Aujourd'hui, les structures basées sur les matériaux ferromagnétiques sont largement utilisées pour différentes applications: mémoires magnéto-résistives à accès non séquentiel, capteurs magnétiques et également nouveaux composants électroniques et dipositifs spintroniques. La tendance générale de l'électronique moderne est une réduction de la dimension des éléments à l'échelle submicronique. Ainsi, les nanostructures magnétiques sont d'un grand intérêt et leurs méthodes de fabrication et propriétés sont étudiées activement.Le but principal de ce travail est la préparation et la recherche expérimentale et théorique des propriétés de nanostructures magnétiques pour applications aux composants magneto-résistifs et phononiques. La lithographie à sonde locale (SPL) et la lithographie par faisceau d’électrons (EBL) ont été utilisées pour la fabrication des nanostructures. De premiers pas ont également été réalisés en fabrication des cristaux phononiques sensibles au champ magnétique. / Nowadays, structures based on ferromagnetic materials are largely used for different applications: random access magneto-resistive memories, magnetic sensors, and also new electronic components and spintronic devices. The general trend of modern electronic is the reduction of dimensions down to submicronic scales. Therefore, the magnetic nanostructures are of great interest and their methods of fabrication and properties largely studied.The main goal of this work is the preparation and experimental and theoretical research on properties of magnetic nanostructures for applications in magnetoresistive and photonic devices. The Scanning Probe Lithography (SPL) and Electron Beam Lithography (EBL) were used for the nanostructures fabrications. First steps were also achieved in fabrication of phononic cristals sensitive the magnetic field.

The dissertation thesis is focused on research and development in the field of microfabrication by the technology of electron beam lithography. In the first part of this work, the extensive study is conducted in the field of technology of electron beam lithography in terms of physical principles, writing strategies and resist materials. This is followed with description of physical principles of etching for the transfer of relief structures into substrates. The thesis describes innovative techniques in modelling, simulation, data preparation and optimization of manufacturing technology. It brings new possibilities to record deep binary or multilevel microstructures using electron beam lithography, plasma and reactive ion etching technology. Experience and knowledge in the large area of microlithography, plasma and anisotropic wet-etching of silicon have been capitalized to the design process of manufacturing of nano-patterned membranes. It was followed with practical verification and optimization of the microfabrication process.

This paper describes technology and process development for a hybrid lithography approach pairing UV-lithography for planar single mode waveguides with 2-photon-polymerization direct-laser-writing for out-of-plane coupling mirrors. Improvements to multi-layer direct patterning of OrmoCore/-Clad material system using UV-lithography are presented. Near square core cross sections are achieved. Minimum alignment accuracy at ≈ 3 μm is observed. Cut-back measurement on single mode waveguides shows attenuation of 0.64 dB cm −1 and 1.5 dB cm −1 at 1310 nm and 1550 nm respectively. Up to 2.5-times increase of shear-strength after thermal exposure up to 300 ◦ C is found using shear tests and compared for various surface treatments. Mechanical compatibility to reflow soldering is derived. An extensive study on the pattering of ORMOCER® using 2-photon-polymerization is performed. Flat 45 ◦ -micro mirrors with sub-10 μm dimensions are 3D-printed both in OrmoCore and OrmoComp. Outlook to further research on hybrid lithography integration approach is given.

This paper describes design and advances in process development for UV-lithography of planar single mode waveguides with openings for out-of-plane coupling µ-mirrors. Improvements to multi-layer direct patterning of OrmoCore/-Clad material system using UV-lithography are presented. Near square core cross sections are achieved. However, non uniformity across 4” wafer is shown due to varying proximity and UV-intensity. Openings in full stack with steep sidewalls without residual layer are patterned. Reduction in stack thickness for very small exposure doses due to inhibition even under inert atmosphere is shown. 45° -µ-mirrors are integrated in these openings to manufacture a U-link via a single mode waveguide and two adjacent micro-mirrors. Optical characterization of U-link demonstrates the feasibility of hybrid lithography approach. However, non-uniformity of core cross-section leads to cross coupling of planar waveguides. Outlook to further research on UV-lithography of multi-layer waveguide stack and alignment with µ-mirror printing is given.

This paper describes advances in hybrid-lithography process, combining UV-lithography for planar, single mode redistribution layer (RDL) and 2-photon-polymerization direct-laser-writing (2PP-DLW) for micro-mirrors inside RDL-opening. Improvements to multi-layer direct patterning of OrmoCore/-Clad material system using UV-lithography and need for broadband UV-LED source are presented. Near square core cross sections and smooth sidewalls are achieved. Openings in full stack with steep sidewalls without residual layer are patterned. To optimize 2PP-DLW-process processing window for both OrmoComp and IP-DIP is thoroughly characterized. Roughness measurements prove feasibility even of coarsely printed structure as reflective μ-mirror for 1550 nm wavelength. Finally these results are applied to periscope probe for wafer-level-testing of edge emitting lasers and proof of concept is shown. Outlook to further research on UV-lithography of multi-layer waveguide stack and alignment with μ-mirror printing is given.

