SiO2 solutions were prepared from tetraethylortho-silicate (TEOS) by using the sol-gel process to fabricate dielectric materials of the insulator. We weighed different weight of TEOS in the solution and looked for the suitable conditions which easily fabricate the thin film. Then, we tried to add organic dispersants ( Octyl Phenol Ethoxylate ) in the SiO2 solution for the purpose of making molecules dispersed in the solution uniformly. After being a membrane, it could improve the roughness to make it more smooth. We used AFM to measure the root-mean square (RMS). The purpose of measurement was less than 1nm. Then we used these materials to make metal-insulator-metal (MIM) structures. And the measurement showed the leakage current was 10 times less than that without adding it in the solution. After that, we applied the thin film to the insulator of the thin film transistor (TFT). Pentacene of the semiconductor layer was thermally deposited and the thickness was about 50nm. Because the interface between the insulator and the semiconductor could change the arrangement of Pentacene, so we used O2 plasma to improve the interface. The process could make the molecules arrange regularly and influence the carrier mobility, and that can let us get the characteristic of the TFT.

Aggressive downscaling of complementary metal-oxide-semiconductor (CMOS) transistors has pushed Si-based transistors to their limit. III-V materials have much higher electron mobility compared to Si, which can potentially provide better device performance. Therefore, III-V semiconductor materials have been actively investigated as alternative channel materials, which can extend Moore’s law on CMOS scaling beyond the 22 nm node not only by relying on scaling. Meanwhile, conventional silicon dioxide cannot easily meet the requirement for the scaling of the equivalent oxide thickness; as a result, various high dielectric constant (high-k) materials have been incorporated onto the III-V semiconductor substrate. Nevertheless, the key challenges for high-k/III-V MOSFETs still need to be solved in order to implement high performance high-k/III-V MOSFETs. Those challenges are the lack of high quality and thermodynamically stable insulators that passivate the gate dielectric/III-V interface, compatible III-V p-type MOSFETs, and reliability issue of III-V MOSFETs, etc. The main focus of this dissertation is to develop proper fabrication processes and structures for III-V MOSFETs devices that result in good interface quality and high device performance. Firstly, we studied the effect of interfacial chemistry on ZrO2/InGaAs gate stack comprehensively, comparing ALD ZrO2 with H2O vs. O3 as the oxidizer. We found that the amount of oxygen is critical to form a good interface. Excessive oxygen concentration, e. g. using O3 as the ALD precursor, induces III-V native oxides at the interface. The second part of this dissertation focuses on the III-V MOSFETs with various IPLs. Various IPLs have been demonstrated, for example, a thin PVD Si IPL, and ALD Al2O3, HfAlOx, and ZrAlOx. Those IPLs are demonstrated to be effective interfacial dielectric layers to improve device performance, including frequency dispersion, SS, Ion, effective channel mobility, and reliability. The third part of this study highlights a novel CF4 post-gate plasma treatment on III-V MOSFETs. Fluorine incorporation was demonstrated on various high-k/III-V gate stacks and achieved significant improvements, including Al2O3/In0.53Ga0.47As, Al2O3/InP, HfO2/In0.53Ga0.47As, and HfO2/InP. Detailed physical analysis, electrical characterization and device performance were carried out. With F incorporation, we have successfully developed excellent interface quality of high-k/III-V MOSFETs. As a result, high-performance III-V MOSFETs have been realized. Finally, emerging non-volatile memories, RRAMs, have been demonstrated. We addressed its conducting mechanism by conducting various experiments and purposed a model for SiOx RRAMs: the conducting filament is randomly formed within the SiOx at the sidewall edge, depending on pre-existing defects. Moreover, the rupture/recovery could occur anywhere along the conducting filament, depending on a random process that determines the location of the weak spot along the conducting filament. In addition, we improved SiO2-based RRAM by incorporating a thin silicon layer onto its sidewall. This technique significantly reduced the electroforming voltage and instability of HRS current of SiO2-based RRAMs. Consequently, a tri-state pulse endurance performance over 106 cycles has been demonstrated and the data stored had good read disturb immunity and thermal disturbance. / text

