La fusion sélective par laser est un procédé de la technologie de fabrication rapide de plus en plus utilisé dans l’industrie automobile, aéronautique, médicale, etc. Selon le principe de la fabrication rapide, la pièce est fabriquée couche par couche en fusionnant et soudant les particules fines par laser. Actuellement, les principaux matériaux utilisés sont les métaux métalliques ou les polymères. Le faible ou modeste point de fusion de ces matériaux conduit à une mise en œuvre par laser relativement facile. Cependant, en raison de leur point de fusion élevé, de la forte résistance à haute température et de la faible conductivité thermique, l’utilisation de matériaux céramiques est limitée dans la technologie de fusion laser sélective. Cette étude explore la fusion laser sélective de zircone stabilisée par yttrine avec un laser à fibre de longueur d’onde d’environ 1 µm. L’influence de différentes puissances de laser et de différentes vitesses de balayage sur la microstructure et la déformation de l’échantillon a été étudiée, et la densité relative et la microdureté ont été mesurées. Notamment, l’effet de différentes températures de préchauffage sur la microstructure sera étudié. En même temps, la structure cristalline céramique et la transformation des phases pendant le procédé de prototypage rapide ont été analysées. Les résultats expérimentaux montrent qu’il est possible de fondre complètement de la poudre YSZ avec un laser à fibre NIR, et avec l’optimisation des paramètres de fabrication, la densité relative de l’échantillon peut atteindre 91 %. Il est inévitable de voir se former des fissures et des pores dans les pièces fabriquées du fait de l’hétérogénéité de la distribution de l’énergie du laser. Cette distribution de l’énergie peut être améliorée grâce à l’optimisation des paramètres ; les longueurs de fissure peuvent être contrôlées et maîtrisées par un préchauffage du lit de poudre. Notamment, à haute température (1500°C, 2000°C et 2500°C) de préchauffage, la fissure verticale continue devient désordonnée et courte. Une transformation de la structure monoclinique et cubique en structure tétragonale s’est produite pendant le processus de fabrication. / Selective laser melting is a rapid manufacturing process coming from the rapid prototyping technology, which is widely used in the automotive, aeronautical, medical industry etc. According to the principle of rapid manufacturing, the piece is manufactured layer by layer through the laser sintering or melting the fine powder. Currently, the main powder materials used are metal or polymer materials. The low melting point of these materials facilitates the melting process. However, duo to the high melting point, strong strength at high temperature and low thermal conductivity the application of ceramic materials is limited in the technology of selective laser melting. In this study, selective laser melting of the ceramic yttria stabilized zirconia by a 1μm wavelength fiber laser was explored. The influence of different laser powers and different scanning velocities on the microstructure and the deformation were analyzed, then the micro-hardness and relative density were measured. In particular, the effect of different preheat temperatures on microstructure was investigated. At the same time, the crystal structure and phase transformation during the fabrication were analyzed. Experimental results show that YSZ powder can be completely melted by the near IR fiber laser. With the optimization of the manufacturing parameters, the relative density of sample could reach 91 %. The forming of cracks and pores in the manufactured parts is rarely avoid due to the heterogeneity of distribution of energy. The energy distribution could be improved by optimizing the parameters and the crack lengths can be controlled by preheating the powder bed. In particular, the high temperature (1500 ℃, 2000 ℃ and 2500 ℃) lead the continuous vertical crack becomes messy and short. The transformation of monoclinic and cubic crystal to tetragonal crystal can be observed during the fabrication.

The effect of dental technical tools on the phase composition and roughness of 3/4/5 yttria-stabilized tetragonal zirconia polycrystalline (3y-/4y-/5y-TZP) for application in prosthetic dentistry was investigated. Additionally, the X-ray diffraction methods of Garvie-Nicholson and Rietveld were compared in a dental restoration context. Seven plates from two manufacturers, each fabricated from commercially available zirconia (3/4/5 mol%) for application as dental restorative material, were stressed by different dental technical tools used for grinding and polishing, as well as by chewing simulation and thermocycling. All specimens were examined via laser microscopy (surface roughness) and X-ray diffraction (DIN EN ISO 13356 and the Rietveld method). As a result, the monoclinic phase fraction was halved by grinding for the 3y-TZP and transformed entirely into one of the tetragonal phases by polishing/chewing for all specimens. The tetragonal phase t is preferred for an yttria content of 3 mol% and phase t″ for 5 mol%. Mechanical stress, such as polishing or grinding, does not trigger low-temperature degradation (LTD), but it fosters a phase transformation from monoclinic to tetragonal under certain conditions. This may increase the translucency and deteriorate the mechanical properties to some extent.

