Le travail de thèse présenté dans ce manuscrit s’inscrit dans une dynamique d’intégration de matériaux non conventionnels en systèmes microfluidiques. Il vise à démontrer le potentiel du cPDMS, un matériau nanocomposite formé d’une matrice de polydiméthylsiloxane rendu conducteur par l’ajout de nanoparticules de carbone. Compatible avec les procédés technologiques habituels, le cPDMS peut être structuré dans une large gamme d’épaisseurs et de géométries mais présente surtout l’avantage de pouvoir être collé irréversiblement sur verre, PDMS et silicium. Son intégration est parfaitement étanche, rapide à mettre en oeuvre, et très économique. La première partie du manuscrit est consacrée à la caractérisation de ce matériau. Ses propriétés électriques et de surface, pouvant être critiques pour une utilisation en microfluidique, ont été particulièrement étudiées. Les champs électriques offrant de nombreuses possibilités pour réaliser des fonctions clés en microfluidique (détection, séparation, manipulation de fluides ou de particules), nous avons choisi d’évaluer l’intérêt d’électrodes de cPDMS dans deux types d’applications. Les aspects de détection ont d’abord été mis en évidence à l’aide de mesures électrochimiques. Cette méthode a permis à la fois de caractériser la surface du cPDMS tout en validant son utilisation potentielle pour des applications d’analyses électrochimiques. Dans la dernière partie du manuscrit, le matériau a été testé pour la manipulation de particules à travers l’observation de différents phénomènes électrocinétiques. Ceux-ci ont conduit à la mise au point de dispositifs microfluidiques (intégrant des lectrodes de cPDMS) dédiés à la lyse et à l’électrofusion de cellules. / The work presented in this thesis deals with the integration of non-conventional materials in microfluidic systems. It aims to demonstrate the potential of cPDMS, a conductive nanocomposite material made up of polydimethylsiloxane matrix mixed with carbon nanoparticles. Compatible with the usual technological processes such as soft lithography, cPDMS can be microstructured in a large range of thicknesses and geometries. Moreover, cPDMS can be quickly, irreversibly and perfectly sealed to glass, PDMS and silicon substrates, something that is not possible for conventional metallic electrodes. The first part of the manuscript is centered on the characterization of this material. Its electrical and surface properties that may turn out critical for microfluidic applications have been particularly studied. Electric fields present many opportunities to perform key functions in microfluidic (detection, separation, fluid or particles handling). We have chosen to assess the potential of cPDMS electrodes for two kinds of applications. Aspects of detection were first demonstrated using cyclic voltammetry measurements. This electrochemical method has enabled both to characterize the cPDMS surface while validating its potential as an electrochemical analysis tool. In the last part of this manuscript, cPDMS was tested for the electrokinetic manipulation of particles through thre study of different electrical fields with induced phenomena. This has led to the development of microfluidic devices (integrating cPDMS electrodes) designed for cell lysis and cells electrofusion.

Sepsis, commonly referred to as blood poisoning, is a serious medical condition characterized by a whole-body inflammatory state caused by microbial infection. Rapid treatment is crucial, however, traditional culture-based diagnostics usually takes 2-5 days.  The overall aim of the thesis is to develop microfluidic based sample preparation strategies, capable of isolating bacteria from whole blood for rapid sepsis diagnostics.  Although emerging technologies, such as microfluidics and “lab-on-a-chip” (LOC) devices have the potential to spur the development of protocols and affordable instruments, most often sample preparation is performed manually with procedures that involve handling steps prone to introducing artifacts, require skilled technicians and well-equipped, expensive laboratories.  