Medical ultrasound technology accounts for over half of all imaging tests performed worldwide. In comparison to other methods, ultrasonic imaging is more portable and lower cost, and is becoming more accessible to remote regions where traditionally no medical imaging can be done. However, conventional ultrasonic imaging systems still rely on expensive PZT-based ultrasound probes that limit broader applications. In addition, the resolution of PZT based transducers is low due to the limitation in hand-fabrication methods of the piezoelectric ceramics. Capacitive Micromachined Ultrasonic Transducers (CMUTs) appears as an alternative to the piezoelectric (PZT) ceramic based transducer for ultrasound medical imaging. CMUTs show better ultrasound transducer design for batch fabrication, higher axial resolution of images, lower fabrication costs of the elements, ease of fabricating large arrays of cells using MEMS fabrication, and the extremely important potential to monolithically integrate the 2D transducer arrays directly with IC circuits for real-time 3D imaging. Currently most efforts on CMUTs are silicon based. Problems with current silicon-based CMUT designs include low pressure transmission and high-temperature fabrication processes. The pressure output from the silicon based CMUTs cells during transmission are too low when compared to commercially available PZT transducers, resulting in relatively blurry ultrasound images. The fabrication of the silicon-based cells, although easier than PZT transducers, still suffers from inevitable high temperature process and require specialized and expensive equipment. Manufacturing at an elevated temperature hinders the capability of fabricating front end analog processing IC circuits, thus it is difficult to achieve true 3D/4D imaging. Therefore novel low temperature fabrication with a low cost nature is needed. A polymer (Parylene) based CMUTs transducer has been investigated recently at UCF and aims to overcome limitations posted from the silicon based counterparts. This thesis describes the numerical simulation work and proposed fabrication steps of the Parylene based CMUT. The issue of transducer cost and pressure transmission is addressed by proposing the use of low cost and low temperature Chemical Vapor Deposition (CVD) fabrication of Parylene-C as the structural membrane plus graphene for the membrane electrodes. This study focuses mainly on comparing traditional silicon-based CMUT designs against the Parylene-C/Graphene CMUT based transducer, by using MEMS modules in COMSOL. For a fair comparison, single CMUT cells are modeled and held at a constant diameter and the similar operational frequency at the structural center. The numerical CMUT model is characterized for: collapse voltage, membrane deflection profile, center frequency, peak output pressure transmission over the membrane surface, and the sensitivity to the change in electrode surface charge. This study took the unique approaches in defining sensitivity of the CMUT by calculating the membrane response and the change in the electrode surface charge due to an incoming pressure wave. Optimal design has been achieved based on the simulation results. In comparison to silicon based CMUTs, the Parylene/Graphene based CMUT transducer produces 55% more in volume displacement and more than 35% in pressure output. The thesis has also laid out the detailed fabrication processes of the Parylene/Graphene based CMUT transducers. Parylene/Graphene based ultrasonic transducers can find wide applications in both medical imaging and Non destructive evaluation (NDE).

This research contributes to worldwide efforts to miniaturize one of the most powerful and versatile analytical tools, gas chromatography (GC). If a rapid, sensitive and selective hand-held GC system is realized, it would have a wide range of applications in many industries and research areas. As a part of developing a hand-held GC system, this research focuses on the separation column, which is the most important component of a GC system. This thesis describes the development of a miniature separation column that has low thermal mass and an embedded heating element for rapid thermal cycling. The worlds first thin polymer film (parylene) GC column has been successfully developed. This thesis includes: first, a study of theoretical column performance of rectangular GC column; second, the design optimization of parylene column and embedded heating element; third, the development of new processes such as parylene micromolding and stationary phase coating technique for parylene column; fourth, the fabrication of parylene GC column with an embedded heating element; and lastly, the testing and evaluation of parylene GC column through GC analysis.

