Thesis (M.S.)--Mississippi State University. Department of Electrical and Computer Engineering. / Title from title screen. Includes bibliographical references.

Integration of sensors and silicon-based electronics for harsh environment applications is driven by the automotive industry and the maturity of semiconductor processes that allow embedding sensitive elements onto the same chip without sacrificing the performance and integrity of the electronics. Sensor devices post-processed on top of electronics by surface micromachining allow the addition of extra functionality to the fabricated ICs and creating a sensor system without significant compromise of performance. Smart sensors comprised of sensing structures integrated with silicon carbide-based electronics are receiving attention from more industries, such as aerospace, defense and energy, due to their ability to operate in very demanding conditions. This thesis describes the design and implementation of a novel, integrated thin film temperature sensor that uses a half-bridge arrangement to measure thin film platinum sensitive elements. Processes have been developed to fabricate temperature insensitive thin film tantalum nitride resistors which can be combined with the platinum elements to form the temperature transducing bridge. This circuit was designed to be integrated with an existing silicon carbide-based instrumentation amplifier by post-CMOS processing and to be initially connected to the bond pads of the amplifier input and output ports. Thin films fabricated using the developed TaN and Pt processes have been characterized using resistive test structures and crystallographic measurements of blanket thin film layer samples, and the relationship between the measurement results obtained has been analyzed. An initial demonstration of temperature sensing was performed using tantalum nitride and platinum thin film resistor element chips which were fabricated on passivated silicon substrates and bonded into high temperature packages. The bridge circuit was implemented by external connections through a printed circuit board and the bridge output was connected to a discrete instrumentation amplifier to mimic the integrated amplifier. The temperature response of the circuit measured at the output of the amplifier was found to have sensitivity of 844 μV·°C–1 over the temperature range of 25 to 100 °C. Two integrated microfabrication process flows were evaluated in this work. The initial process provided a very low yield for contact resistance structures between TaN and Pt layers, which highlighted problems with the thin film platinum deposition process. Multiple improvement options have been identified among which removal of the dielectric layer separating TaN and Pt layers and thicker Pt film were considered and a redesign of both layout and the process flow has resulted in improved yield of platinum features produced directly on top of TaN features. Temperature sensitivity of the integrated sensor devices was found to depend significantly on parasitic elements produced by thin film platinum step coverage, the values of which were measured by a set of resistive test structures. A new microfabrication design has enabled the production of a group of integrated temperature sensors that had a sensitivity of 150.84 μV·°C–1 in the temperature range between 25 and 200 °C on one of the fabricated wafers while the best fabricated batch of sensors had a sensitivity of 1079.2 μV·°C–1.

Este trabalho tem por objetivo o estudo e o desenvolvimento de uma solução de engenharia para o mapeamento e caracterização da oclusão dentária, não somente no âmbito de sua distribuição ao longo da arcada, mas também através da mensuração da intensidade de pressão nos pontos de contato oclusal interarco. Neste sentido, empregaram-se esforços no aprofundamento do conhecimento neste campo da Odontologia, assim como, na elaboração de um sistema experimental que, utilizando sensores de pressão/força resistivos (FSR) específicos para uso odontológico, viabilizou a análise do estado da oclusão, atuando como agente facilitador no diagnóstico de desequilíbrios oclusais. Inicialmente, são apresentados e esclarecidos os principais conceitos da esfera odontológica, os quais são tomados como base para todos os projetos deste trabalho, além da abordagem referente às formas de contato entre os dentes, aos diferentes tipos de oclusão e seus problemas. Em relação ao desenvolvimento do sistema, foram projetadas duas placas de circuito impresso para interface com os sensores e elaborados o firmware de acesso ao hardware, assim como o software de gerenciamento global do sistema. Todos os blocos do circuito de condicionamento foram avaliados e as suas funcionalidades validadas. Do mesmo modo, a caracterização da resposta dos sensores e a sua homogeneidade ao longo da extensão sensível foram analisadas, demonstrando que a resistência elétrica varia de forma análoga em todas as áreas do sensor. Através de ensaios realizados com sujeito envolvido no projeto, estabeleceu-se um comparativo entre a utilização do papel carbono e o sistema desenvolvido, mostrando as vantagens na utilização do segundo, principalmente atreladas à capacidade de avaliação da intensidade dos contatos oclusais. Por fim, ainda se valendo do uso paralelo do papel carbono, foram efetuados ensaios de análise da oclusão em sujeito envolvido no projeto utilizando placa miorrelaxante, possibilitando a utilização da capacidade do sistema desenvolvido para executar ajustes precisos na placa, com a finalidade de manter o balanço de pressões oclusais entre ambos os lados da arcada. / This essay has as objective the study and development of an engineer