeroelastic aspects of wings and drone autonomy.In this work we propose the use of original concepts like resonance and passive torsion of the wings which are implemented on all-polymer prototypes obtained using a micromachining SU-8 photoresist process. In order to achieve a better efficiency of the prototype, each element of the energy transduction has been carefully examined and optimized. Especially, the actuation, the transmission and the wings in order to increase the lift. These improvements demonstrate experimentally that the prototype is able to produce a complex kinematic and compensate 75 % of its weight.

No description available.

L’objectif de la thèse est de développer un dispositif de micro positionnement intégrant à la fois les actionneurs et les capteurs. Un dispositif a été conçu afin de réaliser des déplacements dans les plans sur une course millimétrique. Le dispositif compact ne nécessite pas de système de guidage additionnel et selon le mode d’utilisation de ces moteurs, il est capable de réaliser des translations dans le plan ou des rotations autour d’un axe perpendiculaire au plan. Le dispositif comprend quatre moteurs électromagnétiques linéaires fixés orthogonalement sur une structure en forme de croix. Chaque moteur consiste en une paire de bobines planes entrelacées fixe et une barre ’aimants mobile. Un capteur de déplacement intégré dans la structure en croix permettant de mesurer le déplacement de celle-ci a été conçu et fabriqué. Ce capteur est constitué d’une tête de mesure à fibres optiques placé face à un réseau en silicium réalisé par des techniques de microfabrication. Afin de minimiser les erreurs d’assemblage, la structure en croix a également été micro fabriquée. Le dispositif est capable de réaliser un déplacement de 10 mm et une rotation de ±11° autour de l’axe perpendiculaire au plan du dispositif. La résolution de déplacement du dispositif est de 1,4 µm avec une précision de 31 nm en boucle fermée. Le dispositif peut également atteindre une vitesse de déplacement de 12 mm/s. / The objective of thesis is to develop an integrated micro positioning system for micro applications. A unique micro positioning system design capable to deliver millimeter level strokes with pre-embedded auto guidance feature in micro application has been realized. The design integrates, a stack of orthogonally arranged four electromagnetic linear motors. Each linear motor consists of a fixed planar electric drive coil and mobile permanent magnet array. The optimal design of the system delivers a small footprint size. In addition, to measure and control the displacement, a high resolution compact optical displacement measurement sensor has been designed and fabricated in silicon material using microfabrication technology. Furthermore, a light weight silicon cross structure was fabricated using dry etching technology to reduce components assembly errors. The device is capable to deliver 10 mm displacement stroke with a rotation of ±11° about an axis perpendicular to the plane of the device. The displacement resolution of the device is 1.4 µm with a precision of 31 nm in closed loop control. The device can realize displacement with a speed of 12 mm/s.

