The absence of a cheap and easily scalable synthesis technique for nitrogen-vacancy (NV) centers enriched nanodiamonds (NDs) is a critical factor for the development of devices based on this very peculiar nanoparticle. Indeed, the combination between the unique NV fluorescence properties and NDs characteristics allow to obtain a tool having quantum sensing capabilities, with nanometric spatial resolution, which is able to operate in a wide range of temperature, pressures and in harsh chemical conditions. NVenriched NDs applications in nanothermometry, nanomagnetometry and in bio-imaging have already been reported. However, most of the standard fluorescent NDs production techniques present common drawbacks: poor control in NDs size distribution and in nitrogen concentration, as well as the need of post-synthesis process to clean the NDs surface from impurities and to increase the NV density. In this thesis, an alternative method for fluorescent NDs synthesis based on pulsed laser ablation (PLA) of graphite is demonstrated. After the introductory chapters on NV-centers physics and NDs properties (Chapter 2 and 3), the demonstration that PLA is a viable route for synthesis of NDs is given in Chapter 4. In particular, PLA of graphite and of diamond-like carbon is performed in water. Here, a thermodynamic model taking into account the peculiar physical processes occurring during PLA is developed to explain NDs formation. Then, synthesis of NV-enriched NDs is demonstrated through PLA of graphite in a nitrogen atmosphere (Chapter 5) and in liquid nitrogen (Chapter 6). In both chapters, the thermodynamic model is adapted to explain diamond phase formation in a gaseous environment and in a cryogenic liquid. Furthermore, NV centers optical properties are fully characterized with optically detected magnetic resonance (ODMR) spectroscopy. Finally, in Chapter 7, fluorescent NDs are produced by laser ablation of N-doped graphite in water. This particular target is then used for a quantitative comparison between the other fluorescent NDs laser-synthesis, with the aim of establishing in which condition the highest NV-center formation efficiency is achieved.

Les applications présentées dans cette thèse valorisent de diverses manières le principe d'ablation laser, c'est à dire l'arrachement de la matière d'une surface solide suite à l'irradiation avec un faisceau laser. Le plasma généré par irradiation laser impulsionnel a été utilisé pour le dépôt de couches minces ou de nanoparticules et pour l'analyse compositionnelle des couches d'épaisseur nanométrique. Nous avons synthétisé par dépôt laser combinatoire des librairies compositionnelles d'un oxyde mixte transparent d'In et Zn. En utilisant le plasma d'ablation pour le diagnostic compositionnel, nous avons déterminé les concentrations d'indium et de zinc dans les couches minces par spectroscopie laser. Des couches minces de bioverre ont été synthétisées par dépôt laser impulsionnel sur des substrats de titane. En contact avec des cellules ostéoblastes, les bioverres ont stimulé la prolifération et ont augmenté la viabilité. La prolifération des ostéoblastes cultivés sur les couches de bioverre a été 30% supérieure a l'échantillon de contrôle. On a déposé par PLD des couches minces ou nanoparticules adhérentes de ZnO sur des substrats textiles hydrophiles dans un flux d'oxygène ou sous vide pour obtenir des structures avec différentes mouillabilités. En augmentant le nombre d'impulsions laser de 10 à 100 nous avons observé la transition du recouvrement par des nanoparticules isolées vers des couches minces. En fonction de l'atmosphère environnant lors du dépôt, les couches minces et les nanoparticules ont changé leur mouillabilité, passant d'hydrophile en flux d'oxygène à un comportement superhydrophobe (angle de contact de 157°) en cas de dépôt sous vide. / The applications presented in this thesis exploit in different modes the principle of laser ablation, i.e. the material removal from a solid surface following irradiation with a pulsed laser beam. The plasma generated by laser ablation was used for thin films or nanoparticles deposition and for the compositional analysis of nanometric thin films. We synthesized by combinatorial pulsed laser deposition, thin film libraries of a complex oxide of In and Zn. Using the ablation plasma for compositional diagnostic, we determined the In and Zn concentrations in films by Laser Induced Breakdown Spectroscopy using a procedure based on the spectral luminance calculation of a plasma in local thermodynamic equilibrium. Thin films of bioactive glass were synthesized by pulsed laser deposition, magnetron sputtering and MAPLE on Ti substrates and tested the transfer accuracy by physico-chemical tests and their functionality in vitro. In contact with human osteoblast cells, the bioactive glasses stimulated their proliferation and enhanced their viability. The proliferation of osteoblasts cultivated on bioactive films was 30% superior to the control sample. ZnO thin films or nanoparticles were deposited on hydrophilic textile substrates in oxygen flux or in vacuum in order to obtain structures with different wetting behavior. Increasing the number of laser pulses from 10 to 100, we observed a coating transition from isolated nanoparticles to thin films fully coating the textile fibers. Function of the ambient atmosphere during experiments, the structures changed their wetting behavior, passing from hydrophilic in oxygen flux to superhydrophobic (157°) in case of deposition in vacuum.