Les piles à combustible Solid Oxide Fuel Cell sont des systèmes de production d’électricité. Une cellule élémentaire est un multicouche constitué de matériaux céramiques et de métal. Elles sont très sensibles aux contraintes mécaniques générées lors des cycles thermiques et d’oxydo-réduction, limitant leur durée de vie.Ce travail a porté sur la détermination expérimentale des contraintes résiduelles dans des cellules SOFC à anode support en fonction des sollicitations du système. Parallèlement à des mesures in-situ en température, une approche multi-échelles a été développée pour évaluer les hétérogénéités de contraintes dans l’électrolyte liées à la forte anisotropie élastique de la zircone yttriée qui le constitue. Différentes techniques ont été mise en œuvre afin de couvrir les 3 ordres de contraintes. Les mesures à l’échelle macroscopique ont été effectuées par diffraction de rayons X de laboratoire (méthode des sin²(Ψ)). La microdiffraction de rayonnement synchrotron en mode faisceau blanc et monochromatique a permis, après un important travail d’amélioration du protocole de mesure et d’analyse, de déterminer les tenseurs complets de contraintes et déformations grain à grain dans l’électrolyte. Les déformations intra-granulaires ont été évaluées par une technique d’EBSD.Les résultats obtenus ont permis d’analyser les mécanismes principaux qui régissent les évolutions de contraintes dans l’électrolyte. Des hétérogénéités de contraintes entre grains liées à leurs orientations cristallographiques ont été mises en évidence. Au-delà du problème des SOFC, les techniques mises en œuvre ouvrent la voie aux validations expérimentales des modèles mécaniques poly-cristallins. / The Solid Oxide Fuel Cells (SOFC) are high-performance electrochemical devices for energy conversion. A single cell is composed of layers made of different ceramic materials and metal. The mechanical integrity of the cell is a major issue during its lifetime. Damage of the cells is mainly due to the high operating temperature, the “redox” behavior of the anode and the brittleness of the involved materials. In this work, residual stresses in the electrolyte of a planar anode-supported SOFC have been experimentally measured for different treatments of the cell. In situ analysis at various temperatures has been performed. A multi-scale approach has been developed to study the expected strain-stress heterogeneities in the electrolyte due to the strong elastic anisotropy of the involved material (yttria-stabilized zirconia). Different techniques have been used to determinate stresses at the 3 different orders. Macroscopic stresses were studied using the Sin2 method on a laboratory X-ray goniometer. The complete strain and stress tensors of individual grains in the electrolyte have been determinate, after various improvements in the technique, by combining the diffraction of white and monochromatic micro beams produced by synchrotron source. Strain variation into grains has been evaluated using EBSD.This study has identified the main phenomena that control the stresses variation in the electrolyte layer. Stresses heterogeneities from grain to grain have been found and linked to the crystallographic orientation. Beyond SOFC’s considerations, the techniques that have been developed should permit an experimental validation of mechanical modeling to polycrystalline materials.

