<p dir="ltr">Optical frequency combs have revolutionized metrology and advanced other fields such as RF photonics and astronomy. While powerful, they can be bulky, expensive, and difficult to manufacture. This tends to limit uses in real-world scenarios. Within the last decade or so, coherent frequency combs have begun to be generated in millimeter-scale, CMOS fabrication-compatible nonlinear crystals. These so-called “microcombs” have led to hopes of overcoming deployability constraints of more traditional bulk combs.</p><p dir="ltr">One of the first applications for \textit{bulk} frequency combs after their explosion in 2000 was the optical atomic clock. It promised extreme long-term time stability better than that of the Cesium clock that currently defines the SI second. More recently, interest in a fully portable optical atomic clock has grown. Such a device could reliably keep time even without the aid of GPS references, and potentially with greater accuracy than current GPS synchronization can provide.</p><p dir="ltr">Frequency combs have also been used to sample electrical signals more rapidly than traditional electronics can accomplish. This has been used to achieve dramatically increased effective frequency bandwidths for signal detection architectures. One can imagine how this capability would be beneficial in a portable (microcomb-driven) form: a lightweight, comb-enhanced receiver able to capture a broadband snapshot of its surrounding electromagnetic environment could be a powerful tool.</p><p dir="ltr">Timekeeping and RF photonics are the primary applications of microcombs focused upon here. I will attempt to roughly summarize important concepts and highlight relevant work in both subjects in the Introduction. Then I will move a step closer to the hands-on lab work that has largely kept me preoccupied over the last several years and describe important or commonly-employed Methods for experiments. A collection of three journal manuscripts (two published, and the third recently submitted) will follow in the Publications chapter, highlighting some experimental results. Finally, I will conclude with a brief Outlook.</p>

Advancements in photonic integrated circuits, so-called PICs, have progressed fast in the last decades. More complex PICs are getting developed, which are promising in possibly offering advantages like low power consumption and high-performance computing. Re-programmable photonic FPGAs are one of these candidates. To make these PICs viable, fundamental building blocks based on photonics need to be developed. Some of those fundamental building blocks are tunable silicon ring resonators, which can be used to filter signals in the transmission of light through photonic circuits. Fabrication of PICs is developing and those components are getting smaller, which leads to a strong sensitivity of their behavior to nanometer-scale variations. That has created a need for active tuning of those devices to recuperate those variances. One promising way to tune silicon ring resonator devices is to integrate microelectromechanical systems (MEMS) into the tuning section of the devices, because of their local and low power actuation. They are prospective to eliminate drawbacks from usual actuation methods like thermal actuation, which comes with high power consumption and cross talk while heating the functional sections of the ring. In this thesis, we have measured and analyzed MEMS-tunable silicon ring resonators, featuring two different designs, being an all-pass ring resonator and an add-drop ring resonator. The MEMS in the design are used to change the gap between the waveguides in their directional coupler and phase shifter section to control the position and extinction ratios of the ring resonance dips, which has been successfully demonstrated for the all-pass ring resonator. For the add-drop ring resonators, we have obtained performance parameters of their resonances with an average Q-factor of 3000 over the measured wavelength ranged from 1460nm to 1580nm and the characteristic behavior of their transmission has been shown without actuation. Further investigation with MEMS actuation of add-drop ring resonators and passive measurements on all-pass ring resonators can be done for a better understanding of their behavior and functionality. This can be achieved by characterizing all-pass ring resonators in terms of obtained performance parameters and by active measurements on add-drop ring resonators, as we expect that their MEMS could enable similar functionalities as all-pass ring resonators. Our first characterization results confirm the potential of MEMS for ring resonator tuning and could enable future circuits based on ring resonators with low power consumption. / Framsteg inom fotoniska integrerade kretsar, så kallade PIC, har utvecklats snabbt under de senaste decennierna. Mer komplexa PIC utvecklas, vilket lovar att möjligen erbjuda fördelar som låg strömförbrukning och högpresterande datorer. Omprogrammerbara fotoniska FPGA är en av dessa kandidater. För att göra dessa PICs livskraftiga måste grundläggande byggstenar baserade på fotonik utvecklas. Några av dessa grundläggande byggstenar är avstämningsbara kiselringresonatorer, som kan användas för att filtrera signaler vid överföring av ljus genom fotoniska kretsar. Tillverkning av PIC utvecklas och dessa komponenter blir