This thesis reports design, fabrication, and implementation of two different micro electrophoresis system architectures for DNA analyses. The first architecture is traditional single channel layout with several design alternatives for size-based separation of DNA fragments. The second one is novel double channel architecture specialized for rapid mutation detection using heteroduplex analysis (HDA) method with an application of a newly designed injection technique. Besides achieving high resolution separations within the length of 1 mm with single channel arrangement, HDA was successfully applied for 590 base pair (bp) long PCR sample with 3 bp mutations in a separation length of 50 &micro / m in less than 3 minutes with double channel structure. Microchannels were formed using parylene-C due to its conformal deposition, no surface treatment requirement, transparency, biocompatibility, low background fluorescence, etc. Using the advantage of parylene in fabrication, the microchannels were fabricated with an only three-mask process. New double channel architecture is obtained by dividing the 200 &micro / m-wide separation channel into two parts by a 20 &micro / m-thick wall between them. For sample injection, various techniques, such as traditional cross, double-T, and double-L were investigated and optimized for single channel architecture assisting with pullback injection method. For double channel architecture, a novel, u-turn injection technique was applied. Precise control of sample amount by adjusting the injection time was accomplished by this new technique. Using high resolution cross-linked polyacrylamide gel as sieving material, separations were achieved in a very short length and time. Electrophoresis was performed in both channels of the double channel microchips simultaneously under the same conditions. This gives the chance of having a control channel in microchip format, which is very critical for the accuracy and reliability of the results in genetic analyses.

Every year, many archeological findings are discovered. It is necessary to document and conserve these items dug up from the ground. However, archeologists and conservators cannot handle such a big amount of newly found items. This work offers an alternative approach to standard conservation techniques, increasing the processing capacity and lowering the cost on items’ conservation. Studied alternative, mainly for protection of metallic artefacts, includes thin films based on parylene and organosilicons. Thin films were prepared on two experimental apparatuses. Parylene films were deposited by chemical vapour deposition (CVD). Final product was a thin film of parylene C. Organosilicon thin films were deposited via plasma enhanced chemical vapour deposition (PECVD). PECVD apparatus operates with capacitively coupled radiofrequently initiated plasma. Using hexamethyldisiloxane, thin films very similar to silicon dioxide were produced, thus called SiOx. Thin films were characterized by several methods and compared to standard treatment used by conservators – tannate layer, acrylic furnish Paraloid B72 and microcrystalline wax Revax 30. Parylene films showed excellent conformity and resistance to corrosion on iron substrate. First signs of corrosion were observed on layer of 5 µm thickness after 24 hours in salt fog. On samples coated by SiOx films, corrosion was spreading wide even during 1st hour of the corrosion test. Most probable cause was that SiOx film has thermal expansion coefficient different from iron substrate and due to this fact cracking occurs during cooling down of the treated substrate. On samples coated by standard treatment, corrosion occurred after 1-3 hours of the test. Oxygen transmission rate (OTR) measurements (performed on polypropylene substrate) confirmed good barrier properties of parylene C. Best parylene thin films had OTR approximately 170 cm3•m-2•atm-1•day-1. SiOx films reached good results with OTR 300 cm3•m-2•atm-1•day-1, compared to clean polypropylene substrate with OTR 1700 cm3•m-2•atm-1•day-1. Standard conservation layers could not be applied on polypropylene substrate, thus their OTR was not measured. We did not succeed in finding a substrate which is compatible for all types of treatments. Next, the study focused on combinations of thin films forming sandwich structures. All types let the corrosion attack the substrate during the 1st hour of the test. The cause was insufficient film thickness as well as crack ing of SiOx films due to different thermal expansion properties from the iron substrate. Although SiOx thin films were not deposited on substrate directly, they have excellent adhesion to parylenu and thus they could tear parylenu films due to thermal expansion. However, OTR measurements showed improvement in barrier properties. Multilayer parylene C–SiOx–parylene C–SiOx had OTR 5 cm3•m-2•atm-1•day-1. Final result is that parylene C thin films have better barrier properties than standard coatings and are suitable for conservation of metallic archaeological artefacts. SiOx films and multilayers showed poor anticorrosion protection of metallic substrates but they have good barrier and chemical properties in combination with other types of substrates. Mainly deposited on polymers, there is great potential for their application in many fields. Further research would be focused on new substrates for SiOx thin films and on the improvement of UV stability of parylene films.