Foram efetuados experimentos de sinterização em cerâmica policristalina de ZrO2: 3 mol% Y2O3 (3YSZ) por três métodos: aquecimento seguindo o perfil temperatura ambiente 1400 °C temperatura ambiente (sinterização convencional), aquecimento a partir da temperatura ambiente até 1000-1100 °C sob aplicação de campo elétrico AC (sinterização dinâmica assistida por campo elétrico), e aquecimento até 1000-1100 °C para aplicação do campo elétrico AC (sinterização isotérmica assistida por campo elétrico). O último método foi aplicado em amostras sob diferentes condições (amostras a verde, amostras a verde compactadas isostaticamente com diferentes pressões, amostras pré-sinterizadas a 1400 °C) e diferentes condições experimentais (diferentes frequências do campo elétrico AC, campo elétrico DC, diferentes limites de densidade de corrente, aplicação de carga simultaneamente à aplicação do campo elétrico). Todas as amostras de 3YSZ sinterizadas, além de terem a densidade aparente determinada, tiveram a superfície observada em microscópio eletrônico de varredura para avaliação do tamanho médio de grão e distribuição do tamanho de grão (em alguns casos, ao longo da superfície, do centro para a borda). Além disso, análises de espectroscopia de impedância foram feitas para avaliar a contribuição intergranular (principalmente contorno de grão) e intragranular (grãos) para a resistividade elétrica. A ideia principal foi coletar dados sobre sinterização assistida por campo elétrico, procurando entender o mecanismo atuando no método de sinterização, conhecido por produzir peças cerâmicas densas em temperaturas menores do que as usadas em sinterização convencional, em tempos curtos, e com inibição do crescimento de grão. Os resultados principais mostram que: 1) o nível de retração depende da frequência do campo elétrico AC, 2) quanto maior a porosidade, maior o efeito do campo elétrico, 3) quanto maior o valor da densidade de corrente, maior a densificação, até um determinado limite a partir do qual a amostra é danificada, 4) o pulso de corrente elétrica flui preferencialmente pela região intergranular, e 5) amostras submetidas a sinterização assistida por campo elétrico mostraram aumento da condutividade do contorno de grão. Um mecanismo para a sinterização assistida por campo elétrico é proposto, baseado em que 1) aquecimento Joule é o efeito principal, 2) a corrente elétrica, que surge como resultado da aplicação do campo elétrico, flui pela região intergranular, 3) o aquecimento Joule difunde as espécies químicas depletadas nas interfaces de volta aos grãos, aumentando a concentração de defeitos, levando ao aumento da condutividade do grão, e 4) o aquecimento Joule é responsável por diminuir a barreira potencial na região de carga espacial, inibindo o bloqueio dos íons de oxigênio nos contornos de grão. / Experiments on sintering ZrO2: 3 mol% Y2O3 polycrystalline ceramics (Y-TZP, hereafter 3YSZ) were carried out by three methods: heating following the room temperature-1400°C-room temperature profile (conventional sintering), heating from room temperature to 1000-1100°C under an applied AC electric field (dynamic electric field-assisted sintering), and heating to 1000-1100°C for application of an AC electric field (isothermal electric field-assisted sintering). The last method was performed under different specimen conditions (green pellets, green pellets isostatically pressed with different loads, pellets pre-sintered at 1400°C) and different experimental conditions (different frequencies of the AC electric field, DC electric fields, different limitation of the electric current densities, applying loads simultaneously to application of the electric field). All 3YSZ sintered samples, besides having their apparent densities determined, had their surfaces observed in a scanning electron microscope to evaluate average grain size and distribution of grain sizes (some, along the surface from the center to the border). Moreover, impedance spectroscopy analyses were carried out to evaluate the intergranular (mainly grain boundary) and intragranular (bulk) contributions to the electrical resistivity. The primary idea was to collect data on electric field-assisted sintering looking for understanding the mechanisms behind that sintering method, known to produce dense ceramic pieces at temperatures lower than those used in conventional sintering, in short times and inhibiting grain growth. The main results show that 1) the shrinkage level depends on the AC frequency, 2) the larger the porosity the higher the electric field effect, 3) higher current densities promotes higher densification up to a limit that could damage the sample, 4) the electric current pulse follows preferentially the intergranular instead of the bulk pathway, and 5) electric field-assisted sintered specimens show enhanced grain boundary conductivity. A mechanism for the electric field-assisted sintering is proposed based on that 1) Joule heating is the primary event, 2) the electric current, as a result of the electric field, follows the intergranular pathway, 3) Joule heating diffuses chemical species depleted at the interfaces back to the bulk, increasing the defect concentration, leading to the enhancement of the bulk conductivity, and 4) that same Joule heating is responsible for the decrease of the potential barrier at the space charge region, inhibiting the blocking of oxide ions at the grain boundaries.