Notre étude porte sur la fabrication des micro-supercondensateurs à base d'électrodes hiérarchiques à large surface spécifique. Ces électrodes hiérarchiques combinent des approches top down et bottom up afin de développer des surfaces spécifiques importantes en cumulant les gains des microstructures 3D (top down - gravure) et des nanofils (bottom up - croissance). Des microstructures 3D usinées dans un substrat de silicium (microtubes / micropiliers / micromurs) constituent le socle de base de ces électrodes hiérarchiques. Deux volets ont été donc explorés pour décorer ces microstructures 3D par des nanofils. La première voie est basée sur la synthèse hydrothermale des nanofils de ZnO à partir d'une couche de germination nanométrique déposée par ALD sur ces microstructures 3D. La seconde voie explorée s'articule autour d'un procédé de recuit rapide (< 10 min) à haute température (1000 °C) d'un empilement SiO2/Pt. Ce recuit rapide permettait la formation des nanofils de silice (SiO2). Les matériaux pseudocapacitifs ont été ensuite déposés par voie électrolytique sur ces électrodes hiérarchiques. Le procédé d'élaboration de ces électrodes était couplé à celui de fabrication des MSCs complets afin d'obtenir des densités d'énergie surfaciques encore jamais atteintes à ce jour (>100 µWh/cm2) en maintenant les performances en densité de puissance raisonnables (> 10 mW/cm2) par l'utilisation des couches minces (-200 nm). Cette thèse a été réalisée dans 3 laboratoires du RS2E : l'IMN, l'ICGM et l'IEMN. / Our study focuses on the fabrication of micro-supercapacitors based on hierarchical electrodes with a large surface area. These electrodes combine top down and bottom up approaches in order to develop important specific area by combining the surface gain of the 3D microstructures (top down / etching) and the nanowires (bottom up / growth). 3D microstructures etched within silicon substrate (microtubes / micropiliers / micromurs) forme the base of these hierarchical electrodes. Two aspects was explored to decorate 3D microstructures with nanowires. The first route is based on the hydrothermal synthesis of ZnO nanowires from a nanometric seed layer deposited by ALD on these 3D microstructures. The second explored route is based on a fast annealing process (<10 min) at high temperature (1000 ° C) of a SiO2 / Pt stack. This rapid annealing allowed therefore the formation of silica nanowires. The pseudocapacitive materials was then deposited electrolytically on these hierarchical electrodes. The method of elaboration of these electrodes was coupled with that of manufacturing complete MSCs in order to obtain high surface energy densities never before reached (> 100 uWh / cm2) while maintaining reasonable power density performances. (> 10 mW / cm2) by the use of thin films (~ 200 nm). This thesis was conducted between 3 laboratories of the RS2E: IMN, ICGM and IEMN.

Este trabalho teve como objetivo a combinação de ânodos e eletrólitos otimizados, para a formação de células a combustível de etanol direto (DEFC), operantes em elevadas temperaturas (130 ºC). Como materiais de ânodo, foram produzidos eletrocatalisadores baseados em PtSn/C, com diversas razões atômicas Pt:Sn, preparados pelo método do poliol modificado, essa metodologia possibilita a produção de eletrocatalisadores auto-organizados com estreita distribuição de tamanhos de partículas e elevado grau de liga. Os eletrocatalisadores foram caracterizados por DRX e stripping de CO. Os resultados mostraram que esses materiais apresentaram elevado grau de liga e Eonset de oxidação de CO em potenciais menores do que os materiais comerciais. Como eletrólito, foram sintetizados híbridos Nafion-SiO2 com a incorporação do óxido diretamente nos agregados iônicos de diversos tipos de membranas Nafion. Os parâmetros de síntese, tais como o solvente em meio solgel, a espessura da membrana, e a concentração do precursor de sílica foram avaliados em termos do percentual de sílica incorporada e da estabilidade mecânica do híbrido. Por fim, ânodos e eletrólitos otimizados foram avaliados em DEFCs nas temperaturas de 80 e 130 ºC. Os resultados mostraram um significativo incremento no desempenho de polarização (122 mW cm-2), resultado da aceleração na taxa de oxidação de etanol devido ao material de ânodo otimizado e do aumento de temperatura de operação, uma vez que o uso de eletrólitos híbridos possibilita o aumento da temperatura sem perdas de condutividade. Nesse sentido, a combinação de eletrodos e eletrólitos otimizados é uma alternativa promissora para o desenvolvimento de tais dispositivos. / This work has as objective to evaluate anodes and electrolytes in direct ethanol fuel cells (DEFC) operating at high temperature (130 ºC). As anode materials, electrocatalysts based