Des MEMS supraconducteurs ont été développés par l’IRAM pour des besoins instrumentaux dans les récepteurs hétérodyne large bande en millimétrique. Dans ce mémoire, la caractérisation de ces MEMS capacitifs par des mesures profilométriques, vibrométriques, aux rayons X , électriques et thermiques est présentée. Ils ont en outre été modélisés avec un modèle analytique électromécanique simple. Ce modèle est complété par un schéma équivalent haute fréquence semi-distribué facilement implantable dans le simulateur multiphysique COMSOL pour prendre en compte la supraconductivité. Ce travail a permis de déterminer quelles géométries de ces MEMS sont satisfaisantes pour une utilisation dans les récepteurs hétérodyne large bande en hyperfréquence. / Superconducting MEMS were developed by IRAM for millimetre wave heterodyne receivers improvements. In this report, the characterization of these capacitive MEMS is presented (profilometry, vibrometry, X rays, electric and thermal). They were described with a simple analytical electromechanical model which can be easily implemented with an equivalent high frequency circuit in the COMSOL multiphysic software to take into account the superconductivity. This work answers to the question of what are the MEMS geometries well suited for broadband heterodyne receivers requirements.

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Microelectromechanical systems (MEMS) devices have been increasing in popularity for radio frequency (RF) and microwave communication systems due to the ability of MEMS devices to improve the performance of these circuits and systems. This interdisciplinary field combines the aspects of lithographic fabrication, mechanics, materials science, and RF/microwave circuit technology to produce moving structures with feature dimensions on the micron scale (micro-structures). MEMS technology has been used to improve switches, varactors, and inductors to name a few specific examples. Most MEMS devices have been fabricated using planar micro fabrication techniques that are similar to current integrated circuit (IC) fabrication techniques. These techniques limit the thickness of individual layers to a few microns, and restrict the structures to have planar and not vertical features. One micro fabrication technology that has not seen much application to microwave MEMS devices is LIGA, a German acronym for X-ray lithography, electroforming, and moulding. LIGA uses X-ray lithography to produce very tall structures (hundreds of microns) with excellent structural quality, and with lateral feature sizes smaller than a micron. These unique properties have led to an increased interest in LIGA for the development of high performance microwave devices, particularly as operating frequencies increase and physical device size decreases. Existing work using LIGA for microwave devices has concentrated on statically operating structures such as transmission lines, filters, couplers, and antennas. This research uses these unique fabrication capabilities to develop dynamically operating microwave devices with high frequency performance. This thesis documents the design, fabrication and testing of LIGA-MEMS variable capacitors that exploit the vertical dimension. Also included are methods to improve both the reliable fabrication and operation of these devices as well as material property characterization. Variable capacitors can be found in systems such as voltage-controlled oscillators, filters, impedance matching networks and phase shifters. Important figures-of-merit for these devices include the quality factor (Q), tuning range and tuning voltage. Two different types of variable capacitors are presented, a pull-away design and a design based on the principle of leveraged bending. The pull-away style variable capacitors were found to have high Q-factors, especially the devices fabricated using a thick gold device layer. As an example, the small gold half capacitance electrode design features a Q-factor of 95 at an operating frequency of 5.6 GHz and a tuning ratio of 1.36:1 with a tuning voltage range of 0 to 7.8 V. The design based on leveraged bending significantly improves the tuning ratio to a value of 1.9:1 while still maintaining a high Q-factor similar to those found in the pull-away style designs. A further increase in tuning ratio to a value of approximately 2.7:1 would be possible, based on simulated results, by simply changing the angle of the capacitance electrode in the layout. To improve device performance and fabrication reliability, modifications were made to both the fabrication process and the device layout. In the fabrication process the exposure step, electroplating step, and the etching process were modified to improve the quality of the resulting devices. In the layout, anti-stiction measures were introduced that reduce the contact area during collapse. To improve device characterization as well as the feedback link between simulation and fabrication, a set of test structures called VM-TEST was developed to accurately determine the important mechanical material properties of thick electroplated layers. These structures utilize the measurement of the pull-in voltage in cantilever and fixed-fixed beams, along with measured structure dimensions, to accurately extract the mechanical properties. Both nickel and gold test structures were analyzed with extracted Young’s modulus values of 186.2 and 60.8 GPa respectively. Also presented is a study of the gap shape in cantilever and fixed-fixed beams that significantly reduces the pull-in voltage while still maintaining a required maximum actuator displacement. It was shown that in the case of cantilever beam actuators, an approximately 40% reduction in pull-in voltage is possible, and in the case of fixed-fixed beam actuators, an approximately 30% reduction is possible by simply varying the shape of the gap between the beam and actuator electrode. These results can be used to significantly reduce the pull-in voltage of future designs. These promising results show that the LIGA fabrication process is capable of producing high performance dynamically operating RF MEMS devices, by exploiting the vertical dimension, not typically performed in most existing RF MEMS designs.