Foram efetuados experimentos de sinterização em cerâmica policristalina de ZrO2: 3 mol% Y2O3 (3YSZ) por três métodos: aquecimento seguindo o perfil temperatura ambiente 1400 °C temperatura ambiente (sinterização convencional), aquecimento a partir da temperatura ambiente até 1000-1100 °C sob aplicação de campo elétrico AC (sinterização dinâmica assistida por campo elétrico), e aquecimento até 1000-1100 °C para aplicação do campo elétrico AC (sinterização isotérmica assistida por campo elétrico). O último método foi aplicado em amostras sob diferentes condições (amostras a verde, amostras a verde compactadas isostaticamente com diferentes pressões, amostras pré-sinterizadas a 1400 °C) e diferentes condições experimentais (diferentes frequências do campo elétrico AC, campo elétrico DC, diferentes limites de densidade de corrente, aplicação de carga simultaneamente à aplicação do campo elétrico). Todas as amostras de 3YSZ sinterizadas, além de terem a densidade aparente determinada, tiveram a superfície observada em microscópio eletrônico de varredura para avaliação do tamanho médio de grão e distribuição do tamanho de grão (em alguns casos, ao longo da superfície, do centro para a borda). Além disso, análises de espectroscopia de impedância foram feitas para avaliar a contribuição intergranular (principalmente contorno de grão) e intragranular (grãos) para a resistividade elétrica. A ideia principal foi coletar dados sobre sinterização assistida por campo elétrico, procurando entender o mecanismo atuando no método de sinterização, conhecido por produzir peças cerâmicas densas em temperaturas menores do que as usadas em sinterização convencional, em tempos curtos, e com inibição do crescimento de grão. Os resultados principais mostram que: 1) o nível de retração depende da frequência do campo elétrico AC, 2) quanto maior a porosidade, maior o efeito do campo elétrico, 3) quanto maior o valor da densidade de corrente, maior a densificação, até um determinado limite a partir do qual a amostra é danificada, 4) o pulso de corrente elétrica flui preferencialmente pela região intergranular, e 5) amostras submetidas a sinterização assistida por campo elétrico mostraram aumento da condutividade do contorno de grão. Um mecanismo para a sinterização assistida por campo elétrico é proposto, baseado em que 1) aquecimento Joule é o efeito principal, 2) a corrente elétrica, que surge como resultado da aplicação do campo elétrico, flui pela região intergranular, 3) o aquecimento Joule difunde as espécies químicas depletadas nas interfaces de volta aos grãos, aumentando a concentração de defeitos, levando ao aumento da condutividade do grão, e 4) o aquecimento Joule é responsável por diminuir a barreira potencial na região de carga espacial, inibindo o bloqueio dos íons de oxigênio nos contornos de grão. / Experiments on sintering ZrO2: 3 mol% Y2O3 polycrystalline ceramics (Y-TZP, hereafter 3YSZ) were carried out by three methods: heating following the room temperature-1400°C-room temperature profile (conventional sintering), heating from room temperature to 1000-1100°C under an applied AC electric field (dynamic electric field-assisted sintering), and heating to 1000-1100°C for application of an AC electric field (isothermal electric field-assisted sintering). The last method was performed under different specimen conditions (green pellets, green pellets isostatically pressed with different loads, pellets pre-sintered at 1400°C) and different experimental conditions (different frequencies of the AC electric field, DC electric fields, different limitation of the electric current densities, applying loads simultaneously to application of the electric field). All 3YSZ sintered samples, besides having their apparent densities determined, had their surfaces observed in a scanning electron microscope to evaluate average grain size and distribution of grain sizes (some, along the surface from the center to the border). Moreover, impedance spectroscopy analyses were carried out to evaluate the intergranular (mainly grain boundary) and intragranular (bulk) contributions to the electrical resistivity. The primary idea was to collect data on electric field-assisted sintering looking for understanding the mechanisms behind that sintering method, known to produce dense ceramic pieces at temperatures lower than those used in conventional sintering, in short times and inhibiting grain growth. The main results show that 1) the shrinkage level depends on the AC frequency, 2) the larger the porosity the higher the electric field effect, 3) higher current densities promotes higher densification up to a limit that could damage the sample, 4) the electric current pulse follows preferentially the intergranular instead of the bulk pathway, and 5) electric field-assisted sintered specimens show enhanced grain boundary conductivity. A mechanism for the electric field-assisted sintering is proposed based on that 1) Joule heating is the primary event, 2) the electric current, as a result of the electric field, follows the intergranular pathway, 3) Joule heating diffuses chemical species depleted at the interfaces back to the bulk, increasing the defect concentration, leading to the enhancement of the bulk conductivity, and 4) that same Joule heating is responsible for the decrease of the potential barrier at the space charge region, inhibiting the blocking of oxide ions at the grain boundaries.