Here, we propose the development of methods for fast and efficient sample preparation that can isolate bacteria from whole blood by using microfluidic techniques with potential to be incorporated in LOC systems. We have developed two means for high throughput bacteria isolation: size based sorting and selective lysis of blood cells. To process the large blood samples needed in sepsis diagnostics, we introduce novel manufacturing techniques that enable scalable parallelization for increased throughput in miniaturized devices. The novel manufacturing technique uses a flexible transfer carrier sheet, water-dissolvable release material, poly(vinyl alcohol), and a controlled polymerization inhibitor to enable highly complex polydimethylsiloxane (PDMS) structures containing thin membranes and 3D fluidic networks. The size based sorting utilizes inertial microfluidics, a novel particles focusing method that operates at extremely high flow rates. Inertial focusing in flow through a single inlet and two outlet, scalable parallel channel devices, was demonstrated with filtration efficiency of >95% and a flowrate of 3.2 mL/min. Finally, we have developed a novel microfluidic based sample preparation strategy to continuously isolate bacteria from whole blood for downstream analysis. The method takes advantage of the fact that bacteria cells have a rigid cell wall protecting the cell, while blood cells are much more susceptible to chemical lysis. Whole blood is continuously mixed with saponin for primary lysis, followed by osmotic shock in water. We obtained complete lysis of all blood cells, while more than 80% of the bacteria were readily recovered for downstream processing. Altogether, we have provided new bacteria isolation methods, and improved the manufacturing techniques and microfluidic components that, combined offer the potential for affordable and effective sample preparation for subsequent pathogen identification, all in an automated LOC format. / QC 20120611

<p>Achieving control over the construction and operation of microfabricated label-free DNA biosensors would be a big leap in the quest for highly reliable clinical laboratory tests. Reliable outcomes of critical medical tests mean less need for repetitions and earlier isolation of outbreaks. Nanotechnology has lent itself well to this purpose, with a plethora of work that attempt to produce highly sensitive nano-biosensors for detection of DNA strands. The problem of achieving a repeatable outcome is crude at best. Additionally, the mechanism of sensing in label-free Field-Effect based DNA sensors is still a matter of dispute. Simulation of the sensors using physical models can shed light into these mechanisms and help answer this question. Computational calculations can also allow designers to assess the importance of several parameters involved in the fabrication.</p> <p>In this thesis, the problem of modeling FET-based DNA hybridization sensors (named BioFET) is approached. Using the Finite-Element Method, a scalable model for the BioFET is produced and solved in 3D. The results are compared to an earlier work and we find that higher dimension physical modeling is essential for more realistic results. Additionally, we present a model for the impedance of the BioFET which allows the calculation of parasitic components that can contaminate the impedance measurements.</p> <p>The issue of variations in the sensed signal from the BioFET is addressed by performing hybrid Finite-Element/Monte Carlo simulations on the conformation of single-stranded DNA. From electrostatic considerations alone, it is concluded that the change of conformation upon hybridization is a main contributor to the induced signal. We also simulate the positional variations of the DNA molecules on the sensitive surface. This computation yields an estimate for the amount of variation in the sensed signal due to the random placement of DNA molecules, and an estimate for the total signal-to-noise ratio is deduced.</p> / Doctor of Philosophy (PhD)

Die Menschheit steht vor der großen Herausforderung der Energieversorgung des 21. Jahrhundert. Nirgendwo ist diese noch dringlicher geworden als im Bereich der Energiespeicherung und Umwandlung. Konventionelle Energie kommt hauptsächlich aus fossilen Brennstoffen, die auf der Erde nur begrenzt vorhanden sind, und hat zu einer starken Belastung der Umwelt geführt. Zusätzlich nimmt der Energieverbrauch weiter zu, insbesondere durch die rasante Verbreitung von Fahrzeugen und verschiedener Kundenelektronik wie PCs und Mobiltelefone. Alternative Energiequellen sollten vor einer Energiekrise entwickelt werden. Die Gewinnung erneuerbarer Energie aus Sonne und Wind sind auf jeden Fall sehr wichtig, aber diese Energien sind oft nicht gleichmäßig und andauernd vorhanden. Energiespeichervorrichtungen sind daher von großer Bedeutung, weil sie für eine Stabilisierung der umgewandelten Energie sorgen. Darüber hinaus ist es eine enttäuschende Tatsache, dass der Akku eines Smartphones jeglichen Herstellers heute gerade einen Tag lang ausreicht, und die Nutzer einen zusätzlichen Akku zur Hand haben müssen. Die tragbare Elektronik benötigt dringend Hochleistungsenergiespeicher mit höherer Energiedichte. Der erste Teil der vorliegenden Arbeit beinhaltet Lithium-Ionen-Batterien