on PtSn/C were prepared by Modified Polyol Method with various Pt:Sn atomic ratios. Such methodology promotes selforganized electrocatalysts production with narrow particle size distribution and high alloying degree. The eletrocatalysts were characterized by XRD, and CO stripping. The results showed that these materials presented high alloying degree and Eonset CO oxidation at lower potential as commercial materials. As electrolyte, Nafion-SiO2 hybrids were synthesized by sol-gel reaction, by the incorporation of oxide directly into the ionic aggregates of various kinds of Nafion membranes. The synthesis parameter, such sol-gel solvent, membrane thickness and silicon precursor concentration were studied in terms of silica incorporation degree and hybrid mechanical stability. Finally, the optimized anodes and electrolytes were evaluated in DEFC operating at 80 130 ºC temperature range. The results showed a significant improvement of the DEFC performance (122 mW cm-2), resulted from the acceleration of ethanol oxidation reaction rate due to anode material optimization and high temperature operation once the use of hybrids possibilities the increase of temperature without a significant conductivity loses. In this sense, the combination of optimized electrodes and electrolytes are a promising alternative for the development of these devices.

Os polímeros têm sido usados em áreas diferentes, como indústrias automotivas, eletrônicas e de construção civil. A poliamida 6 (PA 6) é um dos principais plásticos de engenharia com aplicações em diversas áreas produtivas, devido as suas propriedades térmicas, mecânicas e a estabilidade dimensional. O objetivo principal deste trabalho foi estudar a potencialidade do uso do dióxido de silício coloidal (SiO2) como carga em substituição ao talco, estudando o efeito da radiação ionizante em suas propriedades. O SiO2 é uma substância amorfa com baixa densidade que tem potencial para ser usado como carga mineral em substituição ao talco na matriz da resina de PA 6. Atualmente o talco é a carga mineral mais utilizada pelas indústrias, por isto vem sofrendo redução de suas reservas ao longo dos anos. Este estudo foi desenvolvido a partir da preparação de um \"masterbeach\" de PA 6 com SiO2. Posteriormente, este \"masterbeach\" foi fracionado em diferentes porcentagens em uma matriz de PA 6. Os corpos de prova das amostras foram processados em uma extrusora dupla rosca, injetados e irradiados no acelerador de elétrons para estudar o efeito da radiação ionizante no compósito de PA 6 com diferentes porcentagens de SiO2. Assim sendo, as propriedades destes compósitos foram analisadas e comparadas com as propriedades das amostras de PA6 com talco. Os resultados mostraram que a utilização do SiO2 como carga para a poliamida 6 é tecnicamente viável, uma vez que suas propriedades foram semelhantes ao compósito de PA 6 com talco. A irradiação dos compósitos estudados apresentou melhorias principalmente nas propriedades térmicas e mecânicas. / Polymers have been used in different fields, such as automotive, civil construction and electronics industries. Polyamide 6 (PA 6) is one of the main engineering plastics with several productive applications areas. By the same token, there was an interest in improving their thermal, mechanical and dimensional stability properties. The main objective of this work was to study the potentiality of colloidal silicon dioxide such as filler. According to literature, SiO2 is an amorphous substance with low density. In addition, this material has the potential to be used as a mineral filler to replace the talc in the PA 6 resin matrix. Therefore, SiO2 load was compared to the mineral filler talc which is currently used by industries. Consequently, their reservations are decreasing all over the years. Indeed, these studies were developed from colloidal silicon dioxide with PA 6 the masterbatch elaboration. In addition, the masterbatch was fractionated in different percentages in a PA 6 matrix. It is important to emphasize that all samples were injected and irradiated by an electrons accelerator. Furthermore, the effect of ionizing radiation on the PA 6 composite in different SiO2 percentages was studied. In short, radiation interacts with the polymer by transferring energy to a polymer chain causing modifications that are interfering with its properties. Thus, the mechanical and thermal properties of these composites were measured. In this manner, the irradiation composite studied in that research brought improvements in the thermal and mechanical properties evaluated. In conclusion, results have shown that the use of colloidal silicon dioxide in polyamide 6 composite is technically feasible load to replace talc.