Made available in DSpace on 2017-07-21T20:42:43Z (GMT). No. of bitstreams: 1 LENA, Eleomar.pdf: 3273064 bytes, checksum: d7d21ed4ddfa4969702a9c497ccaccc4 (MD5) Previous issue date: 2012-08-03 / Coordenação de Aperfeiçoamento de Pessoal de Nível Superior / This work studied the influence of oxidizing atmospheres of calcination and sintering temperature on the electrical properties, densification and grain size of yttria doped with 4.5 mol% zirconia synthesized by a sol-gel process followed by calcination at 600 ºC/2h in O2 and air. Used for uniaxial pressing with pressures between 150 MPa and 1.6 GPa. Sintered by Two Step Sintering (TSS): 1550 °C / 5 min and 1200, 1300, 1400 °C, remaining at these temperatures for 2 and 10 hours. Characterized by X-ray diffraction, apparent density,scanning electron microscopy, impedance spectroscopy. The density measurements were above 94% of theoretical density and grain size between 304 and 477 nm, activation energies of 0.68 and 0.90 eV. The TSS was formed in sintering and grain submicrométicos prevented their excessive growth during the final sintering.The calcination atmosphere had little influence on the values of density and porosity, but caused changes in crystallite size and influenced the values of conductivity / Neste trabalho foram estudadas as influência de atmosferas oxidadante de calcinação nas propriedades elétricas das temperaturas de sinterização, densificação e tamanho de grão em compactos de zirconia dopada com 4,5% em moles de oxido de itrio sintetizado por processo sol-gel seguido de calcinação a 600 °C/2h ao ar e O2. Compactados uniaxialmente com pressoes entre 150 MPa e 1,6 GPa. Sinterizados pelo processo Two Step Sintering (TSS): 155 °C/5 min e 1200, 1300 e 1400 °C, permanescendo por 2 e 10 horas. Caracterizados por difração de raios X, densidade aparente, microscopia eletronica de varredura e espectrocopia de impedancia. As As medições de densidade foram acima de 94% da densidade teórica e tamanho de grão entre 304 e 477 nm, as energias de activação de 0,68 e 0,90 eV. A TSS foi formou na sinterização grãos submicrométicos e impediu seu crescimento excessivo durante o final de sintering. A atmosfera calcinação teve pouca influência sobre os valores de densidade e porosidade, causando mudanças no tamanho de cristalito e influenciando os valores de condutividade Neste trabalho foram estudadas as influência de atmosferas oxidadante de calcinação nas propriedades elétricas das temperaturas de sinterização, densificação e tamanho de grão em compactos de zirconia dopada com 4,5% em moles de oxido de itrio sintetizado por processo sol-gel seguido de calcinação a 600 °C/2h ao ar e O2. Compactados uniaxialmente com pressoes entre 150 MPa e 1,6 GPa. Sinterizados pelo processo Two Step Sintering (TSS): 155 °C/5 min e 1200, 1300 e 1400 °C, permanescendo por 2 e 10 horas. Caracterizados por difração de raios X, densidade aparente, microscopia eletronica de varredura e espectrocopia de impedancia. As As medições de densidade foram acima de 94% da densidade teórica e tamanho de grão entre 304 e 477 nm, as energias de activação de 0,68 e 0,90 eV. A TSS foi formou na sinterização grãos submicrométicos e impediu seu crescimento excessivo durante o final de sintering. A atmosfera calcinação teve pouca influência sobre os valores de densidade e porosidade, causando mudanças no tamanho de cristalito e influenciando os valores de condutividade

The yttria-stabilized zirconia (YSZ) system has been extensively studied because of its critical applications, like solid oxide fuel cells (SOFCs), oxygen sensors, and jet engines. However, there are still important questions that need to be answered and significant thermodynamic information that needs to be provided for this system. There is no predictive tool for the ionic conductivity of the cubic-YSZ (c-YSZ), as an electrolyte in SOFCs. In addition, no quantitative diagram is available regarding the oxygen ion mobility in c-YSZ, which is highly effective on its ionic conductivity. Moreover, there is no