solution for the dental occlusion mapping and characterization, not only related to the interarch occlusal contact distribution, but also through the pressure magnitude measuring in each. In this sense, was employed effort in the Odontological knowledge increasing and also in the system elaboration allowing the occlusion state evaluation and acting as an easier agent in the occlusion disturbs diagnosing using a specific pressure/force sensing resistor (FSR) for dental use. Initially the main concepts of the Odontological sphere are presented, clarified and took as a base for all the projects in this essay. Besides this, different teeth contacts shapes are shown, as well as the occlusion’s types and its problems. In the system development, two printed circuit boards were designed for sensor interfacing. The hardware access through the firmware was elaborated, even as the global system managing software. All the conditioning circuit blocks and functionalities were evaluated and validated. In the same way, the sensor’s output and its homogeneity through all the sensible extension were evaluated, showing that the sensor’s electric resistance changes in the same form in all the sensor’s areas. In addition, it was showed the advantages of the developed system over the articulation paper through trials with a subject that is part of the project, showing the capacity of the system in the occlusion contacts magnitude evaluation. Ultimately, also in an articulation paper versus the developed system comparison, it was made occlusion analysis trials with subject using a night guard for teeth grinding (bruxism), showing the system capacity of precisely adjust the night guards for pressure balance between the both arch sides.

Este trabalho tem por objetivo o estudo e o desenvolvimento de uma solução de engenharia para o mapeamento e caracterização da oclusão dentária, não somente no âmbito de sua distribuição ao longo da arcada, mas também através da mensuração da intensidade de pressão nos pontos de contato oclusal interarco. Neste sentido, empregaram-se esforços no aprofundamento do conhecimento neste campo da Odontologia, assim como, na elaboração de um sistema experimental que, utilizando sensores de pressão/força resistivos (FSR) específicos para uso odontológico, viabilizou a análise do estado da oclusão, atuando como agente facilitador no diagnóstico de desequilíbrios oclusais. Inicialmente, são apresentados e esclarecidos os principais conceitos da esfera odontológica, os quais são tomados como base para todos os projetos deste trabalho, além da abordagem referente às formas de contato entre os dentes, aos diferentes tipos de oclusão e seus problemas. Em relação ao desenvolvimento do sistema, foram projetadas duas placas de circuito impresso para interface com os sensores e elaborados o firmware de acesso ao hardware, assim como o software de gerenciamento global do sistema. Todos os blocos do circuito de condicionamento foram avaliados e as suas funcionalidades validadas. Do mesmo modo, a caracterização da resposta dos sensores e a sua homogeneidade ao longo da extensão sensível foram analisadas, demonstrando que a resistência elétrica varia de forma análoga em todas as áreas do sensor. Através de ensaios realizados com sujeito envolvido no projeto, estabeleceu-se um comparativo entre a utilização do papel carbono e o sistema desenvolvido, mostrando as vantagens na utilização do segundo, principalmente atreladas à capacidade de avaliação da intensidade dos contatos oclusais. Por fim, ainda se valendo do uso paralelo do papel carbono, foram efetuados ensaios de análise da oclusão em sujeito envolvido no projeto utilizando placa miorrelaxante, possibilitando a utilização da capacidade do sistema desenvolvido para executar ajustes precisos na placa, com a finalidade de manter o balanço de pressões oclusais entre ambos os lados da arcada. / This essay has as objective the study and development of an engineer solution for the dental occlusion mapping and characterization, not only related to the interarch occlusal contact distribution, but also through the pressure magnitude measuring in each. In this sense, was employed effort in the Odontological knowledge increasing and also in the system elaboration allowing the occlusion state evaluation and acting as an easier agent in the occlusion disturbs diagnosing using a specific pressure/force sensing resistor (FSR) for dental use. Initially the main concepts of the Odontological sphere are presented, clarified and took as a base for all the projects in this essay. Besides this, different teeth contacts shapes are shown, as well as the occlusion’s types and its problems. In the system development, two printed circuit boards were designed for sensor interfacing. The hardware access through the firmware was elaborated, even as the global system managing software. All the conditioning circuit blocks and functionalities were evaluated and validated. In the same way, the sensor’s output and its homogeneity through all the sensible extension were evaluated, showing that the sensor’s electric resistance changes in the same form in all the sensor’s areas. In addition, it was showed the advantages of the developed system over the articulation paper through trials with a subject that is part of the project, showing the capacity of the system in the occlusion contacts magnitude evaluation. Ultimately, also in an articulation paper versus the developed system comparison, it was made occlusion analysis trials with subject using a night guard for teeth grinding (bruxism), showing the system capacity of precisely adjust the night guards for pressure balance between the both arch sides.