The present research work mainly focuses on fabrication of compositionally modulated multilayers of (l−x) Pb(Mgi/3N2/3)O3 - x PbTiO3 (PMNPT) through multi target pulsed laser ablation technique. Heterostructures like compositionally varying multilayers; multilayers with graded interface and a ferroelectric [PbTiO3 (PT)] and relaxor (PMN) superlattices of different periodicities were fabricated. Role of artificially enhanced chemical heterogeneity and strain on enhancement of physical property was studied. Dimensional dependent ferroelectric and antiferroelectric type of polarization behavior was observed in the case of both compositionally varying multilayers and the superlattice structures fabricated. The dimensional dependence of various ferroelectric interactions like long-range, short-range and interfacial coupling among the layers was studied. The phase transition behavior and dielectric studies were carried out on these heterostructures. An artificial superlattice of a relaxor ferroelectric with a ferromagnetic layer was also fabricated for magnetoelectric applications. Chapter 1 provides a brief introduction to ferroelectric (FE) heterostructures, their technological applications and the fundamental physics involved in ferroelectric heterostructures. Initially an introduction to the technological importance and advantages of ferroelectric heterostructures is provided. A brief introduction to relaxor ferroelectrics and their characteristic structural features are discussed. A brief review of the ferroelectric heterostructures both from fundamental science and technological point of view is provided. Finally the specific objectives of the current research are outlined. Chapter 2 deals with the various experimental studies carried out in this research work. It gives the details of the experimental set up and the basic operation principles of various structural and physical characterizations of the materials prepared. A brief explanation of material fabrication, structural, micro structural and physical property measurements is discussed. Chapter 3 addresses the problem of phase formation of PMNPT over platinum substrates and the role of the template over the phase formation, micro structural evolution and polarization behavior. The surface modifications of bare Pt under the processing conditions used to fabricate PMNPT was also studied. An intermediate roughening mechanism was observed. The role of LSCO over the micro structural evolution of PMNPT, the minimum thickness of LSCO required for phase formation of PMNPT, role of LSCO on phase formation and its effect on the polarization behavior of PMNPT of constant thickness are discussed. Chapter 4 deals with fabrication of different types of relaxor based heterostructures studied in this work. Three different types of PMNPT based heterostructures was fabricated using a multi target laser ablation chamber. The first type of heterostructure is a compositionally modulated multilayer thin film with four different compositions of (1-x) PMN - x PT (x = 0.0, 0.1, 0.2, 0.3 at.%) and is represented as PMNPT multilayer (ML) further in this thesis. PMNPT ML with different individual layer thickness was fabricated (30, 40, 60, 80, 100 and 120 nm). The second type of heterostructure is the PMNPT ML of same dimensions, but associated with a post deposition annealing to achieve a graded interface between the multilayers present and will be named as PMNPT graded or simply graded, further in this thesis. The third type of heterostructure is an artificial superlattice of a simple relaxor ferroelectric (PMN) and a normal ferroelectric (PT), which will be named as PMN-PT superlattice (SL) further in this thesis. The crystallinity, micro structural features and the nature of the interface present in the fabricated heterostructures were studied using various experimental techniques. Chapter 5 deals with the FE studies of compositionally modulated PMNPT ML thin films and PMNPT graded thin films. The ML with individual layer thickness of 120nm exhibited a clear FE behavior but with a reduced remnant polarization and reduced non linear behavior in capacitance - voltage (C-V) characteristics. But on varying the dimensions of the individual layers (30, 40, 60, 80, 100 and 120nm) a large dielectric tunability of around 74% was observed at lOOnm. The polarization behavior of these ML exhibited an interesting size dependent polarization behavior. A FE behavior was observed at low dimensions of 40 and 30nm. An AFE type