This dissertation presents work involving the manufacture and analytic modeling of microcantilever parts (length-width-thickness of roughly 500-100-10 microns). The manufacturing goals were to devise a means for and demonstrate repeatable production of microcantilevers from techniques not used in the integrated-circuit field, which are the exclusive means of current microcantilever production. The production of microcantilevers was achieved via a solvent casting approach and with injection molding, which produced parts from various thermoplastic polymeric materials (amorphous, semi-crystalline, fiber- and nanoclay-filled) in a repeatable fashion. Limits of the injection molding process in terms of the thinnest cantilevers possible were examined with 2 microns being the lower bound. Subsets of the injection-molded parts were used in a variety of sensing applications, some results were successful (e.g., vapor-phase, resonance- and deflection-based sensing), while others showed poor results, likely due to experimental shortcomings (e.g., fluid-phase, deflection-based sensing). Additionally, microcantilever parts with integrated tips were injection-molded and showed to function at the same level as commercial, tipped, silicon-nitride parts when imaging an optical grating; this experimental work was the first demonstration of injection-molded parts for chemical sensing and force spectroscopy. The scientific results were (i) the derivation of a length scale dependent bending stiffness and experimental evidence showing that such an effect was observed, (ii) the development of a new microcantilever experimental mode (surface stress monitoring via microcantilever bending resonant frequencies) and experimental validation of the technique, and (iii) a new method for determining microcantilever geometry based upon measurement of a bending, lateral, and torsional mode and experimental validation of the procedure.

This research contributes to worldwide efforts to miniaturize one of the most powerful and versatile analytical tools, gas chromatography (GC). If a rapid, sensitive and selective hand-held GC system is realized, it would have a wide range of applications in many industries and research areas. As a part of developing a hand-held GC system, this research focuses on the separation column, which is the most important component of a GC system. This thesis describes the development of a miniature separation column that has low thermal mass and an embedded heating element for rapid thermal cycling. The worlds first thin polymer film (parylene) GC column has been successfully developed. This thesis includes: first, a study of theoretical column performance of rectangular GC column; second, the design optimization of parylene column and embedded heating element; third, the development of new processes such as parylene micromolding and stationary phase coating technique for parylene column; fourth, the fabrication of parylene GC column with an embedded heating element; and lastly, the testing and evaluation of parylene GC column through GC analysis.

This dissertation reports, for the first time, on the electrical coupling of microelectromechanical (MEM) resonators for high order bandpass filter synthesis. Electrical coupling of MEM resonators has a strong potential for extension of the operating frequency of MEM bandpass filters into the ultra high frequency (UHF) range and provides higher tunability and design flexibility compared to the mechanical coupling approach. Various schemes of electrical coupling are presented in this dissertation. Electromechanical models of clamped-clamped beam resonators, and various types of electrically coupled filters are presented. Lower frequency prototypes of electrically coupled filters with operating frequencies in the hundreds of kHz are implemented using micromechanical single crystal silicon clamped-clamped beam resonators. Measurement results are in good agreement with the developed electrical equivalent models of the filters. It is demonstrated that the characteristics of electrically coupled filters can be widely tuned by changing the DC polarization voltages.

The development of microscale and nanoscale devices has outpaced the development of metrology tools necessary for their complete characterization. In the area of thermal MEMS technology, accurate measurements across a broad range of temperatures with high spatial resolution are not trivial. Thermal MEMS are devices in which the control and manipulation of temperature is necessary to perform a desired function, and are used in actuation, chemical sensing, nanolithography, thermal data storage, biological reactions and power generation. In order to properly design for reliability and performance issues amongst these devices and verify modeling accuracy, the temperature distribution under device operating conditions must be experimentally determined. Raman spectroscopy provides absolute temperature measurements with spatial scales below 1 micron, which is sufficient for most MEMS devices. In this work, a detailed study of Raman spectroscopy as an optical thermal metrology tool was performed. It is shown that a calibration of the Stokes shift with temperature yields a linear calibration for measurements up to 1000?n polysilicon. These coefficients were determined for polysilicon processed under various conditions (575-620?B and P doping) to assess the effects of microstructural variations on Raman spectra. The Stokes peak was also shown to shift linearly with an applied pure bending stress. In order to make stress-independent thermometry measurements, the ratio of the Stokes to anti-Stokes signal intensities and the Stokes linewidth were calibrated over the same temperature range. Using the calibration data, Raman spectroscopy was implemented for the evaluation of temperature of thermal MEMS. Heated AFM cantilevers and micro-beam heaters were chosen due to their wide range of applications. Different thermal and mechanical boundary conditions were considered by studying both the beams and cantilevers, resulting in varying levels of thermal stress. By using the three calibrations in a complementary fashion, the validity of Raman thermometry was explored. Device temperatures of up to 650?nd their corresponding uncertainties were found, and used to verify FEA modeling. Effects of thermally induced stresses were taken into account and analyzed. Possible uncertainties such as laser heating, spatial and spectral resolution, light collection efficiency, measurement uncertainty, and instrumental drift were reported and elucidated.