Submitted by MARCIA ROVADOSCHI (marciar@unifra.br) on 2018-08-14T13:38:42Z No. of bitstreams: 2 license_rdf: 0 bytes, checksum: d41d8cd98f00b204e9800998ecf8427e (MD5) Dissertacao_NadirLaciDieckelMainardi.pdf: 5429138 bytes, checksum: d4be23b9d4642d6e82afe1c1a85e8489 (MD5) / Made available in DSpace on 2018-08-14T13:38:42Z (GMT). No. of bitstreams: 2 license_rdf: 0 bytes, checksum: d41d8cd98f00b204e9800998ecf8427e (MD5) Dissertacao_NadirLaciDieckelMainardi.pdf: 5429138 bytes, checksum: d4be23b9d4642d6e82afe1c1a85e8489 (MD5) Previous issue date: 2013-01-16 / This dissertation consists of a proposed interaction of existing technologies in our school with classroom content Electricity contemplating having as support concepts resulting from the perspective of Vygotsky (1997). The guiding question was: what is the contribution of the use of a virtual page in interaction with the classroom in the learning process of content on Electricity Electrical Resistors in the discipline of physics? The action was applied to third-year students "A" students with 23 members of the State College of Santo Antão of Bela Vista Caroba - PR. To accomplish this work was necessary to divide into two main phases: the first time we developed a virtual page (wikispaces) containing content Electricity headquartered initially with a controversial issue experienced by the student, causing him to interact with the simulations, virtual experiments , videos, current scientific texts and curiosities that contribute to student learning. In the second time in the classroom has developed content using electrical resistors as support for virtual page concomitantly with scientific text and slides, occurring just one student-computer interaction, student-student and student-teacher, with discussions, questions, interpretations and resolutions of the activities presented in the classroom. The methodology of qualitative observations proved efficient in the discussions among students instant access to the virtual page in the computer lab at school, but there was also efficient in the analysis of discussions and absorptions of content applied in the classroom. Three activities were prepared in the form of testing containing content electricity and applied to participants: the first questionnaire served as propellant forwarding all activities in this dissertation, his resulting demonstrated a low level of knowledge in solving exercises, with answers without nexus as usual without any scientific knowledge. In the second activity, students applied the issues between the two moments (virtual page - classroom), there were some concepts Association of Electrical Resistors more significantly, with some confusion, destabilizing the existing concepts, emerging discussions, reflections and training hypotheses of the concepts acquired in the computer room, taking the students curiosity and desire to understand and interpret the content. Applying the third activity after discussions, interactions and interpretation of students on the content presented in the classroom, it was necessary to determine whether the use of our interaction with the virtual classroom helped in the process of learning the content of Association Electrical Resistors. The results demonstrated satisfactorily in student learning through cultural mediation, appears in the interaction of ICT, teacher and classmates. In activities (testing III) developed by the students, was the domain knowledge of scientific concepts, creating stability and security in the discussions and resolutions of the exercises presented in the classroom. / A presente dissertação consiste em uma proposta de interação das tecnologias existentes em nossa escola com a sala de aula, contemplando o conteúdo de Eletricidade tendo como suporte conceitos decorrentes da perspectiva de Vygotsky (1997). A questão orientadora foi: qual a contribuição do uso de uma página virtual em interação com a sala de aula no processo da aprendizagem do conteúdo de Eletricidade em Resistores Elétricos na disciplina de Física? A ação foi aplicada em alunos do terceiro ano ―A‖ com 23 alunos integrantes do Colégio Estadual Santo Antão de Bela Vista da Caroba – PR. Para realizar este trabalho se fez necessário dividir em dois momentos principais: no primeiro momento foi desenvolvida uma página virtual (wikispaces), contendo o conteúdo Eletricidade sediado inicialmente com uma questão polêmica vivenciada pelo aluno, provocando-o a interagir com as simulações, experimentos virtuais, vídeos, textos científicos e curiosidades atuais que contribuem para aprendizagem dos alunos. No segundo momento em sala de aula se desenvolveu o conteúdo de resistores elétricos usando como apoio a página virtual concomitantemente com o texto científico e slides, ocorrendo assim uma interação entre aluno-computador, aluno-aluno e aluno-professor, com debates, questionamentos, interpretações e resoluções das atividades apresentadas em sala de aula. A metodologia utilizada de cunho qualitativo se mostrou eficiente nas observações das discussões entre os alunos no instante de acesso à página virtual no laboratório de informática da escola, como também houve a eficiência na analise das discussões e absorções do conteúdo aplicado em sala de aula. Foram elaboradas três atividades em forma de testagem contendo o conteúdo de eletricidade e aplicado aos participantes: o primeiro questionário serviu como propulsor do encaminhamento de todas as atividades desenvolvidas nesta dissertação, seu resultando demonstrou um baixo nível de conhecimento