of loop was observed at 60 and 80nm of individual layer thickness and at lOOnm it showed a clear paraelectric kind of behavior both in polarization hysteresis (P-E) and C-V studies. Graded films exhibited clear FE behavior at all dimensions fabricated and hence the role of interface in developing a critical polarization behavior in the case of ML was confirmed. Apart from the fundamental physics these ML and graded films permits the tunability of their physical properties on just varying the individual layer thickness. The dimensional dependence of dielectric tunability of ML and graded films were studied and it was found that in the case of a ML the dielectric tunability was high at lOOnm individual layer thickness and at 40nm in the case of a graded film. Thus the interfacial strain, interfacial coupling and chemical heterogeneity give an opportunity to engineer the physical property depending on the requirements. Chapter 6 deals with ferroelectric studies (P-E, C-V) of PMN-PT superlattice structures with different periodicities. The dimensional range in which, the interfacial coupling dominates the overall polarization behavior of the system was analyzed. A dimensional dependent FE and AFE behavior was observed in the PMN-PT SL structures. The dimensional dependent tunability of physical properties was achieved. The different interactions like short range, long range and the interfacial coupling and their dimensional dependent behavior was studied. The dimensional dependent tunability of the P-E and C-V behavior was observed both in symmetric and asymmetric SL structures. Chapter 7 deals with the relaxor behavior of the fabricated PMNPT ML, graded and PMN-PT SL structures. The dielectric phase transition of a PMNPT ML exhibited local maxima in the real part of dielectric constant with temperature. The local maxima correspond to the temperature regime at which, the individual layer dielectric maxima dominates the phase transition behavior of the ML structure. In the case of graded films an averaged behavior of all the compositions, with an enhanced diffusivity was observed. All the characteristic features of a relaxor ferroelectric were observed in the phase transition behavior of a graded thin film. The dielectric maxima exhibited a Vogel-Fulcher type of behavior with frequency, A similar averaged behavior was observed in the phase transition behavior of PMNPT ML at low dimensions (< 40 nm) of the individual layer. The dielectric phase transition behavior of PMN-PT SL structures of different periodicities was studied. No characteristic of a relaxor ferroelectric was observed for the periodicities in the range of 10 to 50 nm. At 60 nm periodicity the individual layer dominance was observed in the phase transition behavior of the SL structure. The phase transition behavior was found to be insensitive to the interfacial coupling in both the PMNPT ML and PMN-PT SL. Chapter 8 deals with the dielectric response, impedance spectroscopy and the DC leakage characteristics of the relaxor heterostructures. All the relaxor heterostructures fabricated, exhibited low frequency dispersion, similar to that of the Jonscher's universal type of relaxation behavior. The anomalous dispersion common of a relaxor ferroelectric was observed in the imaginary dielectric constant at high frequencies. A.multi debye type of relaxation behavior was observed in the impedance analysis and the relaxation time was found to obey Vogel-Fulcher type of relation with temperature. The leakage current of all the heterostructures were found to be few orders less than the homogeneous single layer thin films. A space charge limited conduction was observed in all the heterostructures fabricated. Chapter 9 deals with an attempt of realizing the magnetoelectric effect in an artificial superlattice structure consisting ferromagnetic [Lao.6Sro.4Mn03 (LSMO)] and ferroelectric (PMNPT 70-30) layers. Both symmetric and asymmetric SL structures were fabricated and the asymmetric SL exhibited both room temperature ferromagnetic and ferroelectric behavior. A weak influence of magnetic field over the polarization behavior was observed. The magnetic behavior and its influence over electrical behavior were found to be dominated by the interface and were confirmed from the Maxwell-Wagner type of relaxation. Chapter 10 gives the summary and conclusions of the present study and also discusses about the future work that could give more insight into the understanding of the relaxor heterostructures.

