Artificial tactile recognition systems can provide valuable information about the surroundings and would enable artificial systems like prostheses and robotics to protect themselves against damage. However, making the desired geometry of sensing elements in flexible and stretchable sensors is a problem to be addressed. To overcome these hurdles, 3D printing technology can introduce advantages such as ease of design and rapid prototyping of complex geometries for soft sensors. Here, we report a conductive, biocompatible and antimicrobial 3D printed electronic skin (e-skin) based on a combination of platinum-cured silicone inks alongside carbon nanofibers (CNF). We adapted and standardized 3D printing parameters to obtain consistent CNF-based structural patterns and geometries. We explored the influence of printing angles and infill density on the mechanical properties of the printed structure, and utilized them to build complex resistive sensors with conductivity values of up to 120 S m-1, stretchability of up to 1000%, and 1200% increased pressure sensitivity in comparison to bulk sensors. We investigated the biocompatibility and antibacterial action of our material, and developed relieved pigmented e-skin sensor parts that can be integrated into robotic limbs to measure touch and a wide range of human motions demonstrating its promising integration in smart robotic sensing.

Demand for wearable electronics is expected to at least triple by 2020, embracing all sorts of Internet of Everything (IoE) applications, such as activity tracking, environmental mapping, and advanced healthcare monitoring, in the purpose of enhancing the quality of life. This entails the wide availability of free-form multifunctional sensory systems (i.e “skin” platforms) that can conform to the variety of uneven surfaces, providing intimate contact and adhesion with the skin, necessary for localized and enhanced sensing capabilities. However, current wearable devices appear to be bulky, rigid and not convenient for continuous wear in everyday life, hindering their implementation into advanced and unexplored applications beyond fitness tracking. Besides, they retail at high price tags which limits their availability to at least half of the World’s population. Hence, form factor (physical flexibility and/or stretchability), cost, and accessibility become the key drivers for further developments. To support this need in affordable and adaptive wearables and drive academic developments in “skin” platforms into practical and functional consumer devices, compatibility and integration into a high performance yet low power system is crucial to sustain the high data rates and large data management driven by IoE. Likewise, scalability becomes essential for batch fabrication and precision. Therefore, I propose to develop three distinct but necessary “skin” platforms using scalable and cost effective manufacturing techniques. My first approach is the fabrication of a CMOS-compatible “silicon skin”, crucial for any truly autonomous and conformal wearable device, where monolithic integration between heterogeneous material-based sensory platform and system components is a challenge yet to be addressed. My second approach displays an even more affordable and accessible “paper skin”, using recyclable and off-the-shelf materials, targeting environmental mapping through 3D stacked arrays, or advanced personalized healthcare through the developed “paper watch” prototype. My last approach targets a harsh environment waterproof “marine skin” tagging system, using marine animals as allies to study the marine ecosystem. The “skin” platforms offer real-time and simultaneous monitoring while preserving high performance and robust behaviors under various bending conditions, maintaining system compatibility using cost-effective and scalable approaches for a tangible realization of a truly flexible wearable device.

Touch (or tactile) sensors are gaining renewed interest as the level of sophistication in the application of minimally invasive surgery and humanoid robots increases. The spatial resolution of current large-area tactile sensors (greater than 1 cm2) lag human fingers by over an order of magnitude. Using metal and semiconducting nanoparticles, a ~100 nm thick, large area thin-film device working on the principles of electron tunneling is self-assembled, such that the change in current density through the film and the electroluminescence light intensity are linearly proportional to the local stress. By pressing a United States 1 cent coin (and also a copper grid) on the device a well resolved stress image by focusing the electroluminescence light directly on CCD is obtained. Both the lateral and height resolution of texture are comparable to human finger at similar stress levels of ~10 KPa. The fabrication of the film is based on self-assembly of polyelectrolytes, and metal and semiconducting nanoparticles in a layered architecture. The polyelectrolyte layer functions as the dielectric tunneling barrier and the nanoparticles function as the base for tunneling electrons. The assembly of the device can be simplified by incorporating the functionality of the polyelectrolyte and the nanoparticles in a single composite medium. A non-micellar mineralization process for the synthesis of multifunctional nanocomposite materials is also reported as a possible building block for the assembly of tactile sensor. The non-micellar method results in the synthesis of monodisperse semi-conducting nanoparticles templated on polymer chains dissolved in solution at high yield. The monodispersity is achieved due to the beaded necklace morphology of the polyelectrolyte chains in solution where the beads are nanometer-scale nodules in the polymer chain and the nanoparticles are confined to the beads. The resultant structure is a nanoparticle studded necklace where the particles are imbedded in the beads. Multiple cycles of the synthesis on the polymer template yield nanoparticles of identical size, resulting in a nanocomposite with high particle fraction. The resultant nanocomposite has beaded-fibrilar morphology with imbedded nanoparticles, and can be solution cast to make electroluminescent thin film devices. The concept is further modified for synthesis of metal nanoparticles on polyelectrolyte templates with isolated beaded morphology. / Ph. D.

