For decades, advances in device scaling has proven to be critical in improving the performance and productivity of 2D systems. In this thesis, we explore how advances in technology have pushed functional integration to such a high-level that interconnection and packaging issues represent real barriers to further progress. While three-dimensional (3D) integration offers to be a potential contender to overcome the barriers of increased energy consumption due to interconnects and bandwidth limitations, there are certain challenges that must be overcome before systems can be successfully stacked. Cooling and power delivery are among these key challenges in the integration of high performance 3D ICs. To address these challenges, microchannel heat sinks for inter-stratum cooling and through-silicon vias (TSVs) for signaling and power delivery between stacked ICs were explored. Novel integration schemes to integrate these uidic and electrical interconnects in conventional CMOS processes were also explored. Compact physical modeling was utilized to understand the trade-offs involved in the integration of electrical and microfluidic interconnects in a 3D IC stack. These concepts were demonstrated experimentally by showing different CMOS compatible methods of fabricating microchannels and integration of high aspect ratio (~20:1) and high density (200,000/cm²) electrical TSVs in the fins of the microchannels for signaling and power delivery. A novel mesh process for bottom up plating of high aspect ratio TSVs is also shown in this work. Fluidic reliability measurements are shown to demonstrate the feasibility of this technology. This work also demonstrates the design and fabrication of a 3D testbed which consists of a 2 chip stack with microchannel cooling on each level. Preliminary testing of the stack along with interlayer electro-fluidic I/Os has also been demonstrated.

Numerical simulations of liquid flow in a micro-channel between two horizontal plates are performed. The channel is infinite in streamwise and spanwise directions and its height is taken as m, which falls within the dimension ranges of microchannels. The Navier-Stokes equations with the addition of Brinkman number (Br) to the energy equation are used as the governing equations and spectral methods based approach is applied to obtain the required accuracy to handle liquid flow in the microchannel. It is known for microchannels that Br combines the effects of conduction and viscous dissipation in liquids and is also a way of comparing the importance of latter relative to former. The present study aims to simulate the unusual behavior of decreasing of Nu with increasing Re in the laminar regime of microchannels and to show that Br can be introduced to explain this unexpected behavior. Consequently, it is seen at the end of the results that secondary effect of the Br is observed for the single-phase convective heat transfer. Therefore, a laminar flow of a liquid in a microchannel shows different characteristics compared to a similar flow in a macrochannel. To observe the differences, three different cases are run over each of a range of Reynolds numbers: one with no axial conduction assumption that corresponds to a case similar to macrochannel flow, another case with axial conduction included in the energy equation to simulate one of the main differences and lastly a case with the inclusion of Br number in the governing equations. A similar study is made for natural convection with the same numerical set-up for the same three cases. Formation of Rayleigh-Benard cells are observed for the critical numbers widely accepted in the literature. The results are compared with each other to see the effects of axial conduction and Br inclusion, in addition to Ra for natural convection.

Concern with global climate change has led to the interest in the use of natural refrigerants, such as carbon dioxide, as replacements in heat pump systems. When operating in a transcritical cycle, carbon dioxide heat pumps are well suited for use in high temperature water heating heat pumps. In this work, four systems are analyzed: with and without the use of a suction line heat exchanger, and two water heating schemes. These two schemes involve the heating of water to its desired temperature at a low water flow rate in a single pass through the heat pump, and the heating of water at a high water flow rate, but requiring multiple passes. The performance and resulting heat exchanger size of these four systems is analyzed through the development of an overall system model. This system model uses component-level models that were developed based upon heat exchanger geometry and subsequently validated through experimental testing on a test facility developed for this purpose.

