As CMOS device sizes shrink, the channel electric field becomes higher and the hot carrier (HC) effect becomes more significant. When the oxide is scaled down to less than 3 nm, gate oxide breakdown (BD) often takes place. As a result, oxide trapping and interface generation cause long term performance drift and related reliability problems in devices and circuits. The RF front-end circuits include low noise amplifier (LNA), local oscillator (LO) and mixer. It is desirable for a LNA to achieve high gain with low noise figure, a LO to generate low noise signal with sufficient output power, wide tuning range, and high stability, and a mixer to up-convert or down-convert the signal with good linearity. However, the RF front-end circuit performance is very sensitive to the variation of device parameters. The experimental results show that device performance is degraded significantly subject to HC stress and BD. Therefore, RF front-end performance is degraded by HC and BD effects. With scaling and increasing chip power dissipation, operating temperatures for device have also been increasing. Another reliability concern, which is the negative bias temperature instability (NBTI) caused by the interface traps under high temperature and negative gate voltage bias, arises when the operation temperature of devices increases. NBTI has received much attention in recent year and it is found that NIT is present for all stress conditions and NOT is found to occur at high VG. Therefore, the probability of BD in pMOSFET increases with temperature since trapped charges during the NBTI process increase, thus resulting in percolation, a main cause of oxide degradation. The above effects can cause significant degradations in transistors, thus leading to the shifts of RF performance. This dissertation focuses on the following aspects: (1) RF performance degradation in nMOSFET and pMOSFET due to hot carrier and soft breakdown effects are examined experimentally and will be used for circuit application in the future. (2) A modeling method to analyze the gate oxide breakdown effects on RF nMOSFET has been proposed. The device performance drifts due to gate oxide breakdown are examined, breakdown spot resistance and total gate capacitance are extracted before and after stress for 0.16 um CMOS technology. (3) LC voltage controlled oscillator (VCO) performance degradation due to gate oxide breakdown effect is evaluated. (4) NBTI, HCI and BD combined effects on RF performance degradation are investigated. A physical picture illustrating the NBTI induced BD process is presented. A model to evaluate the time-to-failure (TTF) during NBTI is developed. DCIV method is used to extract the densities of NIT and NOT. Measurements show that there is direct correlation between the steplike increase in the gate current and the oxide-trapped charge (NOT). However, Breakdown has nothing to do with interface traps (NIT). (5) It is found that the degradation due to NSH stress is more severe than that of NS stress at high temperature. A model aiming to evaluate the stress-induced degradation is also developed.

Nanoscale p-channel transistors under negative gate bias at an elevated temperature show threshold voltage degradation after a short period of stress time. In addition, nanoscale (45 nm) n-channel transistors using high-k (HfO2) dielectrics to reduce gate leakage power for advanced microprocessors exhibit fast transient charge trapping effect leading to threshold voltage instability and mobility reduction. A simulation methodology to quantify the circuit level degradation subjected to negative bias temperature instability (NBTI) and fast transient charge trapping effect has been developed in this thesis work. Different current mirror and two-stage operation amplifier structures are studied to evaluate the impact of NBTI on CMOS analog circuit performances for nanoscale applications. Fundamental digital circuit such as an eleven-stage ring oscillator has also been evaluated to examine the fast transient charge transient effect of HfO2 high-k transistors on the propagation delay of ring oscillator performance. The preliminary results show that the negative bias temperature instability reduces the bandwidth of CMOS operating amplifiers, but increases the amplifier's voltage gain at mid-frequency range. The transient charge trapping effect increases the propagation delay of ring oscillator. The evaluation methodology developed in this thesis could be extended to study other CMOS device and circuit reliability issues subjected to electrical and temperature stresses.

No description available.

