Dans un contexte d'integration des dispositifs de conversion d'energie de petite puissance, le travail de these presente porte sur la realisation de micro-bobines integrees sur silicium. Les contraintes liees a ce type d'integration resident dans la mise au point, la compatibilite des procedes technologiques contribuant a la fabrication du systeme complet et le cout de fabrication. Dans un premier temps, une etude bibliographique nous a permis de faire une synthese sur les structures integrables de micro-bobines ainsi que sur les materiaux conducteurs et magnetiques et leurs techniques de depot. Une fois les objectifs fixes, notamment concernant la nature des materiaux a deposer, nous avons mis au point les depots electrochimiques et les procedes photolithographiques de resines epaisses destinees a la realisation de moules. Ces resines doivent resister a la fois a des contraintes chimiques et physiques fortes. Une premiere structure de micro-bobine de type spirale a ete dimensionnee et le processus de fabrication a ete identifie. En parallele, des motifs specifiques de forme bien definie ont ete etudies puis realises afin de caracteriser les couches deposees par electrochimie, en termes de resistivite, permeabilite et composition de l'alliage. La derniere partie de la these a consiste a appliquer ce procede de fabrication a une seconde structure de bobine dont la geometrie a ete definie dans le but de reduire le nombre d'etapes technologiques. Actuellement les premiers prototypes de ces bobines ont ete realises avec de faibles epaisseurs de materiaux. Ceci nous a permis de valider les procedes de fabrication de ces dispositifs.

Herstellung anwendungsbezogener SiO2- Grabenstrukturen im sub-μm-Bereich durch RIE und ICP-Prozesse.

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La miniaturisation des systèmes d'imagerie présente aujourd'hui un fort potentiel dans plusieurs domaines, dont le développement de nouveaux dispositifs biomédicaux. Les exigences associées concernant l'imagerie demandent un effort substantiel dans le développement de composants optiques de haute qualité. Un meilleur contrôle de la propagation de la lumière ou de ses caractéristiques dans de tels systèmes est également important. Les composants doivent donc, par exemple, contenir les aberrations optiques pouvant affecter la résolution, la mise en œuvre de composants optiques dont le profil de phase continu est bien contrôlé est une voie intéressante. Ces composants devraient, de plus, être réalisés à partir de matériaux robustes en vue de leur assemblage au sein de dispositifs miniatures. Ce manuscrit de thèse de doctorat porte donc sur la conception et la fabrication parallèle de tels micro-composants optiques réfractifs réalisés en verre. Dans ce but, deux technologies ont été étudiées et optimisées, la lithographie à niveaux de gris et un procédé de soufflage de verre. En exemple, des microaxicons en verre ont été fabriqués et la génération de faisceaux de Bessel démontrée. Ce type de faisceau est caractérisé par une longue distance de propagation non-diffractive le long de l'axe optique, suivie d'une forme de faisceaux creux, qui les rend très utiles dans de nombreux domaines. Ces travaux de thèse ont été soutenus par le projet SMYLE (Small Systems for a Better Life) et le conseil Régional de Franche-Comté. / Miniaturization of imaging systems shows nowadays a strong potential for many applications, in particular, e. g., for novel biomedical devices. Related imaging specifications require a substantial effort onto the development of high quality microoptical components. better control of light propagation and features in such system sis also of particular interest. Components should then e.g. contain optical aberrations in order to reach high resolutions. In purpose of searching higher diffraction efficiencies or resolutions, optical components with well-controlled continuous phase profiles are sought. In addition, they also should be made of robust materials to handle their further assembly into miniaturized devices. Consequently, the manuscript focuses on the design and the parallel fabrication of such microoptical components made of glass. To that end, two technologies have been studied and optimized, namely gray-scale lithography and glass-blowing processes. As an example, glass-based microaxicons have been fabricated and Bessel beams generation has been demonstrated. This type of beam exhibits a long non-diffractive propagation distance along the optical axis followed by a dark hollow shape which makes them useful in many different applications. This work has been supported by the SMYLE (Smart Systems for a Better Life) European project and the Ranche-Comté Regional Council.

Herstellung anwendungsbezogener SiO2- Grabenstrukturen im sub-μm-Bereich durch RIE und ICP-Prozesse.

In this thesis I investigate characteristics of turbulent flow in a channel where one of the walls has riblets, superhydrophobic microribs, or a hybrid surface with traditional riblets built on a superhydrophobic microrib surface. PIV measurements are used to find the velocity profile, the turbulent statistics, and shear stress profile in the rectangular channel with one wall having a structured test surface. Both riblets and superhydrophobic surfaces can each provide a reduction in the wall shear stress in a turbulent channel flow. Characterizing the features of the flow using particle image velocimetry (PIV) is the focus of this research. Superhydrophobicity results from the combination of a hydrophobic coating applied to a surface with microrib structures, resulting in a very low surface energy, such that the fluid does not penetrate in between the structures. The micro-rib structures are aligned in the streamwise flow direction. The riblets are larger than the micro-rib structure by an order of magnitude and protrude into the flow. All the test surfaces were produced on silicon wafers using photolithographic techniques. Pressure in the channel is maintained below the Laplace pressure for all testing, creating sustainable air pockets between the microribs. Velocity profiles, turbulent statistics, shear stress profiles, and friction factors are presented. Measurements were acquired for Reynolds numbers ranging from 4.5x10^3 to 2.0x10^4. Modest drag reductions were observed for the riblet surfaces. Substantial drag increase occurred over the superhydrophobic surfaces. The hybrid surfaces showed the greatest drag reduction. Turbulence production was strongly reduced during riblet and hybrid tests.

The present masters's thesis informs about the development and application of low-temperature sintering pastes in the manufacture and assembly of PCB components of the enclosing lead-free using nanoparticles of metals and their compounds. Lead-free brazing technology which s using in the present time, which has its drawbacks, however, and thus gaining other appropriate alternatives that seek to replace or further refined lead brazing. The introduction of the theoretical part inform about retrieval method of the type, composition and properties of low-temperature sintering pastes consisting of metal nanoparticles and their compounds. This section describes and explains the reaction mechanisms taking place during the sintering process. The end of the first chapter is dedicated to nanotechnology and production of nanoparticles and their compounds for the needs of the low-temperature sintering and possible related problems. Folowing section is devoted to examples of practitioners of the application and use of low-temperature sintering pastes and tests with which to assess the characteristics and quality of the related sintering conection. At the end of the thesis is a summary perspective and the use of low-temperature sintering technology nanoparticle past into the future. The experimental part is devoted to the application of conductive ink on the base of graphite for the production of 1V, 2V and 4V structures and their electroplated by the copper. There were created technological processes of 2V and 4V structures and test proposed methodologies resistance conductive theme to environmental influences. Filling pasta was tested in implementing 4V structure. There were made microsections various technological applications and their results were processed and evaluated.