na resolução dos exercícios, com respostas sem nexo de forma usual sem nenhum conhecimento científico. Na segunda atividade, as questões aplicadas aos alunos entre os dois momentos (página virtual – sala de aula), surgiram alguns conceitos de Associação de Resistores Elétricos de forma mais significativa, com alguns equívocos, desestabilizando as concepções existentes, surgindo discussões, reflexões e formação de hipóteses dos conceitos adquiridos na sala de informática, levando os alunos a curiosidade e o desejo de entender e interpretar o conteúdo. Aplicando a terceira atividade após as discussões, interpretação e interações dos alunos sobre o conteúdo apresentado em sala de aula, houve a necessidade de verificar se o uso da página virtual em interação com a sala de aula auxiliou o processo da aprendizagem do conteúdo de Associação de Resistores Elétricos. Os resultados se manifestaram satisfatoriamente na aprendizagem dos alunos via mediação cultural, exibida na interação dos TICs, professor e colegas. Nas atividades (testagem III) desenvolvidas pelos alunos, houve domínio no conhecimento dos conceitos científicos, criando uma estabilidade e segurança nas discussões e nas resoluções dos exercícios apresentados na sala de aula.

The big question that I raise up in this dissertation is to think of the constitution and permanence of the brotherhood of Saint Benedict during the 20th century, as a collective organization of people that activate the claim religious and ethnic socialization. This research aims to analyze the practices of sociability and resistance present in brotherhood of Saint Benedict in Aracaju, State of Sergipe. I understand the ties of solidarity and the discourses of identity in the context of this brotherhood. Dialog also closely with issues relating to the theme ethnic-racial in religious contexts. With respect to the methodology, I used the articulation between research on file and direct observation. I divide this dissertation in three chapters, the first, I realize a bibliographic survey about the theme that emphasizes the studies about fraternities, the field of Anthropology and the discussion about religious practices. In the second and third chapter, delivery of an ethnographic approach emphasizing three modes of entry in the field, accompanied by interviews, first with the files where I did a search from the documentation of the brotherhood. The main documents found were the enrolment forms, the statute, the death records, a letter from the caretaker of the cemetery and the photos of the group. A second entry from the direct observation of the feast of St. Benedict, in the years 2013 and 2014, noting the aspects of sociability in this commemoration. The third entry is given in the form of space observation of the graveyard of the brotherhood. Thus, this dissertation addresses a facet little known about Aracaju: the world of brotherhoods of "black". I realized that the survival strategies of the brotherhood of Saint Benedict, the Catholic world aracajuano if retrogression on the basis of ethnicity. From the color reference that became a uniting factor of a religious group mostly recognized and self-declared blacks. I have noticed that the spaces of sociability of ethnic brotherhood of St. Benedict were composed by processions, by prestitos funeral and the festivities dedicated to the Holy One. / A grande questão que suscito nesta dissertação é pensar na constituição e permanência da irmandade de São Benedito durante o século XX como uma organização coletiva de pessoas que ativam a afirmação religiosa e étnica de socialização. Esta pesquisa tem como objetivo analisar as práticas de sociabilidades e resistências presentes na irmandade de São Benedito na cidade de Aracaju, estado de Sergipe. Busco compreender os laços de solidariedade e os discursos de identidade no contexto desta irmandade. Dialogo também intimamente com as questões referentes à temática étnico- racial em contextos religiosos. Com relação à metodologia, utilizei a articulação entre pesquisa em arquivo e observação direta. Dividi esta dissertação em três capítulos, no primeiro, realizo um levantamento bibliográfico acerca da temática que enfatiza os estudos sobre irmandades, o campo da Antropologia e a discussão sobre práticas religiosas. No segundo e terceiro capítulos, parto de uma abordagem etnográfica enfatizando três modos de entrada em campo, acompanhados de entrevistas, primeiro junto aos arquivos onde fiz uma pesquisa a partir da documentação da referida irmandade. Os principais documentos encontrados foram as fichas de inscrições, o estatuto, os registros de óbitos, uma carta do zelador do cemitério e as fotografias do grupo. Uma segunda entrada a partir da observação direta da festa de São Benedito, nos anos de 2013 e 2014, observando os aspectos das sociabilidades presentes nesta comemoração. A terceira entrada se deu na forma de observação do espaço do cemitério da referida irmandade. Desta forma, a presente dissertação aborda uma faceta pouco conhecida sobre Aracaju: o mundo das irmandades de “pretos”. Percebi que as estratégias de sobrevivência da irmandade de São Benedito, no universo católico aracajuano se perduraram em função da etnicidade. A partir da referência da cor que se tornou um elemento aglutinador de um grupo religioso majoritariamente reconhecido e auto-declarados pretos. Verifiquei que os espaços das sociabilidades étnicas da irmandade de São Benedito foram compostos pelas procissões, pelos préstitos fúnebres e as festas dedicadas ao Santo.