The objectives of this work were to investigate, design and implement beam steering antenna arrays for mobile and wireless applications using the genetic algorithm (GA) and particle swarm optimisation (PSO) techniques as optimisation design tools. Several antenna designs were implemented and tested: initially, a printed dipole antenna integrated with a duplex RF switch used for mobile base station antenna beam steering was investigated. A coplanar waveguide (CPW) to coplanar strip (CPS) transition was adopted to feed the printed dipole. A novel RF switch circuit, used to control the RF signal fed to the dipole antenna and placed directly before it, was proposed. The measured performance of the RF switch was tested and the results confirmed its viability. Then two hybrid coupled PIN diode phase shifters, using Branchline and Rat-Race ring coupler structures, were designed and tested. The generation of four distinct phase shifts was implemented and studied. The variations of the scattering parameters were found to be realistic, with an acceptable ±2 phase shift tolerance. Next, antenna beam steering was achieved by implementing RF switches with ON or OFF mode functions to excite the radiating elements of the antenna array. The switching control process was implemented using a genetic algorithm (GA) method, subject to scalar and binary genes. Anti-phase feeding of radiating elements was also investigated. A ring antenna array with reflectors was modelled and analysed. An antenna of this type for mobile base stations was designed and simulation results are presented. Following this, a novel concept for simple beam steering using a uniform antenna array operated at 2.4 GHz was designed using GA. The antenna is fed by a single RF input source and the steering elements are reactively tuned by varactor diodes in series with small inductors. The beam-control procedure was derived through the use of a genetic algorithm based on adjusting the required reactance values to obtain the optimum solution as indicated by the cost function. The GA was also initially used as an optimisation tool to derive the antenna design from its specification. Finally, reactive loading and time modulated switching techniques are applied to steer the beam of a circular uniformly spaced antenna array having a source element at its centre. Genetic algorithm (GA) and particle swarm optimisation (PSO) processes calculate the optimal values of reactances loading the parasitic elements, for which the gain can be optimised in a desired direction. For time modulated switching, GA and PSO also determine the optimal on and off times of the parasitic elements for which the difference in currents induced optimises the gain and steering of the beam in a desired direction. These methods were demonstrated by investigating a vertically polarised antenna configuration. A prototype antenna was constructed and experimental results compared with the simulations. Results showed that near optimal solutions for gain optimisation, sidelobe level reduction and beam steering are achievable by utilising these methods. In addition, a simple switching process is employed to steer the beam of a horizontally polarised circular antenna array. A time modulated switching process is applied through Genetic Algorithm optimisation. Several model examples illustrate the radiation beams and the switching time process of each element in the array.