unter Verwendung von einzelnen aufgerollten Siliziumstrukturen als Anoden, die durch nanotechnologische Methoden hergestellt werden. Eine Lab-on-Chip-Plattform wird für die Untersuchung der elektrochemischen Kinetik, der elektrischen Eigenschaften und die von dem Lithium verursachten strukturellen Veränderungen von einzelnen Siliziumrohrchen als Anoden in einer Lithium-Ionen-Batterie vorgestellt. In dem zweiten Teil wird ein neues Design und die Herstellung von flexiblen on-Chip, Festkörper Mikrosuperkondensatoren auf Basis von MnOx/Au-Multischichten vorgestellt, die mit aktueller Mikroelektronik kompatibel sind. Der Mikrosuperkondensator erzielt eine maximale Energiedichte von 1,75 mW h cm-3 und eine maximale Leistungsdichte von 3,44 W cm-3. Weiterhin wird ein flexibler und faserartig verwebter Superkondensator mit einem Cu-Draht als Substrat vorgestellt. Diese Dissertation wurde im Rahmen des Forschungsprojekts GRK 1215 "Rolled-up Nanotechnologie für on-Chip Energiespeicherung" 2010-2013, finanziell unterstützt von der International Research Training Group (IRTG), und dem PAKT Projekt "Elektrochemische Energiespeicherung in autonomen Systemen, no. 49004401" 2013-2014, angefertigt. Das Ziel der Projekte war die Entwicklung von fortschrittlichen Energiespeichermaterialien für die nächste Generation von Akkus und von flexiblen Superkondensatoren, um das Problem der Energiespeicherung zu addressieren. Hier bedanke ich mich sehr, dass IRTG mir die Möglichkeit angebotet hat, die Forschung in Deutschland stattzufinden. / Human beings are facing the grand energy challenge in the 21st century. Nowhere has this become more urgent than in the area of energy storage and conversion. Conventional energy is based on fossil fuels which are limited on the earth, and has caused extensive environmental pollutions. Additionally, the consumptions of energy are still increasing, especially with the rapid proliferation of vehicles and various consumer electronics like PCs and cell phones. We cannot rely on the earth’s limited legacy forever. Alternative energy resources should be developed before an energy crisis. The developments of renewable conversion energy from solar and wind are very important but these energies are often not even and continuous. Therefore, energy storage devices are of significant importance since they are the one stabilizing the converted energy. In addition, it is a disappointing fact that nowadays a smart phone, no matter of which brand, runs out of power in one day, and users have to carry an extra mobile power pack. Portable electronics demands urgently high-performance energy storage devices with higher energy density. The first part of this work involves lithium-ion micro-batteries utilizing single silicon rolled-up tubes as anodes, which are fabricated by the rolled-up nanotechnology approach. A lab-on-chip electrochemical device platform is presented for probing the electrochemical kinetics, electrical properties and lithium-driven structural changes of a single silicon rolled-up tube as an anode in lithium ion batteries. The second part introduces the new design and fabrication of on chip, all solid-state and flexible micro-supercapacitors based on MnOx/Au multilayers, which are compatible with current microelectronics. The micro-supercapacitor exhibits a maximum energy density of 1.75 mW h cm-3 and a maximum power density of 3.44 W cm-3. Furthermore, a flexible and weavable fiber-like supercapacitor is also demonstrated using Cu wire as substrate. This dissertation was written based on the research project supported by the International Research Training Group (IRTG) GRK 1215 "Rolled-up nanotech for on-chip energy storage" from the year 2010 to 2013 and PAKT project "Electrochemical energy storage in autonomous systems, no. 49004401" from 2013 to 2014. The aim of the projects was to design advanced energy storage materials for next-generation rechargeable batteries and flexible supercapacitors in order to address the energy issue. Here, I am deeply indebted to IRTG for giving me an opportunity to carry out the research project in Germany. September 2014, IFW Dresden, Germany Wenping Si