With the downscaling trend in CMOS technology, it has been possible to utilize the advantages of high element densities in VLSI circuits and systems. This trend has readily allowed digital circuits to predominate VLSI implementations due to their ease of scaling. However, high element density in integrated circuit technology has also entailed a decrease in the power consumption per functional circuit cell for the use of low-power and reconfigurable systems in portable equipment. Analog circuits have the advantage over digital circuits in designing low-power and compact VLSI circuits for signal processing systems. Also, analog circuits have been employed to utilize the wide dynamic range of the analog domain to meet the stringent signal-to-noise-and-distortion requirements of some signal processing applications. However, the imperfections and mismatches of CMOS devices can easily deteriorate the performance of analog circuits when they are used to realize precision and highly linear elements in the analog domain. This is mainly due to the lack of tunability of the analog circuits that necessitates the use of special trimming or layout techniques. These problems can be alleviated by making use of the analog storage and capacitive coupling capabilities of floating-gate transistors. In this research, tunable resistive elements and analog storages are built using floating-gate transistors to be incorporated into signal processing applications. Tunable linearized resistors are designed and implemented in CMOS technology, and are employed in building a highly linear amplifier, a transconductance multiplier, and a binary-weighted resistor digital-to-analog converter. Moreover, a tunable voltage reference is designed by utilizing the analog storage feature of the floating-gate transistor. This voltage reference is used to build low-power, compact, and tunable/reconfigurable voltage-output digital-to-analog converter and distributed arithmetic architecture.

Acompanha: Produto educacional: Desenvolvimento de um kit didático experimental para o ensino de resistores, capacitores e circuitos de temporização RC / Coordenação de Aperfeiçoamento de Pessoal de Nível Superior (CAPES) / O Ensino de Física tem sofrido inúmeras transformações nas últimas décadas, discute-se muito sobre a inserção de diferentes recursos didáticos em sala de aula a fim de gerar um ambiente de aprendizagem diferente do tradicional, bem como proporcionar condições de uma aprendizagem efetiva para o aluno. O sistema tradicional do ensino de Física vem perdendo aos poucos a eficácia, o significado e até mesmo o interesse por parte do aluno em buscar conhecimento. O convívio constante com as mídias de maneira inapropriada tem provocado uma imensa perda de tempo, tornando-se um adversário desleal contra o estudo, restando assim pouco tempo para a aprendizagem. Nesse sentido, esse trabalho tem como objetivo o desenvolvimento de um novo método com uma proposta experimental e investigativa, baseado na teoria de Vygotsky, visando despertar no educando o interesse e a busca pelo saber, uma vez que ele é parte principal do processo, e que a partir de seus conhecimentos prévios é que o professor introduz seu conhecimento, proporcionando melhor interação entre professor e aluno, e também propiciando o desenvolvimento cognitivo e social no ambiente escolar. O kit didático experimental desenvolvido torna-se uma ferramenta de grande valia, que possibilita ao professor trabalhar um método diferenciado onde ele poderá relacionar a parte teórica com a parte prática, possibilitando com o kit trabalhar o conteúdo de resistores e capacitores por completo, de um modo que despertará no aluno um maior interesse. A tecnologia utilizada para o desenvolvimento do kit foi a plataforma de desenvolvimento Arduino que é composta por um microcontrolador e periféricos, devido ao fácil acesso a materiais didáticos disponíveis, possibilitando a fácil reprodução do protótipo futuramente por pessoas com pouco conhecimento na área e por ser uma plataforma open-source. Esse produto desenvolvido vem ao encontro das politicas de inclusão propostas pelos governos, que tem o objetivo de incluir na sociedade pessoas com necessidades educacionais especiais, pensando nisso, essa ideia vem contribuir e dar suporte a alunos com deficiências auditiva ou visual, bem como os demais alunos do ensino regular ou até mesmo superior, que necessitam estudar o conteúdo abordado aqui. / The teaching of physics has undergone numerous transformations in the last decades, much is discussed about the insertion of different didactic resources in the classroom in order to generate a learning environment different from the traditional one, as well as to provide conditions of an effective learning for the student. The traditional system of physics teaching