mindre, vilket leder till en stark känslighet för variationer, även på nanometer skala. Det har skapat ett behov av aktiv inställning av dessa enheter för att återhämta dessa avvikelser. Ett lovande sätt att ställa in kiselringresonatoranordningar är att integrera mikroelektromekaniska system (MEMS) i enhetens stämningsdel på grund av deras lokala och lågeffektaktivering. De kan eliminera nackdelar med vanliga manövreringsmetoder som termisk aktivering, som kommer med hög strömförbrukning och termisk överhöring. I denna avhandling har vi mätt och analyserat MEMS-avstämbara kiselringresonatorer, med två olika designer, som är en all-pass ringres-onator och en add-drop ringresonator. MEMS i konstruktionen används för att ändra gapet mellan vågledarna i deras kopplare och fasskiftarsektion för att styra positionen och djupet på ringresonaserna, vilket har visats framgångsrikt för allpassningsresonatorn. För add-dropringresonatorer har vi erhållit prestandaparametrar för deras resonanser med en genomsnittlig Q-faktor på 3000 över den uppmätta våglängden som varierar från 1460 nm till 1580 nm och det karakteristiska beteendet för deras överföring har visats utan aktivering. Ytterligare undersökning med MEMS-aktivering av add-drop-ringresonatorer och passiva mätningar på all-pass-ringresonatorer kan göras för en bättre förståelse av deras beteende och funktionalitet. Detta kan uppnås genom att karakterisera allpassningsresonatorer i termer av erhållna prestandaparametrar och genom aktiva mätningar på add-drop-ringresonatorer, eftersom vi förväntar oss att deras MEMS kan möjliggöra liknande funktioner som all-pass-ringresonatorer. Våra första karakteriseringsresultat bekräftar MEMS potential för ringresonatorinställning och kan möjliggöra framtida kretsar baserade på ringresonatorer med låg strömförbrukning.

This thesis theoretically and experimentally studies the characteristics of integrated microresonators (MRs) built by passive (no gain) and non-magnetic materials and characterized by both Hermitian and non-Hermitian Hamiltonians. In particular, I have studied three different microresonators: a typical Microring Resonator (MR), a Taiji Microresonator (TJMR), which consists of a microresonator with an embedded S-shaped waveguide, and a new geometry called the Infinity-Loop Microresonator (ILMR), which is characterized by a microresonator shaped like the infinity symbol coupled at two points to the bus waveguide. To get an accurate picture of the three devices, they were modeled using both the transfer matrix method and the temporal coupled mode theory. Neglecting propagation losses, the MR is described by a Hermitian Hamiltonian, while the TJMR and the ILMR are described by a non-Hermitian one. An important difference between Hermitian and non-Hermitian systems concerns their degeneracies. Hermitian degeneracies are called Diabolic Points (DPs) and are characterized by coincident eigenvalues and mutually orthogonal eigenvectors. In contrast, non-Hermitian degeneracies are called Exceptional Points (EPs). At the EP, both the eigenvalues and the eigenvectors coalesce. The MR is at a DP instead, and the TJMR and the ILMR are at an EP. Since the TJMR and ILMR are at an EP, they have interesting features such as the possibility of being unidirectional reflectors. Here, it is shown experimentally how in the case of the TJMR this degeneracy can also be used to break Lorentz reciprocity in the nonlinear regime (high incident laser powers), discussing the effect of the Fabry-Perot of the bus waveguide facets. The effect of backscattering, mainly due to the waveguide surface-wall roughness, on the microresonators is also studied. This phenomenon induces simultaneous excitation of the clockwise and counterclockwise modes, leading to eigenvalue splitting. This splitting makes the use of typical quality factor estimation methods unfeasible. To overcome this problem and mitigate the negative effects of backscattering, a new experimental technique called interferometric excitation is introduced. This technique involves coherent excitation of the microresonator from both sides of the bus waveguide, allowing selective excitation of a single supermode. By adjusting the relative phase and amplitude between the excitation fields, the splitting in the transmission spectrum can be eliminated, resulting in improved quality factors and eigenvalue measurements. It is shown that this interferometric technique can be exploited under both stationary and dynamic conditions of time evolution. The thesis also investigates the sensing performance of the three microresonators as a function of a backscattering perturbation, which could be caused, for example, by the presence of a molecule or particle near the microresonator waveguide. It is shown that the ILMR has better performance in terms of responsivity and sensitivity than the other two microresonators. In fact, it has both the enhanced sensitivity due to the square root dependence of the splitting on the perturbation (characteristic of EPs) and the ability to completely eliminate the region of insensitivity as the backscattering perturbation approaches zero, which is present in both the other two microresonators. To validate the models used, they were compared with experimental measurements both in the linear regime and, for TJMR, also in the nonlinear regime, with excellent agreement.