Die Menschheit steht vor der großen Herausforderung der Energieversorgung des 21. Jahrhundert. Nirgendwo ist diese noch dringlicher geworden als im Bereich der Energiespeicherung und Umwandlung. Konventionelle Energie kommt hauptsächlich aus fossilen Brennstoffen, die auf der Erde nur begrenzt vorhanden sind, und hat zu einer starken Belastung der Umwelt geführt. Zusätzlich nimmt der Energieverbrauch weiter zu, insbesondere durch die rasante Verbreitung von Fahrzeugen und verschiedener Kundenelektronik wie PCs und Mobiltelefone. Alternative Energiequellen sollten vor einer Energiekrise entwickelt werden. Die Gewinnung erneuerbarer Energie aus Sonne und Wind sind auf jeden Fall sehr wichtig, aber diese Energien sind oft nicht gleichmäßig und andauernd vorhanden. Energiespeichervorrichtungen sind daher von großer Bedeutung, weil sie für eine Stabilisierung der umgewandelten Energie sorgen. Darüber hinaus ist es eine enttäuschende Tatsache, dass der Akku eines Smartphones jeglichen Herstellers heute gerade einen Tag lang ausreicht, und die Nutzer einen zusätzlichen Akku zur Hand haben müssen. Die tragbare Elektronik benötigt dringend Hochleistungsenergiespeicher mit höherer Energiedichte. Der erste Teil der vorliegenden Arbeit beinhaltet Lithium-Ionen-Batterien unter Verwendung von einzelnen aufgerollten Siliziumstrukturen als Anoden, die durch nanotechnologische Methoden hergestellt werden. Eine Lab-on-Chip-Plattform wird für die Untersuchung der elektrochemischen Kinetik, der elektrischen Eigenschaften und die von dem Lithium verursachten strukturellen Veränderungen von einzelnen Siliziumrohrchen als Anoden in einer Lithium-Ionen-Batterie vorgestellt. In dem zweiten Teil wird ein neues Design und die Herstellung von flexiblen on-Chip, Festkörper Mikrosuperkondensatoren auf Basis von MnOx/Au-Multischichten vorgestellt, die mit aktueller Mikroelektronik kompatibel sind. Der Mikrosuperkondensator erzielt eine maximale Energiedichte von 1,75 mW h cm-3 und eine maximale Leistungsdichte von 3,44 W cm-3. Weiterhin wird ein flexibler und faserartig verwebter Superkondensator mit einem Cu-Draht als Substrat vorgestellt. Diese Dissertation wurde im Rahmen des Forschungsprojekts GRK 1215 "Rolled-up Nanotechnologie für on-Chip Energiespeicherung" 2010-2013, finanziell unterstützt von der International Research Training Group (IRTG), und dem PAKT Projekt "Elektrochemische Energiespeicherung in autonomen Systemen, no. 49004401" 2013-2014, angefertigt. Das Ziel der Projekte war die Entwicklung von fortschrittlichen Energiespeichermaterialien für die nächste Generation von Akkus und von flexiblen Superkondensatoren, um das Problem der Energiespeicherung zu addressieren. Hier bedanke ich mich sehr, dass IRTG mir die Möglichkeit angebotet hat, die Forschung in Deutschland stattzufinden. / Human beings are facing the grand energy challenge in the 21st century. Nowhere has this become more urgent than in the area of energy storage and conversion. Conventional energy is based on fossil fuels which are limited on the earth, and has caused extensive environmental pollutions. Additionally, the consumptions of energy are still increasing, especially with the rapid proliferation of vehicles and various consumer electronics like PCs and cell phones. We cannot rely on the earth’s limited legacy forever. Alternative energy resources should be developed before an energy crisis. The developments of renewable conversion energy from solar and wind are very important but these energies are often not even and continuous. Therefore, energy storage devices are of significant importance since they are the one stabilizing the converted energy. In addition, it is a disappointing fact that nowadays a smart phone, no matter of which brand, runs out of power in one day, and users have to carry an extra mobile power pack. Portable electronics demands urgently high-performance energy storage devices with higher energy density. The first part of this work involves lithium-ion micro-batteries utilizing single silicon rolled-up tubes as anodes, which are fabricated by the rolled-up nanotechnology approach. A lab-on-chip electrochemical device platform is presented for probing the electrochemical kinetics, electrical properties and lithium-driven structural changes of a single silicon rolled-up tube as an anode in lithium ion batteries. The second part introduces the new design and fabrication of on chip, all solid-state and flexible micro-supercapacitors based on MnOx/Au multilayers, which are compatible with current microelectronics. The micro-supercapacitor exhibits a maximum energy density of 1.75 mW h cm-3 and a maximum power density of 3.44 W cm-3. Furthermore, a flexible and weavable fiber-like supercapacitor is also demonstrated using Cu wire as substrate. This dissertation was written based on the research project supported by the International Research Training Group (IRTG) GRK 1215 "Rolled-up nanotech for on-chip energy storage" from the year 2010 to 2013 and PAKT project "Electrochemical energy storage in autonomous systems, no. 49004401" from 2013 to 2014. The aim of the projects was to design advanced energy storage materials for next-generation rechargeable batteries and flexible supercapacitors in order to address the energy issue. Here, I am deeply indebted to IRTG for giving me an opportunity to carry out the research project in Germany. September 2014, IFW Dresden, Germany Wenping Si

