Titanium nitride (TiN) films are widely applied as diffusion barrier layers in microelectronic devices. The continued miniaturization of such devices not only poses new challenges to material systems design, but also puts high demands on characterization techniques. To gain understanding of diffusion processes that can eventually lead to failure of the barrier layer and thus of the whole device, it is essential to develop routines to chemically and structurally investigate these layers down to the atomic scale. In the present study, model TiN diffusion barriers with a Cu overlayer acting as the diffusion source were grown by reactive magnetron sputtering on MgO(001) and thermally oxidized Si(001) substrates. Cross-sectional transmission electron microscopy (XTEM) of the pristine samples revealed epitaxial, single-crystalline growth of TiN on MgO(001), while the polycrystalline TiN grown on Si(001) exhibited a [001]-oriented columnar microstructure. Various annealing treatments were carried out to induce diffusion of Cu into the TiN layer. Subsequently, XTEM images were recorded with a high-angle annular dark field detector, which provides strong elemental contrast, to illuminate the correlation between the structure and the barrier efficiency of the single- and polycrystalline TiN layers. Particular regions of interest were investigated more closely by energy dispersive X-ray (EDX) mapping. These investigations are completed by atom probe tomography (APT) studies, which provide a three-dimensional insight into the elemental distribution at the near-interface region with atomic chemical resolution and high sensitivity. In case of the single-crystalline barrier, a uniform Cu-enriched diffusion layer of 12 nm could be detected at the interface after an annealing treatment at 1000 °C for 12 h. This excellent barrier performance can be attributed to the lack of fast diffusion paths such as grain boundaries. Moreover, density-functional theory calculations predict a stoichiometry-dependent atomic diffusion mechanism of Cu in bulk TiN, with Cu diffusing on the N-sublattice for the experimental N/Ti ratio. In comparison, the polycrystalline TiN layers exhibited grain boundaries reaching from the Cu-TiN interface to the substrate, thus providing direct diffusion paths for Cu. However, the microstructure of these columnar layers was still dense without open porosity or voids, so that the onset of grain boundary diffusion could only be found after annealing at 900 °C for 1 h. The present study shows how to combine two high resolution state-of-the-art methods, TEM and APT, to characterize model TiN diffusion barriers. It is shown how to correlate the microstructure with the performance of the barrier layer by two-dimensional EDX mapping and three-dimensional APT. Highly effective Cu-diffusion barrier function is thus demonstrated for single-crystal TiN(001) (up to 1000 °C) and dense polycrystalline TiN (900 °C).

L'utilisation récente des nanoparticules (NPs) comme vecteurs pour l'imagerie et l'adressage d'agents thérapeutiques en nano-médecine nécessite la compréhension de leurs mécanismes d'internalisation et de transport au niveau des barrières biologiques. Dans ce contexte, l'objectif de cette étude est de caractériser l'interaction et la transcytose de NPs de silice fluorescentes en fonction de leur taille (15, 50 et 100 nm) dans un modèle in-vitro de barrière endothéliale pulmonaire humaine. L'internalisation et le transport trans-endothélial des NPs a été analysé quantitativement à l'échelle nanométrique par microscopie électronique à transmission (MET) combinée à de la stéréologie. Un transport trans-endothélial a été observé pour toutes les tailles de NPs. Néanmoins, l'analyse de la distribution intracellulaire révèle une tendance à l'accumulation dans les voies de dégradation cellulaires pour les NPs de 50 et 100 nm. Cette accumulation est moindre pour les NPs de 15 nm. L'internalisation des NPs a également été analysée par cytométrie en flux et MET en présence de différents inhibiteurs de l'endocytose dans le but d'identifier leurs voies d'internalisation. En fonction de la taille des NPs, les mécanismes d'endocytose varient, suggérant une dépendance du transport trans-cellulaire à certains mécanismes d'endocytose. L'internalisation des NPs de 15 nm par la voie d'endocytose cavéole dépendante pourrait ainsi expliquer l'efficacité de leur transport du côté basal. Les méthodologies développées pour l'étude du transport trans-cellulaire des NPs de silice peuvent être appliquées à l'étude de NPs synthétiques plus complexes ou de NPs biologiques, telles que les lipoprotéines de basse-densité, et ce dans un contexte pathologique. / The recent use of nanoparticles (NPs) as carriers for imaging and delivery of therapeutics agents in nanomedecine involves understanding their endocytosis and transcytosis mechanisms at biological barriers. In this context, the aim of this study was to characterize the interaction and transcytosis of fluorescent silica NPs in function of their size (15, 50, and 100 nm) in an in-vitro model of human pulmonary endothelial barrier. NPs internalization and trans-endothelial transport has been quantitatively analyzed at nanometer resolution using transmission electron microscopy (TEM) combined with stereology. Trans-endothelial transport has been observed for each size of NPs. However cellular distribution analysis shows an accumulation in the cellular degradation pathways for 50 nm and 100 nm NPs. Whereas 15 nm NPs are less accumulated. NPs uptake was also analyzed by flow cytometry and TEM in the presence of different inhibitors to decipher NPs internalization pathways. Depending on NPs size, the involved endocytosis pathways were different, suggesting a dependency of trans-cellular transport toward endocytic mechanisms. The specific internalization of 15 nm NPs by the caveolin dependant pathway could explain the efficacy of their release at the basal side. Techniques developed for the study of the trans-cellular transport of silica NPs can also be applied to more complex synthetic NPs or biological NPs, such as low-density lipoproteins, in a pathological context.