applicable phase stability diagram for the nano-YSZ, which is applied in oxygen sensors. Phase diagrams are critical tools to design new applications of materials. Furthermore, even after extensive studies on the thermodynamic database of the YSZ system, the zirconia-rich side of the system shows considerable uncertainties regarding the phase equilibria, which can make the application designs unreliable. During this dissertation, the CALPHAD (CALculation of PHase Diagrams) approach was applied to provide a predictive diagram for the ionic conductivity of the c-YSZ system. The oxygen ion mobility, activation energy, and pre-exponential factor were also predicted. In addition, the CALPHAD approach was utilized to predict the Gibbs energy of bulk YSZ at different temperatures. The surface energy of each polymorph was then added to the predicted Gibbs energy of bulk YSZ to obtain the total Gibbs energy of nano-YSZ. Therefore, a 3-D phase stability diagram for the nano-YSZ system was provided, by which the stability range of each polymorph versus temperature and particle size are presented. Re-assessment of the thermodynamic database of the YSZ system was done by applying the CALPHAD approach. All of the available thermochemical and phase equilibria data were evaluated carefully and the most reliable ones were selected for the Gibbs energy optimization process. The results calculated by the optimized thermodynamic database showed good agreement with the selected experimental data, particularly on the zirconia-rich side of the system.

The transport in oxides is studied by the use of gas phase analysis (GPA). An experimental method to identify transported species of gases and their contribution to the overall transport of gases in oxides and an experimental method to evaluate the parameters diffusivity, concentration, permeability of gases in oxides and effective pore size in oxides are developed, respectively. Pt has two effects on the thermal oxidation of metals. One is to enhance the oxidation of metals which takes place at the oxide-metal interface by promoting a high concentration gradient of dissociated oxygen across the oxide layer. The other effect is to suppress the oxidation of metals by decreasing the contact area between metal and oxygen. The overall effect of Pt on the oxidation of metals depends on the mechanism of oxide growth in the absence of Pt. It is suggested that an appropriate amount of Pt coating induces a balanced oxide growth resulting from stoichimetrical inward oxygen flux to outward metal flux, which leads to a reduced oxidation rate. The diffusion of diatomic gases in oxides such as vitreous silica and yttria stabilized zirconia (YSZ) takes place in both molecular and dissociated (atomic or/and ionic) form. The fraction of transport of molecular species decreases with temperatures, and the fraction of transport of dissociated species increases with temperatures. Measured permeabilities of diatomic gases in vitreous silica are higher than the expected permeabilities of their molecules, which are explained by diffusion of molecules combined with a retardation of dissociated species in reversible traps. The diffusion of hydrogen in vitreous silica is concentration dependent and increases with local concentration. Transport paths are shared among transported species and gases at all temperatures in YSZ. Helium shares transport path with molecular oxygen and nitrogen at low temperatures; whereas helium shares transport path with dissociated oxygen and also dissociated nitrogen at high temperatures. / QC 20100705