<p dir="ltr">This thesis is about the exciting discovery of a new kind of single photon emitter that<br>is suspected to occur at the interface of silicon nitride SixNy and silicon dioxide SiO2 after<br>being rapidly annealed. Since SixNy is one of the most developed platforms for integrated<br>photonics the discovery of a native emitter in this platform opened up the possibility for<br>seamless integration of these single photon emitters with photonic circuitry for the first<br>time. This seamless integration was demonstrated as is shown in Chapter 3 by creating the<br>emitters and then patterning the SixNy layer into a waveguide. This work demonstrated for<br>the first time the coupling of such single photon emitters with on-chip integrated photonics.<br>However, the integration approach demonstrated was based on the stochastic integration of<br>emitters which limits the efficiency of the devices and the possible types of devices that can<br>be designed. This is why the next stage of research focused on the development of a site-<br>controlled process for creating these single photon emitters. Remarkably, it was found that<br>if the SixNy and SiO2 are nanostructured into nanopillars and then annealed then a single<br>photon emitter forms over 65% of the time within the nanopillar! Due to the lithography<br>defined nature of this process for creating the single photon emitters the first multi-mask<br>integration process was also developed and demonstrated. This fabrication process was used<br>to demonstrate the integration of several thousand single photon emitters with complex<br>integrated photonic structures such as topology optimized couplers. These developments<br>has generated a great deal of excitement due to the inherent scalability of the approach and<br>it’s obvious applications for the development of very large scale integrated (VLSI) on-chip<br>quantum photonic systems.</p>

[ES] La presente tesis se ha centrado en el modelado, diseño y demonstración experimental por primera vez del dispositivo Reconfigurable Reflective Arrayed Waveguide Grating (R-RAWG). Para la consecución de este dispositivo que tiene posibilidades de uso en la espectrometría, una plataforma de nitruro de silicio llamada CNM-VLC se ha usado, ya que este material permite operar en un gran ancho de banda. Esta plataforma posee ciertas limitaciones y los elementos necesarios para el funcionamiento de este dispositivo tenían un performance bajo. Por ello, se ha desarrollado y validado una metodología que ha permitido obtener mejores divisores. Además, se ha diseñado un inverted taper que ha mejorado considerablemente el acoplo de luz al chip. Esto ha sido gracias a un exhaustivo análisis de opciones existentes en la literatura que también ha permitido escoger la mejor opción para realizar un espejo reconfigurable en la plataforma sin cambiar ni añadir ningún proceso de fabricación. Se han demostrado espejos reconfigurables gracias a utilizar divisores ópticos realimentados y también se ha desarrollado códigos que predicen el comportamiento del dispositivo experimentalmente. Con todo el trabajo realizado, se ha diseñado un R-RAWG para que pudiera operar en un gran ancho de banda y que los actuadores de fase no tuvieran peligro de estropearse. También se ha desarrollado un código para el modelado del R-RAWG que permite imitar la fabricación de estos dispositivos y que, gracias a esto, se ha desarrollado un método o algoritmo llamado DPASTOR, que usa algoritmos usados en machine learning, para optimizar la respuesta con tan sólo la potencia óptica de salida. Finalmente, se ha diseñado una PCB para poder conectar eléctricamente el chip fotónico y se ha desarrollado un método de medida que ha permitido tener una respuesta estable consiguiendo demostrar multitud de respuestas de filtros ópticos con el mismo dispositivo. / [CAT] La present tesi s'ha centrat en el modelatge, disseny i demonstració experimental