This research focuses on developing new techniques and designs for highly con- trollable microactuating systems with large force-stroke outputs. A fixed-fixed mi- crobeam is the actuating element in the introduced techniques. Either buckling of a microbridge by thermal stress, lateral deflection of a microbridge by electro- magnetic force, or combined effects of both can be employed for microactuation. The proposed method here is MicroElectroThermoMagnetic Actuation (METMA), which uses the combined techniques of electrical or electro-thermal driving of a mi- crobridge in the presence of a magnetic field. The electrically controllable magnetic field actuates and controls the electrically or electrothermally driven microstruc- tures. METMA provides control with two electrical inputs, the currents driving the microbridge and the current driving the external magnetic field. This method enables a more controllable actuating system. Different designs of microactuators have been implemented by using MEMS Pro as the design software and MUMPs as the standard MEMS fabrication technology. In these designs, a variety of out-of- plane buckling or displacement of fixed-fixed microbeams have been developed and employed as the actuating elements. This paper also introduces a novel actuating technique for larger displacements that uses a two-layer buckling microbridge actu- ated by METMA. Heat transfer principles are applied to investigate temperature distribution in a microbeam, electrothermal heating, and the resulting thermoelas- tic effects. Furthermore, a method for driving microactuators by applying powerful electrical pulses is proposed. The integrated electromagnetic and electrothermal microactuation technique is also studied. A clamped-clamped microbeam carry- ing electrical current has been modeled and simulated in ANSYS. The simulations include electrothermal, thermoelastic, electromagnetic, and electrothermomagnetic effects. The contributions are highlighted, the results are discussed, the research and design limitations are reported, and future works are proposed.

This thesis develops strain and kinetic energy functions and a finite beam element useful for analyzing curved beams which go through large deflections, such as a hockey stick being swung and bent substantially as it hits the ice. The resulting beam model is demonstrated to be rotation invariant and capable of computing the correct strain energy and reaction forces for a specified deformation. A method is also described by which the model could be used to perform static or dynamic simulations of a beam.

Piezoelectric actuators (PEA) hold the most promise for precision positioning applications due to their capability of producing extremely small displacements down to 10 pm (1 pm = 10-12 m) as well as their high stiffness and force output. The piezoelectric-driven stick-slip (PDSS) actuator, working on the friction-inertia concept, has the capacity of accomplishing an unlimited range of motion. It also holds the promises of simple configuration and low cost. On the other hand, the PDSS actuator has a relatively low efficiency and low loading capability, which greatly limits its applications. The purpose of this research is to improve the performance of the PDSS actuators by employing specially-designed working surfaces.<p> The working surfaces, referred as anisotropic friction (AF) surfaces in this study, can provide different friction forces depending on the direction of relative motion of the two surfaces, and are used in this research to accomplish the aforementioned purpose. To fabricate such surfaces, two nanostructure technologies are employed: hot filament chemical vapour deposition (HFCVD) and ion beam etching (IBE). The HFCVD is used to deposit diamond on silicon substrates; and the IBE is used to etch the diamond crystalloid with a certain angle with respect to the coating surface to obtain an unsymmetrical-triangle microstructure. <p> A PDSS actuator prototype containing the AF surfaces was developed in this study to verify the function of the AF surfaces and characterize the performance of PDSS actuators. The designed surfaces were mounted on the prototype; and the improvement in performance was characterized by conducting a set of experiments with both the normal isotropic friction (IF) surfaces and the AF surfaces, respectively. The results illustrate that the PDSS actuator with the AF surface has a higher efficiency and improved loading capability compared to the one with the IF surfaces.<p> A model was also developed to represent the displacement of the novel PDSS actuator. The dynamics of the PEA and the platform were approximated by using a second order dynamic system. The pre-sliding friction behaviour involved was investigated by modifying the LuGre friction model, in which six parameters (Note that three parameters are used in the LuGre model) were employed to represent the anisotropic friction. By combining the PEA mechanism model, the modified friction model, and the dynamics of end-effector, a model for the PDSS actuator with the AF surface was developed. The model with the identified parameters was simulated in MATLAB Simulink and the simulation results obtained were compared to the experimental results to verify the model. The comparison suggests that the model developed in this study is promising to represent the displacement of the novel PDSS actuators with AF surfaces.