Ce travail de thèse porte sur la conception, la fabrication et la caractérisation de composants non linéaires à hétérostructures d'une part, et de guides de propagation coplanaires sur membrane d'autre part.<br />Pour les dispositifs actifs, le composant développé est une hétérostructure à simple barrière qui présente des non-linéarités en capacité extrêmement marquées utilisables dans les multiplicateurs de fréquences. Par rapport aux dispositifs Schottky varactors conventionnels, les hétérostructures permettent de tirer parti de propriétés de symétrie et d'optimiser et d'optimiser au mieux les caractéristiques des courants de déplacement et de conduction. En pratique, les composants sont fabriqués à partir de multiples hétérostructures épitaxiées par jets moléculaires sur substrat InP mettant en jeu des techniques d'intégration monolithiques. Plusieurs séries d'échantillons ont été fabriquées avec pour les dernières structures des résultats à l'état de l'art, notamment avec la possibilité de moduler la capacité dans un rapport 5 en tenue en tension de plus de 6 Volt favorable aux applications de puissance. dans cette optique, nous démontrons par ailleurs la possibilité d'intégrer verticalement plusieurs composants sur une même épitaxie.<br />Pour les structures passives, elles sont constituées de lignes coplanaires déposées sur membrane de polyimide ou de nitrure de silicium. Dans ces conditions le milieu de propagation peut se comparer à l'air avec une permittivité effective très proche de celle obtenue dans l'espace libre. De telles structures ont été fabriquées en utilisant des technologies de micro-usinage de l'Arséniure de Gallium. Les résultats des caractérisations hyperfréquences sont conformes aux prédictions théoriques, avec la propagation faible perte de l'énergie électromagnétique sans dispersion dans une très large bande de fréquence. Ces études sont ensuite étendues à la conception de structures de filtrage aux fréquences millimétriques, notamment à 250 GHz.

Varactors form an important part of many communication circuits. They are utilized in oscillators, tunable matching networks, tunable filters and phase-shifters. This thesis deals with the design, analysis, characterization and applications of a novel MEMS varactor. Lower actuation voltage and higher dynamic range are the two important issues widely addressed in the study of MEMS varactors. The pull-in instability, due to which only 33% of the gap between plates could be covered smoothly, greatly reduces useful dynamic range of MEMS varactors. We propose a torsional MEMS varactor that exploits “displacement amplification” whereby pull-in is overcome and wide dynamic range is achieved. The torsion beam in the device undergoes torsion as well as bending. Behavior of the device has been analyzed through torque and force balance. Based on the torque balance and the force balance expressions, theoretical limits of torsion angle and bending for stable operation have been derived. Torsional MEMS varactors and its variants are fabricated through a commercial fabrication process (polyMUMPS) and extensive characterization has been carried out. Capacitance-voltage characteristics show a maximum dynamic range of 1:16 with parasitic capacitance subtracted out from the capacitance values. A bidirectional torsional varactor, in which the top AC plate moves not only towards bottom plate but also away from bottom plate, is also tested. The bottom AC plate is isolated from low resistivity substrate with a thin nitride layer. This gives rise to large parasitic capacitances at higher frequencies. So to avoid this, a varactor with both AC plates suspended in air is designed and fabricated. A dynamic range of 1:8 including parasitic capacitances has been achieved. Self-actuation is studied on fabricated structures and a torsional varactor that overcomes self-actuation has been proposed. Hysteresis behavior of the torsional varactor is analyzed for different AC signals across the varactor plates. Effects of residual stress on C-V characteristics are studied and advantages and disadvantages of residual stress on device performance are discussed. The torsional varactors have been cycled between Cmax and Cmin for 36 hours continuously without any failure. High-frequency characteristics of torsional varactors are analyzed through measurements on one-port and two port configurations. Measurements are done on polyMUMPS devices to study the capacitance variation with voltage, quality factor (Q) and capacitance variation with frequency. Effects of substrate are de-embedded from the device and characteristics of device are studied. An analog phase shifter based on torsional varactor proposed and analyzed through HFSS simulations. Very high tuning range can be achieved with a LC-VCO based on torsional varactors. A LC VCO with the torsional varactor as a capacitor in LC tank is designed. The torsional varactor and IC are fabricated separately and are integrated through wire bonding. Bond-wires are used as inductors.

