The accomplishments presented in this thesis are the development of three models for simulation of space charge generation in the phosphor layer of alternating current thin-film electroluminescent (ACTFEL) devices and the results from simulation of these models. First, a single sheet charge model is developed and simulated. The single sheet charge model is a model that simplifies the problem of modeling an arbitrary distribution of space charge across the phosphor layer by lumping all of the space charge into a sheet of charge at a specified location in the phosphor layer. In this model and all subsequent models, space charge creation is assumed to occur by field emission from bulk traps or by impact ionization of deep-level traps. A fairly exhaustive parametric variation study of the single sheet charge model is performed and the results are presented and discussed. The results show space charge effects that are quite dependent on several parameters such as the number of bulk traps in the phosphor layer, the location of the sheet of charge, the capture efficiency for space charge annihilation, and the characteristic field for impact ionization of the deep-level traps. The second model considered is a logical extension of the single sheet charge model, the two sheet charge model, which models the space charge distribution as two sheets of charge rather than one. This model has potential application in the simulation of ACTFEL devices which exhibit large and/or symmetrical space charge effects. The final model developed is an equivalent circuit/SPICE model of the single sheet charge model. Actually, two models are developed, one for space charge creation by field emission and one for impact ionization of deep-levels. Two SPICE models are required because of functional differences in the dependencies of space charge creation. The results of a simulation showing overshoot generated by SPICE are given for the field emission equivalent circuit. / Graduation date: 1996

Solid-state amorphous materials show amazing promise in thin-film electronics. The interface-to-bulk ratio of thin films makes interfacial chemistries of these systems of utmost importance. Thin films of amorphous metals, dielectrics and semiconductors have novel chemistries that are not only based upon their elemental constituent makeup, but also based upon the method with which the amorphous material is deposited and treated after deposition. The chemical attributes unique to amorphous, thin-film systems are defined primarily through the utilization of solution-processed aluminum oxide phosphate dielectric material and Zr������Cu������Al������Ni������ metal. the chemical findings wrought via the observation of interactions between amorphous metal-dielectric systems are applied to semiconductor/insulator systems to illustrate the use of the same general chemical principles applying to diverse problems. Finally in the appendices, the systems are utilized to create extremely-thin tunneling electronic devices and optical metamaterials as well as innovative classroom material. / Graduation date: 2012 / Access restricted to the OSU Community at author's request from Dec. 13, 2011 - Dec. 13, 2012

The ability to detect and quantify presence and concentration of unknown gasses is sought for applications ranging from environmental monitoring to medical analysis. Metal oxide based chemical sensing technology currently exists but the ability to provide a compositional gas breakdown reliably within a short time frame is not readily available. A very small sensor that can differentially identify the type and concentration of a gas is required. Novel methods of creating low cost and easily tuned one and two-dimensional gas sensing elements are explored. Tungsten trioxide has been thoroughly documented as an electrochromic coating, but highly sensitive WO3 elements with beam and nanowire structures have yet to be explored. Research of WO3 as a gas sensor encompasses three major components: A suitable sensing chamber with accurate analyte gas flow control and temperature control, a reliable method for WO3 deposition, and a high yield fabrication process. This thesis explores all three of these technologies. Chapter two starts with a summary of existing tungsten trioxide fabrication methods. An overview of WO3 processing follows. A comprehensive setup was designed and created to test the gas sensing response of a series of metal oxide based resistive elements through conductimetric analysis. Chapter three provides an in depth account of gas sensor test chamber design and testing. Critical test chamber aspects such as temperature control, precise gas flow control, highly efficient analyte gas switching and ease of use are presented. Chapter four outlines WO3 electrodeposition and the fabrication of beam structures for testing, while chapter five explores the templated electrodeposition of WO3 segments intercalated between gold nanowire segments. Finally, chapter six provides a summary of the research presented in this thesis as well as future directions and options available for further exploration of WO3 gas sensing elements. / Micro-Electro-Mechanical Systems (MEMS) and Nanosystems