Cette thèse traite principalement des connaissances fondamentales en hydrodynamique et des caractéristiques des réactions gaz-liquide dans des microréacteurs capillaires. Dans une première partie, nous avons effectué des essais dans trois microcanaux circulaires en verre placés horizontalement. Les diamètres étudiés étaient de 302, 496 et 916 µm. Les arrivées de gaz et de liquide se font de manière symétrique et forme un angle de 120° entre elles. Une cartographie des écoulements diphasiques gaz-liquide a été systématiquement faite pour des vitesses du liquide comprises entre 0,1 et. 2 m/s et des vitesses du gaz comprises entre 0,01 et 50 m/s Ces essais mettent en évidence l'influence du diamètre des canaux, de la viscosité du liquide et de leur tension superficielle. Ces mesures ont été comparées avec les cartes décrivant les différents régimes d'écoulement (à bulles, en bouchons de Taylor, annulaires ou sous forme de mousse) et confrontés aux modèles de la littérature qui prédisent les transitions entre les différents régimes. Nous avons mis en évidence que ces derniers n'étaient pas totalement satisfaisant et en conséquence, un nouveau modèle de transition prenant en compte les effets de taille du canal, les propriétés physiques du liquide a été proposé. Les pertes de charge engendrées par ces écoulements gaz- ont été étudiées. Nous avons constaté que la chute de pression est très dépendante du régime d'écoulement. Cependant pour décrire l'évolution de la perte de charge il est commode de la scinder en trois régions: une où les forces de tension superficielle sont le paramètre prépondérant et qui correspond aux faibles vitesses superficielle du gaz, une zone de transition et une dans laquelle les forces d'inertie sont dominantes et qui correspond aux grandes vitesses superficielles du gaz. La prédiction de cette chute de pression dans la troisième zone a été faite à partir d'un modèle de Lockhart-Martinelli. Ce modèle qui prend en compte les flux de chaque phase dépend d'un paramètre semi empirique C. Nous avons proposé de le corréler avec les nombres de Reynolds correspondant à chacune des deux phases en présence. Cette méthode permet de bien rendre compte de nos mesures. Les caractéristiques hydrodynamiques en écoulement de Taylor ont été examinées. Il a été montré que la formation des bulles dans un écoulement de Taylor est dominée par un mécanisme d'étranglement en entrée du capillaire. La taille des bulles dépend fortement de la viscosité du liquide et la tension superficielle. La chute de pression dans cette zone, lorsque le nombre capillaire est relativement faible, peut assez être bien décrite par le modèle de Kreutzer modifiée par Walsh et al… En fin dans une dernière partie, nous avons réalisé une réaction chimique en écoulement de Taylor. L'oxydation du 2-hydrogéne-ethyltetrahydroanthraquinone (THEAQH2) pour former du peroxyde d'hydrogène a été expérimentalement étudiée dans un microcanal circulaire horizontal de 900 µm de diamètre et 30 cm de long. La présence d'une réaction chimique ne modifie que très peu les transitions entre les différents régimes d'écoulement ni l'évolution des pertes de charge. Les cinétiques de conversion du peroxyde d'hydrogène sont environ deux fois plus rapides celles obtenues dans les réacteurs gaz liquide utilisés habituellement. Mots-clés: microcanal, écoulement diphasiques, écoulement de Taylor, pertes de charge, réaction gaz-liquide. / This dissertation mainly deals with the fundamental knowledge of hydrodynamics and reaction characteristics in gas-liquid microreactors. Extensive experimental investigations have been performed in horizontal circular microchannels with diameter from 302 µm to 916 µm. Gas-liquid two-phase flow patterns in the microchannel have been systematic experimental investigated, in which the influence of channel diameters, liquid viscosities and surface tension were considered. Flow pattern regime maps in the present microchannels were developed, and the comparison with existing regime maps and flow pattern transition models in literature implied that transitions in present work could not be well predicted. As a result, a new transition model taking the effects of channel size, liquid physical properties into account was proposed. The gas-liquid two-phase pressure drop characteristics in microchannels were studied. It has been found that the pressure drop was highly flow patterns dependent, and the main trend can be divided into three regions: surface tension-dominated region, transitional region and inertia-dominated region. The pressure drop characteristics in surface tension-dominated and inertia-dominated region were discussed respectively. A modified Lockhart-Martinelli separated flow model in which the effects of channel diameter and liquid properties on the C-value are taken into account was proposed, and it showed a good agreement with respect to our experimental data and others' reported in literature. Hydrodynamics characteristics of Taylor flow have been examined. It was shown that the formation of Taylor flow was dominated by squeezing mechanism, on which the effects of liquid viscosity and surface tension were dramatically. The two-phase pressure drop of Taylor flow could be well predicted with the Kreutzer's model modified by Walsh et al., when capillary number was relatively low. Oxidation of hydrogenated 2-ethyltetrahydroanthraquinone (THEAQH2) in a horizontal circular microchannel have been experimental investigated. Results of visualization study on oxygen-anthraquinone working solution two-phase flow in microchannel showed that the flow pattern transition model and pressure drop model for inertia-dominated region proposed in this dissertation had good predicting accuracy. It was indicated that the gas-liquid interfacial area and space-time yield of hydrogen peroxide in the microchannel are at least one to two orders of magnitude higher than those in the conventional gas-liquid reactors. Keywords: microchannel, two-phase flow pattern, pressure drop, gas-liquid reaction, Taylor flow..

