Nanoscale metal thin film dewetting via laser treatment is studied in this dissertation. The purpose is to understand: 1) the spatial and temporal nature of intrinsic instabilities; and 2) mass transportation involved in dewetting pattern evolution in metal thin films as well as in lithographically patterned nanostructures; and finally 3) to explore advanced control of metallic nanostructure fabrication via the confluence of top down nanolithography and pulsed laser induced dewetting. This study includes three sections. In first section, thin film Cu-Ni alloys ranging from 2-8nm were synthesized and laser irradiated. The evolution of the spinodal dewetting process is investigated as a function of the thin film composition which ultimately dictates the size distribution and spacing of the nanoparticles, and the optical measurements of the copper rich alloy nanoparticles revealed characteristic plasmonic peaks. In section two, the dewetting behavior of nanolithographically patterned copper rings on Silicon substrate was studied. The self assembly of the rings into ordered nanoparticle/nanodrop arrays was accomplished via nanosecond pulsed laser heating. The resultant length scale of the 13nm and 7nm thick copper rings was correlated to the competition between transport and instabilities time scales during the liquid lifetime of the melted copper rings. To explore the influence of different substrates with different surface energy, the pulsed laser heated assembly of lithographically patterned copper rings on SiO2 substrate was studied in the last section. The correlated transport and instabilities show modified timescales. It is demonstrated again that the original geometry dictates the instability pathway, which for narrow rings obeys the Rayleigh-Plateau instability and for wider rings are influenced by the thin film instability.

Les couches minces d’argent sont largement employées dans l’industrie verrière à des fins d’isolation ; leur instabilité est un problème critique. Les travaux ont porté sur l’étude du démouillage (i.e. agglomération) de couches minces d’argent sur de la silice amorphe, selon deux axes : la compréhension du mécanisme par l’emploi de méthodes in situ et le contrôle du démouillage induit par une texturation du substrat à l’échelle nanométrique. Les différentes techniques de microscopie in situ ont permis de mettre en évidence le rôle particulier joué par certains grains lors du démouillage. Celui-ci se déroule en trois étapes distinctes : l’induction, la propagation, et le frittage. Les grains qui donnent lieu à des particules à la fin du démouillage sont identifiables durant toutes ces étapes. Le démouillage est fortement influencé par la présence d’oxygène dans l’atmosphère de recuit. En présence d’oxygène, certains grains très spécifiques accumulent la matière provenant du démouillage. En absence d’oxygène, l’argent se répartit sur davantage de grains, les trous adoptent une forme dendritique. Une analyse d’image a permis de montrer que le modèle capillaire usuellement employé dans la littérature ne permettait pas de décrire l’évolution constatée. Un nouveau modèle, fondé sur le rôle individuel des grains, a été proposé. Le démouillage sur des surfaces texturées permet d’obtenir des rangées de particules nanométriques organisées. Une méthode a été développée afin de minimiser les défauts intrinsèques à la méthode. Des mesures optiques effectuées sur ces échantillons ont mis en évidence une modification de l’absorption due à l’organisation spatiale des particules. / Silver thin films are widely used in the glass industry for their insulation properties. Their stability is crucial. This work focus on silver solid-state dewetting (i.e. agglomeration) on amorphous silica substrates, divided into two axes: understanding the mechanisms thanks to in situ experiments and controlling the dewetting thanks to the patterning of the substrate at the nanoscale. The various in situ microscopy techniques revealed the role of specific grains in the dewetting mechanism. Dewetting proceeds into three steps: induction, propagation and sintering. Throughout these steps, the grains that eventually give birth to particles are identified, even as early as induction. Dewetting is strongly impacted by the oxygen content of the annealing atmosphere. When present, oxygen promotes the growth of very specific grains, where all dewetted material agglomerates. Without oxygen, silver is distributed on a larger number of grains, surrounding the holes that take a dendritic shape. A cautious image processing procedure allowed us to conclude that the capillary models usually invoked were not suitable for our system. A new model, based on the role of individual grains, is suggested. Dewetting on patterned substrates is a way to produce large arrays of organised nanoparticles. A method was developed to minimize in these arrays the number of defects inherent to dewetting. Optical measurements on such arrays showed that the spatial organisation of the particles led to a specific signature in optical absorption.