This thesis reports on the design and fabrication of micro-electro-mechanical (MEM) resonators on silicon that are piezoelectrically-transduced for operation in the very high frequency (VHF) range. These devices have a block-type or beam-type design, and are designed to resonate in their in-plane and out-of-plane bulk extensional modes. Two piezoelectric materials were taken into consideration, zinc-oxide (ZnO) and lead-zirconate-titanate (PZT). The resonators are fabricated on silicon-on-insulator (SOI) wafers and the metal/piezo/metal stack of layers forming the device is built and patterned on the device layer silicon via photolithography techniques, RF sputtering (for the piezo-layer) and electron-beam evaporation (for the metal layers). The designing aspect involved ANSYS simulations of the mode-shapes and estimation of frequencies, and these have correlated well with experimental results. Devices with RF sputtered ZnO were successfully fabricated and tested to give high quality factors at reasonably high frequencies. A gold ground plane was implemented to reduce the feed-through level and increase the signal-to-noise ratio. Extensive characterization of PZT was also done as a replacement for ZnO, as the former material has a much higher piezoelectric coefficient (~20X that of ZnO) and can therefore extend the operation of these MEM resonators into the UHF range. Although the basic design of the device remains the same, incorporation of PZT complicates the process flow considerably with respect to the chemistry now involved with the patterning of different layers. The frequency response for ZnO-based resonators as well as all the characterization data for PZT has been reported.

This thesis reports the characterization and development of nanolithography using Electron Beam Lithography system and nanoscale plasma etching. The standard Bosch process and a modified three-pulse Bosch process were developed in STS ICP and Plasma ICP system separately. The limit of the Bosch process at the nanoscale regime was investigated and documented. Furthermore, the effect of different control parameters on the process were studied and summarized in this report. 28nm-wide trench with aspect-ratio of 25 (smallest trench), and 50nm-wide trench with aspect ratio of 37 (highest aspect-ratio) have been demonstrated using the modified three-pulse process. Capacitive resonators, SiBAR and IBAR devices have been fabricated using the process developed in this work. IBARs (15MHz) with ultra-high Q (210,000) have been reported.

The objective of the proposed research is to use MEMS technology to develop low profile power inductors with minimized eddy current losses to be used in high power density compact switching converters. Eddy currents arise in high-flux density metallic cores as increased switching frequencies of DC-DC converters cause the skin depth to be small compared with the core thickness. Laminations can reduce the eddy current losses but converters operating with switching frequencies in the MHz regime may require submicron laminations. Previous research has been done to fabricate inductors with micron-scale laminated cores for high frequency switching converters. To optimize the previous fabrication technique, an automated electroplating system was developed for the fabrication of thick magnetic cores comprising large number of submicron laminations without human intervention. Inductors with higher inductance, quality factor and power handling capacity have been realized compared to previously developed inductors. The inductors are characterized in terms of saturation behavior and power handling capability. A miniaturized DC-DC converter with power conversion capacity of 10 Watts has been demonstrated using the fabricated inductor.

This thesis reports the development and analysis of high performance CMOS readout electronics for increasing the performance of MEMS gyroscopes developed at Middle East Technical University (METU). These readout electronics are based on unity gain buffers implemented with source followers. High impedance node biasing problem present in capacitive interfaces is solved with the implementation of a transistor operating in the subthreshold region. A generalized fully differential gyroscope model with force feedback electrodes has been developed in order to simulate the capacitive interfaces with the model of the gyroscope. This model is simplified for the single ended gyroscopes fabricated at METU, and simulations of resonance characteristics are done. Three gyroscope interfaces are designed by considering the problems faced in previous interface architectures. The first design is implemented using a single ended source follower biased with a subthreshold transistor. From the simulations, it is observed that biasing impedances up to several gigaohms can be achieved. The second design is the fully differential version of the first design with the addition of a self biasing scheme. In another interface, the second design is modified with an instrumentation amplifier which is used for fully differential to single ended conversion. All of these interfaces are fabricated in a standard 0.6 &micro / m CMOS process. Fabricated interfaces are characterized by measuring their ac responses, noise response and transient characteristics for a sinusoidal input. It is observed that, biasing impedances up to 60 gigaohms can be obtained with subthreshold transistors. Self biasing architecture eliminates the need for biasing the source of the subthreshold transistor to set the output dc point to 0 V. Single ended SOG gyroscopes are characterized with the single ended capacitive interfaces, and a 45 dB gain improvement is observed with the addition of capacitive interface to the drive mode. Minimum resolvable capacitance change and displacement that can be measured are found to be 58.31 zF and 38.87 Fermi, respectively. The scale factor of the gyroscope is found to be 1.97 mV/(&deg / /sec) with a nonlinearity of only 0.001% in &plusmn / 100 &deg / /sec measurement range. The bias instability and angle random walk of the gyroscope are determined using Allan variance method as 2.158 &deg / /&amp / #8730 / hr and 124.7 &deg / /hr, respectively.