A pesquisa realizada envolveu a avaliação experimental dos efeitos do fluido e da orientação do escoamento no desempenho de um dissipador de calor baseado na ebulição convectiva em microcanais. Estes dissipadores de calor são usados como uma nova aplicação para a refrigeração dos novos dispositivos eletrônicos que geram altas taxas de calor. Efetuou-se inicialmente uma extensa pesquisa bibliográfica sobre o escoamento monofásico e a ebulição convectiva em microcanais e em multi-microcanais através da qual levantou-se os principais métodos de previsão do coeficiente de transferência de calor e da perda de pressão. Então, utilizando o aparato experimental desenvolvido durante o mestrado de Do Nascimento (2012) avaliou-se a transferência de calor e perda de pressão de um dissipador de calor baseado em multi-microcanais paralelos. O dissipador de calor avaliado possui 50 microcanais retangulares dispostos paralelamente com 15 mm de comprimento, 100 µm de largura, 500 µm de altura e espaçados de 200 µm. Ensaios experimentais foram executados para o R245fa, fluido de baixa pressão utilizado em ciclos frigoríficos de baixa pressão, e R407C, fluido de alta pressão usado para conforto térmico, temperatura de saturação de 25 e 31°C, velocidades mássicas de 400 a 1500 kg/m²s, graus de subresfriamento do líquido de 5, 10 e 15°C, título de vapor máximo de até 0,38, fluxos de calor de até 350 kW/m², e para 3 orientações diferentes do dissipador de calor, horizontal, vertical com os canais alinhados horizontalmente e vertical com escoamento ascendente. Os resultados obtidos foram parametricamente analisados e comparados com métodos da literatura. Coeficientes de transferência de calor médios de até 35 kW/m² °C foram obtidos. Resultados adquiridos para o R245fa e R407C foram inferiores aos levantados por Do Nascimento (2012) para o R134a utilizando o mesmo dissipador. O fluido R407C apresentou frequências e amplitudes de oscilações inferiores aos fluidos R134a e R245fa. Nenhum método para o coeficiente de transferência de calor e perda de pressão proporcionou previsões satisfatórias dos dados experimentais. O modelo Homogêneo com viscosidade da mistura bifásica dada por Cicchitti et al. (1960) apresentou as melhores previsões da perda de pressão, já para o coeficiente de transferência de calor, os métodos de Bertsch et al. (2009) e Liu e Winterton (1991) apresentaram as melhores previsões. O dissipador com sua base posicionada horizontalmente fornece coeficientes de transferência de calor superiores enquanto sua base na vertical e escoamento ascendente verificam-se perdas de pressão inferiores. Imagens do escoamento bifásico foram obtidas com uma câmera de alta velocidade e analisadas. / This study presents an experimental investigation on the effect of the fluid and the footprint orientation on the performance of a heat spreader based on flow boiling inside micro-scale channels. This heat spreader is used in an electronics cooling application with high-power density. Initially an extensive investigation of the literature concerning single-phase and two-phase flow inside a single microchannels and multi-microchannels was performed. In this literature review the leading predictive methods for heat transfer coefficient and pressure drop are described. The experimental study was carried out in the apparatus developed by Do Nascimento (2012). The heat sink evaluated in the present study is comprised of fifty parallel rectangular microchannels with cross-sectional dimensions of 100 µm width and of 500 µm depth, and total length of 15 mm. The fins between consecutive microchannels are 200 µm thick. Experimental tests were performed for R245fa, low-pressure fluid used in low pressure refrigeration cycles, and R407C, high-pressure fluid used for heat comfort, saturation temperature of 25 and 31°C, mass velocities from 400 to 1500 kg/m² s, degrees of subcooling of the liquid of 5, 10 and 15°C, outlet vapor quality up to 0.38, heat fluxes up to 350 kW/m², and for the