Abstract The rapid growth in the wireless communications markets together with the emerging need for high-bit-rate (≫ 100 Mb/s) multimedia/data services are pushing the usage of radio spectrum resources below 10 GHz to the uttermost limit. The lack of bandwidth has led to an extensive development of mobile/fixed BWA systems for the higher microwave and millimetre-wave regions up to the V-band frequencies (50–75 GHz). In order for these systems to have mass deployment and to meet cost-sensitive consumer markets’ requirements, their cost and size must be reduced from current levels. One of the most viable packaging approaches to satisfy these demands is the low-temperature co-fired ceramic (LTCC) based system-in-package (SiP) module technology combined with fully automated surface-mount assembly techniques. However, one of the main challenges of this approach has been previously associated with the broadband radio frequency (RF) and reliability performance constraints of the board-level solder joints in LTCC/PCB assemblies. In this thesis the primary focus is to tackle these limitations and significantly extend the feasibility of the LTCC module technology to various wireless/mixed-signal packaging applications. The thesis is divided into three main parts. In the first part, design, modelling and implementation of vertical package transitions (BGA, flip-chip, substrate via) over a very wide frequency range are presented. In the second part, the emphasis is on the improvement of the thermal fatigue endurance of the board-level solder joints in the LTCC/PCB assemblies. In the last part, the results are merged to realize a high-performance LTCC module platform for use in a wide variety of SiP products in the telecommunication sector. The flip-chip, substrate-via and BGA transition structures exhibited excellent signal transmission properties up to the V-band frequencies. The developed equivalent circuit models of the transitions matched well with the measurements. Cascading the transitions together allows the building of different combinations of vertical interconnection paths in SiP modules. To demonstrate this, a surface-mountable LTCC filter package for K-band radio link frequencies was implemented. The developed composite BGA solder joint structure with plastic-core solder balls significantly enhanced the thermal fatigue life in LTCC/PCB assemblies in different thermal cycling conditions, indicating adequate board-level reliability for many practical LTCC-BGA packaging applications. Moreover, electromagnetic analysis showed that the use of the plastic-core solder ball has no detrimental impact on the RF performance of the solder joint. Finally, based on the obtained results a reliable lead-free LTCC-BGA module platform was developed for broadband packaging applications. The BGA module platform with a size of 15 mm × 15 mm included 38 low-frequency and two wideband RF input/output connections up to the K-band frequencies. The module structure also allowed plenty of space to mount discrete SMD/bare-die components on the surface and/or to embed passive components in the 1.2 mm thick substrate. Preliminary thermal cycling results of the soldered LTCC/PCB assemblies demonstrated sufficient reliability for telecommunication applications. Therefore, the presented module platform can serve as a physical building block for various wireless/mixed-signal SiP products, and hence significantly reduce their development time and associated costs.

Passive millimeter-wave (PMMW) imaging is a technique that allows the detection of inherent millimeter-wave radiation emitted by bodies. Since different bodies with varying properties emit unequal power intensities, a contrast can be established to detect their presence. The advantage of this imaging scheme over other techniques, such as optical and infrared imaging, is its ability to operate under all weather conditions. This is because the relatively long wavelengths of millimeter-waves, as compared to visible light, penetrate through clouds, fog, and sandstorms. The core of a PMMW camera is an antenna, which receives the electromagnetic radiation from a scene. Because PMMW systems require high gains to operate, large antenna arrays are typically employed. This mandatory increase of antenna elements is associated with a large feeding network. Therefore, PMMW cameras usually have a big profile. In this work, two enabling technologies, namely, Substrate integrated Waveguide (SIW) and Low Temperature Co-fired Ceramic (LTCC), are coupled with an innovative design to miniaturize the passive front-end. The two technologies synergize very well with the shielded characteristics of SIW and the high density multilayer integration of LTCC. The proposed design involves a novel multilayer power divider, which is incorporated in a folded feed network structure by moving between layers. The end result is an efficient feeding network, which footprint is least affected by an increase in array size. This is because the addition of more elements is accommodated by a vertical expansion rather than a lateral one. To characterize the feed network, an antenna array has been designed and integrated through efficient transitions.The complete structure has been simulated and fabricated. The results demonstrate an excellent performance, manifesting in a gain of 20 dBi and a bandwidth of more than 11.4% at 35 GHz. These values satisfy the general requirements of a PMMW system.