Este trabalho teve como objetivo a combinação de ânodos e eletrólitos otimizados, para a formação de células a combustível de etanol direto (DEFC), operantes em elevadas temperaturas (130 ºC). Como materiais de ânodo, foram produzidos eletrocatalisadores baseados em PtSn/C, com diversas razões atômicas Pt:Sn, preparados pelo método do poliol modificado, essa metodologia possibilita a produção de eletrocatalisadores auto-organizados com estreita distribuição de tamanhos de partículas e elevado grau de liga. Os eletrocatalisadores foram caracterizados por DRX e stripping de CO. Os resultados mostraram que esses materiais apresentaram elevado grau de liga e Eonset de oxidação de CO em potenciais menores do que os materiais comerciais. Como eletrólito, foram sintetizados híbridos Nafion-SiO2 com a incorporação do óxido diretamente nos agregados iônicos de diversos tipos de membranas Nafion. Os parâmetros de síntese, tais como o solvente em meio solgel, a espessura da membrana, e a concentração do precursor de sílica foram avaliados em termos do percentual de sílica incorporada e da estabilidade mecânica do híbrido. Por fim, ânodos e eletrólitos otimizados foram avaliados em DEFCs nas temperaturas de 80 e 130 ºC. Os resultados mostraram um significativo incremento no desempenho de polarização (122 mW cm-2), resultado da aceleração na taxa de oxidação de etanol devido ao material de ânodo otimizado e do aumento de temperatura de operação, uma vez que o uso de eletrólitos híbridos possibilita o aumento da temperatura sem perdas de condutividade. Nesse sentido, a combinação de eletrodos e eletrólitos otimizados é uma alternativa promissora para o desenvolvimento de tais dispositivos. / This work has as objective to evaluate anodes and electrolytes in direct ethanol fuel cells (DEFC) operating at high temperature (130 ºC). As anode materials, electrocatalysts based on PtSn/C were prepared by Modified Polyol Method with various Pt:Sn atomic ratios. Such methodology promotes selforganized electrocatalysts production with narrow particle size distribution and high alloying degree. The eletrocatalysts were characterized by XRD, and CO stripping. The results showed that these materials presented high alloying degree and Eonset CO oxidation at lower potential as commercial materials. As electrolyte, Nafion-SiO2 hybrids were synthesized by sol-gel reaction, by the incorporation of oxide directly into the ionic aggregates of various kinds of Nafion membranes. The synthesis parameter, such sol-gel solvent, membrane thickness and silicon precursor concentration were studied in terms of silica incorporation degree and hybrid mechanical stability. Finally, the optimized anodes and electrolytes were evaluated in DEFC operating at 80 130 ºC temperature range. The results showed a significant improvement of the DEFC performance (122 mW cm-2), resulted from the acceleration of ethanol oxidation reaction rate due to anode material optimization and high temperature operation once the use of hybrids possibilities the increase of temperature without a significant conductivity loses. In this sense, the combination of optimized electrodes and electrolytes are a promising alternative for the development of these devices.