Thesis (MBA)--Stellenbosch University, 2001. / ENGLISH ABSTRACT: The majority of small and medium - and to a much lesser extent the large - commercial lithographic printing firms situated in the Western Cape do not employ a fulltime financial director or an accountant. The result is that many managers - very often without much financial training - have to steer their firm through very turbulent economic times. Apart from being in this state of siege, managers of these commercial printing firms have their problem compounded by the fact that they do not have any industry-specific financial benchmarks against which to evaluate their firms' financial performance. Against this background, the writer has set out to determine certain industry financial benchmarks - presented in the form of ratios - for the commercial lithographic printing firms situated in the Western Cape to enable participating firms to measure their performance relative to their sector peers. As such, this study is aimed at the non-financial manager, firstly, and thereafter the financial manager. To this end an attempt has been made to keep the vocabulary as user-friendly as possible without sacrificing brevity and clarity. Lastly, this study is presented as a working document rather than a theoretical exercise. The essence of this study - to create a tool for financial evaluation - could be embodied as follows: Turnover is vanity, profit is sanity, cash flow is reality. / AFRIKAANSE OPSOMMING: Die meerderheid klein en medium - en tot 'n mindere mate groot - kommersiële litografiese drukkery firmas wat in die Wes Kaap geleë is, het nie 'n voltydse finansiële direkteur of rekenmeester in diens nie. Dit gee daartoe aanleiding dat verskeie bestuurders - dikwels sonder noemenswaardige finansiële opleiding - hul firma deur 'n baie onstuimige ekonomiese omgewing moet stuur. Buiten hierdie uitdaging is daar ook die verdere probleem dat daar tans geen industrie-spesifieke finansiële maatstawwe bestaan waarteen hul firmas se finansiële prestasie gemeet kan word nie. Teen hierdie agtergrond het hierdie studie dus ten doel gehad om sekere industrie spesifieke finansiële maatstawwe - aangebied as verhoudings - vir die kommersiële litografiese drukkery firmas wat in die Wes Kaap geleë is, te genereer sodat deelnemende firmas hul finansiële prestasie kan meet relatief tot hul sektor eweknieë. Met hierdie doel voor oë is hierdie studie dus eerstens gerig op die nie-finansiële bestuurder en daarna die finansiële bestuurder. Dienooreenkomstig is die woordeskat dus so gebruikervriendelik moontlik gehou sonder om akkuraatheid en trefkrag in te boet. Laastens is hierdie studie gemik om 'n werksdokument eerder as 'n teoretiese skrywe te wees. Die kern van hierdie studie - om naamlik 'n instrument te wees vir finansiële evaluasie - kan as volg saamgevat word: Omset is ydelheid, wins is redelikheid, kontantvloei is werklikheid.

The Cold-Electron Bolometer (CEB) is a sensitive detector of millimeter-wave radiation, in which tunnel junctions are used as temperature sensors of a nanoscale normal metal strip absorber. The absorber is fed by an antenna via two Superconductor-Insulator-Normal metal (SIN) tunnel junctions, fabricated at both ends of the absorber. Incoming photons excite electrons, heating the whole electron system. The incoming RF power is determined by measuring the tunneling current through the SIN junctions. Since electrons at highest energy levels escape the absorber through the tunnel junctions, it causes cooling of the absorber. This electron cooling provides electro-thermal feedback that makes the saturation power of a CEB well above that of other types of millimeter-wave receivers. The key features of CEB detectors are high sensitivity, large dynamic range, fast response, easy integration in arrays on planar substrates, and simple readout. The high dynamic range allows the detector to operate under relatively high background levels. In this thesis, we present the development and successful operation of CEB, focusing on the fabrication technology and different implementations of the CEB for efficient detection of electromagnetic signals. We present the CEB detector integrated across a unilateral finline deposited on a planar substrate. We have measured the finline-integrated CEB performance at 280-315 mK using a calibrated black-body source mounted inside the cryostat. The results have demonstrated strong response to the incoming RF power and reasonable sensitivity. We also present CEB devices fabricated with advanced technologies and integrated in log-periodic, double-dipole and cross-slot antennas. The measured CEB performance satisfied the requirements of the balloon-borne experiment BOOMERANG and could be considered for future balloon-borne and ground-based instruments. In this thesis we also investigated a planar phase switch integrated in a back-to-back finline for modulating the polarization of weak electromagnetic signals. We examine the switching characteristics and demonstrate that the switching speed of the device is well above the speed required for phase modulation in astronomical instruments. We also investigated the combination of a detector and a superconducting phase switch for modulating the polarization of electromagnetic radiation.