L'élongation cellulaire de cellules cultivant bout comme hyphae fongueux, inculquez hairs, des tubes de pollen et des neurones, est limité au bout de la cellule, qui permet à ces cellules d'envahir l'encerclement substrate et atteindre une cible. Les cellules cultivant bout d'équipement sont entourées par le mur polysaccharide rigide qui régule la croissance et l'élongation de ces cellules, un mécanisme qui est radicalement différent des cellules non-walled. La compréhension du règlement du mur de cellule les propriétés mécaniques dans le contrôle de la croissance et du fonctionnement cellulaire du tube de pollen, une cellule rapidement grandissante d'équipement, est le but de ce projet. Le tube de pollen porte des spermatozoïdes du grain de pollen à l'ovule pour la fertilisation et sur sa voie du stigmate vers l'ovaire le tube de pollen envahit physiquement le stylar le tissu émettant de la fleur. Pour atteindre sa cible il doit aussi changer sa direction de croissance les temps multiples. Pour évaluer la conduite de tubes de pollen grandissants, un dans le système expérimental vitro basé sur la technologie de laboratoire-sur-fragment (LOC) et MEMS (les systèmes micro-électromécaniques) ont été conçus. En utilisant ces artifices nous avons mesuré une variété de propriétés physiques caractérisant le tube de pollen de Camélia, comme la croissance la croissance accélérée, envahissante et dilatant la force. Dans une des organisations expérimentales les tubes ont été exposés aux ouvertures en forme de fente faites de l'élastique PDMS (polydimethylsiloxane) la matière nous permettant de mesurer la force qu'un tube de pollen exerce pour dilater la croissance substrate. Cette capacité d'invasion est essentielle pour les tubes de pollen de leur permettre d'entrer dans les espaces intercellulaires étroits dans les tissus pistillar. Dans d'autres essais nous avons utilisé l'organisation microfluidic pour évaluer si les tubes de pollen peuvent s'allonger dans l'air et s'ils ont une mémoire directionnelle. Une des applications auxquelles le laboratoire s'intéresse est l'enquête de processus intracellulaires comme le mouvement d'organelles fluorescemment étiqueté ou les macromolécules pendant que les tubes de pollen grandissent dans les artifices LOC. Pour prouver que les artifices sont compatibles avec la microscopie optique à haute résolution et la microscopie de fluorescence, j'ai utilisé le colorant de styryl FM1-43 pour étiqueter le système endomembrane de tubes de pollen de cognassier du Japon de Camélia. L'observation du cône de vésicule, une agrégation d'endocytic et les vésicules exocytic dans le cytoplasme apical du bout de tube de pollen, n'a pas posé de problèmes des tubes de pollen trouvés dans le LOC. Pourtant, le colorant particulier en question a adhéré au sidewalls du LOC microfluidic le réseau, en faisant l'observation de tubes de pollen près du difficile sidewalls à cause du signal extrêmement fluorescent du mur. Cette propriété du colorant pourrait être utile de refléter la géométrie de réseau en faisant marcher dans le mode de fluorescence. / Cellular elongation of tip-growing cells such as fungal hyphae, root hairs, pollen tubes and neurons, is limited to the tip of the cell, which enables these cells to invade the surrounding substrate and to reach a target. Tip-growing plant cells are surrounded by the stiff polysaccharidic wall that regulates the growth and elongation of these cells, a mechanism that is very different from non-walled cells. Understanding the regulation of the cell wall mechanical properties in controlling growth and cellular functioning of the pollen tube, a rapidly growing plant cell, is the goal of this project. The pollen tube carries sperm cells from the pollen grain to the ovule for fertilization and on its way from the stigma towards ovary the pollen tube physically invades the stylar transmitting tissue of the flower. To reach its target it also has to change its growth direction multiple times. To assess the behavior of growing pollen tubes, an in vitro experimental system based on lab-on-chip (LOC) technology and MEMS (microelectro-mechanical systems) was designed. Using these devices we measured a variety of physical properties characterizing the pollen tube of Camellia, such as growth velocity, invasive growth and dilating force. In one of the experimental set-ups the tubes were exposed to slit-shaped openings made of elastic PDMS (polydimethylsiloxane) material allowing us to measure the