This thesis covers the topic ”Thinning and Turbulence in Aqueous Films”. Experimental studies in two-dimensional systems gained an increasing amount of attention during the last decade. Thin liquid films serve as paradigms of atmospheric convection, thermal convection in the Earth’s mantle or turbulence in magnetohydrodynamics. Recent research on colloids, interfaces and nanofluids lead to advances in the developtment of micro-mixers (lab-on-a-chip devices). In this project a detailed description of a thin film experiment with focus on the particular surface forces is presented. The impact of turbulence on the thinning of liquid films which are oriented parallel to the gravitational force is studied. An experimental setup was developed which permits the capturing of thin film interference patterns under controlled surface and atmospheric conditions. The measurement setup also serves as a prototype of a mixer on the basis of thermally induced turbulence in liquid thin films with thicknesses in the nanometer range. The convection is realized by placing a cooled copper rod in the center of the film. The temperature gradient between the rod and the atmosphere results in a density gradient in the liquid film, so that different buoyancies generate turbulence. In the work at hand the thermally driven convection is characterized by a newly developed algorithm, named Cluster Imaging Velocimetry (CIV). This routine determines the flow relevant vector fields (velocity and deformation). On the basis of these insights the flow in the experiment was investigated with respect to its mixing properties. The mixing characteristics were compared to theoretical models and mixing efficiency of the flow scheme calculated. The gravitationally driven thinning of the liquid film was analyzed under the influence of turbulence. Strong shear forces lead to the generation of ultra-thin domains which consist of Newton black film. Due to the exponential expansion of the thin areas and the efficient mixing, this two-phase flow rapidly turns into the convection of only ultra-thin film. This turbulence driven transition was observed and quantified for the first time. The existence of stable convection in liquid nanofilms was proven for the first time in the context of this work. / Diese Diplomarbeit behandelt das Thema ”Dünnung und Turbulenz in wässrigen Filmen”. Experimente in zweidimensionalen Systemen erfuhren in den vergangenen Jahren zunehmend an Aufmerksamkeit. Dünne Flüssigkeitsschichten dienen als Modell für atmosphärische Konvektion, thermische Konvektion im Erdmantel oder Turbulenz in der Magnetohydrodynamik. Aktuelle Forschung im Bereich der Kolloide, Grenzflächen und Nanofluidik führt zu Fortschritten in der Entwicklung von Mikromixern (”lab-on-a-chip”). In diesem Projekt wird eine detaillierte Beschreibung eines Dünnfilmexperiments mit Fokus auf die besonderen Oberflächenkräfte vorgestellt. Die Auswirkung der Turbulenz auf die Dünnung von parallel zur Gravitationskraft orientierten Flüssigkeitsschichten wurde untersucht. Es wurde ein Experiment entwickelt, welches die Aufnahme von Dünnschichtinterferenzmustern unter kontrollierten Oberflächenbedingungen und Atmosphäre erlaubt. Der Messaufbau dient auch als Prototyp eines Mixers auf Basis von thermisch induzierter Turbulenz in Flüssigkeitsfilmen mit Dicken im Nanometerbereich. Die Konvektion wird durch das Platzieren eines gekühlten Kupferstabs in der Mitte des Films realisiert. Der Temperaturgradient zwischen Stab und äußerer Atmosphäre resultiert in einem Dichtegradienten in dem flüssigen Film, sodass durch unterschiedliche Auftriebskräfte Turbulenz erzeugt wird. In der vorliegenden Arbeit ist die thermisch getriebenen Konvektion an Hand eines neu entwickelten Verfahrens (Cluster Imaging Velocimetry - CIV) zur Ermittlung des strömungsrelevanten Vektorfelder (Geschwindigkeit und Deformation) charakterisiert worden. Auf Basis dieser Erkenntnisse wurde die im Experiment vorherrschende Strömung in Hinsicht auf ihre Mischungseigenschaften im Vergleich zu theoretischen Modellen untersucht und die Mischungseffizienz berechnet. Die gravitationsgetriebene Ausdünnung der Flüssigkeitsschicht unter Einfluss der Turbulenz wurde analysiert. Durch starke Scherkräfte kommt es lokal zur Bildung ultradünner Domänen bestehend aus ”Newton black film”. Diese Zweiphasenströmung geht durch das exponentielle Ausdehnen der dünnen Bereiche und die effiziente Mischung sehr schnell in eine Konvektion von ausschließlich ultradünnem Film im Gleichgewichtszustand über. Dieser turbulenzgetriebene Übergang wurde zum ersten Mal beobachtet und quantifiziert. Die Existenz stabiler Konvektion in flüssigen Nanofilmen ist zum ersten Mal im Rahmen dieser Arbeit belegt worden.

