A semiconductor optical source monolithically integrated with a surface acoustic wave (SAW) Bragg-cell to operate as a functional device is proposed in this thesis. The practical structure of such an integrated device is demonstrated and design guidelines are presented. Compared with conventional optical beam processed devices, this functional integrated semiconductor optical source (FISOS) is revised to be compact in size, flexible in function and potentially robust in performance. <br /> The FISOS is analyzed as two sub-divisions, optical source and acoustic processor, which have the common substrate structure. The optical beams excited from the optical source part of the device undergoes a scattering in the Bragg grating formed by SAWs that are generated by an IDT positioned on top of the acoustic processing part of device. By altering the property (power, frequency, etc.) of the SAW, versatile functionalities such as modulation, filtering, beam steering and so on of the optical beams can be realized in this optical source device. <br /> A multilayer structure based on GaN/InGaN MQWs grown on sapphire is designed for the FISOS to be blue light emitting and efficiently launching SAWs. An etch-down technique employed in the SAW processing part is taken to improve the overlap between the optical and acoustic waves and then the interaction efficiency. Optimizations to the geometrical dimensions of the FISOS, such the width of the ridge waveguide, the position of the IDT and the etching depth, etc., are discussed in the given structure. <br /> Numerical models are investigated to access the operational characteristics and then to provide design guidelines for the proposed integrated device. The Bragg diffraction of optical waves occurring within the acoustic waves in the proposed structure are simulated as a two-dimensional interaction between two guided optical modes and an acoustic surface wave. <br /> The modal distributions and propagation velocities of SAWs in a multilayer system are calculated using Adler’s matrix method. The electrical characteristics of an IDT, such as impedance, insertion loss, electromechanical constant and so on are also discussed. <br /> Transverse and lateral optical modes in the given multilayer structure are analyzed by the transfer matrix method. The interaction of optical waves and acoustic waves are modeled using the rigorous grating diffraction theory. Starting from Floquet’s theory, the well-known coupled-wave method and modal method can both be derived from the rigorous grating diffraction theory. Discussions of some useful approximate methods are also presented. In this thesis, the simulations of the acoustooptic interaction are performed using the coupled-wave method. <br /> From the simulation results, the angular distribution profile and spatial profile of the output of the FISOS are evaluated. An improvement to the expression of the diffraction efficiency in such an integrated device is proposed. The so-called beam diffraction efficiency gives a more complete measure to the acoustooptic diffraction and is used to investigate the features of FISOS different from conventional acoustooptic devices. Contour plots of the beam efficiency varying with acoustic frequency and power in a FISOS is demonstrated to be a convenient and powerful approach in the device design. <br /> The operational performances of an integrated deflector and a modulator in FISOS are analyzed to investigate the feasibility of FISOS. The trade-off of the efficiency-resolution in an integrated deflector design is discussed. Short interaction length, high acoustic frequency and narrow ridge are proved to be helpful for a larger number of resolvable spots with a fairly high efficiency. In the case of the integrated modulator, given that the figure of merit Q is fixed, it is demonstrated that the smaller the Q, the longer the interaction length, larger ridge width and lower acoustic frequency will give rise to a larger bandwidth, though the highest efficiency might appear at a higher frequency. <br /> Some practical issues such as the misalignment of planar elements on the device and the incoherence of the integrated optical source are also discussed. A modified working frequency can be used to compensate the efficiency loss in the former case; in the latter case, it is demonstrated that a distortion of beam diffraction efficiency versus acoustic power with an incoherent optical source arises due to the wide spectrum of the incident optical waves.

