Ces travaux de thèse ont pour but l’évaluation et le développement de briques technologiques en silicium poreux répondant à la problématique de l’intégration monolithique 3D rattachée au concept du “more than Moore” : d’une part l’intégration sur silicium de composants passifs RF, d’autre part, la réalisation de chemins traversants d’interconnexion à fort facteur d’aspect par voie électrochimique. Dans un premier temps, différents substrats mixtes silicium / silicium poreux sont réalisés. Des inductances en cuivre, réalisées sur un substrat mésoporeux de 200 µm de profondeur et de porosité proche de 60%, atteignent des facteurs de qualité à 20 GHz jusqu’à 55% supérieurs à ceux mesurés sur silicium massif. Une perspective d’industrialisation de ce type d’application est à l’étude dans le cadre d’une thèse CIFRE. La gravure de matrices de pores à fort facteur d’aspect, bien qu’encore difficilement localisable en termes de qualité de périphérie, fait d’autre part l’objet de développements, notamment pour la fabrication de condensateurs à haute densité capacitive et de contacts d’interconnexions en cuivre. / Those thesis works deal with the evaluation and the development of porous silicon technological step in order to answer some of the monolithic integration challenges bring by the “more than Moore” problematic in microelectronics industry: on one hand, the integration on silicon of passive RF devices, on the other hand, realization by electrochemical etching of through silicon via. In a first time, several mixed porous silicon / silicon substrat are realized. Copper inductors, realized on 200 µm thick and 60% porosity mesoporous layer, show a quality factor superior to 55% to the one obtained on massive silicon. Industrialization perspectives are on the line via a CIFRE PhD convention. In a second time, several electrochemical etching process are evaluated. Among them, high aspect ratio macropore array etching, although poorly localizable, allows many perspectives: copper via and high density capacitor.

Made available in DSpace on 2014-06-11T19:31:27Z (GMT). No. of bitstreams: 0 Previous issue date: 2005-02-28Bitstream added on 2014-06-13T20:41:46Z : No. of bitstreams: 1 xavier_ccg_dr_arafo.pdf: 2502909 bytes, checksum: 3349b0ab0c81badc5aa688fd716eaa6b (MD5) / Este trabalho teve como objetivo avaliar in vitro a força de união da resina composta à dentina tratada com quatro adesivos dentinários, sendo dois sistemas universais simplificados (G1- Prime & Bond® NT/ Dentsply, G2- Single Bond/ 3M) e dois auto-condicionantes (G3- AdheSE® / Vivadent, G4- Adper- PromptL-Pop/ 3M). Para a realização deste estudo, foram selecionados 20 terceiros molares humanos íntegros e livres de cárie, que tiveram suas superfícies oclusais cortadas em 3mm. Após o corte, cada grupo de dentes receberam seus respectivos sistemas de tratamento adesivo, pré-selecionados. Todas as amostras de dentes foram restauradas com a resina composta Tetric Ceram® / IvoclarVivadent, termocicladas em 550 ciclos e cortadas. Dessa forma, obtendo-se espécimes de 1,0mm2 l0,1mm2 que foram levados a uma Máquina de Teste Universal onde foi realizado o ensaio de microtração. Os tipos de fraturas foram analisados, mediante microscopia óptica (40X) e as fraturas mais representativas foram levadas à microscopia eletrônica de varredura. Os resultados mostraram que os sistemas universais simplificados (G1 e G2) apresentaram valores de resistência de união mais elevados do que os sistemas auto-condicionantes (G3 e G4). A maioria das fraturas encontradas foram do tipo adesiva para os grupos G3 e G4, enquanto nos grupos G1 e G2 87% dos modos de fraturas foram distribuídas entre adesivas e coesivas da resina. / This work had with aim to evaluate in vitro the bond strength of composite resin to dentine bonded with four dentin adhesives. In this study, were used two one-step adhesive systems (G1- Prime & Bond® NT/Dentsply, G2-Single Bond/ 3M)and two self-etching adhesive systems (G3- AdheSE® /Vivadent, G4- Adper Prompt L-Pop/3M). For this, were chosen twenty human healthy third molars, that had their oclusal surfaces cut in 3mm. After the cut, each group of teeth received their respectives adhesive systems, even then chosen. All the samples were restored with the composite Tetric Ceram® / IvoclarVivadent, thermocycled 550 times and cut. Then, obtaining specimens of 1,0mm2 l 0,1mm2 that were made a test of micro tensile bond strength in a Universal Test Machine. The fractures were analyzed in a optical microscope (40X), and the more representative fractures were then analyzed at scanning electronic microscope. The results revealed that the one-step adhesive systems (G1 and G2) showed higher values of bond strength compared to the self-etching adhesive systems (G3 and G4). The fractures more commum were the adhesive type in the G3 and G4 groups, while in the G1 and G2 groups, 87% of the fractures were the adhesive and cohesion of resin types.