The deformation mechanisms operating in diamond-like carbon (DLC) coatings on (100) and (111) Si, has been investigated. The effect of coating thickness, indenter geometry, substrate orientation and deposition technique on the deformation of DLC coatings and the underlying substrate was studied by undertaking nanoindentation followed by subsurface microstructural characterization. Uncoated (111) Si was also investigated for comparison. The observed microstructural features were correlated to the indentation response of the coatings and compared with simulation studies, as well as observations on uncoated Si. In uncoated (111) Si, phase transformation was found to be responsible for the discontinuities in the load-displacement curves, similar to (100) Si. However, slip was activated on {311} planes instead of on {111} planes. Moreover, the density of defects was also significantly lower and their distribution asymmetric. The coatings were adherent, uniformly thick and completely amorphous. The load-displacement curves displayed several pop-ins and a pop-out, the indentation loads for the first pop-in and the pop-out depending primarily on the thickness of the coating. The coatings exhibited localized compressive deformation in the direction of loading without any through-thickness cracks. The extent of this localized deformation increased with indentation load. Hardness and thickness of the coatings and the geometry of the indenter influenced the magnitude of compressive strains. Harder and thinner coatings and a blunt indenter exhibited the minimum degree of deformation. Densification by rearrangement of molecules has been suggested as the mechanism responsible for plastic compression. At indentation loads corresponding to the first pop-in, (100) and (111) silicon substrates initially deformed by <111> and <311> slip respectively. Higher indentation loads caused phase transformation. Therefore, unlike in uncoated Si, dislocation nucleation in the Si substrate has been proposed as the mode responsible for the first pop-in. Subsequent pop-ins were attributed to further deformation by slip and twinning, phase transformation and extensive cracking (median and secondary cracks) of the substrate. The pop-out, however, was ascribed to phase transformation. Extensive deformation in the substrate, parallel to the interface, is attributed to the wider distribution of the stress brought about by the DLC coating. Good correlation was obtained between the nanoindentation response, microstructural features and simulation studies.

Bien que mon activité de recherche a été principalement axée sur la caractérisation structurale des phases d'Aurivillius en relation avec leurs propriétés ferroélectriques, je me suis aussi intéréssé à divers aspects liés à la synthèse de ces phases que ce soit sous forme de monocristaux, de poudres ou encore de films (voie chimique). Une première section consacrée à la synthèse ouvrira donc cette deuxième partie. Dès mon arrivée au SPCTS, une part importante de mon activité a été consacrée à l'étude des intercroissances à longues périodes qui ont pu être observées dans divers systèmes mais dont les caractéristiques structurales restaient inconnues. Sur la base de nos observations expérimentales, un modèle cristallographique généralisé utilisant le formalisme des groupes de super-espace a été développé pour les stuctures de type Aurivillius. Ce travail est issu d'une collaboration étroite avec l'équipe du Prof. J.M. Perez-Mato de l'Université de Bilbao. Cette nouvelle approche cristallographique et son utilisation constitueront la deuxième section. L'étude des relations structure/propriétés dans ces composés a constitué une autre part importante de mes recherches au SPCTS avec, notamment, le co-encadrement de la thèse de Jenny Tellier. Les divers aspects de la transition ferroélectrique-paraélectrique (FE-PE) rencontrés dans les composés de type Aurivillius ont été abordés que ce soit dans le cas des termes simples, des composés d'intercroissances que dans le cas, moins classique, des composés présentant un comportement ressemblant à celui de "relaxeurs" tel que Pb(Mg1/3Nb2/3)O3. Ce travail visant à décrire les mécanismes structuraux associés à la transition FE-PE fera l'objet de la troisième et dernière section.