Les travaux décrits dans ce mémoire ont pour but de conduire à la réalisation de capteurs et de filtres à ondes élastiques de surface (SAW) innovants, passifs et sans fil, dédiés à une utilisation en environnement sévère. Différentes structures de composants SAW sont alors étudiées. Les caractéristiques générales, telles que les pertes d’insertion ou les bandes passantes relatives atteignables, des structures usuelles (résonateurs, lignes à retard, LCRF, filtres en échelle…) sont connues de l’homme de l’art. Cependant, pour concevoir un dispositif SAW qui respecte les critères d’un cahier des charges donné, il est impératif de définir le comportement spécifique de chaque dispositif avant son envoi en production.Pour ce faire, des modèles numériques sont développés, qui incluent à la fois la possibilité d’analyser le comportement de systèmes à la géométrie complexe (filtres en échelles, transducteurs apodisés) et qui prennent en compte la présence de phénomènes perturbateurs (modes transverses, pertes liées à la nature des matériaux). La comparaison entre les calculs numériques et les mesures a mis en avant l’adéquation des résultats expérimentaux et de calculs.La mise en place de ces outils permet le développement de capteurs et filtres SAW innovants grâce à une analyse numérique rapide et fiable de leur comportement.Ainsi, l’étude de résonateurs et capteurs dédiés à une utilisation à des températures excédant les 700°C est menée. Il est démontré qu’en dépit de son inhomogénéité, le Ba2TiSi2O8 est un matériau adapté à la réalisation de SAW soumis à des températures élevées pour des fréquences de l’ordre de 300 MHz jusqu’au GHz.Par ailleurs, une structure disposant d’un transducteur à trois doigts par longueur d’ondes est utilisée dans le but de réaliser des résonateurs insensibles aux effets de la directivité lorsque la température évolue. Cette même configuration a mis en exergue la possibilité de réaliser des capteurs n’utilisant qu’un seul résonateur (contre au moins deux jusqu’à présent). Ce dernier point permet de limiter l’encombrement des composants et résout la problématique du vieillissement différentiel des structures.Un second type de capteurs, passifs et sans fil, fondés sur l’utilisation d’un seul SAW et dédiés à la mesure d’hygrométrie, a été étudié. Dans cette nouvelle configuration, un SAW de type LCRF est utilisé comme transpondeur et la zone sensible est externalisée. La sensibilité des modes (de plus d’un MHz) à la variation d’un élément capacitif ou d’une antenne dipôle a été mise en avant numériquement. En pratique, la fabrication des dispositifs a montré une variation différentielle de plusieurs centaines de kHz des résonances selon la condition électrique appliquée à l’un des ports.Finalement, des filtres, dédiés aux applications stratégiques, agiles en fréquence sont réalisés. L’objectif de faire varier la fréquence centrale des dispositifs au cours de leur fonctionnement est atteinte en modifiant les conditions électriques appliquées aux réflecteurs. Deux types de tirage en fréquence sont observés : un glissement fin, de quelques ‰ de la fréquence centrale, cyclique, et un saut de fréquences lié au glissement et à l’ouverture de la bande de Bragg des miroirs aux hautes fréquences. La fabrication des structures et leur connexion à des interrupteurs MEMS validé la faisabilité de la structure.Ces travaux mettent en lumière les capacités de prédiction du comportement des structures SAW grâce au développement de logiciels dédiés. De plus, l’étude et la réalisation de filtres et capteurs innovants ouvre la voie à de nouvelles fonctionnalités. / This thesis aims at designing innovative, passive and wireless surface acoustic waves (SAW) sensors and filters, dedicated to harsh environments. Several types of SAW components are consequently studied. The main characteristics, such as insertion losses or relative bandwidth, of usual structures (resonators, delay lines, LCRF, ladder filters…) are known by men of the art. However, to design a SAW device that respects specific requirements, the definition of the proper behavior of each device must be established before the manufacturing.For this purpose, numerical models are developed. Not only they include the possibility to analyse he beha-vior of systems with complex geometry (ladder filters, apodised transducers) but they take into account disturbing phenomena (transverse modes, losses due to the intrinsic nature of the materials). The comparison between computations and measures points out the match between experimental results and calculations.The implementation of these tools allows the development of innovative SAW sensors and filters thanks to a fast and reliable numerical analysis of their behavior.Thus, the design of resonators and sensors dedicated to a use at temperatures exceeding 700°C is studied. It is demonstrated that despite its inhomogeneity, Ba2TiSi2O8 is suitable for the manufacturing of SAW devices subject to high temperatures and in a frequency range from 300 MHz to the GHz.Furthermore, a structure composed of a three electrodes per wavelength transducer is used to produce re-sonators that are not subject to directivity effects when the temperature changes. This configuration offers the possibility to design sensors that use a single resonator (versus at least two until now). This last point makes smaller components possible and solves the question of a differential aging of the structures.A second type of sensors, also passive and wireless, dedicated to humidity measurements, based on the use of a single SAW, is studied. In this new configuration, a LCRF is used as a transponder and the sensitive area is outsourced. The mode sensitivity (of more than a MHz) to the variation of a capacitance or a dipole antenna is numerically brought to light. In practice, the device manufacturing showed a differential variation of the resonances of about 600 kHz depending on the electric condition applied to one of the ports.Finally, filters, dedicated to strategic applications, with frequency agility are designed. The purpose is to make the frequency vary depending on the electrical conditions applied to the mirrors. Two kinds of agility are identified : a slight sliding, of a few ‰ of the initial central frequency, periodic, and a frequency jump due to the shift of the Bragg band to the high frequencies. The manufacturing of some structures and their connection to MEMS switches attest the feasibility of such a structure.This work highlights the ability to predict the behavior of SAW structures thanks to the development of dedicated software. Moreover, the analysis and the manufacturing of innovative sensors and filters pave the way to new functionalities.