The first year of membership of the Helmholtz-Zentrum Dresden-Rossendorf (HZDR) in the Helmholtz Association of German Research Centers (HGF) was a year of many changes also for the Institute of Ion Beam Physics and Materials Research (IIM). The transition period, however, is not yet over, since the full integration of the Center into the HGF will only be completed in the next period of the so-called program-oriented funding (POF). This funding scheme addresses the six core research fields identified by the Helmholtz Association (Energy; Earth and Environment; Health; Key Technologies; Structure of Matter; Aeronautics, Space and Transport) to deal with the grand challenges faced by society, science and industry. Since the Institute has strong contributions to both core fields “Key Technologies” and “Structure of Matter”, intense discussions were held amongst the leading scientists of the Institute, across the Institutes of the HZDR, and finally with leading scientists of other Helmholtz centers, to determine the most appropriate classification of the Institute’s research. At the end we decided to establish ourselves in Structure of Matter, the core field in which most of the large-scale photon, neutron and ion facilities in Germany are located. As a consequence, the Ion Beam Center (IBC) of the Institute submitted an application to become a HGF recognized large-scale facility, providing more than 50% of its available beam time to external users. This application perfectly reflects the development of the IBC over more than a decade as a European Union funded infrastructure in the framework of the projects “Center for Application of Ion Beams in Materials Research (AIM)” (1998-2000, 2000-2003, 2006-2010) and subsequently as the coordinator of the integrated infrastructure initiative (I3) “Support of Public and Industrial Research using Ion Beam Technology (SPIRIT)” (2009-2013). Another part of the Institute’s activities is dedicated to exploit the infrared/THz free-electron laser at the 40 MeV superconducting electron accelerator ELBE for condensed matter research. This facility is also open to external users and funded by the European Union.

Entladungsbasierte Elektronenquellen mit Kaltkathode waren gegen Ende des 19. Jahr hunderts weithin genutzte Forschungswerkzeuge und ermöglichten die Entdeckung des Elektrons und der Röntgenstrahlung. In jüngster Zeit erfahren sie erneutes Interesse in Wissenschaft und Industrie, motiviert durch ihre Fähigkeit, Elektronenstrahlen hoher Leistung für Produktionsprozesse (wie das Schweißen, die Materialverdampfung in der Vakuum beschichtung oder die Vakuum-Schmelzveredlung in der Metallurgie) basierend auf einem robusten Design sowie einfachen Versorgungs- und Steuerungssystemen zu erzeugen. Entladungsbasierte Elektronenquellen könnten also eine wirtschaftlich attraktive Alternative zu den gegenwärtig noch etablierten Elektronenstrahlkanonen mit Glühkathoden bieten. Trotz der langen Geschichte und vieler empirischer Ansätze, Gasentladungen zur Elektronenstrahlerzeugung für diverse Anwendungen zu nutzen, sind die bestimmenden Mechanismen bei dieser Art von Elektronenquellen immer noch unzulänglich verstanden. Es war deshalb das Ziel der für die vorliegende Dissertation durchgeführten experimentellen und theoretischen Arbeiten, nicht nur die technologischen Potentiale und Limitierungen entladungsbasierter Elektronenstrahlquellen zu untersuchen, sondern auch die Kenntnis grundlegender physikalischer Effekte zu verbessern. Analysiert wurden zunächst verschiedene, im Fraunhofer FEP vorhandene Kaltkathoden-Strahlquellen, die - ungeachtet der Tatsache, dass sie für unterschiedliche Anwendungen konstruiert wurden - sämtlich auf demselben Funktionsprinzip beruhen: Innerhalb des Gerätes wird eine Hochspannungs-Glimmentladung (HSGE) unterhalten. Ionen erfahren im Kathodenfall einen Energiezuwachs, treffen auf die Kathode und setzen dort Sekundärelektronen frei. Diese Elektronen werden in Richtung des Plasmas be schleu nigt und verlassen schließlich die Strahlquelle, um am Prozessort die beabsichtigte Wirkung zu erzielen. Zur Optimierung der Stabilität der die Ionen produzierenden