This work presents the successful development of micro-origami sensorics by 3D self-assembling and reconfiguring in space integrated thin-film magnetic sensors, which rely on anisotropic (AMR) and giant magnetoresistance (GMR). Stimuli responsive polymeric materials able to reshape into mesoscale 3D “Swiss-roll” and polygonal architectures accomplish a strain driven parallel spatial realignment of magnetic sensors from the in-plane state. High performance 3D magnetic vector angular encoders demonstrates the successful realization of complex sensor configurations. The proposed concepts rely on parallel wafer scale processes, which allow for a monolithic fabrication of 3D sensor arrays and pave the way towards active sensory matrix circuits. As a proof of this concept, magneto-resistive Wheatstone bridge sensors are developed and integrated in the self-assembling platform at predefined rigid regions and integrated with an active matrix backplane circuit. This circuit, based on a-IGZO TFT technology, is specially designed for the operation with the Wheatstone bridge differential sensors and optimized to be compatible with the micro-origami self-folding technology. Such an active sensory matrix system with integrated 3D self-assembled pixels is called Integrated Micro-Origami Sensors or in short IMOS. IMOS is capable for static and dynamic mapping of magnetic fields enabling spatiotemporal mapping of artificial magnetic hair arrays embedded in an elastic skin layer. The presented results offer a fresh strategy for large area integration of microscale 3D electronic devices with various vector functionalities in active matrix circuits, which are of great interest in novel robotics, bioelectronics and diagnostic systems.

In this work, stretchable magnetic sensorics is successfully established by combining metallic thin films revealing a giant magnetoresistance effect with elastomeric materials. Stretchability of the magnetic nanomembranes is achieved by specific morphologic features (e.g. wrinkles), which accommodate the applied tensile deformation while maintaining the electrical and magnetic integrity of the sensor device. The entire development, from the demonstration of the world-wide first elastically stretchable magnetic sensor to the realization of a technology platform for robust, ready-to-use elastic magnetoelectronics with fully strain invariant properties, is described. The prepared soft giant magnetoresistive devices exhibit the same sensing performance as on conventional rigid supports, but can be stretched uniaxially or biaxially reaching strains of up to 270% and endure over 1,000 stretching cycles without fatigue. The comprehensive magnetoelectrical characterization upon tensile deformation is correlated with in-depth structural investigations of the sensor morphology transitions during stretching. With their unique mechanical properties, the elastic magnetoresistive sensor elements readily conform to ubiquitous objects of arbitrary shapes including the human skin. This feature leads electronic skin systems beyond imitating the characteristics of its natural archetype and extends their cognition to static and dynamic magnetic fields that by no means can be perceived by human beings naturally. Various application fields of stretchable magnetoelectronics are proposed and realized throughout this work. The developed sensor platform can equip soft electronic systems with navigation, orientation, motion tracking and touchless control capabilities. A variety of novel technologies, like smart textiles, soft robotics and actuators, active medical implants and soft consumer electronics will benefit from these new magnetic functionalities.