Ce travail constitue une contribution à l’étude de la synergie entre le vieillissement accéléré et l’évolution de la robustesse aux évènements singuliers pour les technologies MOS avancées. Ce manuscrit expose le travail fait autour de la Caractérisations des mécanismes de dégradation NBTI, HCI, TDDB et Electromigration sur les structures de tests conçues dans le véhicule de test NANOSPACE en technologie CMOS LP 65 nm. Il décrit aussi l’évaluation de la robustesse face aux évènements singuliers après un vieillissement de type NBTI sur les chaines de portes logiques (inverseurs, NOR, bascules D). Cette dernière partie nous a permis de démontrer que le vieillissement de type NBTI améliore la robustesse face aux SET dans ce cas d’étude. / This work is a contribution to the study of the synergy between accelerated aging and the evolution of robustness to single event effects for advanced MOS technologies.This manuscript describes the work done around the characterization of degradation mechanisms NBTI, HCI, TDDB and Electromigration on test structures designed in the NANOSPACE test vehicle on CMOS 65 nm Low Power technology. It also describes the evaluation of the robustness to Single Events Effects after NBTI aging on chains of logic gates (inverters, NOR, D flip-flops). This last part allows to show that the NBTI aging improves the robustness to SET in this case of study.

Actuellement, les circuits numériques nécessitent d'être de plus en plus performants. Aussi, les produits doivent être conçus le plus rapidement possible afin de gagner les précieuses parts de marché. Les méthodes rapides de conception et l'utilisation de MPSoC ont permis de satisfaire à ces exigences, mais sans tenir compte précisément de l'impact du vieillissement des circuits sur la conception. Or les MPSoC utilisent les technologies de fabrication les plus récentes et sont de plus en plus soumis aux défaillances matérielles. De nos jours, les principaux mécanismes de défaillance observés dans les transistors des MPSoC sont le HCI et le NBTI. Des marges sont alors ajoutées pour que le circuit soit fonctionnel pendant son utilisation, en considérant le cas le plus défavorable pour chaque mécanisme. Ces marges deviennent de plus en plus importantes et diminuent les performances attendues. C'est pourquoi les futures méthodes de conception nécessitent de tenir compte des dégradations matérielles en fonction de l’utilisation du circuit. Dans cette thèse, nous proposons une méthode originale pour simuler le vieillissement des MPSoC à haut niveau d'abstraction. Cette méthode s'applique lors de la conception du système c.-à-d. entre l'étape de définition des spécifications et la mise en production. Un modèle empirique permet d'estimer les dégradations temporelles en fin de vie d'un circuit. Un exemple d'application est donné pour un processeur embarqué et les résultats pour un ensemble d'applications sont reportés. La solution proposée permet d'explorer différentes configurations d'une architecture MPSoC pour comparer le vieillissement. Aussi, l'application la plus sévère pour le vieillissement peut être identifiée. / Nowadays, more and more performance is expected from digital circuits. What’s more, the market requires fast conception methods, in order to propose the newest technology available. Fast conception methods and the utilization of MPSoC have enabled high performance and short time-to-market while taking little attention to aging. However, MPSoC are more and more prone to hardware failures that occur in transistors. Today, the prevailing failure mechanisms in MPSoC are HCI and NBTI. Margins are usually added on new products to avoid failures during execution, by considering worst case scenario for each mechanism. For the newest technology, margins are becoming more and more important and products performance is getting lower and lower. That’s why the conception needs to take into account hardware failures according to the execution of software. This thesis propose a new methodology to simulate aging at high level of abstraction, which can be applied to MPSoC. The method can be applied during product conception, between the specification phase and the production. An empirical model is used to estimate slack time at circuit's end of life. A use case is conducted on an embedded processor and degradation results are reported for a set of applications. The solution enables architecture exploration and MPSoC aging can thus be compared. The software with most severe impact on aging can also be determined.

No description available.