Wireless systems with emerging applications are leaning towards small size, light-weight and low cost. Another trend for these wireless devices is that new applications and functionalities are being added without increasing the size of the device. To accomplish this, individual components must be miniaturized and the system should be designed to maximize the integration of the individual components. The high level of 3D integration feasible in system on package design (SoP) concept can fulfill the latter requirement. Bandpass filters are important components on all wireless systems to reject the unwanted signals and reduce interference. Being mostly implemented with passive and distributed components, bandpass filters take considerable space in a wireless system. Moreover, with emerging bands and multiple applications encompassed in a single device, many bandpass filters are required. The miniaturization related to bandpass filters can be approached by three main ways: (1) at the component level through the miniaturization of individual bandpass filters, (2) at the system level through the use of tunable filters to reduce the overall number of filters, and (3) at the system level through the high level of integration in a 3D SoP platform. In this work we have focused on all three aspects of miniaturization of band pass filters mentioned above. In the first part of this work, a low frequency (1.5 GHz global positioning system (GPS) band) filter implemented through 3D lumped components in two leading SoP technologies, namely low temperature co-fired ceramic (LTCC) and the liquid crystal polymers (LCP) is demonstrated. The miniaturized filter is based on a second order topology, which has been modified to improve the selectivity and out-of-band rejection without increasing the size. Moreover, for the case of LCP, the filter is realized in an ultra-thin stack up comprising four metallization layers with an overall thickness of only 100 _m. Due to its ultra-thin structure, the LCP filter is ten times smaller size as compared to the filters reported in published work. The filter is exible and, therefore, suitable for conformal applications. In the second part of this work, relatively higher frequency (Ku band) distributed bandpass filter is presented which can be tuned through an applied magnetic field. This has been realized in a relatively new LTCC tape with magnetic properties, known as ferrite LTCC. Traditionally, magnetically tunable filters require large external electromagnets or coils, which are non-integrable to typical planar circuit boards and are also inefficient. To demonstrate high level of integration, completely embedded windings realized in multiple layers of LTCC have been used instead of the external coils. As a result, the presented bandpass filter is several orders of magnitude smaller that the reported ones. Aside from reducing the size, the embedded windings based design is more efficient than the external coils because it can avoid the demagnetization effect (fields lost at air-ferrite interface) and thus require much smaller bias fields for tunability. Though the embedded windings bring in a number of advantages as mentioned above, the currents passing through these windings generate considerable heat which can inuence the performance of the microwave structure (bandpass filters in our case). This has never been studied before fro Ferrite LTCC based designs with embedded windings. In this work, the effect of the heat generated by these windings has been investigated. It has been found that this self-heating effect inuences the tunability of the filters considerably so it must be estimated at the design stage. Therefore, a strategy to simulate this effect has been developed. The resultant simulations agree well with the measurements verifying the simulation strategy. The designs presented in this work demonstrate the feasibility of realizing highly integrated, miniaturized and tunable filters in SoP platform which are very suitable for modern and futuristic small form factor and slim wireless devices.