per primera vegada del dispositiu Reconfigurable Reflective Arrayed Waveguide Grating (R-RAWG). Per a la consecució d'aquest dispositiu que té possibilitats d'ús en l'espectrometria, una plataforma de nitrur de silici anomenada CNM-VLC s'ha usat ja que aquest material permet operar en una gran amplada de banda. Aquesta plataforma posseeix certes limitacions i els elements necessaris per al funcionament d'aquest dispositiu tenien un performance baix. Per això, s'ha desenvolupat i validat una metodologia que ha permés obtindre millors divisors i també, gràcies als processos de fabricació, s'ha dissenyat un acoplador que ha millorat considerablement l'acoble de llum al xip. Això ha sigut gràcies a un exhaustiu analisis d'opcions existents en la literatura que també ha permés triar la millor opció per a realitzar un espill reconfigurable en la plataforma sense canviar ni afegir cap procés de fabricació. S'han demonstrat espills reconfigurables gràcies a utilitzar divisors realimentats i també s'ha desenvolupat codis que prediuen el comportament del dispostiu experimentalment. Amb tot el treball realitzat, s'ha dissenyat un R-RAWG fent ús de determinades consideracions perquè poguera operar en una gran amplada de banda i que els actuadors de fase no tingueren perill de desbaratar-se. També s'ha desenvolupat un codi per al modelatge del R-RAWG que permet imitar la fabricació d'aquests dispositius i que, gràcies a això, s'ha desenvolupat un mètode o algorisme anomenat DPASTOR, que usa algorismes usats en machine learning, per a optimitzar la resposta amb tan sols la potència òptica d'eixida. Finalment, s'ha dissenyat una PCB per a poder connectar elèctricament el xip fotònic i s'ha desenvolupat un mètode de mesura que ha permés tindre una resposta estable aconseguint demostrar multitud de respostes de filtres òptics amb el mateix dispositiu. / [EN] This thesis is focused on the modelling, design and experimental demonstration for the first time of Reconfigurable Reflective Arrayed Waveguide Grating (R-RAWG) device. In order to build this device, that can be employed in spectrometry, a silicon nitride platform termed CNM-VLC has been chosen since this material allows to operate in broad range of wavelengths. This platform has the necessary elements, but some limitations because the operation of this device had a low performance. Therefore, a methodology has been developed and validated, which has allowed to obtain better splitters. Also an inverted taper has been designed, which has considerably improved the coupling of light to the chip. This has been possible thanks to an exhaustive analysis of existing options in the literature, that has allowed choosing the best option to make a reconfigurable mirror on the platform without changing or adding new manufacturing steps. Reconfigurable mirrors have been demonstrated by using feedback splitters. Furthermore, codes have been developed to predict the behaviour of the actual device. With all the work done, a R-RAWG has been designed by using certain considerations so that it can operate over a broad wavelength range and the phase actuators are not in danger of being damaged. A code has also been developed for the modelling of the R-RAWG, which allows manufacturing imperfections to be considered, thanks to this, a method or algorithm called DPASTOR has been developed. DPASTOR resembles machine learning to optimise the response by just using the optical output power. Finally, a PCB and an assembly with the chip interconnected to it have been made and designed. Moreover, a measurement method has been developed, which has made it possible to have a stable response and to demonstrate a multitude of optical filter responses with the same device. / Fernández Vicente, J. (2021). Reconfigurable Reflective Arrayed Waveguide Grating on Silicon Nitride [Tesis doctoral]. Universitat Politècnica de València. https://doi.org/10.4995/Thesis/10251/165783 / TESIS