Os polímeros têm sido usados em áreas diferentes, como indústrias automotivas, eletrônicas e de construção civil. A poliamida 6 (PA 6) é um dos principais plásticos de engenharia com aplicações em diversas áreas produtivas, devido as suas propriedades térmicas, mecânicas e a estabilidade dimensional. O objetivo principal deste trabalho foi estudar a potencialidade do uso do dióxido de silício coloidal (SiO2) como carga em substituição ao talco, estudando o efeito da radiação ionizante em suas propriedades. O SiO2 é uma substância amorfa com baixa densidade que tem potencial para ser usado como carga mineral em substituição ao talco na matriz da resina de PA 6. Atualmente o talco é a carga mineral mais utilizada pelas indústrias, por isto vem sofrendo redução de suas reservas ao longo dos anos. Este estudo foi desenvolvido a partir da preparação de um \"masterbeach\" de PA 6 com SiO2. Posteriormente, este \"masterbeach\" foi fracionado em diferentes porcentagens em uma matriz de PA 6. Os corpos de prova das amostras foram processados em uma extrusora dupla rosca, injetados e irradiados no acelerador de elétrons para estudar o efeito da radiação ionizante no compósito de PA 6 com diferentes porcentagens de SiO2. Assim sendo, as propriedades destes compósitos foram analisadas e comparadas com as propriedades das amostras de PA6 com talco. Os resultados mostraram que a utilização do SiO2 como carga para a poliamida 6 é tecnicamente viável, uma vez que suas propriedades foram semelhantes ao compósito de PA 6 com talco. A irradiação dos compósitos estudados apresentou melhorias principalmente nas propriedades térmicas e mecânicas. / Polymers have been used in different fields, such as automotive, civil construction and electronics industries. Polyamide 6 (PA 6) is one of the main engineering plastics with several productive applications areas. By the same token, there was an interest in improving their thermal, mechanical and dimensional stability properties. The main objective of this work was to study the potentiality of colloidal silicon dioxide such as filler. According to literature, SiO2 is an amorphous substance with low density. In addition, this material has the potential to be used as a mineral filler to replace the talc in the PA 6 resin matrix. Therefore, SiO2 load was compared to the mineral filler talc which is currently used by industries. Consequently, their reservations are decreasing all over the years. Indeed, these studies were developed from colloidal silicon dioxide with PA 6 the masterbatch elaboration. In addition, the masterbatch was fractionated in different percentages in a PA 6 matrix. It is important to emphasize that all samples were injected and irradiated by an electrons accelerator. Furthermore, the effect of ionizing radiation on the PA 6 composite in different SiO2 percentages was studied. In short, radiation interacts with the polymer by transferring energy to a polymer chain causing modifications that are interfering with its properties. Thus, the mechanical and thermal properties of these composites were measured. In this manner, the irradiation composite studied in that research brought improvements in the thermal and mechanical properties evaluated. In conclusion, results have shown that the use of colloidal silicon dioxide in polyamide 6 composite is technically feasible load to replace talc.

No description available.

A metal-insulator-metal (MIM) device is used to rectify high frequency radiation received through an antenna coupled to it. In this study, a Ta-SiO2-Ta MIM device was fabricated and characterized. SiO2 layers with different thicknesses of 2nm, 5nm and 8nm were deposited and evaluated both electrically and optically. Tantalum was deposited using a sputtering system, while the oxide was evaporated using an E-beam evaporator. A Keithley 4200-SCS system combined with a four-probe station was adopted to measure both current-voltage and capacitance-voltage (C-V) characteristics. The I-V curves for all MIM devices were almost linear except the one with 8nm of SiO2 exhibited some nonlinearity. The C-V measurement that was carried out at AC frequency showed changing resistance for all samples and the resistance decreased as the thickness decreased. However, the E-beam SiO2 was found not to be a desirable oxide for MIM application due to the existence of many defects. / Materials Engineering