The use of solar cells for energy production has indeed a bright future. Reduction of cost for fabrication along with increased efficiency are key features for a market boom, both achieved as a result of increased knowledge of the technology. Especially the thin film solar cell technology with absorbers made of Cu(In,Ga)Se2 (CIGS) is promising since it has proven high power conversion efficiency in combination with a true potential for low cost fabrication. In this thesis different recipes for fabrication of the Cu(In,Ga)Se2 absorber layer have been studied. The deposition technique used has been co-evaporation from elemental sources. For all depositions the substrate has been heated to a constant temperature of 500 ºC in order for the growing absorber to form a chalcopyrite phase, necessary for the photovoltaic functionality. The selenium has been evaporated such to always be in excess during depositions whereas the metal ratio Cu/(In+Ga) has been varied according to different recipes but always to be less than one at the end of the process. In the work emphasis has been on the radiative properties of the CIGS film during growth. The substrate heater has been temperature controlled to maintain the constant set temperature of the substrate, regardless of varying emitted power caused by changing surface emissivity. Depending on the growth conditions the emissivity of the growing film is changing, leading to a readable variation in the electrical power to the substrate heater. Since the thermal radiation from the substrate during growth has been of central focus, this has been studied in detail. For this reason the substrate has been treated as an optical stack composed of glass/Mo/Cu(In,Ga)Se2/CuxSe which determine the thermally radiated power by its emissivity. An optical model has been adopted to simulate the emissivity of the stack. In order to use the model, the optical constants for Cu(In,Ga)Se2 and CuxSe have been derived for the wavelength interval 2 μm to 20 μm. The simulation of the emissivity of the stack during CIGS growth agreed well with what has been seen for actual growth. Features of the OP-signal could hereby be explained as a result of film thickness of Cu(In,Ga)Se2 and CuxSe respectively. This is an important knowledge for an efficient fabrication in large scale.

Today’s MEMS technology allows manufacturing of miniaturized, low power sensors that sometimes exceeds the performance of conventional sensors. The pressure sensor market today is dominated by MEMS pressure sensors. In this thesis two different pressure sensor techniques are studied. The first concerns ways to improve the sensitivity in the most commonly occurring pressure sensor, namely such based on the piezoresistive technique. Since the giant piezoresistive effect was observed in silicon nanowires, it was assumed that a similar effect could be expected in nano-thin silicon films. However, it turned out that the conductivity was extremely sensitive to substrate bias and could therefore be controlled by varying the backside potential. Another important parameter was the resistivity time drift. Long time measurements showed a drastic variation in the resistance. Not even after several hours of measurement was steady state reached. The drift is explained by hole injection into the buried oxide as well as existence of mobile charges. The piezoresistive effect was studied and shown to be of the same magnitude as in bulk silicon. Later research has shown the existence of such an effect where the film thickness has to be less than around 20 nm.  The second area that has been studied is the pressure sensitivity of in acoustic resonators. Aluminium nitride thin film plate acoustic resonators (FPAR) operating at the lowest-order symmetric (S0), the first-order asymmetric (A1) as well as the first-order symmetric (S1) Lamb modes have been theoretically and experimentally studied in a comparative manner. The S0 Lamb mode is identified as the most pressure sensitive FPAR mode. The theoretical predictions were found to be in good agreement with the experiments. Additionally, the Lamb modes have been tested for their sensitivities to mass loading and their ability to operate in liquids, where the S0 mode showed good results. Finally, the pressure sensitivity in aluminium nitride thin film bulk wave resonators employing c- and tilted c-axis texture has been studied. The c-axis tilted FBAR demonstrates a substantially higher pressure sensitivity compared to its c-axis oriented counterpart.

Alumina-Zirconia thin films were grown on a range of substrates using dual magnetron sputtering. Film growth was achieved at a relatively low temperature of 450 °C and at higher temperatures up to 810 °C. The films were grown on well-defined surfaces such as silicon (100) but also on industrially relevant substrates such as hardmetal (WC-Co). Radio frequency power supplies were used in combination with magnetron sputtering to avoid problems with target arcing. A range of film compositions were possible by varying the power on each target. The influence of sputtering target were investigated, both ceramic oxide targets and metallic targets being used. The phase composition of the as-deposited films was investigated by x-ray diffraction. The pure zirconia films contained the monoclinic zirconia phase, while the pure alumina films appeared either amorphous or contained the gamma-alumina phase. The composite films contained a mixture of amorphous alumina, gamma-alumina and the cubic zirconia phase. In-depth high-resolution electron microscopy studies revealed that the microstructures consisted of phase-separated alumina and zirconia nanocrystals in the case of the nanocomposites. In-situ spectroscopy was also performed to characterise the nature of the bonding within the as-deposited films. The oxygen stoichiometry in the films was investigated as a possible reason for the stabilisation of the cubic zirconia phase in the nanocomposite. Ion beam techniques such as Rutherford backscattering scattering and electron recoil detection analysis were used in these studies. The growth of films with ceramic targets led to films that may be slightly understoichiometric in oxygen, causing the phase stabilisation. The growth of films from metallic targets necessitates oxygen rich plasmas and it is not expected that such films will be oxygen deficient. Initial attempts were also made to characterise the mechanical properties of the new material with nanoindentation. The nanocomposite appeared to have greater resistance to wear than the pure zirconia film. In doing so, some surface interactions and some material interactions have been studied. / Report code: LIU-TEK-LIC-2006:41