Orientadores: Fernando Galembeck, Lay Theng Lee / Tese (doutorado) - Universidade Estadual de Campinas, Instituto de Quimica / Made available in DSpace on 2018-08-10T12:01:04Z (GMT). No. of bitstreams: 1 Rezende_CamilaAlvesde_D.pdf: 9244452 bytes, checksum: 5d4f1598e74adcbed09c1807dde14a2e (MD5) Previous issue date: 2007 / Doutorado / Físico-Química / Doutor em Quimica

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Ag thin film dewetting upon high temperature annealing is a non-trivial problem for its application in the semiconductor industry as an ohmic contact metal. Thus, preventing Ag thin film from dewetting is of great importance. Typically, adhesion-promoting layers of chromium are deposited to prevent dewetting, but this deposition has its own process optimization parameters. In this thesis, we introduce an alternative, novel strategy for dewetting prevention via Si or In ion implantation. Electron microscopy including SEM, AFM and AES are conducted to characterize changes in film morphology after ion implantation. Thermodynamic simulation is established to better understand the mechanism of this anti-dewetting approach as well as to predict the performance of doped Ag thin films. It is found that Ag films implanted by a trace amount of Si dopants remain intact after 24 h annealing at 530℃ rather than break down into isolated particles as pure Ag film did. Furthermore, Ag grains in doped samples are much smaller than that in non-doped samples and higher Si or In doses contribute to smaller grains, indicating that a retarding force against film grain growth is introduced by the implanting species. Fortunately, electrical conductivity and optical reflectivity of doped films change trivially, suggesting an insignificant influence of external species on the film performance. The retarding force suppressing film grain growth is demonstrated to be solute drag, which will introduce a size limit towards Ag grain growth. A grain growth model including the solute drag effect is established here to describe the grain growth process. Combining our thermodynamic simulation with our grain growth model in the presence of the solute drag effect, the critical grain diameter to initiate agglomeration of 100 nm thick Ag thin film is calculated to be 350 nm and the critical Si dose to prevent 100 nm thick Ag thin film from dewetting is predicted to be 2.0×1013 per cm2. Finally, we successfully synthesize ultrathin Si thin films via ion implantation and pattern as-deposited Si films by implanting through a hard mask in order to identify some steps towards synthesizing 2-D silicon, or silicene. The as-achieved pattern has an identical shape as that of mask, suggesting Si atoms only diffuse within the implanting regions during thermal annealing. Even though only amorphous Si films are prepared at present, this novel strategy possesses potential to fabricated CMOS-compatible 2-D silicon films for semiconductor industry. / Thesis / Master of Applied Science (MASc)

The work presented in this thesis concerns surface energy modification and patterning of the surfaces of conjugated polymers. Goniometry and Wilhelmy Balance techniques were used to evaluate the surface energy or wettability of a polymer’s surface; infrared reflectionabsorption spectroscopy (IRAS) was used to analyse the residuals on the surface as modified by a bare elastomeric stamp poly(dimethylsiloxane) (PDMS). The stamp was found to be capable of modifying a polymer surface. Patterning of a single and/or double layer of conjugated polymers on the surface can be achieved by surface energy controlled dewetting. Modification of a conjugated polymer film can also be carried out when a sample is subjected to electrochemical doping in an aqueous electrolyte. The dynamic surface energy changes during the process were monitored in-situ using the Wilhelmy balance method. This thesis also concerns studies of conjugated polymer-based optoelectronics, including light-emitting diodes (PLEDs), that generate light by injecting charge into the active polymer layer, and solar cells (PSCs), that create electrical power by absorbing and then converting solar photons into electron/hole pairs. A phosphorescent metal complex was doped into polythiophene to fabricate PLEDs. The energy transfer from the host polymer to the guest phosphorescent metal (iridium and platinum) complex was studied using photoluminescence and electroluminescence measurements performed at room temperature and at liquid nitrogen temperature. PSCs were prepared using low-bandgap polyfluorene copolymers as an electron donor blended with several fullerene derivatives acting as electron acceptors. Energetic match is the main issue affecting efficient charge transfer at the interface between the polymers and the fullerene derivatives, and therefore the performance of the PSCs. Photoluminescence, luminescence quenching and the lowest unoccupied molecular orbital (LUMO) together with the highest occupied molecular orbital (HOMO) of the active materials in the devices were studied. A newly synthesized fullerene, that could match the low-bandgap polymers, was selected and used as electron acceptor in the PSCs. Photovoltaic properties of these PSCs were characterised, demonstrating one of the most efficient polymer:fullerene SCs that generate photocurrent at 1 μm. / On the day of the defence the status of article number III was Manuscript and article VII was Accepted.