The nano-age has already begun, where typical feature dimensions are smaller than 100nm. The operating frequency is expected to increase up to 12 GHz, and a single chip will contain over 12 billion transistors in 2020, as given by the International Technology Roadmap for Semiconductors (ITRS) initiative. ITRS also predicts that the scaling of CMOS devices and process technology, as it is known today, will become much more difficult as the industry advances towards the 16nm technology node and further. This aggressive scaling of CMOS technology has pushed the devices to their physical limits. Design goals are governed by several factors other than power, performance and area such as process variations, radiation induced soft errors, and aging degradation mechanisms. These new design challenges have a strong impact on the parametric yield of nanometer digital circuits and also result in functional yield losses in variation-sensitive digital circuits such as Static Random Access Memory (SRAM) and flip-flops. Moreover, sub-threshold SRAM and flip-flops circuits, which are aggravated by the strong demand for lower power consumption, show larger sensitivity to these challenges which reduces their robustness and yield. Accordingly, it is not surprising that the ITRS considers variability and reliability as the most challenging obstacles for nanometer digital circuits robust design. Soft errors are considered one of the main reliability and robustness concerns in SRAM arrays in sub-100nm technologies due to low operating voltage, small node capacitance, and high packing density. The SRAM arrays soft errors immunity is also affected by process variations. We develop statistical design-oriented soft errors immunity variations models for super-threshold and sub-threshold SRAM cells accounting for die-to-die variations and within-die variations. This work provides new design insights and highlights the important design knobs that can be used to reduce the SRAM cells soft errors immunity variations. The developed models are scalable, bias dependent, and only require the knowledge of easily measurable parameters. This makes them useful in early design exploration, circuit optimization as well as technology prediction. The derived models are verified using Monte Carlo SPICE simulations, referring to an industrial hardware-calibrated 65nm CMOS technology. The demand for higher performance leads to very deep pipelining which means that hundreds of thousands of flip-flops are required to control the data flow under strict timing constraints. A violation of the timing constraints at a flip-flop can result in latching incorrect data causing the overall system to malfunction. In addition, the flip-flops power dissipation represents a considerable fraction of the total power dissipation. Sub-threshold flip-flops are considered the most energy efficient solution for low power applications in which, performance is of secondary importance. Accordingly, statistical gate sizing is conducted to different flip-flops topologies for timing yield improvement of super-threshold flip-flops and power yield improvement of sub-threshold flip-flops. Following that, a comparative analysis between these flip-flops topologies considering the required overhead for yield improvement is performed. This comparative analysis provides useful recommendations that help flip-flops designers on selecting the best flip-flops topology that satisfies their system specifications while taking the process variations impact and robustness requirements into account. Adaptive Body Bias (ABB) allows the tuning of the transistor threshold voltage, Vt, by controlling the transistor body voltage. A forward body bias reduces Vt, increasing the device speed at the expense of increased leakage power. Alternatively, a reverse body bias increases Vt, reducing the leakage power but slowing the device. Therefore, the impact of process variations is mitigated by speeding up slow and less leaky devices or slowing down devices that are fast and highly leaky. Practically, the implementation of the ABB is desirable to bias each device in a design independently, to mitigate within-die variations. However, supplying so many separate voltages inside a die results in a large area overhead. On the other hand, using the same body bias for all devices on the same die limits its capability to compensate for within-die variations. Thus, the granularity level of the ABB scheme is a trade-off between the within-die variations compensation capability and the associated area overhead. This work introduces new ABB circuits that exhibit lower area overhead by a factor of 143X than that of previous ABB circuits. In addition, these ABB circuits are resolution free since no digital-to-analog converters or analog-to-digital converters are required on their implementations. These ABB circuits are adopted to high performance critical paths, emulating a real microprocessor architecture, for process variations compensation and also adopted to SRAM arrays, for Negative Bias Temperature Instability (NBTI) aging and process variations compensation. The effectiveness of the new ABB circuits is verified by post layout simulation results and test chip measurements using triple-well 65nm CMOS technology. The highly capacitive nodes of wide fan-in dynamic circuits and SRAM bitlines limit the performance of these circuits. In addition, process variations mitigation by statistical gate sizing increases this capacitance further and fails in achieving the target yield improvement. We propose new negative capacitance circuits that reduce the overall parasitic capacitance of these highly capacitive nodes. These negative capacitance circuits are adopted to wide fan-in dynamic circuits for timing yield improvement up to 99.87% and to SRAM arrays for read access yield improvement up to 100%. The area and power overheads of these new negative capacitance circuits are amortized over the large die area of the microprocessor and the SRAM array. The effectiveness of the new negative capacitance circuits is verified by post layout simulation results and test chip measurements using 65nm CMOS technology.