following footprint heat sink orientations: horizontal, vertical with the microchannels aligned horizontally and vertical with upward flow. The results were parametrically analyzed and compared again the predictive methods from literature. Average heat transfer coefficients up to 35 kW/m² °C were obtained. The results for R134a from Do Nascimento (2012) for the same heat sink presented heat transfer coefficients higher than R245fa and R407C. The fluid R407C presented oscillation of the temperature due to thermal instability effects with lower frequency and amplitude lower than R134a, and R245fa. None predictive method provided satisfactory heat transfer coefficient and pressure drop predictions of the experimental data. The Homogeneous model with the viscosity given by Cicchitti et al. (1960) provided the best pressure drop prediction while the heat transfer coefficient was best predicted by Bertsch et al. (2009) and Liu and Winterton (1991). The horizontal orientation of the footprint provided the highest heat transfer coefficients while the vertical footprint orientation with upward flow the lowest pressure drops. Images of the two-phase flow were obtained with a high-speed camera and analyzed.

A pesquisa realizada tratou do estudo da transferência de calor e do fluxo crítico durante a ebulição convectiva no interior de canais de diâmetro reduzidos a partir de dados levantados em bancadas experimentais construídas para esta finalidade. Extensa pesquisa bibliográfica foi efetuada e os principais métodos disponíveis para previsão de coeficiente de transferência de calor, fluxo crítico e mapas de escoamento foram levantados. Os resultados obtidos foram parametricamente analisados e comparados com os métodos da literatura. Pela primeira vez para microcanais, resultados experimentais foram levantados por um mesmo autor em laboratórios distintos buscando verificar a tendência e comportamentos. Tal comparação tem sua importância destacada em face das elevadas discrepâncias observadas na literatura quando resultados de autores distintos, obtidos em condições similares, são comparados. Os resultados levantados foram utilizados na elaboração de modelos que consideram os padrões de escoamento observados em microcanais. A incorporação dos padrões permitiu o desenvolvimento de modelos mecanísticos para coeficiente de transferência de calor, fluxo crítico e critérios para a caracterização da transição entre macro e microcanais baseados na formação do padrão de escoamento estratificado e na simetria do filme líquido no escoamento anular. / This research comprises an experimental and theoretical study on flow boiling heat transfer and critical heat flux inside small diameter tubes based on data obtained in experimental facilities specially designed for this purpose. A broad literature review was carried out and the main methods to predict the heat transfer coefficient, critical heat flux and flow patterns were pointed out. The experimental results were parametrically analyzed and compared against the predictive methods from literature. For the first time, microchannels experimental results obtained by an unique researcher in distinct laboratories were compared and a reasonable agreement was observed. The importance of such a comparison is high-lighted for flow boiling inside microchannels due to the high discrepancies ob-served when results from independent laboratories obtained under similar experimental conditions are compared. Moreover, the experimental results obtained in the present study were used to develop correlations and models for the heat transfer coefficient and heat flux that takes into account the flow patterns observed in microchannels. The heat transfer coefficient and critical heat flux models were developed based on mechanistic approach. In addition, criteria to characterize macro to microchannel transition were proposed based in the occurrence of the stratified flow pattern and the liquid film symmetry under annular flow conditions.