Combustion chemical vapor deposition (combustion CVD) is a thin film deposition process that uses a flame created by the ignition of an aerosol containing precursors dissolved in a flammable solvent. Combustion CVD is a relatively new technique for creating thin film oxide coatings. Combustion CVD has been successfully used to deposit high quality thin oxide films for potential applications such as thermal barrier coatings, dielectric thin films, composite interlayer coatings, etc. The present work involved developing the optimum parameters for deposition of thin films of yttria-stabilized zirconia (YSZ), alumina (Al₂O₃), and YSZ-alumina composites followed by a determination of the mechanical properties of the films (measured using nanoindentation) as a function of composition. The optimized parameters for deposition of YSZ, alumina, and YSZ-alumina composites onto single crystal a-plane alumina involved using an organic liquid as the flammable solvent and Y 2-ethylhexanoate, Zr 2-ethylhexanoate and Al acetylacetonate as the metal precursors at a 0.002 M concentration delivered at 4 ml/min at flame temperatures of 155 ℃ and substrate temperatures of 105 ℃. The resulting films were grown with deposition rates of ~ 1.5 μm/hr. Measurement of the mechanical properties (hardness, elastic modulus and fracture toughness) of the films was performed using a mechanical properties microprobe called the Nanoindenter®. In order to obtain valid results from nanoindentation, the combustion CVD films were optimized for minimum surface roughness and grown to a thickness of approximately 0.8 μm. With the penetration depth of the indenter at approximately 150 nm, the 800 nm thickness of the film made influences of the substrate on the measurements negligible. The hardnesses and elastic moduli of the YSZ-alumina films did not vary with the composition of the film. The fracture toughness, however, did show a dependence on the composition. It was found that second phase particles of alumina grown into a YSZ matrix increased the fracture toughness of the films (on average, 1.76 MPa• m⁰.⁵ for 100% YSZ to 2.49 MPa• m⁰.⁵ for 70 mol% YSZ/30 mol% alumina). Similarly, second phase particles of YSZ grown into an alumina matrix also increased the fracture toughness (on average, 2.20 MPa• m⁰.⁵ for 100% alumina to 2.45 MPa• m⁰.⁵ for 37.2 mol% YSZ/62.8 mol% alumina). Modeling of the fracture toughness of the YSZ-alumina films was successfully achieved by using the following toughening mechanisms: crack deflection from the second phase particles, grain bridging around the particles, and residual stress from the CTE mismatch between the film and the substrate and between the second phase particles and the matrix of the film.

H Ζιρκόνια σταθεροποιημένη με Ύττρια (Yttria Stabilized Zirconia (YSZ)) χρησιμοποιείται σήμερα ευρέως στη βιομηχανία μηχανών για αεριωθούμενα και στη οδοντιατρική. Τα τελευταία χρόνια υπάρχει έντονο ερευνητικό ενδιαφέρον για την εφαρμογή της σε κυψελίδες καυσίμου στερεού ηλεκτρολύτη (SOFCs) μιας και παρουσιάζει αγωγιμότητα ιόντων οξυγόνου σε μεγάλο θερμοκρασιακό εύρος, διαθέτει υψηλή μηχανική αντοχή, μεγάλη σκληρότητα και χημική σταθερότητα σε συνθήκες ηλεκτρικής φόρτισης και αντίδρασης. Σκοπός της παρούσας εργασίας είναι η ανάπτυξη μεθόδου για εναπόθεση υμενίων ζιρκονίας με την βοήθεια πλάσματος. Η εναπόθεση λεπτών υμενίων YSZ με τη χρήση πλάσματος χαμηλής πίεσης παρουσιάζει μερικά σημαντικά πλεονεκτήματα όπως εναπόθεση σε χαμηλές θερμοκρασίες (<400oC) και ομοιόμορφη κάλυψη της επιφάνειας με μεγάλη πυκνότητα. Από την άλλη πλευρά η ιδιαιτερότητα της εναπόθεσης μέσω πλάσματος έγκειται στο γεγονός ότι η δομή, οι ιδιότητες και η χημική σύσταση των παραγόμενων υμενίων εξαρτώνται σημαντικά από τις παραμέτρους της διεργασίας. Στο πρώτο μέρος της εργασίας αναπτύσσεται η εναπόθεση υμενίων YSZ με τη τεχνική πλάσματος χαμηλής πίεσης από μεταλλοργανικές πρόδρομες ενώσεις υττρίου και ζιρκονίου σε δύο διαφορετικούς αντιδραστήρες πλάσματος, ενός επαγωγικά και ενός χωρητικά συζευγμένου. Μελετήθηκε η επίδραση της παρεχόμενης στο πλάσμα ισχύος, των παροχών των πρόδρομων ενώσεων, του συνολικού χρόνου της διεργασίας και της θερμοκρασίας του υποστρώματος στα μορφολογικά χαρακτηριστικά, στην δομή και τη σύσταση των παραγόμενων υμενίων. Στην συνέχεια εξετάσθηκε πως η χρήση πλάσματος αργού-οξυγόνου, σε ήδη εναποτεθειμένα υμένια ζιρκονίου και υττρίου με τις τεχνικές φυσικής εναπόθεσης (spin και spray coating), ενισχύει την κρυστάλλωση του υμενίου σε κυβική YSZ. Γίνεται σύγκριση με