O design de materiais na escala nanométrica está levando a sistemas com novas propriedades e aplicações as mais diversas, como em sistemas de diagnóstico e de tratamento inteligentes e sustentáveis. Melhorar a eficiência dos tratamentos de doenças através do desenvolvimento de fármacos mais eficientes e com menos efeitos colaterais, e agentes de contraste e de diagnóstico mais específicos e sensíveis para monitoramento preventivo precoce, é um dos principais objetivos da Nanomedicina. Todavia, a química de superfície necessária para realizar tais reações de funcionalização/conjugação de moléculas ainda está longe de ser adequadamente controlada, particularmente considerando-se a complexidade das biomoléculas e a estabilidade coloidal. Assim, nesta tese foram desenvolvidos processos de conjugação de nanopartículas de óxido de ferro (SPIONs) com um ou mais agentes co-funcionalizantes, gerando partículas mono, bi e multifuncionalizadas dispersáveis em meio aquoso. Os esforços foram concentrados no desenvolvimento de sistemas de diagnóstico e de entrega de fármacos baseados em nanopartículas, cujas propriedades precisam ser ajustadas pela conjugação de biomoléculas e espécies bioativas em sua superfície, num verdadeiro trabalho de engenharia a nível nanométrico/molecular. De fato, nanopartículas modificadas com moléculas co-funcionalizantes estabilizantes (glicerol-fosfato, glicose-fosfato, fosforiletanolamina, dopamina e tiron), agentes de vetorização que direcionam o nanoconjugado a células-alvo tumorais (ácido fólico e biotina), bem como com fármacos como metotrexato e ibuprofeno foram preparadas, e o efeito das mesmas sobre a eficiência de incorporação por células tumorais (HeLa e MCF-7) estudada. Os estudos de atividade biológica in vitro foram realizados em parceria com o Laboratório de Processos Fotoinduzidos e Interfaces (LPFI-IQUSP). Os resultadosobtidos confirmaram a possibilidade de se controlar a atividade biológica das nanopartículas por meio dos agentes funcionalizantes, abrindo perspectivas interessantes para o desenvolvimento de nanoagentes multifuncionais para teranóstica, conjugados com agentes de vetorização específicos (particularmente anticorpos e aptâmeros), além de agentes de contraste (radiofármacos, fluoróforos, contraste para IRM, etc.) e moléculas terapêuticas (antitumorais, anti-inflamatórios, dentre outros). Entretanto, diversos são os problemas associados aos processos químicos envolvendo a produção e funcionalização desses nanomateriais por processos convencionais em batelada, que tendem a ser demorados e apresentam dificuldade de controle dos parâmetros de reação e baixa reprodutibilidade, dificultando o escalonamento produtivo e a comercialização dos eventuais produtos. Uma estratégia promissora é o uso de reatores microfluídicos com projeto de canais adequado, além de atuadores e sensores que, juntos garantam excelente controle de processos e baixo consumo de energia e de reagentes. Assim, também foram desenvolvidos reatores microfluídicos para produção e funcionalização de nanopartículas de ouro, de forma a tornar os processos químicos programáveis, mais eficientes, controláveis e econômicos, em parceria com o Laboratório de Micromanufatura do Instituto de Pesquisas Tecnológicas (LMI-BIONANO/IPT). Essa parte do desenvolvimento foi realizando empregando a tecnologia de microfabricação em Low Temperature Co-fired Ceramics (LTCC), uma tecnologia versátil que possibilita a produção de dispositivos de diferentes geometrias em materiais cerâmicos de baixa reatividade e de baixo custo. Esses dispositivos podem tornar os processos de produção de nanopartículas multifuncionais dispersáveis suficientemente simples, versáteis e reprodutíveis para atender aos altos padrões de qualidade exigidos para produtos voltados para aplicações biomédicas / Materials design at nanoscale is leading us to intelligent systems with new properties and applications, such as more efficient diagnostic and treatment systems. Improving the treatment of diseases by the development of more specific and efficient drugs, displaying fewer or no side effects, conjugated with sensitive contrast/diagnostic agents for early preventive monitoring and treatment is one of the main goals of the Nanomedicine. However, the knowledge on surface chemistry required to perform such molecular functionalization/conjugation reactions still is far from being adequately controlled, particularly considering the complexity of biomolecules and reaching colloidal stability. Thus, in this thesis, processes of conjugation of iron oxide nanoparticles (SPIONs) with one or more co-functionalizing agents have been developed so as to generate mono, bi and multi-particles dispersible in aqueous medium. Efforts were specifically focused on the development of drug delivery and diagnostic systems based on nanoparticles whose properties must be adjusted by the conjugation of biomolecules and bioactive species on their surface, in a truly nano/molecular scale engineering work. In fact, nanoparticles