Entladung, der Effizienz der Strahlerzeugung sowie der Strahlleistungsdichte und Kathodenlebensdauer wurden verschiedene Kombinationen von Kathodenmaterialien und Plasma-Arbeitsgasen experimentell untersucht. Die Abhängigkeit der Ausdehnung des Kathodenfalls von Strom und Spannung der Entladung wurde gemessen und konnte durch ein analytisches Modell erklärt werden. Emittanz und Richtstrahlwert sind wichtige Kenngrößen zur Charakterisierung der Qualität von Elektronenstrahlen. Beide wurden in dieser Arbeit für den Elektronenstrahl einer HSGE-basierten Kaltkathoden-Schweißstrahlquelle bestimmt, wobei zwei Ansätze verfolgt wurden: Zum einen konnte die Emittanz aus der Randstrahlgleichung gewonnen werden, die den experimentell beobachteten Verlauf des Strahldurchmessers entlang der Ausbreitungsachse analytisch beschreibt. Zum anderen wurde die Emittanz anhand des aus der numerischen Simulation berechneten Phasenraumprofils ermittelt. Eine Kernaufgabe dieser Arbeit war es, Software-Werkzeuge zur Simulation der Strahl erzeugung in verschiedenen geometrischen Konfigurationen zu entwickeln und zu validieren, mit denen künftig die Konstruktion und Optimierung neuer entladungsbasierter Strahlerzeuger unterstützt werden sollte. Da kommerziell verfügbare Programme zur Simulation der Erzeugung und Führung von Elektronenstrahlen grundlegende Effekte plasma basierter Quellen, wie z. B. die Raumladung der Ionen oder die ioneninduzierte Sekundär elektronen-Freisetzung, nicht berücksichtigen, wurde für diese Arbeit eine neue Herangehensweise favorisiert: „Particle-in-Cell“ (PIC)-Algorithmen werden in der Plasma forschung üblicherweise zur Modellierung von Entladungen sowie zum Studium nichtlinearer Probleme, wie z. B. Instabilitäten, verwendet. Deshalb wurde nun eine PIC-Simulations umgebung zur Modellierung der HSGE und der damit verbundenen Strahlerzeugung entwickelt. Die Simulation reproduziert experimentelle Ergebnisse, wie etwa die Charakteristik der Entladung, die Emittanz des Strahls oder die Ausdehnung des Kathodendunkelraums, in befriedigender Weise. Schließlich wurde im Rahmen dieser Arbeit eine entladungsbasierte Elektronenstrahlquelle neuen Typs entwickelt und charakterisiert, die die Einfachheit der bekannten Kaltkathoden-Strahler und vorteilhafte Leistungsparameter, z. B. eine hohe Strahlleistungsdichte und niedrige Arc-Rate, wie sie bisher nur mit traditionellen Glühkathodenstrahlern erreichbar waren, in sich vereinigt. Die Kathode bestand aus LaB6 - einem Material, das sowohl eine hohe Sekundärelektronen-Ausbeute als auch eine niedrige Austrittsarbeit aufweist - und wurde gegen die Halterung thermisch isolierend montiert. Dadurch kann sie von Ionen aus einer HSGE auf hohe Betriebstemperaturen geheizt werden und in erheblichem Maße thermisch freigesetzte Elektronen emittieren. Neben technisch nützlichen Gebrauchs eigenschaften weist diese so genannte „Hybrid-Kathode“ auch ein physikalisch interessantes Verhalten auf. Einige neuartige Effekte, die von Entladungen mit kalten Kathoden nicht bekannt waren, konnten beobachtet und erklärt werden, wie z.B. die auffällige „N-förmige“ Druck-Strom-Charakteristik, die bei plötzlicher Abschaltung der Entladung nur langsam und ungleichmäßig abklingende Elektronenemission, die Limitierung des erreichbaren Strahl stromes und eine Fülle von Kathodenverschleiß-Mechanismen. Physikalische Modelle zur Beschreibung verschiedener Aspekte der Hybridkathoden-Entladung wurden erarbeitet und mit den experimentellen Befunden verglichen. / Discharge-based, cold-cathode electron sources were routinely used as research tools at the end of the 19th century and facilitated then the discovery of the electron and of the x-rays. In recent time, they experience a renewed interest in science and industry due to their capability of generating high power electron beams for production processes (like welding, evaporation of materials for vapor deposition, and vacuum melt refining in metallurgy) relying on rugged mechanic designs as well as simple supply and control systems. Hence, discharge-based electron sources could provide an economically attractive alternative to the currently established