Carbon nanostructures are a wide field with many applications. The use of carbon nanostructures as support in heterogeneous catalysis is a key development that led together with the use of nanoparticles to a significant cost reduction of catalysts. Catalysts designed in this way are widely applied in fuel cell technologies. For portable devices especially low temperature fuel cells are desirable with low hazards for the user. One technology which fulfills these requirements is the direct formic acid fuel cell (DFAFC). DFAFC have many promising characteristics, such as high electromotive force and easy fuel handling. However, they still suffer from too low power output and lifetime for commercialization. This thesis focusses on two main aspects: the synthesis of carbon nanostructures by chemical vapor deposition (CVD) and their application as catalyst support. The materials are investigated by many different techniques ranging from transmission electron microscopy (TEM) to fuel cell tests. Different carbon nanostructures could be synthesized by catalytic CVD on palladium (Pd) nanoparticles. Multi-walled carbon nanotubes (MWCNTs), carbon nanofibers (CNFs) and helical carbon nanofibers (HCNFs) were grown, selectively, dependent on temperature, using acetylene as carbon precursor. Especially HCNF raised further interest due to their unique structure. A growth model for HCNFs was developed based on an anisotropic extrusion model. The synthesis conditions for HCNFs were optimized until an almost 100 % purity with very high efficiency was obtained. The unique helical but fiber-like structure made the material very interesting as support for heterogeneous catalysis. Several catalysts based on Pd nanoparticle decorated HCNFs were developed. The synthesis methods ranged from standard methods like the polyol method to phase-transfer methods. The catalysts showed very promising results for the electro-oxidation of methanol, ethanol and formic acid. This makes them highly attractive for fuel cell applications. The catalysts were tested in DFAFC. The superiority of HCNF-based catalysts is attributed to the good attachment of nanoparticles to the defect-rich and easy to functionalize surface of HCNFs in combination with adequate film forming properties during electrode preparation. / Nanostrukturerat kol är ett mycket brett fält med ett stort antal tillämpningar. Användning av kolnanostrukturer som support för heterogena katalysmaterial har tillsammans med utvecklingen av nanopartiklar lett till en avsevärd minskning av kostnaden för katalysatorer. Katalysatorer designade på detta sätt används frekvent i bränsleceller. För portabla tillämpningar är utvecklingen av säkra och miljövänliga lågtemperaturceller mycket viktig. En teknologi som uppfyller dessa kriterier är bränsleceller som drivs med myrsyra (DFAFC). Sådana bränsleceller har många önskvärda egenskaper, såsom en hög elektromotorisk kraft och en enkel hantering av bränslet. Trots dessa goda egenskaper har de också en del nackdelar som hindrar en full kommersialisering. De två mest problematiska är en för låg genererad effekt samt en för kort livslängd på katalysatorerna. Denna avhandling fokuserar på två huvudpunkter som adresserar dessa problem; tillverkning och karaktärisering av kolnanostrukturer producerade med CVD, och deras tillämpningar som support för katalysatorer. Materialen karaktäriseras med en rad olika tekniker, allt från transmission-elektronmikroskopi till bränslecellstester. Olika kolnanostrukturer har syntetiserats med katalytisk CVD på palladium (Pd) nanopartiklar. Produktionen av flerväggiga kolnanorör, kolfibrer och heliska kolnanofibrer har tillverkats med acetylen som kolkälla och genom att variera temperaturen kunde innehållet av olika typer av nanostrukturerat kol kontrolleras. Särskilt stort intresse har de heliska kolnanofibrerna rönt på grund av deras unika struktur. Vi beskriver en tillväxtmekanism baserad på en anisotrop diffusionsmodell. Genom att justera produktionsparametrarna visar vi att heliska kolnanofibrer kunde tillverkas med nära 100 %-ig renhet och hög effektivitet. Den unika heliska och fiberlika strukturen är mycket intressant for tillämpningar som support för heterogena katalysatorer. Ett flertal kompositer för katalytiska tillämpningar har utvecklats baserade på heliska kolnanofibrer, dekorerade med heterogena katalysatorer genom en rad olika kemiska/fysikaliska tekniker. De syntetiserade materialen visar mycket goda katalytiska egenskaper för att oxidera metanol, etanol och myrsyra. Därigenom blir de mycket attraktiva för användning i bränsleceller. Vi korrelerar de goda katalytiska egenskaperna med en bra vidhäftning av nanopartiklarna på de heliska kolnanofibrerna defekter, deras goda ledningsförmåga, bra egenskaper för att förbereda elektroder, samt deras stora yta i förhållande till deras volym och vikt.