modified with stabilizing co-functionalizing molecules (glycerolphosphate, glucose-phosphate, phosphorylethanolamine, dopamine and tiron), targeting agents (folic acid and biotin) to guide itself and concentrate in specific tumor cells, as well as with drugs such as methotrexate and ibuprofen were prepared, and their effect on the efficiency of uptake by tumor cells (HeLa and MCF-7) studied. In vitro biological activity studies were performed in collaboration with the Laboratory of Photo Induced Processes and Interfaces (LPFI-IQUSP). The results confirmed the possibility of controlling the biological activity of nanoparticles by anchoring suitable functionalizing agents in an additive way, opening interesting new perspectives for the development ofmultifunctional theranostics nanoagents, conjugated with specific vectorization agents (particularly antibodies and aptamers), as well as diagnostic (radiopharmaceuticals, fluorophores, MRI contrast, etc.) and therapeutic agents (antitumor, anti-inflammatory, among others). However, there are several problems associated with the production and functionalization of these nanomaterials by conventional batch processes, which tend to be time consuming and difficult to control, as confirmed by their low reproducibility, making it difficult to produce and commercialize the eventual products. A promising strategy is the use of microfluidic reactors with suitable channel designs, as well as actuators and sensors that, together, ensure excellent process control and low energy and reagent consumption. Thus, microfluidic reactors were also developed for the production and functionalization of gold nanoparticles in order to make chemical processes more predictable, efficient, controllable and economical, in partnership with the Micromanufacturing Laboratory of the Institute of Technological Research (LMI-BIONANO/IPT). This part of the development was accomplished by employing the Low Temperature Co-fired Ceramics (LTCC) microfabrication technology, a versatile technology that enables the production of devices of different geometries in ceramic materials of low reactivity and of low cost. These devices can make the production processes of dispersible multifunctional nanoparticles simple, versatile and reproducible enough to meet the high standards of quality required for products for biomedical applications

Nos últimos anos tem sido grande o interesse na tecnologia de fabricação de cerâmicas cossinterizadas a baixas temperaturas (LTCC – Low Temperature Cofired Ceramics), usualmente inferiores a 1000 °C, para fabricação de dispositivos microeletrônicos multicamadas a partir de substratos cerâmicos e vitrocerâmicos. Além do considerável progresso nas comunicações wireless, a indústria eletrônica tem demandado miniaturização, multifuncionalidade e compactação de circuitos e componentes de última geração. Com esse propósito, busca-se desenvolver substratos, sinterizados a baixa temperatura, com baixa perda dielétrica e retração controlada. O diopsídio (CaO.MgO.2SiO2) é considerado de grande potencial para uso como substrato na referida tecnologia para aplicações em altas frequências, pois apresenta baixa constante dielétrica e capacidade de ser sinterizado a temperaturas relativamente baixas. Assim, o objetivo do presente trabalho foi a obtenção de substratos vitrocerâmicos conformados por tape casting a partir de pó de vidro com a composição do diopsídio, passando por tratamentos térmicos de sinterização e cristalização, avaliando o comportamento da retração durante a sinterização para diferentes distribuições de tamanho de partícula. Para isso, fizeram-se moagens do vidro em álcool isopropílico durante 6, 12 e 24 h, em seguida suspensões cerâmicas de pó vítreo foram preparadas e caraterizadas reologicamente buscando-se a máxima concentração de sólidos para a colagem das fitas cerâmicas. Para esse trabalho foi construída uma máquina de tape casting para conformação de fitas finas a partir de suspensões de vidro diopsídio. As fitas coladas foram sinterizadas em tratamentos não isotérmicos com uma taxa de aquecimento de 5°C/min e a retração linear das fitas foi caracterizada simultaneamente. Curvas de retração e densificação foram calculadas usando o modelo de Clusters de sinterização de vidros por escoamento viscoso com cristalização concorrente, e comparadas com os valores experimentais. Finalmente, foram avaliadas as características físicas, térmicas, microestruturais e dielétricas das fitas sinterizadas. A melhor distribuição de tamanho de partícula foi a representada pelo D50 = 5,7 μm, que apresentou as melhores condições reológicas e de dispersão em barbotinas, sendo possível preparar suspensões com concentração de até 49 %vol de sólidos e fitas de espessura acimas de 1 mm. A retração linear ao término da sinterização variou de acordo com a densidade de empacotamento, que por sua vez depende da concentração inicial de sólidos. A maior concentração e densidade de empacotamento foram obtidas para a distribuição de maior