electron beam guns with thermionic cathodes. Despite the long history and many empirical trials to utilize electron beam generation by gas discharges in several applications, the mechanisms governing this kind of electron sources are far from being well understood. Therefore, it was the purpose of the theoretical and experimental work performed for this thesis not only to investigate in the technological potentials and limitations of discharge-based electron beam guns but also to improve the knowledge of physical basic effects. At first, several cold-cathode beam sources existing at Fraunhofer FEP were analyzed. Regardless that they were designed for different applications, all were based on the same function principle: A high-voltage glow-discharge (HVGD) is sustained inside the device. Ions gain energy in the cathode fall, hit the cathode and release secondary electrons. These electrons will be accelerated towards the plasma then and can finally leave the beam source to perform the desired action at the process site. In order to optimize stability of the ions generating discharge, efficiency of the beam generation, beam power density and longevity of the cathode, different combinations of cathode materials and plasma forming gases have been investigated experimentally. The dependence of the cathode dark space width on current and discharge voltage was measured and could be explained by an analytic model. Emittance and brightness are important measures which quantify the quality of electron beams. In this work, both were determined for the beam originating from a HVGD based cold-cathode electron gun designed for welding following two approaches: First the emittance could be extracted from the envelope equation which analytically describes the evolution of the experimentally observed beam diameter along the propagation axis. Second the emittance was calculated from numerically simulated traces in the phase space. It was a core purpose of this work to develop and validate software tools capable of simulating the beam formation in various geometric configurations. This task was aimed at supporting the design and optimization of new discharge-based beam sources. Since commercially available software for modeling electron beam generation and transport do not consider the key mechanisms of plasma-based sources like the ion space charge or the ion-dependent production of free electrons, a new attempt was favored for this work: Particle-in-Cell (PIC) are being used in plasma research for studying nonlinear problems like instabilities. Therefore, a PIC simulation environment was utilized to numerically model the HVGD and the related beam generation. The simulation satisfactorily reproduces experimental findings, like the characteristics of the discharge, the emittance of the beam or the cathode dark space dimension. Finally, a discharge-based electron-beam sources of a new type was developed and characterized in the frame of this work. It merges the simplicity of known cold cathode devices with beneficial performance parameters, like high beam power density and low arcing rate, which have been reached so far with traditional thermionic electron sources only. The cathode of the new beam source consists of LaB6 - a material with a high secondary electron yield and a low thermionic work function - and was mounted thermally insulated against the holder. Then, an elevated operation temperature resulting in considerable thermionic emission was maintained by ions extracted from a HVGD. Besides to technically advantageous features, this so called “hybrid“ cathode mode of beam generation shows a physically interesting behaviour. Several new effects - not known from traditional cold-cathode discharges - could be observed, like a peculiar “N-shaped“ appearance of the pressure-current characteristic, the slowly and irregularly decreasing electron emission after a sudden discharge cutoff, a limitation of achievable beam current, and a multitude of possible cathode wear mechanisms. Physical models describing various features of the hybrid cathode discharge were elaborated and compared with the experimental findings.