Fabrication of artificially structured superlattices, when controlled on a nanoscale level, can exhibit enhanced dielectric properties over a wide temperature range. Possible fabrication of new functional devices based on the parametric values of dielectric constants of these heterostructures was the major motivation behind the work. Chapter 1 gives a brief overview of ferroelectrics; their defining features and their commercial importance to electronic industry. An introduction to ferroelectric superlattices, their technological application and fundamental physics that influence the behavior of superlattices are provided. Chapter 2 deals with the various experimental studies carried out in this research work. It gives the details of the experimental set up and the basic operation principles of various structural and physical characterizations of the materials prepared. A brief explanation of material fabrication, structural, micro structural and physical property measurements is discussed. Chapter 3 involves fabrication of two-component ferroelectric superlattices consisting of Barium Titanate (BTO), and Strontium Titanate (STO) with nanoscale control of superlattice periodicities by high-pressure multi target pulsed laser deposition on Pt (111)/Ti/SiO2/Si (100) substrate. Superlattices with varying periodicities were fabricated and their compositional variation across the thin film and the interface width were studied using Secondary Ion Mass Spectrometry (SIMS). Fabrications of superlattice structure were supported by observation of satellite peaks in XRD corresponding to the coherent heterostructures. The microstructural analysis was carried out using cross-sectional scanning electron microscopy (SEM), and contact mode-AFM was used to image surface morphology and root-mean-square (rms) roughness of the thin film heterostructure. Chapter 4 deals with ferroelectric studies of BTO/STO superlattices. The size dependent polarization behaviors of the superlattices are shown. The experimental realization of the dimensional range in which, the long-range coupling interaction dominates the overall polarization behavior of the system was studied. The dependence of average spontaneous polarization on the individual layer thickness, temperature and the dimensional range of interaction are discussed. The enhanced non-linear behaviors of the films were measured in terms of tunability. The dielectric phase transition behavior of superlattice structures of different periodicities was studied. Chapter 5 focuses on fabrication of three-component ferroelectric superlattices consisting of Barium Titanate (BTO), Calcium Titanate (CTO) and Strontium Titanate (STO). The fabrications of superlattice structures were confirmed by the presence of satellite reflections in XRD analysis and a periodic concentration of Sr, Ba and Ca throughout the film in Depth profile of SIMS analysis. The microstructural analysis was carried out using cross-sectional scanning electron microscopy (SEM), and contact mode-AFM was used to image surface morphology and root-mean-square (rms) roughness of the thin film heterostructure. The dielectric characteristic and polarization properties of the system are discussed. Large variations of lattice distortion in the consisting layers were achieved by varying the stacking sequence and superlattice periodicity. The influence of interfacial strain on enhancement of ferroelectric polarization was studied. The size dependence and the role of interfaces in the observed enhancements of the dielectric behaviors were highlighted. The tunability of about 55% was achieved in these systems and was higher than any of the single polycrystalline thin film of the constituent materials reported till date. The enhanced dielectric properties were thus discussed in terms of the interfacial strain driven polar region due to high lattice mismatch and electrostatic coupling due to polarization mismatch between individual layers. Chapter 6 deals with the dielectric response, impedance spectroscopy and the DC leakage characteristics of the superlattice structures. All the heterostructures fabricated, exhibited low frequency dispersion, similar to that of the Jonscher’s universal type of relaxation behavior. The anomalous dispersion was observed in the imaginary dielectric constant at high frequencies. A Debye type relaxation behavior was observed in the impedance analysis at low temperatures, whereas, a departure from ideal ‘Debye’ type was noticed as the temperature was increased. The leakage currents of all the heterostructures were found to be a few orders less than the homogeneous single layer thin films. A space charge limited conduction was observed in al the superlattice structures fabricated. Chapter 7 summarizes the present study and discusses about the future work that could give more insight into the understanding of the ferroelectric perovskite heterostructures.