Nous nous sommes intéressés à la croissance et la caractérisation de nanofils de silicium (Si) et de germanium (Ge). Les nanofils ont été synthétisés par le mécanisme VLS (Vapeur Liquide Solide) dans un réacteur LPCVD (Low Pressure Chemical Vapor Deposition), en utilisant l'or (Au) comme catalyseur et le silane (SiH4) ou le germane (GeH4) comme gaz précurseur. Pour que ce procédé de croissance conduise à l'obtention de nanofils, le catalyseur Au doit être nano-structuré sous la forme de nanoparticules de diamètre si possible contrôlé. Ceci est fait dans cette étude par « démouillage » d'une couche continue déposée initialement par effet Joule sur le substrat choisi. L'épaisseur de cette couche continue initiale est un paramètre essentiel dans l'étude. Une partie préliminaire de ce travail a concerné l'étude de la façon dont se démouillage s'effectue, en fonction des divers paramètres. Nous avons ensuite effectué une étude exhaustive du rôle de tous les paramètres (nature du substrat, température, pression, épaisseur de la couche continue d'or, temps de croissance, durée et température de démouillage) qui contrôlent le procédé de croissance LPCVD sur les caractéristiques des nanofils de Ge notamment. Nous avons fait varier ces paramètres dans de larges fenêtres de valeurs afin de maîtriser et contrôler leur croissance. La caractérisation structurale des nanofils par microscopie électronique en transmission montre leur structure monocristalline avec une direction de croissance <111> pour les nanofils de Si et <110> pour les nanofils de Ge. Enfin, dans le cas des nanofils de Ge coniques isolés et déposés sur différents substrat, l'analyse micro-Raman nous a permis de mettre en évidence un phénomène de résonance optique à l'intérieur du nanofils et qui dépend fortement du diamètre local du nanofil. L'intensité Raman augmente avec la diminution du volume excité. Ces effets sont expliqués par les modes optiques apparaissant selon le diamètre local du nanofil, la longueur d'onde d'excitation et la nature du substrat utilisé. En plus, Le profil de la fréquence obtenu a montré qu'aucune anomalie particulière n'est observée. Ces profils obtenus en fonction du substrat et de la longueur d'onde utilisés sur différents nanofils montrent une faible variation de la fréquence. Le profil de la largeur à mi-hauteur est constant. Ces résultats montrent l'absence des effets de confinement de modes de phonons dans les nanofils individuels caractérisés. / This work deals with the growth and characterization of silicon (Si) and germanium (Ge) nanowires. The nanowires were synthesized by the growth mechanism VLS (Vapor Liquid Solid) in a LPCVD reactor (Low Pressure Chemical Vapor Deposition) using gold (Au) as the catalyst and silane (SiH4) and germane (GeH4) as precursor gas. In order to grow nanowires, the Au catalyst must be nano-structured in the form of nano-particles with controlled diameter if possible. This is done in this study by “dewetting” of a continuous layer evaporated on the chosen substrate. The thickness of this initial continuous layer is an essential parameter in the study. A preliminary part of this work deals with the problem of how the “dewetting” occurs, depending on various parameters (type of substrate, temperature, pressure, thickness of the continuous gold layer, growth duration and “dewetting” temperature) that control the LPCVD growth process. We varied these process parameters over wide ranges to determine how the influence the properties of Ge nanowires grown. The structural characterization of nanowires by transmission electron microscopy shows their single crystal structure with growth direction along <111> in the case of Si nanowires and along <110> for Ge nanowires. Finally, in the case of conical Ge nanowires isolated and deposited on different substrates, the micro-Raman analysis allowed us identifies an optical resonance phenomenon inside the nanowires which strongly depends on their local diameter. The Raman intensity increases with the decrease of volume excited. These effects are explained by the optical modes appearing according to the local diameter of the nanowire, the excitation wavelength and the nature of the substrate used. In addition, the Raman lines recorded along the same profiles did not show any spectral shift, reinforcing the idea that the behavior of their intensity has to be related to resonances associated with the development of local optical modes. These effects were observed to be dependent upon the type of substrate on which the isolated nanowires were transferred (dielectric versus metallic substrates). No effect of the confinement of phonon mode in our nanowires was observed.

