This diploma thesis deals with the optimization of ultra-high vacuum scanning electron microscope - UHV SEM, which is developed within the Amispec project in cooperation with BUT, Institute of Scientific Instruments of the Czech Academy of Science and Tescan Brno, s.r.o. The theoretical part deals with the description of the actual state of the developed equipment and the research of competing systems. The next part describes the optimization of the sample holder and the pallet receptor for studying nanostructures over a wide range of temperatures. Part of the optimization is the sapphire thermal diode development and experimental verification of the functionality of the designed components. This is followed by the verification of the functionality of the whole system for the transport of samples to the UHV area, deposition with effusion cell and in-situ observations.

This thesis is focused on the environmental scanning electron microscopes including a description of the basic physical mechanisms. It describes the design and realization of the electrode ionization detector system suitable for the detection of signal electrons with a greater proportion of secondary electrons. It also deals with simulations of trajectories of electrons in the electrostatic field of the detector, and with verification of the functionality of the detector in the environment of water vapors in the specimen chamber of the electron microscope.

This thesis deals with the simulation of fluid dynamics in environmental scanning electron microscope and evaluate solvers setup, the degree of discretization, choice of turbulent model and proposal optimal design of environmental scanning electron microscope. The theoretical part describes the issue of environmental scanning electron microscopy, software SolidWorks and ANSYS Fluent, basic equations describing fluid status, fluid turbulence, the mean free path of molecules and electron scattering. The practical part of the thesis is to create the model of environmental scanning electron microscope AQUASEM II in CAD system SolidWorks and simulation of fluid flow in the sample chamber before aperture PLA1 by ANSYS Fluent. A series of simulations provided the perfect setting solver. These knowledge are used in the second stage of the practical part, where is proposed optimal shape of the table sample and the input aperture PLA1.

Die Anatomie des Holzes stellt eine entscheidende Einflussgröße bei einer Vielzahl holztechnologischer Prozesse dar. Der Beitrag soll mit Hilfe rasterelektronenmikroskopischer Bildtafeln den anatomischen Bau des Holzes der Weiß-Eichen anschaulich vermitteln.

This master thesis is divided into two parts, one pedagogical and one engineering. The purpose of the pedagogical part of this master thesis was to investigate how students learn during projects. At the Royal Institute of Technology in Stockholm, three larger student projects occurred where the students themselves developed a probe that was launched into the atmosphere. The supervisors of the projects wanted to find out how the students learn during the project. The thesis includes in-depth interviews with current and former university students. In order to compare and gain new perspectives on learning,the study also included interviews with high school students to identify their corresponding experiences of learning in their final projects in Swedish upper secondary school. The result from this study shows that the students learn through participating inactivities, collaboration and communication. Giving the students responsibility, a mutual goal and an important assignment makes them collaborate and learn from experience through reflection. The purpose of the engineering part of this master thesis was to investigate samples that were collected during the Arctic Summer Cloud Ocean Study in the summer of 2008. The samples were studied by using a scanning electron microscope. The results of the thesis are consistent with former studies on samples collected in Arctic. The images from the microscope showed microgels and how the gels assembled into larger particles, particles which can play a crucial role in the formation of clouds.

>Magister Scientiae - MSc / The growth of the Internet has led to many interesting developments for both educational and commercial purposes. In this project an attempt was made to use the Internet for a research purpose to facilitate the determination of the thermal stability of diffusion barriers. Another purpose of this thesis is to investigate the teaching and training use of the Internet through the development of online interactive tools and activities as well as materials. The training aspects are mentioned as it is hoped that this thesis can serve as a form of documentation of the use of the Internet, while the central part was the determination of thermal stability of TiN, TaN and TiW diffusion barriers on Ag. The fact that most advanced instruments are computer driven or can be interfaced with a computer was exploited to set up a virtual laboratory facility through which sophisticated and scarce instrumentation can be remotely accessed. The major piece of equipment that forms part of the laboratory is a four-point probe furnace at Arizona State University, Tempe, USA. The Internet made it possible to use the facility to perform an online experiment to determine the effectiveness of different diffusion barriers for silver metallisation. This was accomplished by measuring the resistance of the different samples remotely over the Internet through the control of the four-point probe furnace at Arizona State University. Four types of analysis were used to determine the thermal stability of the diffusion barriers, namely the Scanning Electron Microscopy, Rutherford Backscattering Spectrometry, X-Ray Diffraction and resistivity measurements. Similar facilities exist at Oak Ridge National Laboratory, Tennessee, USA, where a range of different electron microscopes can be accessed remotely via the Internet. The measurements of the diffusion barriers form the main part of this work. However, the other aspects required for the use of the Internet in such a system, such as the development of a website to receive and upload scanning electron microscopy (SEM) images, the development of the virtual scanning electron microscope and the learning of the Virtual Reality Markup Language are also included.

Die Anatomie des Holzes stellt eine entscheidende Einflussgröße bei einer Vielzahl holztechnologischer Prozesse dar. Der Beitrag soll mit Hilfe rasterelektronenmikroskopischer Bildtafeln den anatomischen Bau des Holzes der Rot-Buche vermitteln.

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