tamanho de partícula (D50 = 13,4 μm) e apresentou uma retração linear de 14%. O substratos de diopsídio sinterizado e totalmente cristalizado de 1 mm de espessura e 14% de porosidade apresentou constante dielétrica de 5,3 e perdas dielétricas menores que 0,008 para uma frequência de 30 GHz. Os resultados demostram que o material obtido a partir do processo de manufatura desenvolvido tem grande potencial de inovação. / In recent years there has been a great deal of interest in Low Temperature Cofired Ceramics (LTCC) manufacturing technology, usually below 1000°C, for the manufacture of multilayer microelectronic devices from ceramic and glass-ceramic substrates. In addition to the considerable progress in wireless communications, the electronics industry needs miniaturization, multifunctionality, and integration of the latest components and circuits. Therefore, it is sought to develop dense, sintered at low-temperature substrates, with low loss dielectric and controlled shrinkage. The diopside (CaO.MgO2.SiO2) has a great potential for use as a substrate for LTCC technology for high-frequency applications since it presents low dielectric constant and the capacity of sintered at low temperatures. The aim of this work was to obtain glass-ceramic substrates prepared by tape casting from diopside glass powder through sintering and crystallization thermal treatments, assessing the behavior of shrinkage during sintering for different particles sizes. For this purpose, the glass was milled in isopropyl alcohol for 6, 12 and 24 h, then slurries from glass powder were prepared and rheological characterized, aiming at the using the highest possible solids concentration to tape casting. It was manufactured a tape casting machine to thin tape making from diopside glass powder slurries. The tapes were sintered in non-isothermal treatments with a heating rate of 5°C/min and the linear shrinkage of the tapes was characterized in situ. Shrinkage and densification curves were calculated using the Clusters model of glass sintering with concurrent crystallization compared with the experimental values. Finally, the physical, thermal, microstructural and dielectric characteristics of the sintered tapes were evaluated. The best particle size distribution was represented by the D50 = 5.66 μm, which presented the optimal rheological and dispersion conditions in slurries, is it possible to prepare suspensions with a concentration of up to 49% volume solids and tape of the thickness of 1 mm. The linear shrinkage after sintering varied according to the green density, which in turn depends on the initial solids concentration. The highest concentration and green density were obtained for the largest particle size distribution (D50 = 13.40 μm) and showed a linear shrinkage of 14%. The sintered and fully crystallized diopside substrates of 1 mm thickness and 14% porosity showed a dielectric constant of 5.3 and dielectric losses of less than 0.008 at a frequency of 30 GHz. The results show that the material obtained has great potential for innovation.

Dans cette thèse, nous présentons l’étude et la réalisation de micro-capteurs pour les systèmes de gestion des risques naturels. Le cahier des charges était centré sur les possibilités de concevoir des capteurs de polluants pour la surveillance des zones lagunaires dans le sud montpelliérain. Ces capteurs devaient être conçus dans une démarche « faible coût », résistant aux contraintes du milieu et pouvant communiquer et temps réel. Le premier chapitre s’appuie sur une étude bibliographique des différentes méthodes de mesures qui peuvent être utilisées pour faire de la détection de polluants et des matériaux potentiels pour réaliser le capteur. La technique de mesure la plus appropriée pour répondre aux deux premiers points du cahier des charges s’appuie sur la réalisation de transducteurs acoustiques à base de PZT en envisageant un processus technologique basé sur la technique de sérigraphie. Après avoir justifié notre choix de la technique de dépôt par sérigraphie, nous avons détaillé dans le second chapitre le processus technologique, en commençant par la réalisation de l’encre PZT, puis par le dessin des masques et pour finir nous avons détaillé les étapes de dépôt et de fonctionnalisation des transducteurs sur substrat d’alumine et sans substrat. A partir de ces premières réalisations, nous avons présenté les moyens et outils de caractérisation nécessaires pour pouvoir évaluer les différentes étapes du processus technologique mis en place, avec une attention particulière portée sur la qualité du matériau PZT et sur ses propriétés piézoélectriques. Il s’agit d’une part d’études morphologiques (images MEB, profilomètre) et structurelles (diffraction X, EDX) et d’autre part de la mesure des grandeurs piézoélectriques et diélectriques (piézomètre, analyses spectrales et d’impédances). Dans le troisième chapitre nous avons abordé le volet système de cette étude, avec la réalisation de prototypes basés sur les transducteurs sérigraphiés