Bond rupture is an experimental methodology that is used to augment a conventional mass balance biosensor. A good point-of-care biosensor is fast, reliable, simple, cost-effective, and detects low concentrations of the target analyte. Biosensor development is a multidisciplinary field and bond rupture testing is of technical interest to many groups. The Bond rupture methodology endows a mass probe with the ability to discern bond strength. The recognition of specific bonds by mass loading is separated from erroneous non-specific binding by a probe of the force between the analyte and the transducer. Bond rupture is achieved by acoustic excitation of the point of attachment. The force is incremented gradually until rupture occurs. The advancement of bond rupture biosensors beyond the lab requires improved understanding of the mechanisms of bond rupture by base excitation, the transducers, and the supporting hardware. Bond rupture has traditionally been used in conjunction with the Quartz Crystal Microbalance (QCM). There exists, however, a variety of sensors and transducers to which the bond rupture methodology could be applied. The time, cost and experience required for comprehensive investigation of all avenues is prohibitive. To further the development of bond rupture characteristic experiments are designed and carried out on the QCM platform. Numerical simulations are constructed which model the current bond rupture approach. This work is limited to the simulation of bond rupture by base excitation. From the results of the experimental investigation a number of improvements to the bond rupture technique are proposed. Improvements are tested by simulation and the Surface Acoustic Wave (SAW) device is selected to advance the bond rupture craft. A prototype SAW bond rupture device is designed. The prototype device is manufactured and tested, confirming the principle of SAW bond rupture. Future work is required to progress the SAW bond rupture methodology before possible integration with other sensor systems. Because of this work, and the evaluation of the SAW bond rupture prototype, much is learned about the advancement of SAW device bond rupture.

Surface acoustic wave (SAW) technology has been in use for well over one century. In the last few decades, due to its low cost and high performance, this technology has been widely adopted in modern wireless communication systems, to build filtering devices at radio frequency (RF). SAW filters and duplexers can be virtually found inside every mobile handset. SAW devices are traditionally recognized as passive devices with high linear signal processing behavior. However, recent deployments of third generation (3G) and fourth generation (4G) mobile networks require the handsets to handle an increasing number of frequency bands with more complex modulation /demodulation schemes and higher data rate for more subscribers. These requirements directly demand more stringent linearity specifications on the front end devices, including the SAW duplexers. In the past, SAW duplexer design was based on empirically obtained design rules to meet the linearity specifications. Lack of predictability and an understanding of the root cause of the nonlinearity have limited the potential applications of SAW duplexers. Therefore, research on the nonlinearity characterization and an accurate modeling of SAW nonlinearity for mobile device applications are very much needed. The Ph.D. work presented here primarily focuses on developing a general nonlinear model for SAW resonators/duplexers. Their nonlinear characteristics were investigated by measuring the harmonic and intermodulation distortions of resonators. A nonlinear Mason model is developed and the characterization results are integrated into SAW duplexer design flows to help to simulate the nonlinear effects accurately and improve the linearity performance of the products. iv In this dissertation, first, a novel nonlinear Mason equivalent circuit model including a third order nonlinear coefficient in the wave propagation is presented. Next, the nonlinear distortions of SAW resonators are analyzed by measuring large-signal harmonic and intermodulation spurious emission on resonators using a wafer probe station. The influence of the setups on the measurement reliability and reproducibility is discussed. Further, the nonlinear Mason model is validated by comparing its simulation results with harmonic and intermodulation measurements on SAW resonators and a WCDMA Band 5 duplexer. The Mason model developed and presented here is the first and only nonlinear physical model for SAW devices based on the equivalent circuit approach. By using this new model, good simulation measurement agreements are obtained on both harmonic and intermodulation distortions for SAW resonators and duplexers. These outcomes demonstrate the validity of the research on both the characterization and modeling of SAW devices. The result obtained confirms that the assumption of the representation of the 3 rd order nonlinearity in the propagation by a single coefficient is valid