force a pollen tube exerts to dilate the growth substrate. This invasion capacity is crucial for pollen tubes to allow them to enter narrow intercellular spaces within the pistillar tissues. In other assays we used the microfluidic set-up to test whether pollen tubes can elongate in air and whether they have a directional memory. One of the applications that the lab is interested in is the investigation of intracellular processes such as the motion of fluorescently labelled organelles or macromolecules while the pollen tubes grow within the LOC devices. To prove that the devices are compatible with high-resolution optical microscopy and fluorescence microscopy, I used the styryl dye FM1-43 to label the endomembrane system of Camellia japonica pollen tubes. Observation of the vesicle cone, an aggregation of endocytic and exocytic vesicles in the apical cytoplasm of the pollen tube tip, did not pose any problems in pollen tubes located within the LOC. However, the particular dye in question adhered to the sidewalls of the LOC microfluidic network, making viewing of pollen tubes close to the sidewalls difficult because of the highly fluorescent signal of the wall. This property of the dye might be useful to image the network geometry when operating in fluorescence mode.

<p>There is a strong trend in fabricating <i>miniaturized total analytical systems</i>, µTAS, for various biochemical and cell biology applications. These miniaturized systems could e.g. gain better separation performances, be faster, consume less expensive reagents and be used for studies that are difficult to access in the macro world. Disposable µTAS eliminate the risk of carry-over and can be fabricated to a low cost.</p><p>This work focused on the development of µTAS modules with the intentional use for miniaturized diagnostics. Modules for blood separation, desalting, enrichment, separation and ESI-MS detection were successfully fabricated. Surface coatings were additionally developed and evaluated for applications in µTAS with complex biological samples. The first heparin coating could be easily immobilized in a one-step-process, whereas the second heparin coating was aimed to form a hydrophilic surface that was able to draw blood or plasma samples into a microfluidic system by capillary forces. </p><p>The last mentioned heparin surface was further utilized when developing a chip-based sensor for performing CD4-count in human blood, an important marker to determine the stage of an HIV-infection.</p><p>All devices in this work were fabricated in PDMS, an elastomeric polymer with the advantage of rapid and less expensive prototyping of the microfabricated master. It was shown that PDMS could be considered as the material of choice for future commercial µTAS. The devices were intentionally produced using a low grade of fabrication complexity. It was however demonstrated that even with low complexity, it is possible to integrate several functional chip modules into a single microfluidic device.</p>

There is a strong trend in fabricating miniaturized total analytical systems, µTAS, for various biochemical and cell biology applications. These miniaturized systems could e.g. gain better separation performances, be faster, consume less expensive reagents and be used for studies that are difficult to access in the macro world. Disposable µTAS eliminate the risk of carry-over and can be fabricated to a low cost. This work focused on the development of µTAS modules with the intentional use for miniaturized diagnostics. Modules for blood separation, desalting, enrichment, separation and ESI-MS detection were successfully fabricated. Surface coatings were additionally developed and evaluated for applications in µTAS with complex biological samples. The first heparin coating could be easily immobilized in a one-step-process, whereas the second heparin coating was aimed to form a hydrophilic surface that was able to draw blood or plasma samples into a microfluidic system by capillary forces. The last mentioned heparin surface was further utilized when developing a chip-based sensor for performing CD4-count in human blood, an important marker to determine the stage of an HIV-infection. All devices in this work were fabricated in PDMS, an elastomeric polymer with the advantage of rapid and less expensive prototyping of the microfabricated master. It was shown that PDMS could be considered as the material of choice for future commercial µTAS. The devices were intentionally produced using a low grade of fabrication complexity. It was however demonstrated that even with low complexity, it is possible to integrate several functional chip modules into a single microfluidic device.