Graphène est un matériau bidimensionnel unique physique, chimique et les propriétés mécaniques. Il pourrait être prometteur pour de nouvelles applications, mais le contrôle nm échelle de traitement de graphène défis la technologie actuelle, en particulier dans le traitement du plasma, empêchant ainsi le développement de la technologie à base de graphène à l'échelle industrielle. / Graphene is a two-dimensional material with unique physical, chemical and mechanical properties. It could be promising for novel applications, but the nm-scale control of graphene processing challenges current technology, especially in plasma treatment, thus preventing the development of graphene based technology at industrial scale. The main issue associated with plasma/graphene processes is the atomic thickness of the material: graphene is easily damaged upon exposure to reactive plasma. One critical question to answer then: is it possible to use conventional plasma technologies to pattern/clean/dope graphene layers, as is done for other materials in the microelectronic industry?Hydrogen plasmas have been shown to be promising for graphene treatment with minimal damages, but little is known about the fundamental mechanisms involved in graphene etching. Thus, in our work, we applied classical molecular dynamics (MD) simulations of H2 plasma/graphene interaction to assist the development of three important processes. First, MD allowed us to explain the lateral etching mechanisms of graphene nanorribons (GNR) in downstream H2 plasmas, which is an important technological step to produce GNR with a width<10 nm. Second, we show that H2 plasmas can be used to clean polymeric residues from the graphene surface (selective removal of PMMA/photo-resist residues or atmospheric contaminant from its surface). Modeling results combined with experimental work shows very promising results in this application, which is demanded by the entire graphene community. Third, MD simulations were also used to assist the development of multilayer graphene processing by Atomic Layer Etching. Although irreversible damages of graphene are observed when the ion bombarding energy is in the 5-50 eV range, MD predicts a very interesting phenomenon at 20-25eV range: the implantation of hydrogen atoms and subsequent formation of H2 gas sandwiched between first two layers. This causes a pressure rise, which leads to a lift-off of the entire top graphene layer. This result from modeling suggests that H2 plasmas can be used to etch graphene layer by layer in a controlled way through an entirely new mechanism. However, in order to avoid damages of underneath layers during the processing, additional investigations should be provided.In conclusion, several novel and unexpected results were obtained during the present PhD study and MD simulations have proven to be a powerful tool to assist plasma process development. Indeed, based on this fundamental research work an ANR project was launched to develop cleaning, doping and etching processes of graphene in the ICP reactors available in the LTM laboratory, Grenoble, France. MD calculation developed during this PhD will therefore continue to be used to assist further the development of innovative processes.The current PhD project was held in LTM etching group Grenoble, France under supervision of Gilles Cunge and Emilie Despiau-Pujo in the framework of the Chair of Excellence 2010 of Prof. David Graves and financial support of Nanoscience Foundation. We would like to acknowledge collaboration with several groups from Institute Neel (Vincent Bouchiat, Laurence Magaud and Johann Coraux) and our colleagues from CEA-Grenoble, France (Okuno Hanako).