En las últimas dos décadas, han surgido diferentes tecnologías acústicas para aplicaciones biosensoras como alternativas a tecnologías de detección bien establecidas ¿acústicas o ópticas¿ como son la Microbalanza de Cuarzo (QCM, por sus siglas en inglés) y la Resonancia de Plasmón de Superficie (SPR, de sus siglas en inglés). En la primera parte de este documento se revisan dichas tecnologías alternativas para aplicaciones en medio líquido. Como resultado de esta revisión, se determina que los dispositivos de onda acústica superficial Love (LW, de sus siglas en inglés) son los más prometedores y viables para conseguir el principal objetivo de esta Tesis, que es establecer una comparativa en las mismas condiciones entre inmnosensores desarrollados con la tecnología seleccionada en esta tesis y los inmunosensores desarrollados con QCMs de Alta Frecuencia Fundamental (HFF-QCM, por sus siglas en inglés). Después de esta revisión se presenta el estado del arte de los dispositivos LW en su aplicación como biosensores, así como una discusión de las tendencias y retos actuales de este tipo de sensores. Posteriormente se reúne la información más actualizada sobre aspectos de diseño, principios de operación y modelado de estos sensores. Algunos aspectos de diseño son estudiados y probados para establecer el diseño final de los dispositivos LW. Previamente a su fabricación, también se realizan simulaciones para modelar el comportamiento del dispositivo elegido previamente a su fabricación. Posteriormente, se describe la fabricación del dispositivo así como la celda de flujo diseñada para trabajar con el dispositivo en medios líquidos. Adicionalmente, un sistema electrónico de caracterización, previamente validado para sensores QCM, se adapta para sensores LW. Como resultados, se valida el sistema electrónico para caracterizar los sensores LW fabricados y montados en la celda de flujo y, finalmente, se desarrolla un inmunosensor para la detección del pesticida carbaril que se compara con otras tecnologías inmunosensoras. / In the last two decades, different acoustic technologies for biosensors applications have emerged as promising alternatives to other better established detection technologies ¿ acoustic or optic ones- such as traditional Quartz Crystal Microbalance (QCM) and Surface Plasmon Resonance (SPR). The alternative acoustic technologies for in liquid measurements are reviewed in this manuscript. Surface Acoustic Wave (SAW) Love Mode or Love Wave (LW) sensors are determined to be the most promising and viable option to work with for achieving the main aim of this Thesis. Such aim is the development of a LW immunosensor for its comparison with the same application based on High Fundamental Frequency-QCM (HFF-QCM) sensors and under the same conditions. Consequently, the state-of-the-art of LW devices for biosensing is provided and a discussion about the current trends and future challenges of these sensors is presented. In order to start working with suitable LW devices, upto- date information regarding the design aspects, operation principles and modeling of such devices is gathered. Some design aspects are explored and tested to establish the design of the final LW device. Different simulations for modeling the chosen device behavior are carried out before its fabrication. Later, the device fabrication is described. Next, to start working with the fabricated device in liquid media, a flow cell is designed and implemented. In addition, an electronic characterization system, previously validated for QCM sensors, is adapted and tested for the fabricated LW device. As results, the adapted electronic characterization system is validated for LW devices mounted in the fabricated flow cell and, finally, a LW-based immunosensor for the determination of carbaryl pesticide was developed and compared with other immunosensor technologies. / Rocha Gaso, MI. (2013). Analysis, implementation and validation of a Love mode surface acoustic wave device for its application as sensor of biological processes in liquid media [Tesis doctoral]. Editorial Universitat Politècnica de València. https://doi.org/10.4995/Thesis/10251/32492