De nos jours, une gestion optimale de l'énergie électrique est devenue un enjeu majeur. La conversion de l'énergie entre une source et sa charge est réalisée par un élément central : le convertisseur statique utilisé aussi bien pour des faibles puissances (quelques Watts) que pour des très fortes (plusieurs MWatt). La brique élémentaire est la cellule de commutation constituée de semi-conducteurs de puissance (à commutation commandée ou spontanée) généralement réunis au sein d'un " module de puissance ". La nécessaire réduction des volumes dans certaines applications (comme les systèmes embarqués par exemple) ainsi que l'augmentation des calibres de tensions des nouveaux semi- conducteurs grands gaps auront comme conséquence directe d'augmenter les contraintes sur les systèmes d'isolation des convertisseurs. Une répartition contrôlée de ces contraintes dans le volume présente alors un intérêt pour maintenir la fiabilité du système d'isolation. Il est donc nécessaire d'effectuer une caractérisation la plus large possible de l'ensemble des matériaux isolants utilisés dans le packaging des dits " modules de puissance ", ainsi qu'une bonne compréhension de leurs mécanismes de défaillances. Le travail présenté ici consiste en l'étude d'une nouvelle stratégie de répartition du potentiel dans le volume appelée gradation de potentiel. L'isolation de volume développée est un assemblage multicouche constitué d'un matériau à conductivité contrôlée (Epoxy/Graphene) jouant le rôle de gradateur et d'une fine couche isolante (parylène) assurant la tenue en tension. Différents outils, tant théoriques (simulation) qu'expérimentaux, ont été ainsi utilisés pour aider au dimensionnent du système d'isolation électrique. La modélisation par la méthode des éléments finis (MEF) permet-elle de prédéterminer la répartition de la contrainte (potentiel et champ électrique) dans une structure de test prédéfini ou de décrire l'étude de l'influence de la conductivité du matériau gradateur et de l'épaisseur du film sur la répartition des équipotentielles. D'un point de vue expérimental le film sélectionné a été caractérisé pour des épaisseurs comprises entre 10 et 40 µm. Le matériau à conductivité contrôlée a été ensuite élaboré puis caractérisé pour différents taux de chargement. Après l'incorporation du système d'isolation dans différentes structures tests (substrats métallisés et structure double face), différentes méthodes permettant de caractériser le système d'isolation ont été utilisées qu'il s'agisse de mesures directes de la contrainte électrique par sonde à champ nul (potentiel de surface) ou indirectes par des mesures de décharges partielles. L'isolation multi-couches présente des améliorations dans la répartition du potentiel mais aussi des limites d'utilisation en fonction de la conductivité du matériau gradateur. Cette isolation doit donc être dimensionnée au plus près des caractéristiques d'utilisation et offre une approche intéressante pour le dimensionnement des modules de puissances double face. / Nowadays, an optimal management of the electrical energy becomes a key point in electric systems. The conversion of energy is realized by a main component: the power converter. It is used as well for low power (few Watts) as for very high power (MWatts). The elementary block of the converters, is the switching cell made up of semiconductor power devices. The trend to reduce both the volume and the weight in many applications (for example in embedded systems) and the increase of the rating voltage of the new wide band gap semiconductors will have for consequence an increase of the stresses on the electrical insulating systems of the power module . A controlled grading of these electrical constraints in the volume is highly interesting to ensure the reliability of the system. It is therefore necessary to perform a precise characterization of the insulated materials used in the packaging of the power modules, as well as to get a good understanding of their failures mechanisms. The works presented in this dissertation consists in the study of a new strategy for the field gradation in power modules. The proposed insulation is an assembly of multi-layers made up of a thick material of electrically controlled conductivity (Epoxy/Graphene nanocomposite) and of a thin insulating layer (Parylene films). Various tools were used (both theoretical and experimental) to help dimensioning of the Electrical Insulation System (EIS). The Finite Element Method (FEM) was used to simulate the equipotential and field distribution in the structure under study and to analyse on one hand, the influence of the changes in the conductivity values of the Epoxy/Graphene nanocomposite materials and, on the other hand, the impact of the parylene (PA) films thickness on the stress grading. From an experimental point of view, the PA films were characterized for different thicknesses ranging between 10 µm and 40 µm. The Epoxy/Graphene nanocomposites of controlled conductivity were manufactured and characterized (0 to 5 % wt) for various filler contents. The field grading effects were evaluated directly in different structures thanks to surface potential measurements and (indirectly) to partial discharges measurements. The proposed multilayer EIS exhibits some improvements regarding the stress grading but also some limits depending on the conductivity of the nanocomposite. Such an EIS will have to be dimensioned taking into account the rating voltage and could offer an interesting approach for the future design of the power modules.