<div>Laser-to-composite interactions are becoming increasingly common in diverse applications such as diagnostics, fabrication and machining, and weapons systems. Lasers are capable of not only performing non-contact diagnostics, but also inducing seemingly imperceptible structural damage to materials. In safety-critical venues like aerospace, automotive, and civil infrastructure where composites are playing an increasingly prominent role, it is desirable to have means of sensing laser exposure on a composite material. Self-sensing materials may be a powerful method of addressing this need. Herein, we present an exploratory study on the potential of using changes in electrical measurements as a way of detecting laser exposure to a carbon nanofiber (CNF)-modified glass fiber/epoxy laminate. CNFs were dispersed in liquid epoxy resin prior to laminate fabrication via hand layup. The dispersed CNFs form a three-dimensional conductive network which allows for electrical measurements to be taken from the traditionally insulating glass fiber/epoxy material system. It is expected that damage to the network will disrupt the electrical pathways, thereby causing the material to exhibit slightly higher resistance. To test laser sensing capabilities, a resistance baseline of the CNF-modified glass fiber/epoxy specimens was first established before laser exposure. These specimens were then exposed to an infra-red laser operating at 1064 nm, 35 kHz, and pulse duration of 8 ns. The specimens were irradiated for a total of 20 seconds (4 exposures each at 5 seconds). The resistances of the specimens were then measured again post-ablation. In this study, it was found that for 1.0 wt.% CNF by weight the average resistance increased by about 18 percent. However, this values varied for specimens with different weight fractions. This established that the laser was indeed causing damage to the specimen sufficient to evoke a change in electrical properties. In order to expand on this result, electrical impedance tomography (EIT) was employed for localization of laser exposures of 1, 3, and 5 seconds on a larger specimen, a 3.25” square plate. EIT was used to measure the changes in conductivity after each exposure. EIT was not only successful in detecting damage that was virtually imperceptible to the human-eye, but it also accurately localized the exposure sites. The post-ablation conductivity of the exposure sites decreased in a manner that was comparable to the resistance increase obtained during prior testing. Based on this preliminary study, this research could lead to the development of a real-time exposure detection and tracking system for the measurement, fabrication, and defense industries.</div>

Le travail de thèse présenté dans ce manuscrit traite du développement de dispositifs à base de dioxyde de vanadium VO₂ et de méta-surfaces dans le moyen infrarouge pour des applications passives et une intégration sur des lasers à cascade quantique (QCL). Ce travail a permis l'élaboration de nouvelles conditions de dépôt du matériau à changement de phase VO₂ par ablation laser pulsé à des températures compatibles avec les hétérostructures de III-V utilisées en optoélectronique. Les caractérisations des couches minces déposées montrent un changement de la réflectivité et de la conductivité électrique entre l'état isolant à basse température et l'état métallique à haute température autour de 68°C (341 K). Des développements ont ensuite été menés sur l'emploi d'un réseau de méta-surfaces permettant d'obtenir une couche homogène d'indice de réfraction effectif résonnant. Ces méta-surfaces sont constituées de résonateurs à anneau fendu dont la fréquence de résonance peut être ajustée par le choix de leurs paramètres géométriques et des matériaux les constituant. Une modulation optique de plus de 100cm-1 du pic de la résonance a été obtenue lors de la transition de phase avec des méta-surfaces déposées sur un film de VO₂. Ce résultat est très prometteur pour la conception de dispositifs monolithiques, robustes, compacts, accordables en fréquence et dont les propriétés optiques ne dépendent que de la température de la couche de VO₂.Enfin, ce travail étudie la fonctionnalisation des QCL dans le moyen infrarouge (7-8 µm) par des couches de VO₂ et de méta-surfaces. Il vise à comprendre l’influence des couches intégrées sur les propriétés d’émission. Afin de garantir une bonne interaction entre ces couches et le mode guidé du laser tout en ayant des pertes optiques faibles, des nouveaux guides d'onde ont été modélisés, puis les premiers QCL à base de VO₂ ont été démontrés et une température maximale de fonctionnement de 334 K a été mesurée. / The thesis work presented in this manuscript deals with the development of vanadium dioxide VO₂ and meta-surfaces based devices in the mid-infrared for passive applications and an integration on quantum cascade lasers (QCL).This work enabled the elaboration of new deposition conditions for the VO₂ phase change material by pulsed laser ablation at temperatures compatible with III-V heterostructures used in optoelectronics. The characterizations of the VO₂ coated thin films show a change in reflectivity and in electric conductivity between the insulating state at low temperature and the metallic state at high temperature around 68°C (341 K).Developments were then carried out on the use of a meta-surfaces array in order to obtain an homogeneous layer of resonant effective refractive index. These meta-surfaces are constituted by split-ring resonators, whose resonance frequency can be adjusted by choosing their geometric parameters and the materials they are made of. An optical modulation of more than 100cm-1 of the resonance peak has been obtained during the phase transition with meta-surfaces deposited on a VO₂ layer. This result is very promising for the conception of monolithic, robust, compact, frequency tunable devices and whose optical properties only depend on the VO₂ layer temperature.Finally, this work studies the functionalization of mid-infrared QCL (7-8 µm) with VO₂ and meta-surfaces layers. It aims at understanding the influence of the integrated layers on the emission properties. In order to ensure a good interaction between these layers and the laser guided mode while having low optical losses, new waveguides were modeled, then the first VO₂ based QCL have been demonstrated and a maximum operating temperature of 334 K has been measured.