Orientador: Yoshitaka Gushikem / Tese (doutorado) - Universidade Estadual de Campinas, Instituto de Química / Made available in DSpace on 2018-08-20T16:56:50Z (GMT). No. of bitstreams: 1 Canevari_ThiagodaCruz_D.pdf: 2821542 bytes, checksum: 1a2c7ff35fcd8e34d5867b81b4bb960b (MD5) Previous issue date: 2012 / Resumo: Este trabalho tem como objetivo sintetizar e caracterizar três materiais diferentes obtidos pelo processo sol-gel: SiO2/SnO2, SiO2/SnO2/Sb2O5 e o filme de Nb2O5 formado sobre a superfície do material cerâmico SiO2/C e utilizá-los como matriz no desenvolvimento de sensores eletroquímicos. O óxido misto, SiO2/SnO2, foi sintetizado utilizando como fonte de SnO2, SnCl4.5H2O, utilizando diferentes catalisadores ácidos HCl e HF (F-). As diferenças estruturais e morfológicas apresentadas pelos óxidos mistos, SiO2/SnO2, em virtude do uso de diferentes catalisadores ácidos, foram investigadas por meio das isotermas de adsorção/dessorção de N2, espectroscopia de fluorescência de raios X, difração de raios X, espectroscopia na região do infravermelho, microscopia eletrônica de transmissão, espectroscopia fotoeletrônica de raios X (XPS), medidas de condutividade elétrica e medidas eletroquímicas visando a utilização destes óxidos mistos como matriz suporte para desenvolvimento de sensores eletroquímicos. O material, SiO2/SnO2/Sb2O5, foi obtido por meio da incorporação do Sb2O5 sobre a superfície do óxido misto, SiO2/SnO2, previamente sintetizado utilizando como fonte de SnO2, o dibutildiacetato de estanho. Este recobrimento foi realizado utilizando, CH2Cl2 seco, em atmosfera inerte, pela técnica de &quot;Enxerto¿. O material, SiO2/SnO2/Sb2O5, foi caracterizado por meio da isoterma de adsorção/dessorção de N2, espectroscopia de fluorescência de raios X, microscopia eletrônica de varredura (MEV), espectroscopia de energia dispersiva (EDS) e espectroscopia fotoeletrônica de raios X (XPS). Sobre este material foi imobilizado o corante catiônico, azul de meldola, no qual foi preparado um eletrodo de disco rígido com objetivo de estudar a eletrooxidação do cofator NADH utilizando as técnicas de voltametria cíclica e cronoamperometria visando o desenvolvimento de um biossensor eletroquímico. A formação do filme de Nb2O5 sobre a superfície do material carbono cerâmico SiO2/C, utilizando a técnica de spin-coating, foi realizado após o material SiO2/C ser sintetizado utilizando o processo sol-gel. O filme de Nb2O5 preparado foi caracterizado utilizando a técnica de microscopia eletrônica de varredura (MEV), espectroscopia de energia dispersiva (EDS) e espectroscopia fotoeletrônica de raios X (XPS). Com este material foi preparado um eletrodo de disco rígido com objetivo de estudar a eletrooxidação dos isômeros fenólicos, hidroquinona e catecol na presença de resorcinol utilizando a técnica de voltametria de pulso diferencial / Abstract: This work describes the synthesis and characterization of three different materials: SiO2/SnO2, SiO2/SnO2/Sb2O5 and the film of Nb2O5 formed on the surface of the ceramic material SiO2/C obtained by sol-gel process and to use them as matrix in the development of electrochemical sensors. The mixed oxides, SiO2/SnO2, were synthesized using as source of SnO2, SnCl4.5H2O, using different acid catalysts HCl and HF (F). The structural and morphological differences provided by mixed oxides, SiO2/SnO2, due to the use of different catalysts were evaluated by using several like area superficial BET technique, ray X fluorescence spectroscopic, ray X diffraction, IV spectroscopic, transmission electron microscopic (TEM), ray X spectroscopic photoelectron excited (XPS) and electrical conductivity and electrochemical measurements in order to use these mixed oxides as matrix support for development of electrochemical sensors. The material SiO2/SnO2/Sb2O5 was obtained by incorporation of Sb2O5 on the surface of the mixed oxide SiO2/SnO2, previously synthesized using as source of SnO2, dibutildiacetate of tin. This coating was performed using, CH2Cl2 dry, in inert atmosphere, using the technique of "Grafting." The SiO2/SnO2/Sb2O5 material was characterized using area superficial BET technique, ray X fluorescence spectroscopic, scanning electron microscopic (SEM), energy dispersive spectroscopic (EDS) and ray X spectroscopic photoelectron excited (XPS). On this material was immobilized on the cationic dye Meldola Blue, which was prepared in a rigid disk electrode to study the electrooxidation of the cofactor NADH using cyclic voltammetry and chronoamperometry technique for the development of an electrochemical biosensor. The formation of Nb2O5 film on the surface carbon ceramic material SiO2/C, using the technique of spin-coating was carried out after material for SiO2/C is synthesized using the sol-gel process. Nb2O5 film prepared was characterized using scanning electron microscopic (SEM), energy dispersive spectroscopic (EDS) and ray X spectroscopic photoelectron excited (XPS). With this material was prepared a disc rigid electrode in order to study the electrooxidation of phenolic isomers, hydroquinone and catechol in the presence of resorcinol using differential pulse voltammetry technique / Doutorado / Quimica Inorganica / Doutor em Ciências