Im Rahmen des Symposiums gaben Vertreter weltweit agierender Konzerne, wie Audi AG, voestalpine Gießerei Linz, Alstom AG und SITEC GmbH Einblick in ihre Forschungs­aktivitäten im Bereich Mobilität, Energietechnik, Medizintechnik und Sondermaschinenbau. Die schweißtechnischen Institute der Universitäten Aachen, Braunschweig, Clausthal, Dresden, Magdeburg und Graz gaben einen Überblick über universitäre Forschungs­aktivitäten.

<p>Cone beam computed tomography (CBCT) is a 3D x-ray imaging technique in which the x-ray beam is transmitted to an object with wide beam geometry producing a 2D image per projection. Due to its faster image acquisition time, wide coverage length per scan, and fewer motion artifacts, the CBCT system is rapidly replacing the conventional CT system and becoming popular in diagnostic and therapeutic radiology. However, there are few studies performed in CBCT dosimetry because of the absence of a standard dosimetric protocol for CBCT. Computed tomography dose index (CTDI), a standardized metric in conventional CT dosimetry, or direct organ dose measurements have been limitedly used in the CBCT dosimetry.</p> <p>This dissertation investigated the CBCT dosimetry from the CTDI method to the organ, effective dose, risk estimations with physical measurements and Monte Carlo (MC) simulations.</p> <p>An On-Board Imager (OBI, Varian Medical Systems, Palo Alto, CA) was used to perform old and new CBCT scan protocols. The new CBCT protocols introduced both partial and full angle scan modes while the old CBCT protocols only used the full angle mode. A metal-oxide-semiconductor-field-effect transistor (MOSFET) and an ion chamber were employed to measure the cone beam CTDI (CTDI_CB) in CT phantoms and organ dose in a 5-year-old pediatric anthropomorphic phantom. Radiochromic film was also employed to measure the axial dose profiles. A point dose method was used in the CTDI estimation.</p> <p>The BEAMnrc/EGSnrc MC system was used to simulate the CBCT scans; the MC model of the OBI x-ray tube was built into the system and validated by measurements characterizing the cone beam quality in the aspects of the x-ray spectrum, half value layer (HVL) and dose profiles for both full-fan and half-fan modes. Using the validated MC model, CTDI_CB, dose profile integral (DPI), cone beam dose length product (DLP_CB), and organ doses were calculated with voxelized MC CT phantoms or anthropomorphic phantoms. Effective dose and radiation risks were estimated from the organ dose results.</p> <p>The CTDI_CB of the old protocols were found to be 84 and 45 mGy for standard dose, head and body protocols. The CTDI_CB of the new protocols were found to be 6.0, 3.2, 29.0, 25.4, 23.8, and 7.7 mGy for the standard dose head, low dose head, high quality head, pelvis, pelvis spotlight, and low dose thorax protocols respectively. The new scan protocols were found to be advantageous in reducing the patient dose while offering acceptable image quality.</p> <p>The mean effective dose (ED) was found to be 37.8 ±0.7 mSv for the standard head and 8.1±0.2 mSv for the low dose head protocols (old) in the 5-year-old phantom. The lifetime attributable risk (LAR) of cancer incidence ranged from 23 to 144 cases per 100,000 exposed persons for the standard-dose mode and from five to 31 cases per 100,000 exposed persons for the low-dose mode. The relative risk (RR) of cancer incidence ranged from 1.003 to 1.054 for the standard-dose mode and from 1.001 to 1.012 for the low-dose mode.</p> <p>The MC method successfully estimated the CTDI_CB, organ and effective dose despite the heavy calculation time. The point dose method was found to be capable of estimating the CBCT dose with reasonable accuracy in the clinical environment.</p> / Dissertation

The most popular methods for solving the shortest-path problem in Artificial Intelligence are heuristic search algorithms. The main contributions of this research are new heuristic search algorithms that are either faster or scale up to larger problems than existing algorithms. Our contributions apply to both online and offline tasks. For online tasks, existing real-time heuristic search algorithms learn better informed heuristic values and in some cases eventually converge to a shortest path by repeatedly executing the action leading to a successor state with a minimum cost-to-goal estimate. In contrast, we claim that real-time heuristic search converges faster to a shortest path when it always selects an action leading to a state with a minimum f-value, where the f-value of a state is an estimate of the cost of a shortest path from start to goal via the