This thesis is about the growth of ZnO thin films for optoelectronic applications. ZnO thin films were grown using plasma assisted molecular beam epitaxy and were studied using various conventional and novel characterisation techniques. The significance of different growth variables on growth efficiency was investigated. The growth rate of ZnO films was found to be linearly dependent on the Zn flux under O-rich growth conditions. Under Zn-rich conditions, the growth rate was dependent on both atomic and molecular oxygen flux. By characterising the oxygen plasma generated using different RF power and aperture plate designs and correlating the results with the growth rates observed, it was found that atomic oxygen was the dominant growth species under all conditions. Molecular oxygen also participated in the growth process, with its importance dependent on the aperture plate design. In addition, an increase in growth temperature was found to monotonically decrease the growth rate. A growth rate of 1.4 Å/s was achieved at a growth temperature of 650 ℃ by using an oxygen flow rate of 1.6 standard cubic centimetres utilising a plasma source with a 276 hole plate operating at 400 W, and a Zn flux 1.4✕10¹⁵ atoms/cm²⋅s. Characterisation of the MBE grown thin films revealed that the qualities of ZnO thin films were dependent on the growth conditions. Experimental evidence suggested that a maximum adatom diffusion rate can be achieved under Zn-rich conditions, giving samples with the best structural quality. O-rich conditions in general led to statistical roughening which resulted in rough and irregular film surfaces. Experimental results also suggested that by increasing the atomic oxygen content and decreasing the ion content of the plasma, the excitonic emission of the ZnO thin films can possibly be improved. It was also found that the conductivity of the films can possibly be reduced by increasing the plasma ion content. By investigating the evolution of the buffer layer surface during the early stages of growth, dislocation nucleation and surface roughening were found to be important strain relief mechanisms in MBE grown ZnO thin films that affected the crystal quality. The usage of LT-buffer layers was found to improve substrate wetting, and was shown to significantly reduce dislocation propagation. Further strain reduction was achieved via the application of a 1 nm MgO buffer layer, and a significant reduction of carrier concentration and improvement in optical quality was subsequently observed. A carrier concentration of <1✕10¹⁶ cm⁻³ and a near band emission full width half maximum of 2 meV was observed for the best sample. The study of electrical characteristics using the variable magnetic field Hall effect confirmed the existence of a degenerate carrier and a bulk carrier in most MBE grown ZnO thin films. The bulk carrier mobility was measured to be ~120 - 150 cm²/Vs for most as-grown samples, comparable to the best reported value. A typical bulk carrier concentration of ~1✕10¹⁶ - 1✕10¹⁸ cm⁻³ was observed for as-grown samples. Annealing was found to increase the mobility of the bulk carrier to ~120 - 225 cm²/Vs and decrease the bulk carrier concentration by two orders of magnitude. Using time resolved photoluminescence, it was found that the radiative recombination in MBE grown ZnO thin films was dominated by excitonic processes, and followed a T³⁄² trend with temperature. A maximum radiative lifetime of 10 ns was observed for as-grown samples. The non-radiative lifetime in ZnO thin films was dominated by the Shockley-Read-Hall recombination processes. The modelling of the temperature dependence of the non-radiative lifetime suggested that an electron trap at ~0.065 eV and a hole trap at ~0.1 eV may be present in these samples. The application of time resolved photoluminescence also allowed the direct observation of carrier freeze-out in these ZnO films at low temperature.