This thesis reports design and implementation of a MEMS based resonant mass sensor for cell detection applications. The main objective of the thesis is the real-time detection of captured cells inside liquid medium and obtaining the detection results by electronic means, without the aid of any external optical instruments. A new resonant mass sensor architecture is presented that has various advantages over its conventional counterparts. The device oscillates in the lateral direction, eliminating squeeze film damping. A thin parylene layer coated on the device prevents liquids from entering the narrow gaps of the device, further improving the quality factor. The resonator is embedded on the floor of a microchannel. A gold film on the proof mass facilitates antibody based cell capture on the device. Theoretical background regarding resonator operation is investigated. Various resonator designs are presented, taking into account design trade-offs, application v considerations, and fabrication limitations. The design procedure is verified with MATLAB Simulink modeling results and finite element simulations. A new process flow has been developed for resonator fabrication, combining SOI, glass, and polymer micromachining. Modifications have been done on the flow for the solution of problems encountered during device fabrication. Each device has a foot print area of 1.5 x 0.5 cm2. The majority of this area is occupied by fluidic connections and reservoirs. Resonance characterization results in air and water have shown that there is significant quality factor enhancement with the parylene coating method. The quality factor decreases to only 170 in water from 610 in air, when the resonator is coated with a thin layer of parylene. Uniformity and linearity tests revealed that the devices have a standard deviation of only 1.9% for different analyte capture sites and an R2 of 0.997 for mass loads as high as 2.7 ng. Detection of Saccharomyces cerevisiae type yeast cells has been done using the resonators. Mass measurement of single yeast cell (13 pg) and yeast clusters (102 pg) have been performed. Antibody and thiol-gold chemistry based Candida Albicans type bacteria capture and detection has also been made in both air and water environments. The mass of several captured bacterial cells in air has been measured as 95pg. Two bacterial cells have been captured on one device inside water and their mass has been measured as 85 pg. It is worthy to note that all mass measurements are consistent with theoretical expectations.

This thesis reports design and implementation of a MEMS based gravimetric resonator for cytometry applications. There are mainly two objectives of this thesis / to enable in-flow analysis and to perform closed loop operation that does not require any additional processing or equipment. A novel MEMS based resonator with in-flow capabilities is proposed for detection of agents inside micro channels. High resolution of mass detection inside micro channels is planned to be succeeded with lateral motion in the micro channel floor. The idea embedding lateral resonators emerges from decreasing squeeze film damping during the motion of the resonator. Lateral motion is supported by hydrophobic parylene coating to decrease the damping. Theory and design of the gravimetric resonators are explained and the fabrication flow is constructed and performed successfully by combining SOI, SOG and polymer micro fabrication techniques. Problems during the fabrication are overcome and optimized flow is presented. The devices have a foot print area of 1.5 x 0.5 cm2 which is mainly composed of reservoirs for fluidic connections. Ten types of devices are designed according to their mass sensitivities and compliances. Trade offs between frequency, injected current, and compliance are analyzed successfully by taking also the performance parameters of the interface electronics in to account. Test results reveal that single latex bead with 3 &micro / m diameter and 14.127 pg mass can be sensed successfully and mass sensitivity is measured to be 5.91 fg/Hz for this type of device.

This thesis reports design and implementation of a MEMS based spiral channel dielectrophoretic separator for cytometry applications. Main objective of the thesis is to separate leukemia cells from healthy leukocytes with respect to the differences in their dielectric properties. A novel MEMS based dielectrophoretic separator with spiral channels and concentric 3D electrodes has been proposed. The proposed geometry decreased the footprint, which reduces the device cost, without degrading the separation and quantization performances. Concentric electrode geometry enables continuous electric-field application with simple voltage supplies. Theoretical explanation of the design has been presented and supported with finite element method simulations. Evolution of the design has been explained in conjunction with solutions to arising problems, chronologically. Comparisons of the proposed system with respect to the existing systems in the literature have been given. The devices are fabricated using a 3-mask process utilizing suspended parylene channel process. The experiments are realized with 1 &mu / m and 10 &mu / m polystyrene beads. The results show that 1 &mu / m particles have an average speed of 4.57 &mu / m/s with 1.06 &mu / m/s standard deviation, and 10 &mu / m particles have an average speed of 544 &mu / m/s with 105 &mu / m/s standard deviation. The speed variation coefficient for 1 &mu / m and 10 &mu / m beads can be calculated as 23% and 19%, respectively. The size accuracy of the device is &plusmn / 10%, while the resolution is 20%, that is, particles with radii different from each other by 20% can be separated. It is worthy to note that the experimental results almost match the simulation results.