Este trabalho apresenta uma metodologia de projeto de atuadores eletromagnéticos lineares inovadora para aplicação em sistemas de suspensão semiativa e ativa. A metodologia, apresentada na forma de fluxograma, define critérios para determinar os requisitos de força e curso que um atuador deve desenvolver considerando um sistema mecânico vibratório com um grau de liberdade com excitação harmônica de base quando o método de controle skyhook é aplicado. Um atuador eletromagnético linear de bobina móvel com duplo arranjo de quase-Halbach que apresenta elevada densidade de força, reduzida massa móvel, ausência de força de relutância e baixa ondulação de força é definido como estudo de caso. Um modelo numérico parametrizado em elementos finitos do comportamento eletromagnético de um passo polar do dispositivo é criado e analisado, considerando restrições dimensionais, com os objetivos de projeto definidos como: elevada densidade de força e reduzida ondulação de força com acionamento brushless CA. Com base no modelo de um passo polar do dispositivo, define-se o volume ativo que o mesmo deve apresentar e, a partir deste, todas as dimensões são definidas de forma a atender os requisitos de projeto. Uma vez definidas as dimensões do atuador com base no modelo eletromagnético, realiza-se a modelagem térmica numérica que permite avaliar qual a máxima densidade de corrente elétrica aplicável de forma que a temperatura, estipulada como máxima, nos enrolamentos não seja excedida. Ainda, a distribuição térmica permite determinar a temperatura de operação dos ímãs permanentes que têm curva de operação dependente da temperatura. A partir dos resultados da simulação térmica e do modelo eletromagnético para um passo polar, realizou-se o acoplamento eletromagnético-térmico por meio da correção das propriedades dos ímãs permanentes e aplicando uma densidade de corrente eficaz dependente das dimensões do modelo parametrizado. O modelo acoplado é simulado e analisado, de modo que as dimensões finais do atuador podem ser obtidas atendendo aos mesmos objetivos de projeto previamente mencionados, respeitando os limites de operação térmica. Adicionalmente, são apresentados modelos analíticos do comportamento eletromagnético e térmico do atuador que podem servir de base para implementação da metodologia proposta, se esta for baseada em modelos analíticos, e podem futuramente ser empregados para a aplicação de otimização matemática do dispositivo. Por fim, um protótipo do dispositivo é construído de forma a validar a metodologia proposta. Com este protótipo são realizados ensaios de densidade de fluxo magnético no entreferro, tensão induzida a vazio, força estática e ensaio dinâmicos com o dispositivo instalado em uma bancada de testes de vibrações controladas desenvolvida durante o projeto. Os resultados mostram a eficácia da metodologia proposta, uma vez que os resultados experimentais mostraram boa concordância com os resultados esperados. / This work presents an innovative linear electromagnetic actuator design methodology for application in semi-active and active suspension systems. The methodology, synthesized in a flowchart, sets criteria to determine requirements such as axial force and stroke that an actuator should develop considering a vibration system with one degree of freedom with harmonic base excitation when the skyhook control method is applied. A linear moving-coil electromagnetic actuator with dual quasi-Halbach arrays of permanent magnets that presents high force density, low moving-mass, no reluctance force and low force ripple is defined as a case study. A finite element numerical parameterized model that describes the electromagnetic behavior of one pole pitch of the device is created and analyzed, considering dimensional constraints, with the design objectives defined as: high force density and low ripple of force with brushless AC drive. Based on the model of one pole pitch of the device the active volume and all dimensions are defined in order to meet the design requirements. Once the actuator dimensions are defined, based on the electromagnetic model, a numerical thermal model was constructed, which allows to evaluate the maximum applicable electric current density so that the maximum temperature at the windings is not exceeded. Furthermore, the thermal distribution gives the operating temperature of the permanent magnets, which present performance highly dependent on temperature. With the results of the thermal simulation, the electromagnetic-thermal coupling is performed by correcting permanent magnet properties and by applying a parametric-dependent effective current density. The coupled model is simulated and analyzed so that the final dimensions of the actuator can be obtained with the same design objectives previously mentioned, while respecting thermal operating limits. In addition, the work presents analytical models of the electromagnetic and thermal behavior of the actuator that can be the basis for implementation of the proposed methodology, if it is based on analytical models, and can further be used for the application of mathematical optimization of the device. Finally, a prototype was built to validate the proposed method. Measurements were carried out to assess magnetic flux density in the air gap, open-circuit induced voltage, static force and dynamic tests with the device installed in a test bench that was developed during this work. The results show the effectiveness of the proposed method since experimental results have shown good agreement with the expected results.

Les contacteurs et les relais sont utilisés dans de très nombreux dispositifs pour le contrôleet la commande à distance. La plupart sont équipés d’actionneurs électromagnétiques qu’il est nécessairede produire en quantité importante pour réaliser ces fonctions. Les exigences environnementalessur l’efficacité et la consommation énergétiques sont de plus en plus contraignantes. La conception deces actionneurs est donc un enjeu important. Cette thèse porte sur le développement d’une plateforme deconception dédiée au pré-dimensionnement d’actionneurs électromagnétiques. Cette plateforme reposesur le développement de méthodes de modélisation très rapides et suffisamment précises. La premièrepartie est consacrée à la résolution des équations de la magnétostatique en linéaire et non-linéaire par lecouplage de la méthode des intégrales de frontières avec la méthode de réseaux de réluctances. L’évaluationdes grandeurs globales telles que le flux magnétique traversant une bobine et la force est étudiée.Les résultats sont validés sur un relais bistable en rotation. La seconde partie concerne la simulationmulti-physique du composant dans son environnement système, pour prendre en compte les aspects mécaniqueet électrique. Une étude de faisabilité par optimisation est réalisée pour le composant seul, puispour l’ensemble composant-système. Enfin, une ouverture sur une autre méthode de modélisation plusgénérale est proposée avec la présentation d’un couplage original et performant entre les méthodes deséléments finis et des intégrales de frontière. / Contactors and relays are used in many devices for monitoring and remote controlling. Mostof them are equipped with electromagnetic actuators, which are produced in large quantities. The environmentalrequirements on efficiency and energy consumption have become more and more strict. Thedesign of these actuators is therefore an important issue. This thesis focuses on the development of adesign platform dedicated to the pre-sizing of electromagnetic actuators. This platform is based on theimplementation of very fast and sufficiently accurate modeling methods. The first part is devoted to theresolution of linear and nonlinear magnetostatic equations by the coupling between boundary integralmethod and reluctance network method. The evaluation of global quantities such as the magnetic fluxflowing through a coil and the force is investigated. The results are validated on a rotating bistable relay.The second part concerns the multi-physics simulation of the component in its environment by takinginto account the mechanical and electrical aspects. A feasibility study by optimization is performed bothfor the component alone and for the whole component-system. Finally, a general modeling method isproposed with the presentation of an original and efficient coupling between the finite element methodsand boundary integrals.