Made available in DSpace on 2014-06-11T19:24:08Z (GMT). No. of bitstreams: 0 Previous issue date: 2006-11-30Bitstream added on 2014-06-13T19:10:18Z : No. of bitstreams: 1 porto_ts_me_arafo.pdf: 998293 bytes, checksum: 6183c4e4dea84be0c45e2947766bf407 (MD5) / O objetivo deste estudo foi avaliar a superfície interna de dois sistemas cerâmicos, após diferentes tratamentos de superfície, avaliação essa feita por meio de rugosimetria e microscopia eletrônica de varredura. Foram utilizadas as seguintes cerâmicas: IPS Empress II (Ivoclar-Vivadent Alemanha) e InCeram Alumina (Vita Zahnfabrick - Alemanha). Foram confeccionadas 50 amostras em forma de pastilha para cada sistema cerâmico de acordo com as especificações dos fabricantes, armazenadas à temperatura ambiente para então serem submetidas ao tratamento superficial, a saber (n=10): sem tratamento (T0) (controle); Ácido fluorídrico (T1); Ácido fluorídrico associado ao jato de óxido de alumínio (T2); Sistema Cojet (T3); Laser Nd:YAG (T4). Para os resultados de rugosidade, padronizaram-se as medidas em Ra, sendo posteriormente realizada a análise estatística por meio de ANOVA e teste de Tukey (p<.001). Para ambos os grupos controle (T0) das cerâmicas testadas, as análises evidenciaram os valores de rugosidade mais inferiores; para o Sistema InCeram Alumina, os tratamentos, ácido fluorídrico (T1), Sistem Cojet (T3)e Laser Nd:YAG (T4), não tiveram diferença estatisticamente significante; já para o Sistema IPS Empress II, todos os tratamentos foram estatisticamente diferentes. As fotomicrografias em microscopia eletrônica de varredura mostraram características diferentes para os tratamentos peculiares para cada sistema cerâmico. Baseado nos dados obtidos pode-se concluir que, quanto ao IPS Empress II, o tratamento com ácido fluorídrico é suficiente, assim como o Sistema CoJet é para o InCeram Alumina. Outros estudos devem ser realizados para que se tenham parâmetros ideais para o tratamento a laser. / The present study aimed at evaluating the inner surface of two ceramic systems, after different surface treatments, performed by surface roughness tests and scanning electron microscopy (SEM). IPS Empress II (Ivoclar-Vivadent – Germany) and InCeram Alumina (Vita Zahnfabrick – Germany) were used. Fifty lozenge-shaped samples were made for each ceramic system according to the manufacturers’ specifications, and stored at room temperature prior to surface treatment; namely (n=10): non-treated (T0) (control); hydrofluoric acid (T1); hydrofluoric acid associated to airborne particle abrasion (T2); CoJet System (T3); Laser Nd: YAG (T4). Roughness measurement results were standardized in Ra. Analysis of variance (ANOVA) and Tukey test (p<.001) were used to perform the stastistics analysis. For both control groups of the tested ceramics, analyses revealed the lowest roughness values; for the InCeram Alumina System, treatments such as hydrofluoric acid (T1), CoJet System (T3) and Laser Nd:YAG (T4) did not present any statistically significant difference, while for the IPS Empress II System, all treatments were statistically different. Photomicrographs by SEM showed different characteristics for each ceramic system treatment. Based on the resulting data, it can be concluded that the hydrofluoric acid treatment suits the IPS Empress II System, as well as the CoJet System suits the InCeram Alumina System. Further research might be done in order to get ideal parameters for the laser treatment.

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Made available in DSpace on 2014-10-09T12:41:59Z (GMT). No. of bitstreams: 0 / Made available in DSpace on 2014-10-09T14:05:51Z (GMT). No. of bitstreams: 0 / Tese (Doutoramento) / IPEN/T / Instituto de Pesquisas Energeticas e Nucleares - IPEN-CNEN/SP

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Orientador: Welingtom Dinelli / Co^orientador: / Banca: José Roberto Cury Saad / Banca: Mânio de Carvalho Tibúrcio / Resumo: O objetivo deste estudo foi avaliar a superfície interna de dois sistemas cerâmicos, após diferentes tratamentos de superfície, avaliação essa feita por meio de rugosimetria e microscopia eletrônica de varredura. Foram utilizadas as seguintes cerâmicas: IPS Empress II (Ivoclar-Vivadent Alemanha) e InCeram Alumina (Vita Zahnfabrick - Alemanha). Foram confeccionadas 50 amostras em forma de pastilha para cada sistema cerâmico de acordo com as especificações dos fabricantes, armazenadas à temperatura ambiente para então serem submetidas ao tratamento superficial, a saber (n=10): sem tratamento (T0) (controle); Ácido fluorídrico (T1); Ácido fluorídrico associado ao jato de óxido de alumínio (T2); Sistema Cojet (T3); Laser Nd:YAG (T4). Para os resultados de rugosidade, padronizaram-se as medidas em Ra, sendo posteriormente realizada a análise estatística por meio de ANOVA e teste de Tukey (p<.001). Para ambos os grupos controle (T0) das cerâmicas testadas, as análises evidenciaram os valores de rugosidade mais inferiores; para o Sistema InCeram Alumina, os tratamentos, ácido fluorídrico (T1), Sistem Cojet (T3)e Laser Nd:YAG (T4), não tiveram diferença estatisticamente significante; já para o Sistema IPS Empress II, todos os tratamentos foram estatisticamente diferentes. As fotomicrografias em microscopia eletrônica de varredura mostraram características diferentes para os tratamentos peculiares para cada sistema cerâmico. Baseado nos dados obtidos pode-se concluir que, quanto ao IPS Empress II, o tratamento com ácido fluorídrico é suficiente, assim como o Sistema CoJet é para o InCeram Alumina. Outros estudos devem ser realizados para que se tenham parâmetros ideais para o tratamento a laser. / Abstract: The present study aimed at evaluating the inner surface of two ceramic systems, after different surface treatments, performed by surface roughness tests and scanning electron microscopy (SEM). IPS Empress II (Ivoclar-Vivadent - Germany) and InCeram Alumina (Vita Zahnfabrick - Germany) were used. Fifty lozenge-shaped samples were made for each ceramic system according to the manufacturers' specifications, and stored at room temperature prior to surface treatment; namely (n=10): non-treated (T0) (control); hydrofluoric acid (T1); hydrofluoric acid associated to airborne particle abrasion (T2); CoJet System (T3); Laser Nd: YAG (T4). Roughness measurement results were standardized in Ra. Analysis of variance (ANOVA) and Tukey test (p<.001) were used to perform the stastistics analysis. For both control groups of the tested ceramics, analyses revealed the lowest roughness values; for the InCeram Alumina System, treatments such as hydrofluoric acid (T1), CoJet System (T3) and Laser Nd:YAG (T4) did not present any statistically significant difference, while for the IPS Empress II System, all treatments were statistically different. Photomicrographs by SEM showed different characteristics for each ceramic system treatment. Based on the resulting data, it can be concluded that the hydrofluoric acid treatment suits the IPS Empress II System, as well as the CoJet System suits the InCeram Alumina System. Further research might be done in order to get ideal parameters for the laser treatment. / Mestre

Resumo: A adesão longitudinal continua a representar um dos maiores desafios da Odontologia moderna. Uma nova proposta para o estabelecimento do equilíbrio da adesão aos tecidos dentários surge, baseada na observação dos resultados obtidos com a tecnologia Grander para revitalização da água. Objetiva-se com o estudo verificar a influência dessa tecnologia nas propriedades físicas de dois sistemas adesivos (convencional e autocondicionante) à partir da medição da tensão superficial e do ângulo de contato; e avaliar a formação e a qualidade da camada híbrida em dentina humana e bovina. A tensão superficial de quatro diferentes líquidos (água, Single Bond- 3M, Primer do Clearfil SE Bond -Kuraray, e Bond do Clearfil SE-Kuraray), foi medida antes e após a modificação pelo procedimento Grander em aparelho goniômetro (Ramé-hart). O ângulo de contato com três substratos distintos (placa de titânio, dentina humana e dentina bovina), foi medido para os quatro líquidos também antes e após a modificação pelo procedimento Grander, também em goniômetro. A formação e qualidade da camada híbrida, foi avaliada em MEV, a partir da confecção de corpos de prova dos substratos humano e bovino, devidamente embutidos, preparados em lixas de variada granulação até a exposição de dentina, submetidos ao procedimento adesivo (SB ou CSEB) normal ou grander modificado, recebendo ao final dupla camada de resina composta Z250-3M, fotopolimerizada por 40s. Após armazenamento em estufa bacteriológica por 24h, os procedimentos para análise ao MEV foram realizados (fixação, desidratação, secagem e metalização). A estatística de Análise de Variância ANOVA e Teste de Tukey 5% revelou que: houve redução estatisticamente significante da tensão superficial para todos os líquidos Grander modificados; houve redução estatisticamente... (Resumo completo, clicar acesso eletrônico abaixo) / Abstract: A long-lasting adhesion is still one of the biggest challenges of the modern Dentistry. A new approach to reaching the equilibrium of the adhesion to the dental tissues emerges based on the observation of the results obtained with the Grander Technology for revitalizing water. The aim of this study was to verify the influence of this technology on the physical properties of two adhesive systems (conventional and self-etching) through the measurement of the surface tension and of the contact angle and through the evaluation of the formed hybrid layer in human and bovine dentin. The surface tension of four different