This thesis summarises work towards a Lab-on-Chip (LOC). The request for faster and more efficient chemical and biological analysis is the motivation behind the development of the LOC-concept. Microfluidic devices tend to become increasingly complex in order to include, e.g. sample delivery, manipulation, and detection, in one chip. The urge for smart and simple design of robust and low-cost microdevices is addressed and discussed. Design, fabrication and characterization of such microdevices have been demonstrated using low-cost polymer and glass microfabrication methods. The manufacturing is feasible, to a large extent, to perform outside the clean-room, and has subsequently been the chosen technique for most of the work. Issues of bonding reliability are solved by using polymer adhesive tapes. A planar electrocapture device with LOC-compatibility is demonstrated where beads are immobilised and released in a flowing stream. Retention of nanoparticles by means of electric field-flow fractionation using transparent indium tin oxide electrodes is presented. Moreover, a cast PDMS 4-way crossing is enabling a combination of liquid chromatography and capillary electrophoresis to enhance separation efficiency. Sample transport issues and a new flow-cell design in a quartz crystal microbalance bioanalyzer are also investigated. Fast bacteria counting by impedance measurements, much requested by the pharmaceutical industry for biomass monitoring, is carried out successfully. In conclusion, knowledge in micro system technology to build microdevices have been utilised to manipulate and characterise beads and cells, taking one step further towards viable Lab-on-Chip instruments.

Der Schwerpunkt dieser Arbeit liegt auf der Simulation, Entwicklung und Realisierung organischer Halbleiterbauelemente für Anwendungen im Bereich der Sensorik. Unter dem Gesichtspunkt der Fertigung sollen die organischen lichtemittierenden Dioden (OLEDs) und die organischen Photodioden (OPDs) einfach konzeptioniert sein. Je nach Bauelementetyp stehen für die Herstellung der organischen Schichten die Vakuumtechnologie oder lösungsmittelbasierte Prozesse zur Verfügung. Eine Besonderheit der Arbeit ist die Integration der OLEDs bzw. der OPDs auf Silizium-Substraten. Zudem wird die Integration von optischen Filtern für die OLEDs sowie die Etablierung einer Dünnschichtverkapselung für die OLEDs und OPDs gezeigt. Im ersten Teil der Arbeit wird anhand von Simulationen der Dünnschichtoptik erarbeitet, welche Möglichkeiten vorhanden sind, die Charakteristik der OLEDEmission bzw. die Absorptionseigenschaften der OPDs zu beeinflussen. Die Besonderheit der OLEDs für die Sensorikanwendungen liegt hierbei in der Licht-Emission mit geringen Halbwertsbreiten. Es wird anhand von Fluoreszenzmarkern (Rhodamin 6G und Nah-IR Alzheimer Farbstoff-4) und einem Chromoprotein (PAS-GAF-64) verdeutlicht, welche Möglichkeiten für die Sensorik durch die Anregung mit der OLED bestehen. Für die OPDs hingegen wird gezeigt, welche Möglichkeiten es für das Rodamin 6G gibt, mit dielektrischen Spiegeln die Absorptionseigenschaften so zu beeinflussen, dass die gewünschten spektralen Bereiche des Lichtes absorbiert bzw. reflektiert werden. Der zweite Teil widmet sich der Entwicklung der OLEDs anhand der Integrationsmöglichkeiten der dielektrischen Filter sowie deren Optimierung. Es wird am Beispiel des Rhodamin 6G gezeigt, dass für die OLED-Emission eine Halbwertsbreite von 18 nm beim Maximum von 530 nm hat. Durch die Verwendung von Entlastungsschichten zwischen OLED und dielektrischem Spiegel können die Kennwerte der OLED positiv beeinflusst werden und weiterhin werden das Temperaturverhalten der OLEDs sowie die Verspannungseigenschaften der dielektrischen Schichten betrachtet. Darüber hinaus steht im dritten Teil die Entwicklung der organischen Photodioden im Fokus. Hierbei wurden OPDs auf Glas- und Siliziumsubstraten gefertigt. Inhalt der Entwicklung auf Glassubstraten ist die Variation der absorbierenden Schicht und deren Einfluss auf die elektro-optischen Eigenschaften. Die Entwicklung der OPDs auf Siliziumsubstraten basiert auf der Integration sowie der Optimierung