has gradually lost its effectiveness, meaning and even the student's interest in seeking knowledge. The constant conviviality with the media in an inappropriate way has caused an immense loss of time, becoming an unfair opponent against the study, thus leaving little time for learning. In this sense, this work aims to develop a new method with an experimental and investigative proposal, based on Vygotsky's theory, aiming to awaken in the student the interest and the search for knowledge, since it is a main part of the process, and that from their previous knowledge is that the teacher introduces their knowledge, providing better interaction between teacher and student, and also fostering cognitive and social development in the school environment. The developed experimental teaching kit becomes a valuable tool that allows the teacher to work a different method where he can relate the theoretical part to the practical part, allowing the kit to work the contents of resistors and capacitors completely, so that the student will be more interested. The technology used for the development of the kit was the Arduino development platform which is composed of a microcontroller and peripherals, due to the easy access to available didactic material, allowing the easy reproduction of the prototype in the future by people with little knowledge in the area and being a open-source platform. This developed product is in line with the inclusion policies proposed by governments, which aims to include people with special educational needs in society. With this in mind, this idea contributes to and supports students with hearing or visual impairments, as well as other students of regular or even higher education, who need to study the content covered here.

In the opening part of this thesis, the reader is briefly introduced into safety technique devices. There are basic types of security sensors discussed together with the most common methods of their connection with the security central. Further text focuses on elaborating the main topic of this thesis - the design of home security central equipped with a WiFi interface.

This thesis reports both the optimizations of the vanadium oxide (VOx) thin film as an active infrared detector material by the magnetron sputtering deposition method and its use during fabrication of proper resistors for the microbolometers. Vanadium oxide is a preferred material for microbolometers, as it provides high TCR value, low noise, and reasonable resistance, and a number of high-tech companies have used this material to obtain state-of-the-art microbolometer arrays. This material is first used in microbolometers by Honeywell, who provides its recipe with license agreements, and there is not much information in the literature for its deposition recipe. This is the first study at METU for development of vanadium oxide thin film for microbolometers. The VOx material deposition studies started by identifying the deposition parameters of the magnetron sputtering system in order to obtain proper VOx resistors for the readout electronics. The obtained recipe includes high temperature deposition conditions of VOx, however, this causes a diffusion problem on the electrodes, preventing to obtain a good contact to VOx. Also, high oxygen level in the depositions makes a contamination on the electrodes. A number of studies were done to determine a proper electrode material which is proper with the deposition conditions of the VOx. Characterization of the vanadium oxide samples is done by XRD and XPS measurements to see the relation between the phases and resistivity of the vanadium oxide. It is known that V2O5 phase provides a high TCR and resistivity value, and the XRD results show that this phase is dominant in the highly-oxygen doped or annealed resistors. The TCR and noise measurements are done using resistors implemented with the developed VOx film, after the etching processes of the both VOx and the electrodes are optimized. The contamination on the electrodes is prevented by the help of a newly designed process. The TCR measurement results show that annealing of the resistors affect the TCR values, i.e., increasing the annealing duration increases the TCR values of the resistors. Two different resistors with different deposition conditions are annealed to see the effect of annealing, where TCR results of the resistors are -0.74%/K and -0.8 %/K before annealing. The TCR values of these resistors increase to -1.6 %/K and -4.35 %K, respectively, after annealing in same conditions, showing that both the deposition conditions and annealing change the TCR significantly. Although good TCR values are obtained, the noise values of the VOx resistors are much higher than the expected values, which suggest a further study to determine the cause of this noise.