In modern broadband microwave applications, receivers are very sensitive to interference signals which can come from the system itself or from hostile emitters. Electronically tunable bandstop filters can be used to eliminate these interference signals with adaptation to changing frequency conditions. In this thesis, electronically tunable bandstop filter design techniques are investigated for microwave frequencies. The aim is to find filter topologies which allow narrowband bandstop or &lsquo / notch&rsquo / filter designs with low-Q resonators and with tuning capability. Tunability will be provided by the use of electronically tunable capacitors, specifically varactor diodes. For this purpose, firstly direct bandstop filter techniques are investigated and their performances are analyzed. Then phase cancellation approach, which enables high quality bandstop filter design with lossy circuit elements, is introduced and analyzed. Lastly, a novel notch filter design technique called as all-pass filter approach is introduced. This approach allows a systematic design method and enables to design very good tunable notch filter characteristics with low-Q resonators. Three filter topologies using this approach are given and their performances are analyzed. Also prototype tunable notch filters operating in X-Band are designed and implemented by using these three topologies.

The thesis describes development and application of coupled resonant coil sensors, which is of growing interest for remote monitoring applications. An interrogation technique, which improves the accuracy and interrogation range of coupled resonant coil sensors, is introduced. The method uses time-domain gating to produce measurements that are dominated by the response of the sensor coil and are immune to surrounding object interference. For application in structural health monitoring a low cost embeddable coupled coil sensor, which is able to monitor the corrosion potential of reinforcement steel is presented. Results of an accelerated corrosion test using the sensor indicate that corrosion potential can be monitored with a resolution less than 10 mV and a sensitivity of 0.76 kHz/mV. The last part describes a coupled-coil pH sensor based on pH electrode potential measurement. A linear response over a 4 to 10 pH dynamic range and 50 kHz/pH sensitivity are achieved with a 0.1 pH resolution and 30 s response time.

La croissance rapide du marché des télécommunications a conduit à une augmentation significative du nombre de bandes de fréquences allouées et à un besoin toujours plus grand en terminaux offrant un accès à un maximum de standards tout en proposant un maximum de services. La miniaturisation de ces appareils, combinée à la mise en place de fonctions supplémentaires, devient un vrai challenge pour les industriels. Une solution consiste à utiliser des fonctions hyperfréquences accordables (filtres, commutateurs, amplificateurs,...). A ce jour, trois technologies d'accord sont principalement utilisées : capacités variables, matériaux agiles ou encore MEMS RF. Dans le cadre de cette thèse, nous avons travaillé sur l'optimisation de dispositifs hyperfréquences reconfigurables en utilisant des couches minces ferroélectriques KTN et des diodes varactor. Nos premiers travaux étaient relatifs à l'optimisation des dispositifs hyperfréquences accordables à base de couche minces KTN. Dans ce sens, nous avons tout d'abord caractérisé le matériau KTN en basse et haute fréquence afin de déterminer ses caractéristiques diélectriques et ses caractéristiques en température. Nous avons ensuite réalisé des dispositifs hyperfréquence élémentaires tels des capacités interdigitées et des déphaseurs à base de KTN. Leurs performances ont alors été comparées aux mêmes dispositifs réalisés cette fois à base de la solution la plus utilisée BST. Bien qu'un léger avantage soit acquis à la solution BST, il n'en reste pas moins vrai que les résultats avec le matériau KTN sont très proches indiquant que cette voie peut également, après optimisation, apporter une alternative au BST. La seconde partie de nos travaux concerne la réalisation de filtres planaires accordables en fréquence à base de matériaux KTN et de diodes varactor. Nous avons ainsi réalisé deux filtres passe-bande accordables. Un premier filtre passe-bande de type " open loop " possédant deux pôles agiles en fréquence centrale et un second filtre passe-bande de type SIR rendant possible l'accord de sa fréquence centrale ainsi que de sa bande passante à partir de diodes varactor. Lors de la conclusion sur nos travaux, nous évoquons les suites à donner à ce travail et les perspectives.