The present research work mainly focuses on the fabrication and characterization of single and multilayer thin films based on Bismuth Vanadate (BVO) and Bismuth Titanate (BTO). The multi-target laser ablation technique was used to fabricate single layer thin films of BVO, BVN and BTO; and multilayers composed of BVO and BTO in different structures. The fabricated thin films exhibited dense microstructure and a sharp interface with the substrate. The lattice strain, surface roughness and grain size could be varied as functions of composition and individual layer thickness in different structure fabricated. The optical properties were studied by spectroscopic ellipsometry and optical transmission spectra. The various models that were used for ellipsometric data analysis gave an excellent fitting to the experimental data. The optical constants were determined through multilayer analyses of the films. The band gap of these films was studied by spectroscopic ellipsometry and optical transmission. The optical studies carried out on BVO-BTO bilayer indicated the presence of an interfacial layer in between the BVO and BTO layer, whose refractive index was different from that of the individual layers and is attributed to different nature of the interfacial layer. The ferroelectric nature of BVO films was confirmed by P-E hysteresis loop studies under different applied fields and at various probing frequencies. The same was corroborated via the C-V measurements of these BVO films which exhibited butterfly shaped C-V characteristics. Fatigue studies in these films indicated that the switchable polarization is essentially constant through 105 cycles, after which it starts increasing probably due to the ionic conduction in BVO thin films. The dielectric response of undoped and Nb doped BVO as well as BVBT ML thin films were studied over a wide range of temperatures. The BVO films exhibited remarkable dielectric dispersion at low frequencies especially in the high temperature regime. Further, the frequency and temperature dependence of the dielectric, impedance, modulus and conductivity spectra of these films were investigated in detail. The ac conductivity was found to obey well the double power law in case of ML, indicating the different contributions to the conductivity, the low frequency conductivity being due to the short range translational hopping and the high frequency conductivity is due to the localized or reorientational hopping motion. DC leakage conduction in BVO, BVN and BVBT ML thin films was studied over a wide range of temperatures and applied electric fields. The experimental data were analyzed in light of different models to investigate the dc conduction mechanism in these films which were broadly classified into electrode limited and bulk limited conduction processes. In the case of BVO thin films the dc leakage current exhibited an ohmic nature at low electric fields followed by an onset of the space charge limited conduction (>1). Further in case of BVN films, three distinct regions were observed in I-V characteristics signifying different types of conduction processes in these films. In case of BVBT ML thin films, bulk limited PF mechanism was found to determine the conduction behavior at moderate electric fields. At higher electric fields, a trap filled region was observed which was followed by SCL conduction at higher fields. Therefore the present observation indicates the presence of more than one bulk limited conduction process in BVBT ML thin films. BVO thin films exhibiting good structure and dense morphology were successfully prepared on p-type Si by chemical solution decomposition technique. The C-V characteristics were evaluated for Au/BVO/Si MFS structure which showed a typical high frequency feature of a conventional MFIS structure.

Semi conductors are of technological importance and attracted many of the re-searchers. ZnO belongs to the family of II-VI semiconductors and has material properties well suitable to UV light emitters, varistors, Schottky diodes, gas sensors, spintronics, ferroelectric devices and thin film transistors. It has been considered as a competitor to GaN, which belongs to the family of III-V semiconductors. This is due to the fact that ZnO of high quality can be deposited at lower growth temperatures than GaN, leading to the possibility of transparent junctions on less expensive substrates such as glass. This will lead to low-cost UV lasers with important applications in high-density data storage systems etc. One of the most popular growth techniques of ZnO is physical sputtering. As compared to sol-gel and chemical-vapor deposition, the magnetron sputtering is a preferred method because of its simplicity and low operating temperatures. Hence, detailed investigations were carried out on undoped and doped ZnO thin films primarily deposited by magnetron sputtering. The obtained results in the present work are presented in the form of a thesis. Chapter 1: A brief discussion on the crystal structure of ZnO material and its possible applications in the different areas such as Schottky diodes, spintronics, ferroelectric devices and thin film transistors are presented. Chapter 2: This chapter deals with various deposition techniques used in the present study. It includes the magnetron sputtering, thermal oxidation, pulsed-laser ablation and sol-gel technique. The experimental set up details and the deposition procedures are described in detail i.e., the deposition principle and the parameters that will affect the film properties. A brief note on the structural characterization equipments namely, X-ray diffraction, scanning electron microscopy, atomic