τα αποτελέσματα που λαμβάνονται για την κρυστάλλωση των υμενίων με τη μέθοδο της θερμικής ανόπτησης ως προς τον χρόνο αλλά και τη θερμοκρασία κρυστάλλωσης που χρειάζεται ώστε να επιτευχθεί το ίδιο αποτέλεσμα. Τα υμένια χαρακτηρίσθηκαν με μια σειρά από τεχνικές όπως: φασματοσκοπία φοτοηλεκτρονίων ακτίνων Χ (XPS), ηλεκτρονιακή μικροσκοπία σάρωσης (SEM), περίθλαση ακτίνων Χ (XRD) και μικροσκοπία ατομικών δυνάμεων (AFM). Τα αποτελέσματα των πειραμάτων έδειξαν ότι η παρεχόμενη ισχύ, ο χρόνος της διεργασίας καθώς και η θερμοκρασία του υποστρώματος παίζουν σημαντικό ρόλο στην ανάπτυξη τη δομή και τη μορφολογία των υμενίων YSZ. Για την πλήρη κρυστάλλωση σε κυβική ζιρκονία σταθεροποιημένη με ύττρια αλλά και την πλήρη απομάκρυνση του άνθρακα από το υμένιο, απαιτήθηκε ένα στάδιο ανόπτησης του υμενίου σε φούρνο υψηλής θερμοκρασίας. Αντικατάσταση αυτού του βήματος με επεξεργασία με πλάσμα, οδήγησε σε σημαντική ελάττωση του χρόνου αλλά και της θερμοκρασία κρυστάλλωσης με αποτέλεσμα η συγκεκριμένη τεχνική χημικής ανόπτησης να είναι ενεργειακά συμφέρουσα σε σχέση με την θερμική. Βελτιστοποίηση της διεργασίας χημικής ανόπτησης με πλάσμα έδειξε ότι είναι εφικτή η κρυστάλλωση των υμενίων σε πολύ μικρούς χρόνους και σε θερμοκρασίες μικρότερες από 400°C. / Nowadays Yttria stabilized Zirconia (YSZ) are widely used in the industries of jet engines and also in dentistry. In recent years a lot of effort has been given for the use of YSZ in solid oxide fuel cells (SOFCs) because of its high ionic conductivity in a wide temperature range, its high mechanical strength, high hardness and chemical stability. The purpose of this study is to develop a method for deposition of zirconia films with the use of plasma. The YSZ thin films deposition using low pressure plasma has important advantages such as deposition at low temperatures (<400oC) and uniform coverage of the surface with high density films. On the other hand, the uniqueness of the deposition by plasma is that the structure, the properties and the chemical composition of the films depends on the parameters of the process. In the first part of the thesis, the process of depositing YSZ films is been developed from organometallic precursors of yttrium and zirconium in two different plasma reactors, an inductively and a capacitively coupled plasma reactor. It has been investigated how the plasma power, the amount of the precursors, the total time of the process and the substrate’s temperature affect the morphological characteristics, the structure and composition of the films. It has been also examined how Argon-Oxygen plasma enhances the crystallization to cubic YSZ of already deposited amorphous films of zirconium and yttrium, which have been prepared by physical deposition techniques like spin coating and spray pyrolysis. The results is been compared with the results which have been obtained for the crystallization of the same films by thermal annealing regarding the annealing time temperature in order to achieve the same final crystallization results. The films were characterized by a variety of techniques such as X-ray Photoelectron Spectroscopy (XPS), Scanning Electron Microscopy (SEM), X-ray Diffraction (XRD) and Atomic Force Microscopy (AFM). The results showed that the plasma power, the process time and the temperature of the substrate play an important role in the development of the structure and the morphology of the YSZ films. In order fully crystallization to be achieved in cubic yttria stabilized zirconia and complete removal of the organic character of the “as deposited” films, a final step of annealing the films in a high-temperature furnace is needed. Replacing this step by Argon-Oxygen plasma treatment resulted a significant reduction in time and crystallization temperature so that the chemical annealing is advantageous in energy consumption compared to thermal annealing. Optimization of the chemical plasma treatment process showed that it is possible to get fully crystallized films in shorter time and for values of temperatures less than 400°C.