state, just like in the offline A* search algorithm. We support this claim by implementing this new non-trivial action-selection rule in FALCONS and by showing empirically that FALCONS significantly reduces the number of actions to convergence of a state-of-the-art real-time search algorithm. For offline tasks, we improve on two existing ways of scaling up best-first search to larger problems. First, it is known that the WA* algorithm (a greedy variant of A*) solves larger problems when it is either diversified (i.e., when it performs expansions in parallel) or committed (i.e., when it chooses the state to expand next among a fixed-size subset of the set of generated but unexpanded states). We claim that WA* solves even larger problems when it is enhanced with both diversity and commitment. We support this claim with our MSC-KWA* algorithm. Second, it is known that breadth-first search solves larger problems when it prunes unpromising states, resulting in the beam search algorithm. We claim that beam search quickly solves even larger problems when it is enhanced with backtracking based on limited discrepancy search. We support this claim with our BULB algorithm. We show that both MSC-KWA* and BULB scale up to larger problems than several state-of-the-art offline search algorithms in three standard benchmark domains. Finally, we present an anytime variant of BULB and apply it to the multiple sequence alignment problem in biology.

Electron Beam Chemical Vapor Deposition (EBCVD) is a process by which an electron beam is used to decompose adsorbed reagent molecules to produce a deposit. The primary electrons from the beam, and especially the secondary electrons emitted from the substrate, dissociate the adsorbed molecules. Important factors for the deposition process include the beam parameters and reagent gas composition. Simple structures are fabricated through utilization of the various scanning modes of an SEM. Fibers (pillar-like structures) can be deposited, and lines (wall-like structures) can be deposited easily. This investigation focuses on the process parameters controlling deposition rate and geometry for platinum and carbon fibers and lines in a modified SEM. Platinum deposition was performed using a system with a small diameter needle that supplied a localized flow of gas from an organometallic platinum compound. Carbon deposition was performed in the Environmental mode, in which the microscope chamber is filled with a specified pressure of reagent gas. Statistically designed experiments were performed for platinum fiber and line deposition. Analysis indicated that the beam current and deposition time were dominant factors in determining the deposition rate. The voltage also had a significant effect on fiber deposition. For platinum line deposition, the effects of the dwell time and line time were also studied. The line time had a significant effect on line height deposited per scan. Optimization analysis was performed, and results indicated that high voltage and high beam current led to higher aspect ratios. Medium voltage and low beam current were preferable for depositing minimal width lines (less than 200 nm). Low voltage and high beam current were preferable for maximum deposition rates. EDS and EELS performed for platinum deposits in a TEM indicated amorphous structure with no carbon detected. This differs significantly from previously reported results. Statistically designed experiments were performed for carbon line deposition. The voltage, beam current, and dwell/line time were studied. Increasing line time led to a significant increase in line height/scan and appeared to be a dominant factor. Lower beam currents appeared to favor higher deposition rates. TEM analysis indicated that carbon deposits were mostly amorphous.

This thesis reports the characterization and development of nanolithography using Electron Beam Lithography system and nanoscale plasma etching. The standard Bosch process and a modified three-pulse Bosch process were developed in STS ICP and Plasma ICP system separately. The limit of the Bosch process at the nanoscale regime was investigated and documented. Furthermore, the effect of different control parameters on the process were studied and summarized in this report. 28nm-wide trench with aspect-ratio of 25 (smallest trench), and 50nm-wide trench with aspect ratio of 37 (highest aspect-ratio) have been demonstrated using the modified three-pulse process. Capacitive resonators, SiBAR and IBAR devices have been fabricated using the process developed in this work. IBARs (15MHz) with ultra-high Q (210,000) have been reported.