Light emitting diodes (LEDs) and laser diodes (LDs) have many advantages over conventional light sources. Current commercial LEDs span the spectrum from IR to near- UV. There are a variety of applications for devices that extend into the deep-UV, including biological agent detection and optical storage. The nitride material system is a set of semiconducting compounds that have wavelengths that span a broad range, from yellow to deep-UV. AlGaN has a direct bandgap that extends into the deep-UV range; we will try to grow device-quality material, deposited epitaxially using metalorganic chemical vapor deposition on sapphire substrates.

Light emitting diodes (LEDs) and laser diodes (LDs) have many advantages over conventional light sources. Current commercial LEDs span the spectrum from IR to near- UV. There are a variety of applications for devices that extend into the deep-UV, including biological agent detection and optical storage. The nitride material system is a set of semiconducting compounds that have wavelengths that span a broad range, from yellow to deep-UV. AlGaN has a direct bandgap that extends into the deep-UV range; we will try to grow device-quality material, deposited epitaxially using metalorganic chemical vapor deposition on sapphire substrates.

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No description available.

The main purpose of this thesis is to improve the fundamental knowledge of non-isothermal tempering of martensite phase and its effects on the reduction in hardness (softening) with respect the base metal occurring at the heat affected zone (HAZ) of resistance spot welded dual-phase (DP) steels. This thesis also aims at understanding the influence of HAZ-softening on the joint performance of various DP steel grades. The tempering of martensite occurring at the sub-critical HAZ (SC-HAZ) of resistance spot welded DP600, DP780 and DP980 steels has been systematically evaluated by microhardness testing through Vickers indentation and the degree of tempering has been correlated to the HAZ-softening. From the joint performance analysis of similar and dissimilar steel grade combinations assessed through standardized testing methods, three important issues have been targeted: a) the joint strength (maximum load to failure), b) the location of failure (failure mode), and c) the physical characteristic of the weld that determines certain type of failure (weld nugget size). In addition, a partial tensile test has been conducted in order to evaluate the initiation of failure in dissimilar steel grade combinations. It has been shown that HAZ-softening lowered the weld size at which transition from interfacial to pullout failure mode takes place along with increased load-bearing capacity and higher energy absorption. Thus, it is concluded from mechanical testing that HAZ-softening benefits the lap-shear tensile joint performance of resistance spot welded DP steels by facilitating pullout failures through failure initiation at the SC-HAZ (tempered region). Instrumented nanoindentation testing was employed to further investigate HAZ-softening along the SC-HAZ by evaluating individual phases of ferrite matrix and tempered martensite islands. Although the ferrite matrix presented a slight reduction in hardness at nanoscale, higher reduction in hardness (softening) resulted for tempered martensite; thus confirming that tempered martensite is the major contributor to softening at micro-scale. A comparison between nanohardness and microhardness testing made at different distances from the line of lower critical temperature of transformation (Ac1) allowed revealing the actual extension of the SC-HAZ. In this regard, good correlation was obtained between nanohardness results along the SC-HAZ and the microstructural changes analyzed by electron microscopy (i.e., the tempering of martensite occurring at various distances far from Ac1 was correlated to low temperature tempering of dual phase steels). An in-depth analysis of the tempering of martensite phase at high temperature in DP steel subjected non-isothermal conditions i.e., rapid heating, extremely short time at peak temperature and rapid cooling (resistance spot welding), has been carried out mainly through analytical transmission electron microscopy (TEM). In addition, an isothermal tempering condition (i.e., slow heating and long time at peak temperature) in DP steel has been evaluated for complementing the analysis. Both non-isothermal and isothermal conditions have been correlated to the softening behaviour. TEM analysis of the base metal in the DP steel indicated that the morphology of the martensite phase is dependent on its carbon content, and its tempering characteristics are similar to that of equal carbon containing martensitic steel. The isothermally tempered structure is characterized by coarsening and spheroidization of cementite (θ) and complete recovery of the martensite laths; whereas precipitation of fine quasi-spherical intralath θ-carbides, coarser plate-like interlath θ-carbides, decomposition of retained austenite into elongated θ-carbides, and partial recovery of the lath structure were observed after non-isothermal tempering of DP steel. This difference in tempering behaviour is attributed to synergistic effect of delay in cementite precipitation due to higher heating rate, and insufficient time for diffusion of carbon that delays the third stage of tempering process (cementite coarsening and recrystalization) during non-isothermal. The finer size and the plate-like morphology of the precipitated carbides along with the partial recovery of the lath structure observed after non-isothermal tempering strongly influenced the softening behaviour of DP steel. The chemical analysis of θ-carbides through extraction replicas for three different DP steels revealed that the chemistry of the carbides is inherited from the parent DP steel during non-isothermal tempering at high temperature confirming that non-isothermal tempering DP steel is predominantly controlled by carbon diffusion.