Spectrally selective solar absorber using composite Ni-NiO as coating materials was studied. Samples were prepared by dc magnetron sputtering unit named Rulle, which is a miniature copy of an industrial roll-coater unit. Using asymmetric location of the oxygen nozzele, it is possible to form the desired metallic concentration distribution along the sputtering zone under optimized conditions. This distribution can be transferred into a graded film profile by moving the substrate, obtaining good spectral selectivity. For specified mechanical settings (such as locations of gas sprays, target and pump positions etc.), the ratio of used oxygen flow to the corresponding critical oxygen flow, <b>RO</b>, is a dimensionless parameter to control the zone specification. The optimal value is around 0.80 for the Rulle. Optimized zone shows properties with two main parts: the metallic composite part of varied nickel volume fraction and the dielectric part. Two parts of the sputtering zone can form a graded absorbing layer with the right ratio of base and middle layer by the moving substrate technique. Distribution of normalized conductivity, NC, along the absorbing sputtering zone is a simple and good specification of zone property. Profile of graded film prepared by the moving substrate technique can be tailored according to NC distribution. XRD and XPS study confirms the NC results. Simulation reveals that absorption should mainly rely on the intrinsic, but less on the interference mechanism. Used metallic volume fraction of Ni-NiO is 0.3 for main absorbing layer. The front surface reflection loss due to high refractive index can be reduced by adding a layer with low refractive index on the top. Simulation shows that three-layer coatings are a good and simple coating structure. High solar absorptance of 0.97 has been achieved with low thermal emittance of 0.05 by theoretical simulation as well as experimentally prepared samples.

Cu(In,Ga)Se2 (CIGS) is one of the most promising semiconductor compounds for large-scale production of efficient, low-cost thin film solar cells, and several research institutes have announced their plans for CIGS production lines. But for the CIGS technology to become a commercial success, a number of issues concerning manufacturability, product definition, and long-term stability require further attention. Several studies indicate that CIGS-based modules are stable over many years in field operation. At the same time, it is shown in the present work that they may have difficulties in passing standard accelerated lifetime test procedures like the IEC 1646 damp heat test. In particular, CIGS modules are sensitive to humidity penetrating through the module encapsulation, which will increase the resistive losses in the front contact and cause severe corrosion of the back contact. It is also shown that cells experience degradation in both voltage and fill factor, and the causes of these effects are addressed. By concentrating the light falling onto a solar cell, the device will deliver a higher power output per illuminated absorber area, which can lower the electricity production costs. For CIGS-based solar cells, low-concentrated illumination could be an economically viable approach. In this work it is shown that the yearly performance of a photovoltaic system with CIGS modules can be significantly improved at a moderate cost by using parabolic aluminum mirrors as concentrating elements. However, in order to avoid detrimental power losses due to high temperatures and current densities, the modules need to be designed for the higher light intensity and to be sufficiently cooled during operation. A design where the front contact of the module is assisted by a metal grid has shown promising results, not only for concentrated illumination but also for normal operation. The benefits are enhanced window processing tolerance and throughput, as well as improved degrees of freedom of the module geometry.

This thesis reports on synthesis, microstructure and properties of binary and ternary carbide thin films deposited by dc magnetron sputtering. These materials are interesting since they exhibit a wide range of useful properties, such as high hardness, resistance to wear and oxidation, and high electrical conductivity. Here, an early transition metal (M) and carbon (C) have been used as the basis, often with the addition of a second M-element or an A-group element (A). In these systems nanocomposites, metastable solid solutions, multilayers, or Mn+1AXn-phases have been deposited. The Mn+1AXn-phases are a group of nanolaminated compounds with a unique mixture of metallic and ceramic properties. In general X is carbon or nitrogen, although here only carbon has been used. Epitaxial MAX-phase thin films of Ti2AlC, Ti3AlC2 and V2GeC have been deposited for the first time. They have been studied with emphasis on phase stability, phase composition and nucleation characteristics to gain deeper insights into their growth. The microstructure of the films was characterized by electron microscopy and X-ray diffraction. In addition, bond strength characteristics have been studied by soft X-ray spectroscopy and complementary calculations within DFT. Their mechanical and electrical properties have been studied, and the results are discussed on the basis of their electronic structure. Furthermore, by interleaving the Ti3SiC2 MAX-phase with TiC0.67 a multilayer structure has been formed, for which a new intrusion-type deformation behaviour has been described. A new concept in the design of nanocomposite films has been developed, whereby a solid solution of a weak carbide-forming element in the carbide structure creates a driving force for surface segregation of C. This concept has been verified both theoretically and experimentally for the Ti-Al-C and Ti-Fe-C systems. It has been shown by pin-on-disc measurements that this surface segregation leads to graphitization and consequently a very low friction coefficient for these films. Finally, it has been demonstrated that low-friction films with tunable magnetic properties can be achieved in the Ti-Fe-C system.