développés au chapitre 2. Les capteurs réalisés ont été testés et étalonnés avec des solutions d’éthanol et de toluène. Pour cela les capteurs sérigraphiés ont été testés sur des bancs expérimentaux afin de valider la technique de la mesure du temps de vol des ondes acoustiques. Dans l’optique de la miniaturisation et de l’intégration du système nous avons mis en place une électronique de commande embarquée à l’aide d’un module dédié. Enfin, pour pouvoir affiner les mesures, nous avons vu que nous pouvions envisager de croiser/corréler plusieurs paramètres. C’est ainsi que nous avons développé un capteur sérigraphié pour la mesure de la conductivité électrique en milieu aquatique. A partir des premiers résultats expérimentaux obtenus nous avons pu valider le principe de la méthode. Dans le quatrième et dernier chapitre de ce manuscrit, nous avons présenté les toutes premières études et réalisations sur la technologie LTCC. En reprenant les paramètres du processus utilisés lors des dépôts sur substrat d’alumine, nous avons réalisé et caractérisé des transducteurs déposés sur une feuille de céramique LTCC. Les premières caractérisations morphologiques et piézoélectriques sont encourageantes et les premiers tests acoustiques ont montré que la génération d’ondes acoustiques était tout à fait possible et qu’une utilisation en vue de la réalisation de capteurs de polluants était envisageable avec cette technologie. Enfin, nous avons pu réaliser une première structure 3D intégrant une cavité d’analyse. Là encore les débuts sont très prometteurs même s’il reste encore beaucoup de travail de « réglage » pour améliorer cette technologie. De plus, cette première réalisation 3D, ouvre de nombreuses perspectives au niveau de l’équipe en vue du développement de nouveaux capteurs. / In this thesis, we introduce the study and implementation of micro-sensors for natural risk management systems. The specification focused on the possibilities to develop a pollutant sensor capable of detecting the presence of hydrocarbons in the lagoon environments of southern Montpellier.These sensors should be designed in a "low cost" gait, resistant to environmental constraints and able to communicate in real time. The first chapter is based on a bibliographical study of the different methods of measurement that can be used for the detection of pollutants and potential materials for making the sensor. The most suitable measurement technology to answer the first two points of the specification is based on the implementation of acoustic transducers made from PZT with a technological process using the screen-printing technique. After justifying our choice of screen-printing deposition technique, we have detailed in the second chapter the technological process: first with the achievement of PZT ink, then with the masks design, and finally with the steps deposition and functionalization of transducers on alumina substrate and without substrate. From these first achievements, we have submitted the means and characterization tools needed to evaluate the different steps of the technological process set up with a focus on the quality of the PZT material and its piezoelectric properties. It is first about morphological (SEM images, profilometer) and structural (XRD, EDX) studies, and then about the measurement of piezoelectric and dielectric values (piezometer, spectral and impedance analyses). In the third chapter we discussed the sensor, with the production of prototypes based on screen-printed transducers developed in Chapter 2. The sensors were tested and calibrated with solutions of ethanol and toluene. For this, the screen-printed sensors were tested in experimental benches to validate the measurement technique of the acoustic waves time of flight. In view of the miniaturization and the integration of the system, we have set an electronic control board with a dedicated module. Finally in order to improve the measurements, we have shown that we could consider crossing/correlating several parameters. Thus, we have developed a screen-printed sensor for the measurement of the electrical conductivity in aquatic environment. From the first experimental results we validated the principle of the method. In the fourth and final chapter of this manuscript, we presented the first studies and achievements on the LTCC technology. By repeating the process parameters used during deposition on alumina substrate, we realized and characterized transducers placed on on a LTCC ceramic sheet. The first morphological and piezoelectric characterizations are encouraging, and the first acoustic tests have shown that the generations of acoustic waves, and a use for the production of sensors of pollutants were possible with this technology. Finally we have been able to achieve a first 3D structure incorporating an analysis cavity. Here again, results are very encouraging, although "adjustments" are needed to improve the technology. Also this 3D realization opens up many opportunities for the team to develop new sensors.