Water droplets tend to bead up on rough or textured hydrophobic surfaces by trapping air on the crevices underneath resulting in “Cassie” state of wetting. When a textured hydrophobic surface is immersed in water, the resulting underwater “Cassie” state can lead to significant drag reduction. The entrapped air pockets act as shear free regions and the composite interface consisting of alternate no slip and no shear regions thus formed can deliver substantial drag reduction during flow. The magnitude of drag reduction depends not only on the fractional coverage of air on the surface, but also on the size of the air pockets, with larger sized air pockets facilitating larger drag reduction. It is a common observance that Lotus leaf when kept immersed in water for a few minutes loses its water repellency due to the loss of entrapped air on the surface. Underwater Cassie state on textured hydrophobic surfaces is also not sustainable because of the depletion of air pockets caused by the diffusion of trapped air into water. This causes the drag reduction to diminish with time. Rate of diffusion of air across the water–air interface depends on the concentration gradient of air across the interface. Under flow conditions, removal of entrapped air is further enhanced by convection, leading to more rapid shrinkage of the air pockets. In order to sustain the Cassie state, it is thus necessary to continuously supply air to these air pockets. In this work, we explore the possibility of supplying air to the cavities on the textured surface inside a microchannel by controlling the solubility of air in water close to the surface. The solubility is varied by i) Controlling the absolute pressure inside the channel and ii) Localized heating of the surface To trap uniform air pockets, a textured surface containing a regular array of blind holes is used. The textured surface is generated by photo etching of brass and is rendered hydrophobic through a self-assembled monolayer. The sustainability of the underwater Cassie state of wetting on the surface is studied at various flow conditions. The air trapped on the textured surface is visualized using total internal reflection based technique, with the pressure drop (or drag) being simultaneously measured. Water which is initially saturated with air at atmospheric conditions, when subjected to sub-atmospheric pressures within the channel becomes supersaturated causing the air bubbles to grow in size. Further growth causes the bubbles to merge and eventually detach from the surface. The growth and subsequent merging of the air bubbles leads to a substantial increase in the pressure drop because as the air pockets grow in size, they project into the flow and start obstructing the flow. On the other hand, a pressure above the atmospheric pressure within the channel makes the water undersaturated with air, leading to gradual shrinkage and eventual disappearance of air bubbles. In this case, the air bubbles do cause reduction in the pressure drop with the minimum pressure drop (or maximum drag reduction) occurring when the bubbles are flush with the surface. The rate of growth or decay of air bubbles is found to be significantly dependent on the absolute pressure in the channel. Hence by carefully controlling the absolute pressure, the Cassie state of wetting can be sustained for extended periods of time. A drag reduction of up to 15% was achieved and sustained for a period of over 5 hours. Temperature of water also influences the solubility of air in water with higher temperatures resulting in reduced solubility. Thus locally heating the textured hydrophobic surface causes the air bubbles to grow, with the rate of growth being dependent on the heat input. The effect of trapped air bubbles on thermal transport is also determined by measuring the heat transfer rate through the surface in the presence and absence of trapped air bubbles. Even though the trapped air bubbles do cause a reduction in the heat transfer coefficient by about 10%, a large pressure drop reduction of up to 15% obtained during the experiments helps in circumventing this disadvantage. Hence for the same pressure drop across the channel, the textured hydrophobic surface helps to augment the heat transfer rate. The experiments show that, by varying the solubility of air in water either by controlling the pressure or by local heating, underwater Cassie state of wetting can be sustained on textured hydrophobic surfaces, thus delivering up to 15% drag reduction in both cases for extended periods of time. The results obtained hold important implications towards achieving sustained drag reduction in microfluidic applications.

This study focuses on the investigation of flow behavior at low Reynolds numbers by the experimental and numerical performance testing of micro-channel heat exchangers. An experimental study of the heat transfers and pressure drop of compact heat exchangers with louvered fins and flat tubes was conducted within a low air-side Reynolds number range of 20 < ReLp < 225. Using an existing low-speed wind tunnel, 26 sample heat exchangers of corrugated louver fin type, were tested. New correlations for Colburn j and Fanning friction f factor have been developed in terms of non-dimensional parameters. Within the investigated parameter ranges, it seems that both the j and f factors are better represented by two correlations in two flow regimes (one for ReLp = 20 – 80 and one for ReLp = 80 – 200) than a single regime correlation in the power-law format. The results support the conclusion that airflow and heat transfer at very low Reynolds numbers behaves differently from that at higher Reynolds numbers. The effect of the geometrical parameters on the heat exchanger performance was investigated. The numerical investigation was conducted for further understanding of the flow behavior at the range of experimentally tested Reynolds number. Ten different heat exchanger geometries with varied geometrical parameters obtained for the experimental studies were considered for the numerical investigation. The variations in the louver angle were the basis of the selection. The heat transfer and pressure drop performance was numerically investigated and the effect of the geometrical parameters was evaluated. Numerical results were compared against the experimental results. From the comparison, it is found that the current numerical viscous laminar models do not reflect experimentally observed transitional two regime flow behavior from fin directed to the louver directed at very low Reynolds number ranging from 20 to 200. The flow distribution through the fin and the louver region was quantified in terms of flow efficiency. The flow regime change was observed at very low Reynolds number similar to the experimental observations. However, the effect of two regime flow change does not reflect on the thermal hydraulic performance of numerical models. New correlations for the flow efficiency � have developed in terms of non-dimensional parameters.