force microscopy, transmission electron microscopy and the optical characterization equipments namely, transmission spectroscopy is presented. The transport properties of the films were studied which include Dielectric studies, impedance studies, device characterization and are discussed. Chapter 3: The optimization of ZnO thin films for Schottky diode formation and The characterization of various Schottky diodes is presented in this chapter. P-type conductivity in ZnO was implemented by the variation of partial pressure of oxygen during the sputtering and are discussed. A method to achieve low series resistance hetero-junction was achieved using thermal oxidation method and the detailed transport properties were studied. The optical investigation carried out on the ZnO thin films under various growth conditions are also presented. Chapter 4: This chapter deals with the processing, structural, electrical, optical and magnetic properties of Mn doped ZnO thin films grown by pulsed laser ablation. Structural investigations have shown that the Mn incorporation increases the c-axis length due to the relatively larger ionic size of the Mn ions. Studies conducted both at low and high concentration region of Zn1¡xMnxO thin films showed that the films are anti-ferromagnetic in nature. The transport measurements revealed that the electrical conductivity is dominated by the presence of shallow traps. Optical investigations suggested the absence of midgap absorption and confirm the uniform distribution of Mn in wurtzite structure. Chapter 5: Carrier induced ferromagnetism in Co doped ZnO thin films were studied and the results are presented in this chapter. High density targets were prepared by solid state reaction process and the thin films were deposited by pulsed laser ablation technique. Two compositions were studied and it was found that with increase in substrate temperature, c-axis length decreases. Optical studies suggested a strong mid gap absorption around 2eV and could be attributed to the d-d transitions of tetrahedral coordinated Co2+. The presence of ferromagnetism in these films makes them potential candidates for spintronics applications. Chapter 6: It has been reported in literature that o®-centered polarization will drive ferroelectric phase transition. Motivated by such results, substitution of Lithium in ZnO was studied in detail. The structural and electrical properties were investigated over a wide range of composition (0-25%). The ferroelectric studies were carried out both in metal-insulator-metal (MIM) and metal-insulator-semiconductor (MIS) configuration and are presented in this chapter. The appearance of Ferro electricity in these films makes them potential candidates for ferroelectric memory devices. Chapter 7: This chapter describes the studies conducted on Mg doped ZnO Thin films grown by multi-magnetron sputtering. The hexagonal phases of the films were evaluated. All the films exhibited c-axis preferred orientation towards (002) orientation. Micro structural evolutions of the films were carried out through scanning electron microscopy and atomic force microscopy. Ferroelectric properties were investigated in both metal-insulator-metal (MIM) and metal-insulator-semiconductor (MIS) configurations. It was observed that the Mg concentration increases the band gap and the details on optical investigations are also presented in this chapter. Chapter 8: ZnO based thin film transistors have been fabricated and characterized using ZnO as active channel layer and Mg doped ZnO as dielectric layer. Excellent leakage properties of the gate dielectric were studied and presented in this chapter. These studies demonstrated that Mg doped ZnO thin films are suitable candidates for gate dielectric applications. Conclusions: This section presents the conclusions derived out of the present work. It also includes a few suggestions on future work on this material.

System on Chip (SoC) and System in Package (SiP) are two electronic technologies that involve integrating multiple functionalities onto a single platform. When the platform is a single wafer, as in SOC, it requires the ability to deposit various materials that enable the different functions on to an underlying substrate that can host the electronic circuitry. Transition metal oxides which have a wide range of properties are ideal candidates for the functional material. Si wafer on which micro-electronics technology is widely commercialized is the ideal host platform. Integrating oxides with Si, generally in the form of thin films as required by microelectronics technology, is however a challenge. It starts with the fact that the properties of crystalline oxides to be exploited in performing various functions are direction dependent. Thus, thin films of these oxides need to be deposited on Si in certain crystallographic orientations. Even if a suitably oriented Si wafer surface were available, it does not always provide for epitaxial growth a critical requirement for controlling the crystalline orientation of thin films. This is because Si surface is covered by an amorphous oxide of Si (SiOx). Thus, during growth of the functional oxide, an ambience in which the Si itself will not oxidize needs to be provided. In addition, during thin film growth on either Si or SiOx surface stresses are generated from various sources. Stress and its relaxation are also associated with the formation and evolution of defects. Both, stress and defects need to be managed in order to harness their beneficial effects and prevent detrimental ones. Given the requirement of SoC technology and the problem associated, the research work reported in this thesis was