In this dissertation, we investigates the electrical stress induced degradation in low-temperature polycrystalline-silicon thin film transistors (LTPS TFTs) applied for system-on-panel (SOP), including the electrical degradations of device for switch operation in active matrix flat-panel displays, driving circuit and nonvolatile memory. Finally, we also present the reliability of LTPS TFTs applied for flexible displays. In first part, electrical degradation of conventional and pattered metal-shielding LTPS TFTs under darkened and illuminated dynamic AC stresses are investigated. Experimental results reveal that competitive mechanisms are generated in conventional LTPS TFTs during illuminated stress, namely, carrier increase and electric field weakening. This phenomenon is verified by stressing the patterned source/drain open metal-shielding LTPS TFTs, which determines that the electric field weakening dominates; conversely, the carrier increase is dominated the electrical degradation in channel open metal-shielding device under illuminated stress. In addition, an improvement in anomalous on-current and subthreshold swing (S.S.) in n-channel LTPS TFTs after positive gate bias stress are studied. These improved electric properties are due to the hole trapping at SiO2 above the lightly doped drain regions, which causes a strong electric field at the gate corners. The effect of the hole trapping is to reduce the effective channel length and the S.S.. Besides, the stress-related electric field was also simulated by TCAD software to verify the mechanism above. Secondly, a mechanism of anomalous capacitance in p-channel LTPS TFTs was investigated. In general, the effective capacitance of the LTPS TFTs was only dependent with the overlap area between gate and source/drain under the off-state. However, the experimental results reveal that the off-state capacitance was increased with decreasing measurement frequency and/or with increasing measurement temperature. Besides, by fitting the curve of drain current versus electric field under off-state region, it was verified that the TAGIDL is consisted of the Pool-Frenkel emission and Thermal-Field emission. In addition, the charge density calculated from the Cch-Vg measurement also the same dependence with electric field. This result demonstrates that the anomalous capacitance is mainly due to the trap-assisted-gate-induced-drain-leakage (TAGIDL). In order to suppress the anomalous capacitance, a band-to-band hot electron (BTBHE) stress was utilized to reduce the vertical electric field between the gate and the drain. In third part, in order to realize the reliability in p-channel TFTs under illuminated environment operation, the degradation of negative bias temperature instability (NBTI) with illumination effect is investigated. The generations of interface state density (Nit) are identical under various illuminated intensity DC NBTI stresses. Nevertheless, the degradation of the grain boundary trap (Ntrap) under illumination was more significant than for the darkened environment, with degradation increasing as illumination intensity increases. This phenomenon is mainly caused by the extra number of holes generated during the illuminated NBTI stress. The increased Ntrap degradation leads to an increase in the darkened environment leakage current. This indicates that more traps are generated in the drain junction region that from carrier tunneling via the trap, resulting in leakage current. Conversely, an increase of Ntrap degradation results in a decrease in the photoleakage current. This indicates that the number of recombination centers increases in poly-Si bulk, affecting photosensitivity in LTPS TFTs. Besides, the transient effect assisted NBTI degradation in p-channel LTPS TFTs under dynamic stress is also presented, in which the degradation of the Ntrap becomes more significant as rise time decreases to 1 £gs. Because the surface inversion layer cannot form during the short rise time, transient bulk voltage will cause excess holes to diffuse into the poly-Si bulk. Therefore, the significant Ntrap increase is assisted by this transient effect. Fourthly, we study the electric properties of n- and p-channel LTPS TFTs under the mechanical tensile strain. The improved on-current for tensile strained n-channel TFTs is originated form an increase in energy difference between 2- and 4-fold valleys, reducing the inter-valley scattering and further improving the carrier mobility. On the contrary, the hole mobility decreases in p-channel, suggesting the split between the light hole and heavy hole energy bands and an increase in hole population on the heavy hole energy band of poly-Si when the uniaxial tensile strain is parallel to the channel direction. In addition, the Nit and Ntrap degradations induced by NBTI for tensile strained LTPS TFTs are more pronounced than in the unstrained. Extracted density-of-states (DOS) and conduction activation energy (EA) both show increases due to the strained Si-Si bonds, which implies that strained Si-Si bonds are able to react with dissociated H during the NBTI stress. Therefore, the NBTI degradation is more significant after tensile strain than in an unstrained condition. Finally, the SONOS-TFT applied to nonvolatile memory is prepared and studied. In the gate disturb stress, a parasitic capacitance and resistance in off-state region are identified as electrons trapped in the gate-insulator (GI) near the defined gate region. Meanwhile, these trapping electrons induced depletions in source/drain also degraded the I-V characteristic when the gate bias is larger than the threshold voltage. However, these degradations slightly recover when the trapped electrons are removed after negative bias stress. The electric field in the undefined gate region is also verified by TCAD simulation software.