This thesis presents analysis, design, implementation, and testing of electrostatically actuated MEMS microvalves. The microvalves are specifically designed for lab-on-a-chip applications to achieve leakage ratios below 0.1 at pressure levels in the order of 101 kPa. For this purpose, two different microvalves are presented in the study. In the proposed designs, electrostatic actuation scheme is utilized to operate the microvalves in normally open and normally closed modes. Characterization of normally open microvalves show that, microvalves with radii ranging between 250

Ce travail est consacré à l’élaboration et à la caractérisation de couches minces de parylène D déposées par dépôt chimique en phase vapeur (CVD) sous forme de films de quelques microns d’épaisseur. L’objectif de l’étude est d’évaluer les potentialités de ce polymère en remplacement des parylènes de type N ou C pour des applications spécifiques ou encore pour l’intégrer dans de nouvelles applications. Une première étude a consisté à évaluer l’impact des paramètres des dépôts CVD (température de sublimation, température de pyrolyse, température du substrat d’accueil du film déposé) sur les changements physico-chimiques, structuraux et diélectriques du parylène D. Pour cela, nous nous sommes appuyés sur des analyses FTIR, XRD, DSC, TGA, AFM, SEM, DMA. Nous avons également appliqué des stress thermiques au parylène D dans le but d’évaluer leur performance à haute température (>200°C) ainsi que les changements opérés au niveau de la structure cristalline (taille des cristallites, pourcentage de cristallinité,…) ou encore la stabilité des propriétés thermiques (température de transition vitreuse, température de cristallisation, température de fusion) et diélectriques (constante diélectrique e’, facteur de dissipation tand et conductivité basse fréquence s’) Enfin, des analyses diélectriques en fréquence (de 0,1Hz à 100 kHz) sur une large plage de température de fonctionnement (-140°C – 350°C) ont permis de mettre en évidence la présence de trois mécanismes de relaxations (a, b, g), une polarisation d’interface de type Maxwell-Wagner-Sillars et une polarisation d’électrode. Les performances diélectriques sont également discutées par comparaison aux parylènes de type N et C plus couramment utilisés aujourd’hui dans les applications industrielles. Cette étude permet ainsi de disposer maintenant de paramètres de dépôt CVD bien contrôlés pour le dépôt de films de parylènes D aux propriétés souhaitées pour une application spécifique / This work is mainly focused on the elaboration and the characterization of parylene D thin films of few micrometers deposited by chemical vapor deposition (CVD). The goal of this study is to evaluate the potentialities of this polymer in order to replace the parylene N or C for specific applications or to integrate it in new applications. A first study consisted in evaluating the impact of the CVD process parameters (temperature of sublimation, temperature of pyrolysis, substrate temperature) on the surface morphology, the molecular structure and dielectric changes of parylene D. For that, we were based on several analyzes techniques as FTIR, XRD, DSC, TGA, AFM, SEM, DMA. Thermal stresses were applied to parylene D to evaluate their performance at high temperature (>200°C) and the changes on the crystal structure (size of crystallites, percentage of crystallinity,…) or the stability of the thermal properties (temperature of transition, temperature of crystallization, melting point) and dielectric properties (the dielectric permittivity, the dissipation factor, the electrical conductivity and the electric modulus). Dielectric and electrical properties of Parylene D were investigated by dielectric spectroscopy in a wide temperature ranges from -140°C to 350°C and frequency from 0.1 Hz to 1 MHz, respectively. (a, b and g)-relaxation mechanisms, interfacial polarization related to Maxwell-Wagner-Sillars and electrode polarization have been identified in this polymers. The dielectric performances of Parylene D have been also compared with parylenes N and C which are used in wide industrial applications. Optimized and controlled conditions of the CVD process of parylenes D are proposed in this work in relation to the properties. The obtained results open a new way for specific applications.