Single molecule force spectroscopy is an important technique to determine the interaction forces between biomolecules. Atomic force microscopy (AFM) is one of the tools used for this purpose. So far, AFMs usually use cantilevers as the force sensors and piezoelectrics as the actuators which may have some drawbacks in terms of speed and noise. In this research, a micromachined membrane actuator was used in two important types of experiments, namely the single molecule pulling and force-clamp based force spectroscopy. These two methods permit a more direct way of probing the forces of biomolecules, giving a detailed insight into binding potentials, and allowing the detection of discrete unbinding forces. To improve the quality of the experiments there is a need for high force resolution, high time resolution and increase in the throughput. This research focuses on using the combination of AFM and membrane based probe structures that have electrostatic actuation capability. The membrane actuators are characterized for range, dynamics, and noise to illustrate their adequacy for these experiments and to show that the complexity they introduce does not affect the noise level in the system. The control system described in this thesis utilizes the novel membrane actuator structures and integrates it into the current AFM setup. This is a very useful tool which can be implemented on any AFM without changing its mechanical architecture. To perform an experiment, all that is needed is to place the membrane actuator on the AFM stage, under the imagining head, and run the control system, which was implemented using LabVIEW. The system allows the user to maintain a precise and continuous control of the force. This was demonstrated by performing a life time experiment using biomolecules. Moreover, by slightly modifying the control scheme, the system allows us to linearize the membrane motion, which is inherently non-linear. The feasibility of using this control system for a variety of loading rate experiments are also demonstrated.

Low-loss off-chip interconnects are required for energy-efficient communication in dense microprocessors. To meet these needs, air cavity parallel plate and microstrip lines with copper conductors were fabricated on an FR-4 epoxy-fiberglass substrate using conventional microelectronics manufacturing techniques. Copper transmission lines were separated by a composite dielectric of air and Avatrel 2000P and by a dielectric layer of air only. The composite dielectric lines were characterized to 10 GHz while the all air dielectric lines were characterized to 40 GHz. The transmission line structures showed loss as low 1.5 dB/cm at 40 GHz with an effective dielectric constant below 1.4. These novel structures show low loss in the dielectric due to the reduced relative permittivity and loss tangent introduced by the air cavity. Transmission line structures with a composite dielectric were built by coating the sacrificial polymer poly(propylene carbonate) (PPC) over a copper signal line, encapsulating with an overcoat polymer, electroplating a ground line, and decomposing PPC to form an air cavity. The signal and ground wires were separated by a layer of 15 µm of air and 20 µm of Avatrel 2000P. Air cavity formation reduced dielectric constant more than 30 percent and loss of less than 0.5 dB/cm was measured at 10 GHz. Residue from PPC decomposition was observed in the cavity of composite dielectric structures and the decomposition characteristics of PPC were evaluated to characterize the residue and understand its formation. Analysis of PPC decomposition based on molecular weight, molecular backbone structure, photoacid concentration and vapor pressure, casting solvent, and decomposition environment was performed using thermogravimetric analysis and extracting kinetic parameters. Novel interaction of copper and PPC was observed and characterized for the self-patterning of PPC on copper. Copper is dissolved from the surface during PPC spincoating and interacts with the polymer chains to improve stability. The improved thermal stability allows selective patterning of PPC on copper. Decomposition characteristics, residual metals analysis, and diffusion profile were analyzed. The unique interaction could simplify air-gap processing for transmission lines. Inorganic-organic hybrid polymers were characterized for use as overcoat materials. Curing characteristics of the monomers and mechanical properties of the polymer films were analyzed and compared with commercially available overcoat materials. The modulus and hardness of these polymers was too low for use as an air-gap overcoat, but may be valuable as a barrier layer for some applications. The knowledge gained from building transmission line structures with a composite dielectric, analyzing PPC decomposition, interaction with copper, and comparison of hybrid polymers with commercial overcoats was used to build air-gap structures with improved electrical design. The ground metal was separated from the signal only by air. The signal wire was supported from above using 60 µm of Avatrel 8000P as an overcoat. Structures showed loss of less than 1.5 dB/cm at 40 GHz, the lowest reported value for a fully encapsulated transmission line structure.