L'objectif principal de cette thèse est de mettre en évidence l'effet de la méthode de préparation sur la dynamique de relaxation des polymères en films minces. Nous nous sommes focalisés en particulier sur l'importance de la maîtrise du taux d'évaporation du solvant lors de la préparation des films, en termes de contrôle de la magnitude des contraintes résiduelles et les conséquences engendrées sur les propriétés physiques. Dans un premier temps, nous exposons la problématique de déviation des propriétés de polymères en films minces et le lien avec la technique de préparation. Nous décrivons un moyen simple permettant de contrôler le taux d'évaporation du solvant en ajustant la concentration de la solution et la vitesse de rotation de la tournette. Les expériences de démouillage nous ont permis de suivre l'effet du taux d'évaporation du solvant sur les propriétés viscoélastiques des polymères près de la Tg. Les résultats obtenus sur des films minces de polystyrène mettent en évidence le rôle de la méthode de préparation sur la probabilité de rupture des films, les temps caractéristiques de relaxation, la dynamique de démouillage et la magnitude des contraintes résiduelles. Dans une seconde partie, nous présentons également une expérience basée sur la propagation des fissures dans les films minces vitreux. Une simple observation microscopique, ainsi que des imageries en AFM permettent de prouver le rôle du taux d'évaporation du solvant lors de la préparation. Enfin, nous explorons une nouvelle approche expérimentale portant sur la possibilité d'investigations en temps réel et lors de démouillage la relaxation moléculaire des chaînes dans les films minces par des mesures diélectriques directes. Nous avons réussi à prouver non seulement un rôle de la méthode de préparation des films mais également que la restauration du comportement du polymère en volume « bulk » est possible en fonction du temps quelques soient les paramètres du film. Nous confirmons ainsi que les propriétés anormales observées dans les films minces spin-coatés sont dictées par l'état métastable provoqué par la méthode de préparation / The aim of this work is to highlight the influence of the sample preparation on the relaxation dynamics of supported polymer thin films. We focus in particular on the importance of tuning the solvent evaporation rate during films preparation, in terms of controlling the magnitude of residual stresses, and the impact on the physical properties. Firstly, we expose the deviation of the polymer behavior in thin polymer films related to the preparation technique. Then, we describe how the solvent evaporation rate can be precisely tuned by varying the concentration of the solution and the rotation rate of the spin coater. Dewetting experiments allowed us to investigate the effect of the solvent evaporation rate on the viscoelastic behavior of the polymers near the Tg. The probability of films rupture, the characteristic time, dewetting dynamics and the magnitude of residual stresses are deduced to prove the impact of sample preparation. In the second part, we present cracks propagation experiments in glassy thin films. A simple microscopic observation, as well as AFM imaging are used to emphasize the role of the solvent evaporation rate during the preparation. Finally, we present a new experimental approach to investigate in real time and during dewetting the dynamics of polymers in thin films by direct dielectric measurements. We have successfully proved not only the impact of sample preparation but also the restoration of the bulk behavior of polymers is possible during the time whatever the film parameters. We therefore confirm that the anomalous properties observed in spin-coated films are governed by the metastable state induced by the sample preparation