Dans les dispositifs électronique, il est prochainement attendu que la réduction de la taille des composant atteingne prochainement la limite quantique. De ce fait, manipuler l'information quantique apparait comme un nouveau challenge. Les Qubits supraconducteurs basé sur la physique du solide et les Jonctions Josephson sont des systèmes prometteurs qui profitent des avantage des technologies de la micro-électronique. Toutefois, le temps de décohérence des états quantique est encore un facteur limitant. Cette limitation est généralement attribuée à la faible qualité cristalline des matériaux utilisés (défauts cristallins, impuretés). La technique d'épitaxie par jets moléculaires a été utilisé pour la croissance de couches minces de rhénium de haute qualité cristalline sur des substrat de saphir dans un environnement Ultra Haut Vide. Le misfit existant entre les réseaux cristallins du rhénium et du saphir est suffisamment bas pour permettre une croissance épitaxiale du rhénium sur le saphir, mais également une croissance d'une barrière tunnel en oxyde d'aluminium monocristallin sur la couche de rhénium elle-même. Afin d'améliorer la qualité cristallographique de la couche de rhénium, des simulations et de nombreuses techniques de caractérisation ont été utilisées. Puis les propriétés supraconductrices des films de rhénium ont été étudié à des températures ultra basses afin de comparer ces propriétés à la qualité cristallographique de nos films. / In electronic devices, it is expected that the quantum limit will soon be reached with decreasing system size. Therefore, manipulating quantum information appears as a new challenge. Solid state Qubits based on superconducting Josephson junction are promising systems which take advantage of microelectronics technology. However, decoherence time of the quantum states is still a limiting factor. This has been generally ascribed to the poor crystallographic quality of the materials used so far (crystallographic defects, impurities). The Molecular Beam Epitaxy (MBE) technique may be used to grow rhenium (Re) films of high quality on sapphire substrates in an Ultra High Vacuum (UHV) environment. So far, the misfit between Re and sapphire is low enough to permit the growth of a single crystal aluminium oxide thin film on top of the Re layer. In order to improve the crystallographic quality of the Re film, some simulations and several characterizations techniques have been used. Then, the superconducting properties of rhenium films have been studied at Ultra Low Temperature in order to compare with their crystallographic qualities.

No description available.

The goal of this research was to examine the relationship between dislocation density and in-plane residual stress in edge-defined film-fed growth (EFG) silicon wafers. Previous research has shown models for linking dislocation density and residual stress based on temperature gradient parameters during crystal growth. Residual stress and dislocation density have a positive relationship for wafers with very low dislocation density such as Cz wafers. There has been limited success in experimental verifications of residual stress for EFG wafers, without any reference to dislocation density. No model of stress relaxation has been verified experimentally in post production wafers. A model that assumes stress relaxation and links residual stress and dislocation density without growth parameters will be introduced here. Dislocation density and predominant grain orientation of EFG wafers have been measured by the means of chemical etching/optical microscope and x-ray diffraction, respectively. The results have been compared to the residual stress obtained by a near infrared transmission polariscope. A model was established to explain the results linking dislocation density and residual stress in a randomly selected EFG wafer.

This dissertation shows the properties of lithium niobate and lithium tantalate as a promising substrate for III-nitrides, addresses several problems of integrating compound semiconductor materials on LN and LT. It also suggests some solutions of the addressed problems, including furnace anneals at high temperature. While this furnace anneal improved surface smoothness and III-nitride film adhesion, it also caused the repolarization on the congruent LN (48.39 mole % of Li2O) samples. However, the repolarization was not developed in the stoichiometric LN (49.9 mole % of Li2O) samples during the identical thermal treatment. Also, the structural quality of GaN epitaxial layers showed slight improvement when grown on LT substrates over LN substrates. Conventional epitaxial growth technologies were adapted and modified to implement a successful AlGaN/GaN heterostructure on LN (LT). The heterostructure were analyzed to verify the electrical and material properties using several characterization techniques. Finally, it demonstrates AlGaN/GaN-based HEMT devices on ferroelectric materials that will allow the future development of the multifunctional electrical and optical applications.

Thesis (Ph. D.)--West Virginia University, 2007. / Title from document title page. Document formatted into pages; contains xv, 145 p. : ill. (some col.). Includes abstract. Includes bibliographical references (p. 138-145).

Thesis (Ph. D.)--University of Texas at Austin, 2007. / Vita. Includes bibliographical references.

Thesis (Ph.D.) -- McMaster University, 1997. / Includes bibliographical references. Also available via World Wide Web.

Thesis (Ph.D.)--McMaster University, 2005. / Supervisor: G.C. Weatherly and M. Niewczas. Includes bibliographical references (leaves 171-177).

Thesis (Ph.D.)--McMaster University (Canada), 1995. / Source: Dissertation Abstracts International, Volume: 57-03, Section: B, page: 1870. Adviser: D. A. Thompson.