Ces travaux ont donc visé le développement d’une plateforme complète de détection de gaz pour environnement sévère haute température. Cette plateforme intègre un dispositif à ondes acoustiques de surface sur substrat Langasite, une résistance chauffante, une couche sensible inorganique nanostructurée et est placée dans une enceinte hermétique. Des températures de l’ordre de 450°C ont été atteintes et des tests de cyclages ont démontré un fonctionnement en accord avec les modèles théoriques et une reproductibilité des mesures. Des tests de détection de composés organiques volatils (éthanol et toluène) ont mis en avant des seuils de détection de l'ordre de quelques ppm. / Measuring pollutants concentrations in gas and vapors emissions are important environmental issues. This work presents a stand-alone portable device for high temperature assessment. The system includes a Langasite (LGS) acoustic sensor, a ceramic heater and a platform with RF connections for remote in-situ measurements. The packaging consists in a hermetic stainless steel cell which enables safe gas detection. In situ temperature measurements have been achieved and the thermal behavior was successfully investigated in the temperature range 25-450°C. The designed cell highlights good agreement with theoretical models and reproducibility of the measures. Volatile organic compounds exposures have been investigated and promising ppm level detections have been obtained.

We studied the possibility of achieving an order of magnitude reduction in the energy dissipation needed to write bits in perpendicular magnetic tunnel junctions (p-MTJs) by simulating the magnetization dynamics under a combination of resonant surface acoustic waves (r-SAW) and spin-transfer-torque (STT). The magnetization dynamics were simulated using the Landau-Lifshitz-Gilbert equation under macrospin assumption with the inclusion of thermal noise. We studied such r-SAW assisted STT switching of nanomagnets for both in-plane elliptical and circular perpendicular magnetic anisotropy (PMA) nanomagnets and show that while thermal noise affects switching probability in in-plane nanomagnets, the PMA nanomagnets are relatively robust to the effect of thermal noise. In PMA nanomagnets, the resonant magnetization dynamics builds over few 10s of cycles of SAW application that drives the magnetization to precess in a cone with a deflection of ~45⁰ from the perpendicular direction. This reduces the STT current density required to switch the magnetization direction without increasing the STT application time or degrading the switching probability in the presence of room temperature thermal noise. This could lead to a pathway to achieve energy efficient switching of spin-transfer-torque random access memory (STT-RAM) based on p-MTJs whose lateral dimensions can be scaled aggressively despite using materials with low magnetostriction by employing resonant excitation to drive the magnetization away from the easy axis before applying spin torque to achieve a complete reversal.

Ce travail porte sur l'étude de structures multicouches à gradient de propriétés (FGM : Functionnally Graded Materials). Ces matériaux sont apparus afin d'obtenir des dépôts aux caractéristiques nouvelles et innovantes. Les FGM sont désormais présents dans divers applications de haute technologie.Un système multicouche à gradient de composition entre le cuivre et le nickel, a fait l'objet d'une étude expérimentale par l'application de la technique des ultrasons laser (LU) couplée à une étude numérique basée sur le formalisme de Stroh et la méthode de la matrice de raideur. Le travail de thèse est organisé autour de quatre chapitres. Le premier chapitre est dédié à l'aspect théorique de la propagation des ondes de surface dans une structure multicouche et à gradient de propriétés. Ainsi, un développement des méthodes numériques pour les matériaux dotés de la piézoélectricité est fourni. Le second chapitre se consacre à l'élaboration des échantillons utilisés dans notre étude et obtenus par pulvérisation cathodique. Le troisième chapitre présente la méthode opto-acoustique utilisée pour caractériser les échantillons réalisés. le dernier chapitre présente les résultats expérimentaux, confrontés aux résultats théoriques, décrivant le comportement dispersif des multicouches submicrométriques. / This thesis focuses on the study of multilayered and FGM systems (FGM : Functionnally Graded Materials). The main purpose of this type of materials is to obtain deposits with new and innovative features and to increase the fracture toughness. From now on, FGM have been used in various high technology applications.A multilayer system with a composition gradient of copper and nickel was studied experimentally by the application of the laser ultrasonics (LU) technique which was coupled to a theoretical study based on the ordinary differential equations (ODE) and the Stiffness Matrix Method (SMM). This PhD thesis is organized around four chapters. The first chapter is dedicated to a theoretical study of the propagation behavior of surface acoustic wave (SAW) in a multilayer system with à gradient of properties. Thus, the numerical methods developped for the piezoelectric materials (FGPM) are presented. The second chapter is devoted to describe the setup for making the samples used in this study which were obtained by sputtering technique. The third chapter presents the experimental study dedicated to the measurement of surface wave velocities in many crystal orientations. The last chapter of the manuscript presents experimental results, compared to the theoretical results, describing the dispersive behavior of submicrometer multilayers.