verschiedener Absorbersysteme, einer alternativen Anode und Kathode sowie der Integration einer Dünnschichtverkapselung. Im Ergebnis wurden OPDs entwickelt, die ohne Dünnschichtverkapselung einen Photonen-zu-Elektron-Umwandlungs-wirkungsgrad (IPCE) von ca. 37 % bei 550 nm haben. Der IPCE konnte zudem durch die Modifikation des Kathodenaufbaus um 4 % gesteigert werden. Die OPD-Bauelemente mit integrierter Dünnschichtverkapselung zeigen einen IPCE von ca. 33 % bei 550 nm. Weiterhin wurde die Methode der orthogonalen Photolithographie zur Strukturierung der OPDs verwendet und es erfolgte der Übertrag der OPD-Technologie auf 8-Zoll-Halbleitersubstrate. In diesem Zusammenhang sind zur Bewertung von Einflüssen, wie Wasser oder Sauerstoff, Untersuchungen zur Lebensdauer der OPDs durchgeführt worden. Die Kenntnis über den Einfluss der orthogonalen Photolithographie auf die Kennwerte der OPDs sowie der Einfluss der Dünnschichtverkapselung auf die Eigenschaften der OPDs und OLEDs sind essentiell für weitere Entwicklungen und zur Fertigung von Sensoranwendungen. / This work focuses on the simulation, development and implementation of organic semiconductor devices for applications in the field of sensor technology. From the viewpoint of manufacturing, organic light emitting diodes (OLEDs) as well as organic photodiodes (OPD) should be designed simply. Depending on the type of device vacuum technology or solvent-based processes are available for producing organic layer. A special feature of OLED- and OPD-devices is the integration on silicon substrates. In addition, the integration of optical filters for OLED-devices and the thin-film encapsulation of OLEDs and OPDs is shown. The first part of the work elaborates on simulations of thin film optics, describing options to control the characteristics of the OLED-emission or the absorption properties of the OPD. A special characteristic of OLEDs is the light emission with a small full with half maximum for sensor applications. By using of fluorescent markers Rhodamine 6G and near-IR dye Alzheimer-4 or the Chromoproteins (PAS-GAF-64) clarifies the possibilities for sensors by excitation with the OLED. In contrast, for the OPD is shown which solutions are available, to influence the absorption properties of Rhodamin 6G with dielectric mirrors so that desired spectral ranges of light are absorbed or reflected. The second part is dedicated to the development of OLEDs based on integration of dielectric filters and their optimization. It is shown by the example of Rhodamine 6G that the OLED emission represents a full with at half maximum of 18 nm at 530 nm. Furthermore, the temperature behavior of the OLEDs and the strain properties of the dielectric layers are considered. Organic photodiodes are in the focus of the third part of the development. These OPDs were made on glass and silicon substrates. The main objective of the development on glass substrates is the variation of the absorption layer and its influence to the electro-optical properties to increase the spectral sensitivity of the OPD. The development of OPD on silicon substrates deals with the integration and optimization of different absorber systems, an alternative anode and cathode as well as the integration of a thin-film encapsulation. As a result, the OPDs without a thin-film encapsulation have an incident photon-to-electron conversion efficiency (IPCE) of about 37 % at 550 nm. The IPCE was increased to 4 % by modifying the cathode structure. The OPD devices with integrated thin-film encapsulation showed an IPCE of about 33 % at 550 nm. Furthermore, the method of orthogonal photolithography was used to pattern the OPD and an upscaling of the OPD technology to 8-inch semiconductor substrates have been realized. In this context studies have been carried out to evaluate the influence of process and encapsulation to the lifetime of OPDs. The knowledge about the influence of the orthogonal photolithography to the characteristics of OPDs and the influence of the thin-film encapsulation on the properties of OPD and OLEDs is essential for further development and for the manufacturing of sensor applications.