The goal of submitted thesis is to perform a computer simulation of bubble creation in T-channel. In the first section of the paper, the theoretical applications of microfluidic bubble, micromachines and droplet formation are described. In the second part of the text, author uses cross flowing method for simulation od bubble creation. Furthermore, several settings in computer simulation software Fluent are mentioned. In addition, the influence of velocity at the T-channel inlet on surface tension and on bubble length is presented.

Le sujet de cette thèse est l'hydrodynamique de corps minces (feuilles) et élancés (filamenteux) de fluide visqueux immergés dans un second fluide ayant une viscosité différente. Nous nous concentrons sur deux exemples : la subduction de la lithosphère océanique et le flambage de fils visqueux dans microcanaux divergents, les deux ont un nombre de Reynolds caractéristique Re<<1. Pour le cas de la subduction d'une feuille mince, nous proposons une hybride méthode «boundary integral & thin sheet» (BITS). Après la validation en comparant ses prévisions avec celles de la boundary-element méthode, deux solutions instantanées et dépendant du temps sont effectués pour analyser la subduction avec la méthode BITS. L'analyse à l'échelle de la vitesse d'immersion normalisée en fonction de «la rigidité en flexion» de la feuille est confirmée par nos prédictions numériques. Pour des rapports de viscosité modérée (≈100), la feuille amincit sensiblement quand elle coule, mais pas assez pour conduire à la «rupture de la dalle» que l'on observe dans plusieurs zones de subduction sur Terre. Ensuite, le code BLEU parallèle pour écoulements polyphasiques est utilisé à simuler pliage visqueux tridimensionnel dans des microcanaux divergent. Nous avons réalisé une étude paramétrique comprenant cinq simulations dans lequel le rapport de débit volumétrique, le rapport de viscosité, le nombre de Reynolds, et la forme de la chaîne ont été modifiées par rapport à un modèle de référence. Le fil devient instable à une instabilité de pliage en raison de la contrainte de compression longitudinale. L'axe de pliage initial peut être parallèle ou perpendiculaire à la dimension étroite de la chambre. Dans le premier cas, le pliage transforme lentement au pliage perpendiculaire au moyen d'une torsion, ou peut disparaître totalement. / The hydrodynamics of thin (sheet-like) and slender (filamentary) bodies of viscous fluid immersed in a second fluid with a different viscosity is studied. Here we focuses on two examples: the subduction of oceanic lithosphere and the buckling of viscous threads in diverging microchannels, both have a characteristic Reynolds number Re<<1. A hybrid boundary integral & thin sheet method (BITS) is build for the subduction of 2D immersed sheet. After the validation by comparing with the results of full boundary elements method, both instantaneous and time-dependant soloutions are done to analyze the subduction with the BITS method. The scaling analysis of the normalized sinking speed V/V_Stokes as a function of the sheet's 'flexural stiffness' is confirmed by our numerical predictions. For moderate viscosity ratios (≈100), the sheet thins substantially as it sinks, but not enough to lead to the ‘slab breakoff’ that is observed in several subduction zones on Earth. Next, the parallel code BLUE for multi-phases flows is used to simulate the 3-dimensional viscous folding in diverging microchannels. We performed a parameter study comprising five simulations in which the flow rate ratio, the viscosity ratio, the Reynolds number, and the shape of the channel were varied relative to a reference model. The thread becomes unstable to a folding instability due to the longitudinal compressive stress. The initial folding axis can be either parallel or perpendicular to the narrow dimension of the chamber. In the former case, the folding slowly transforms via twisting to perpendicular folding , or may disappear totally.