hence concerned with the precise controlling the stress and microstructure in oxide thin films deposited on Si substrates. In order to do so a versatile, ultra high vacuum (UHV) thin film with a base pressure of 10-9 Torr was designed and built as part of this study. The chamber is capable of depositing films by both sputtering (RF & DC) and pulsed laser ablation (PLD). The system has been designed to include an optical curvature measurement tool that enabled real-time stress measurement during growth. Doped zirconia, ZrO2, was chosen as the first oxide to be deposited, as it is among the few oxides that is more stable than SiOx. It is hence used as a buffer layer. It is shown in this thesis that a change in the growth rate at nucleation can lead to (100) or (111) textured films. These two are among the most commonly preferred orientation. Following nucleation a change in growth rate does not affect orientation but affects stress. Thus, independent selection of texture and stress is demonstrated in YSZ thin films on Si. A quantitative model based on the adatom motion on the growth surface and the anisotropic growth rates of the two orientations is used to explain these observations. This study was then subsequent extended to the growth on platinized Si another commonly used Si platform.. A knowledge of the stress and microstructure tailoring in cubic zirconia on Si was then extended to look at the effect of stress on electrical properties of zirconia on germanium for high-k dielectric applications. Ge channels are expected to play a key role in next generation n-MOS technology. Development of high-k dielectrics for channel control is hence essential. Interesting stress and property relations were analyzed in ZrO2/Ge. Stress and texture in pulsed laser deposited (PLD) oxides on silicon and SrTiO3 were studied. It is shown in this thesis that stress tuning is critical to achieve the highest possible dielectric constant. The effect of stress on dielectric constant is due to two reasons. The first one is an indirect effect involving the effect of stress on phase stability. The second one is the direct effect involving interatomic distance. By stress control an equivalent oxide thickness (EOT) of 0.8 nm was achieved in sputter deposited ZrO2/Ge films at 5 nm thickness. This is among the best reported till date. Finally, the effect of growth parameters and deposition geometry on the microstructural and stress evolution during deposition of SrTiO3 on Si and BaTiO3 on SrTiO3 by pulsed laser deposition is the same chamber is described.

[pt] A pandemia da COVID-19 instaurou inúmeras pesquisas sobre a doença, a qual foi atribuída à tempestade de citocinas. Embora, as vacinas sejam eficazes para combater a disseminação da COVID-19 e, recentemente, tenha sido aprovado pela ANVISA (Agência Nacional de Vigilância Sanitária) o fármaco antiviral Paxlovid (Trade Mark), no tratamento da COVID-19, estudos sobre formas de tratamento ainda são necessários. Dentre as novas estratégias terapêuticas, a utilização de nanopartículas de ouro (AuNPs) tem se destacado devido o potencial efeito antiinflamatório. O objetivo deste trabalho foi estudar as eventuais propriedades antiinflamatórias das AuNPs, sintetizadas por ablação a laser pulsado (PLA) em água, em macrófagos RAW 264.7. Ademais, o presente trabalho visou investigar a possível ligação entre o efeito imunomodulador das nanopartículas e os produtos secundários obtidos através da reação de redução da CO2 (CO2RR) ativada por PLA em água. Nesse sentido, foram analisados a proliferação, a citotoxicidade, os níveis das espécies reativas de oxigênio (EROs) e das espécies reativas de nitrogênio (ERNs) nos macrófagos RAW 264.7 submetidas ao tratamento com as AuNPs e expostas ao lipopolissacarídeo (LPS), o qual foi utilizado como agente precursor do processo inflamatório. Em conclusão, os resultados apontaram que AuNPs na concentração de 10 (micro)g/mL não tiveram caráter citotóxico e diminuíram as EROs e ERNs. As AuNPs demonstraram promissora atividade antiinflamatórias com reduzidos valores de citotoxicidade, o que aponta para uma futura aplicação clínica. / [en] With the advent of the COVID-19 pandemic, numerous studies on the disease were initiated, a disease originated from a cytokine storm. Although vaccines are effective in combating the spread of COVID-19 and, more recently, the antiviral drug Paxlovid (Trade Mark) has been approved by ANVISA (Brazilian Health Regulatory Agency) for the treatment of COVID-19, studies on forms of treatment are still needed. Among the new therapeutic strategies, the use of gold nanoparticles (AuNPs) has been in the spotlight due to their potential antiinflammatory effect. This work aims to study the potential anti-inflammatory properties of AuNPs, synthesized by pulsed laser ablation (PLA) in water, in RAW 264.7 macrophages. Furthermore, the present work aimed to investigate the possible connection between the immunomodulatory effect of the nanoparticles and the secondary products obtained through the CO2 reduction reaction (CO2RR) activated by PLA in water. In this sense, we analyzed the proliferation, cytotoxicity, levels of reactive oxygen species (ROS) and reactive nitrogen species (RNS) in RAW 264.7 macrophages subjected to treatment with AuNPs and exposed to lipopolysaccharide (LPS), which was used as a precursor agent of the inflammatory process. In conclusion, the results showed that the AuNPs at a concentration of 10 (micro)g/mL did not have a cytotoxic character and reduced ROS and RNS. AuNPs demonstrated promising anti-inflammatory activity with reduced cytotoxicity values, which points to future clinical applications.