liquids (water, Single Bond - 3M, Clearfil SE primer - Kuraray and Clearfil SE bond - Kuraray) was measured before and after submitting these liquids to the Grander modifying unit, with the aid of a goniometer (Ramé-hart). The measurement of the contact angle of the liquids followed the same procedure using three distinct surfaces: titanium plate, human dentin and bovine dentin. The hybrid layer formed for both: non-modified and Grander modified adhesive systems, was evaluated in SEM. For this purpose human and bovine dentin samples were prepared. The teeth were fixed in acrylic resin and the dentin surfaces exposed and finished with various grit polishing paper discs. These dentin surfaces were then treated with the adhesive procedures (normal and Grander modified), before the placement of a double composite resin layer (Z250- 3M). After storage at 37oC for 24h, the SEM analysis were conducted. The data were submitted to ANOVA and Turkeys test 5%. The results showed statistically significant reduction for the surface tension of all liquids modified by the Grander technology, as well as for the contact angle in the human dentin. Statistically significant were also the results showing a thicker hybrid layer formation with the two adhesive systems when modified by the Grander... (Complete abstract click electronic access below)

Coordenação de Aperfeiçoamento de Pessoal de Nível Superior / O uso de primers autocondicionantes e de bráquetes com compósito pré-incorporado tem sido apresentado como uma alternativa para a redução de passos clínicos. O propósito deste estudo foi avaliar o efeito de um primer autocondicionante (Transbond Plus Self-Etching Primer - SEP) na resistência ao cisalhamento de bráquetes com compósito pré-incorporado colados in vivo. A amostra consistiu de 92 dentes obtidos de 23 pacientes com indicação prévia de extração de 4 pré-molares. Os dentes foram divididos em 4 grupos, sendo os bráquetes colados pelo mesmo operador, alternando os quadrantes em cada paciente: Grupo 1 (controle) - Ácido fosfórico à 37% + primer (Transbond XT Primer) + compósito (Transbond XT Adhesive Paste) + bráquete convencional; Grupo 2 - Ácido fosfórico à 37% + primer + bráquete com compósito pré-incorporado; Grupo 3 SEP + compósito + bráquete convencional; Grupo 4 - SEP + bráquete com compósito pré-incorporado. Após 30 dias os pré-molares foram extraídos, sendo submetidos ao teste de resistência ao cisalhamento através da uma Máquina de Ensaios Universal, com velocidade de 0,5mm/min. Os dados obtidos pelos grupos foram analisados com 2-way ANOVA (p<0,05). As forças médias e desvios padrão obtidos foram os seguintes: Grupo 1 = 11,35 (2,36) MPa; Grupo 2 = 9,77 (2,49) MPa; Grupo 3 = 10,89 (2,60) MPa; e Grupo 4 = 10,16 (2,75) MPa. Não foi observada diferença significativa entre o uso do SEP e o de condicionador e primer tradicionais (p = 0,948). De qualquer modo, diferenças significativas na força de adesão foram observadas quando utilizados bráquetes com compósito pré-incorporado (p = 0,032). Pode ser concluído que a combinação do primer autocondicionante com o bráquete com compósito pré-incorporado apresentou valores de força de adesão adequados, sendo promissora para uso clínico. / The use of self-etching primers and precoated brackets are presented as alternatives to shorten the clinical bonding steps. The aim of this study was to evaluate the influence of a self-etching primer - SEP (Transbond Plus SEP, 3M Unitek) on shear bond strength of adhesive uncoated and precoated Victory brackets (3M Unitek). The sample group consisted of 23 patients with 4 premolars each one, equally divided in four different groups according to the bracket and enamel preparation. Brackets were bonded in vivo, by the same operator, using a split mouth random technique: Group 1- 37% Phosphoric acid + primer + composite + conventional Victory bracket; Group 2- 37% Phosphoric acid + primer + precoated Victory bracket; Group 3- SEP + composite + conventional bracket; Group 4- SEP + precoated bracket. After 30 days premolars were extracted for orthodontic reasons, and a Universal Testing Machine was used to apply an occlusal shear force directly to the enamel-bracket interface at a speed of 0.5 mm/min. Mean results and standard deviation for the groups were: Group 1 = 11,35 (2,36) MPa; Group 2 = 9,77 (2,49) MPa; Group 3 = 10,89 (2,60) MPa; e Group 4 = 10,16 (2,75) MPa. The groups were compared using 2-way ANOVA. No difference was observed while a conventional etching and primer or self-etching primer was used (p = 0.948). But, it was indicated significant differences in bond strength between uncoated and precoated brackets (p = 0.032). However, it could be concluded that the self etching primer combined with adhesive precoated brackets showed adequate shear bond strength, and may be suitable for clinical use.