In this work, stretchable magnetic sensorics is successfully established by combining metallic thin films revealing a giant magnetoresistance effect with elastomeric materials. Stretchability of the magnetic nanomembranes is achieved by specific morphologic features (e.g. wrinkles), which accommodate the applied tensile deformation while maintaining the electrical and magnetic integrity of the sensor device. The entire development, from the demonstration of the world-wide first elastically stretchable magnetic sensor to the realization of a technology platform for robust, ready-to-use elastic magnetoelectronics with fully strain invariant properties, is described. The prepared soft giant magnetoresistive devices exhibit the same sensing performance as on conventional rigid supports, but can be stretched uniaxially or biaxially reaching strains of up to 270% and endure over 1,000 stretching cycles without fatigue. The comprehensive magnetoelectrical characterization upon tensile deformation is correlated with in-depth structural investigations of the sensor morphology transitions during stretching. With their unique mechanical properties, the elastic magnetoresistive sensor elements readily conform to ubiquitous objects of arbitrary shapes including the human skin. This feature leads electronic skin systems beyond imitating the characteristics of its natural archetype and extends their cognition to static and dynamic magnetic fields that by no means can be perceived by human beings naturally. Various application fields of stretchable magnetoelectronics are proposed and realized throughout this work. The developed sensor platform can equip soft electronic systems with navigation, orientation, motion tracking and touchless control capabilities. A variety of novel technologies, like smart textiles, soft robotics and actuators, active medical implants and soft consumer electronics will benefit from these new magnetic functionalities.:Outline List of abbreviations 7 1. INTRODUCTION 1.1 Motivation and scope of this work 8 1.1.1 A brief review on stretchable electronics 8 1.1.2 Stretchable magnetic sensorics 10 1.2 Technological approach 11 1.3 State-of-the-art 12 2. THEORETICAL BACKGROUND 2.1 Magnetic coupling phenomena in layered structures 14 2.1.1 Magnetic interlayer exchange coupling 14 2.1.2 Exchange bias 15 2.1.3 Orange peel coupling 16 2.2 Giant magnetoresistance 17 2.2.1 Electronic transport through ferromagnets 17 2.2.2 The GMR effect 19 2.2.3 GMR multilayers 20 2.2.4 Spin valves 21 2.3 Theory of elasticity 22 2.3.1 Elastomeric materials 22 2.3.2 Stress and strain 23 2.3.3 Rubber elasticity 25 2.3.4 The Poisson effect 26 2.3.5 Viscoelasticity 27 2.3.6 Bending strain in a stiff film on a flexible support 27 2.4 Approaches to stretchable electronic systems 28 2.4.1 Microcrack formation 28 2.4.2 Meanders and compliant patterns 29 2.4.3 Surface wrinkling 30 2.4.4 Rigid islands 32 3. METHODS & MATERIALS 3.1 Sample fabrication 34 3.1.1 Polydimethylsiloxane (PDMS) 34 3.1.2 PDMS film preparation 35 3.1.3 Lithographic structuring on the PDMS surface. 36 3.1.4 Magnetic thin film deposition 38 3.1.5 GMR layer stacks 40 3.1.6 Mechanically induced pre-strain 43 3.1.7 Methods and materials for the direct transfer of GMR sensors 45 3.1.8 Materials used for imperceptible GMR sensors 47 3.2 Characterization 48 3.2.1 GMR characterization setup with in situ stretching capability 48 3.2.2 Sample mounting 50 3.2.3 Electrical contacting of stretchable sensor devices 51 3.2.4 Customized demonstrator electronics 52 3.2.5 Microscopic investigation techniques 53 4. RESULTS & DISCUSSION 4.1 GMR multilayer structures on PDMS 54 4.1.1 Pre-characterization 54 4.1.2 Thermally induced wrinkling 55 4.1.3 Self-healing effect 57 4.1.4 Demonstrator: Magnetic detection on a curved surface 60 4.1.5 Sensitivity enhancement 61 4.1.6 GMR sensors in circumferential geometry 64 4.1.7 Stretchability test 67 4.2 Stretchable spin valves 69 4.2.1 Random wrinkles and periodic fracture 70 4.2.2 GMR characterization 73 4.2.3 Stretching of spin valves 74 4.2.4 Microcrack formation mechanism 76 4.3 Direct transfer printing of GMR sensorics 81 4.3.1 The direct transfer printing process 82 4.3.2 Direct transfer of GMR microsensor arrays 84 4.3.3 Direct transfer of compliant meander shaped GMR sensors 86 4.4 Imperceptible magnetoelectronics 89 4.4.1 GMR multilayers on ultra-thin PET membranes 89 4.4.2 Imperceptible GMR sensor skin 92 4.4.3 Demonstrator: Fingertip magnetic proximity sensor 93 4.4.4 Ultra-stretchable GMR sensors 94 4.4.5 Biaxial stretchability 99 4.4.6 Demonstrator: Dynamic detection of diaphragm inflation 101 5. CONCLUSIONS & OUTLOOK 5.1 Achievements 102 5.2 Outlook 104 5.2.1 Further development steps 104 5.2.2 Prospective applications. 105 5.3 Technological impact: flexible Bi Hall sensorics 106 5.3.1 Application potential 106 5.3.2 Thin and flexible Hall probes 107 5.3.3 Continuative works and improvements 108 5.4 Activities on technology transfer and public relations 108 Appendix References 110 Selbständigkeitserklärung 119 Acknowledgements 120 Curriculum Vitae 121 Scientific publications, contributions, patents, grants & prizes 122