Actuellement, les circuits numériques nécessitent d'être de plus en plus performants. Aussi, les produits doivent être conçus le plus rapidement possible afin de gagner les précieuses parts de marché. Les méthodes rapides de conception et l'utilisation de MPSoC ont permis de satisfaire à ces exigences, mais sans tenir compte précisément de l'impact du vieillissement des circuits sur la conception. Or les MPSoC utilisent les technologies de fabrication les plus récentes et sont de plus en plus soumis aux défaillances matérielles. De nos jours, les principaux mécanismes de défaillance observés dans les transistors des MPSoC sont le HCI et le NBTI. Des marges sont alors ajoutées pour que le circuit soit fonctionnel pendant son utilisation, en considérant le cas le plus défavorable pour chaque mécanisme. Ces marges deviennent de plus en plus importantes et diminuent les performances attendues. C'est pourquoi les futures méthodes de conception nécessitent de tenir compte des dégradations matérielles en fonction de l'utilisation du circuit. Dans cette thèse, nous proposons une méthode originale pour simuler le vieillissement des MPSoC à haut niveau d'abstraction. Cette méthode s'applique lors de la conception du système c.-à-d. entre l'étape de définition des spécifications et la mise en production. Un modèle empirique permet d'estimer les dégradations temporelles en fin de vie d'un circuit. Un exemple d'application est donné pour un processeur embarqué et les résultats pour un ensemble d'applications sont reportés. La solution proposée permet d'explorer différentes configurations d'une architecture MPSoC pour comparer le vieillissement. Aussi, l'application la plus sévère pour le vieillissement peut être identifiée.

Ce travail constitue une contribution à l'étude de la synergie entre le vieillissement accéléré et l'évolution de la robustesse aux évènements singuliers pour les technologies MOS avancées. Ce manuscrit expose le travail fait autour de la Caractérisations des mécanismes de dégradation NBTI, HCI, TDDB et Electromigration sur les structures de tests conçues dans le véhicule de test NANOSPACE en technologie CMOS LP 65 nm. Il décrit aussi l'évaluation de la robustesse face aux évènements singuliers après un vieillissement de type NBTI sur les chaines de portes logiques (inverseurs, NOR, bascules D). Cette dernière partie nous a permis de démontrer que le vieillissement de type NBTI améliore la robustesse face aux SET dans ce cas d'étude.