Dans un avenir proche, les dispositifs de détection médicaux miniaturisés en temps réels (lab-on-chip) seront au centre de la révolution des méthodes de diagnostics médicaux et d’identification des processus biologiques et cela, autant au niveau clinique qu’au niveau de la recherche. Pour y arriver, il est important de développer des chimies de surface stables et spécifiques, ce qui demande une compréhension des interactions intermoléculaires à l’interface liquide/solide. Pour bien comprendre ces interactions, il est important de développer des instruments adaptés à la mesure près de l’interface liquide/solide des différentes caractéristiques à identifier. Ce projet de recherche présente la conception, la fabrication et les expériences tests d’un capteur multimodal pour l’identification de processus biologiques à l’interface basés sur des technologies de résonance des plasmons de surface (SPR) et de microcalorimérie. Ces deux technologies mises ensemble vont permettre d’effectuer des mesures de la cinétique des interactions ainsi que des caractéristiques thermodynamiques. En premier lieu, les caractéristiques d’une interaction intermoléculaire à l’interface d’une réaction d’hybridation d’ADN furent définies afin d’en déduire un cahier des charges pour les transducteurs. Suite à cela, la conception des transducteurs microcalorimétrique et SPR furent réalisés en tenant compte des contraintes de chacun des transducteurs. Suite à la conception théorique des différentes parties du capteur, un procédé de fabrication compatible avec les méthodes de fabrication standard de la microélectronique fut défini et testé. Afin de s’assurer de la fonctionnalité des dispositifs ainsi fabriqués, des tests de fonctionnalisation de surface furent appliqués sur les échantillons afin de tester la compatibilité du procédé de fonctionnalisation avec les méthodes de fabrication et avec une chimie de surface type. Pour terminer, un système de mélange actif fut testé et caractérisé avec le dispositif de microcalorimétrie afin de s’assurer qu’il était possible de mélanger les fluides avec les produits biologiques pour s’assurer de la qualité de la réaction de surface. Le système développé pourra être utilisé pour effectuer la mesure d’hybridation d’ADN à l’interface. Le système intègre deux modalités permettant la caractérisation en temps réel des interactions intermoléculaires à l’interface liquide/solide. Ce type de système permet la mesure de la cinétique de différents modèles biologiques tels que les puces à sucre encore certains récepteurs cellulaires ou la mesure de conformation moléculaire à l’interface. Des mesures d’oxydation du glucose catalysée par la glucose oxydase sont montrées. / To begin with, the characteristics of a DNA hybridization intermolecular interaction at the interface were defined in order to deduce the specifications for our transducers. Following this, the SPR and microcalorimetric transducer will be design by taking into account the constraints of each one. Following the theoretical design of the sensor, a manufacturing process compatible with standard methods of microelectronics manufacturing was tested and identified. To ensure the functionality of the devices, a test of surface functionalization on the sensor was applied to test the compatibility of the manufacturing process with the surface functionalization methods. Finally, a system of active mixing was tested and characterized with a microcalorimetric device to ensure it was possible to mix fluids with organic products to be sure of the quality of the surface reaction. The system developed can be used to mesure DNA hybridization at the interface. This system incorporates two modalities for real-time characterization of intermolecular interactions near the solid/liquid interface. This type of system allows the kinetic measurement of different biological models such as cellular receptors or it is possible to have some molecular measure conformation near the interface. Oxidation of glucose with the enzyme glucose oxidase was shown to present the possibility to measure a biological interaction.

No description available.