La formulation d'une encre diélectrique et son dépôt par impression jet d'encre en vue de la fabrication de modules LTCC ont été étudiés, dans le cadre du projet européen SPrinTronics. Les verrous technologiques de la formulation de l'encre ont pu être levés afin d'ajuster ses caractéristiques au procédé. Pour cela, les mécanismes d'hydrolyse de la poudre, d'adsorption/désorption du dispersant et de fragmentation de la poudre ont été étudiés. Il a été mis en évidence la complexité d'obtenir à la fois une grande stabilité et une granulométrie fine. Les tests préliminaires d'impression ont révélé que les différentes stratégies influencent fortement la planéité des plans. Notamment, il est possible de minimiser la rugosité de surface de plans diélectriques imprimés par jet d'encre en maîtrisant la nature de la maille, l'interpénétration des gouttes et la stratégie de remplissage de la maille. Ces différents travaux sont prometteurs quand à l'industrialisation futur de la méthode. Cependant, les efforts doivent être poursuivis afin de mettre au point des véhicules de test. / Formulation of dielectric ink and its deposit by inkjet printing in order to manufacture LTCC have been studied, in the context of SPrinTronics european project. Technological barriers have been solved and the ink characteristics have been adjusted to the inkjet specifications by studying hydrolysis mechanisms of the powder, adsorption/desorption of the dispersant and powder milling. It has been very complex to obtain simultaneously a good stability (low viscosity and sedimentation rate) and fine particle size. Preliminary printing tests have been revealed that printing strategies are efficients to reduce rugosity of printed dielectric plans, especially the lattice, drop-to-drop distance and the filling strategy. These studies are promising for LTCC printing. However, efforts should be coutinued to print test vehicles.

Master of Science / Department of Electrical and Computer Engineering / William B. Kuhn / Inductors have been produced in LTCC in a unique manner that increases the cross-sectional area of the conductor. The method uses metal-filled trenches and cavities in the tape to create conductors which are as thick as an entire layer of tape. This geometry helps to compensate for high-frequency non-idealities such as skin effect, current crowding, and proximity effect. An array of test structures has been fabricated. The measured results achieved inductors with Qs of 60 and suggest that Qs up to 100 are possible. Accurate measurements of such values require careful consideration of error sources and are discussed. A potential application of the inductors is presented in a two-pole filter, which has been modeled and fabricated. Lastly, a list of conclusions which would be helpful for future work on this subject is presented.

Zugl.: Aachen, Techn. Hochsch., Diss., 2007.

This study focuses on the design, fabrication, test and application of in-plane rotary electromagnetic micro-generator to obtain a high power output. The micro-generator comprises multilayer planar low temperature co-fired ceramics (LTCC) Ag micro-coil and multipole hard magnet of Nd/Fe/B. Finite element simulations have been carried out to observe electromagnetic information. The study also establishes analytical solutions for the micro-generator to predict the induced voltage. Three different configurations of planar micro-coils investigated, which are sector-shaped, circle-shaped, and square-shaped micro-coils. A prototype of the micro-generator is as small as 9¡Ñ9¡Ñ1 mm3 in volume size. The experimental results show that the micro-generator with sector-shaped micro-coil has the highest power output of 1.89 mW, and the effective value of the induced voltage of 205.7 mV at 13,325 rpm is achieved. In application, this study designed and fabricated a planar rotary electromagnetic energy harvester with a low rotary speed for use in bicycle dynamos. Finite element analysis and the Taguchi method were used to design this dynamo system. LTCC technology was applied to fabricate Ag planar multilayer coils with 20 layers. A 28-pole magnet Nd/Fe/B with an outer diameter of 50 mm and a thickness of 2 mm was also sintered and magnetized. This harvester system was approximately 50¡Ñ50¡Ñ3 mm3 in volume. The experimentally induced voltages for 20-layer coils were 1.539 V at the rotary speeds of 300 rpm. The power output was 0.788 mW with an external resistance load of 740 £[, and the efficiency was 26.62%. This harvester is capable of powering a minimum of 200 light emitted diodes (LEDs) (forward voltage (VF) <2.2 V and 20 mA) using a rotary speed of 250 rpm, and can be used for bicycle dynamo lighting.