Integration and miniaturisation in electronics has undoubtedly revolutionised the modern world. In biotechnology, emerging lab-on-a-chip (LOC) methodologies promise all-integrated laboratory processes, to perform complete biochemical or medical synthesis and analysis encapsulated on small microchips. The integration of electrical, optical and physical sensors, and control devices, with fluid handling, is creating a new class of functional chip-based systems. Scaled down onto a chip, reagent and sample consumption is reduced, point-of-care or in-the-field usage is enabled through portability, costs are reduced, automation increases the ease of use, and favourable scaling laws can be exploited, such as improved fluid control. The capacity to manipulate single cells on-chip has applications across the life sciences, in biotechnology, pharmacology, medical diagnostics and drug discovery. This thesis explores multiple applications of optical manipulation within microfluidic chips. Used in combination with microfluidic systems, optics adds powerful functionalities to emerging LOC technologies. These include particle management such as immobilising, sorting, concentrating, and transportation of cell-sized objects, along with sensing, spectroscopic interrogation, and cell treatment. The work in this thesis brings several key applications of optical techniques for manipulating and porating cell-sized microscopic particles to within microfluidic chips. The fields of optical trapping, optical tweezers and optical sorting are reviewed in the context of lab-on-a-chip application, and the physics of the laminar fluid flow exhibited at this size scale is detailed. Microfluidic chip fabrication methods are presented, including a robust method for the introduction of optical fibres for laser beam delivery, which is demonstrated in a dual-beam optical trap chip and in optical chromatography using photonic crystal fibre. The use of a total internal reflection microscope objective lens is utilised in a novel demonstration of propelling particles within fluid flow. The size and refractive index dependency is modelled and experimentally characterised, before presenting continuous passive optical sorting of microparticles based on these intrinsic optical properties, in a microfluidic chip. Finally, a microfluidic system is utilised in the delivery of mammalian cells to a focused femtosecond laser beam for continuous, high throughput photoporation. The optical injection efficiency of inserting a fluorescent dye is determined and the cell viability is evaluated. This could form the basis for ultra-high throughput, efficient transfection of cells, with the advantages of single cell treatment and unrivalled viability using this optical technique.

Les biocapteurs sont utilisés quotidiennement pour déterminer la présence de molécules biologiques dans une matrice complexe, comme l’urine pour les tests de grossesses ou le sang pour les glucomètres. Les techniques courantes pour la détection des autres maladies nécessitent fréquemment le marquage de l’analyte avec une autre molécule, ce qui est à éviter pour fin de simplicité d’analyse. Ces travaux ont pour but la maximisation de la sensibilité d’une surface d’or ou d’argent nanotrouée, afin de permettre la détection de la liaison de molécules biologiques par résonance des plasmons de surface localisés (LSPR), en utilisant la spectroscopie de transmission. Un biocapteur portable, rapide et sans marquage pour quantifier des analytes d’intérêt médical ou environnemental pourrait être construit à partir de ces travaux. Dans l’objectif d’étudier de nombreuses configurations pour maximiser la sensibilité, le temps et le coût des méthodes de fabrication de nanostructures habituelles auraient limité le nombre de surfaces nanotrouées pouvant être étudiées. Un autre objectif du projet consiste donc au développement d’une technique de fabrication rapide de réseaux de nanotrous, et à moindres coûts, basée sur la lithographie de nanosphères (NSL) et sur la gravure au plasma à l’oxygène (RIE). La sensibilité à la variation d’indice de réfraction associée aux liaisons de molécules sur la surface du métal noble et la longueur d’onde d’excitation du plasmon de surface sont influencées par les caractéristiques des réseaux de nanotrous. Dans les travaux rapportés ici, la nature du métal utilisé, le diamètre ainsi que la périodicité des trous sont variés pour étudier leur influence sur les bandes LSPR du spectre en transmission pour maximiser cette sensibilité, visant la fabrication d’un biocapteur. Les surfaces d’argent, ayant un diamètre de nanotrous inférieur à 200 nm pour une périodicité de 450 nm et les nanotrous d’une périodicité de 650 nm démontre un potentiel de sensibilité supérieur. / Biosensors are used daily to determine the presence of biomolecules in a complex matrix, like urine for pregnancy test or blood with a glucometer. The usual biodetection methods require the addition of a tag on the analyte, which is to be avoided to design a simple analytical method. The objective of this work is to maximize the sensitivity of a gold or silver nanohole arrays to detect the biomolecules liaisons close to the metal surface by localized surface plasmon resonance (LSPR) in transmission spectroscopy. A portable and effective biosensor to quantify analytes could be built based on this work, without a tagging step. To achieve the objective of evaluating numerous configurations for maximal sensitivity, the time and cost of the usual nanostructures fabrication methods would have limited the number of nanohole arrays in metal surface that could have been studied in this project. This fact motivated another objective of this project, the development of a fast and low cost fabrication method for nanohole arrays using nanospheres lithography (NSL) followed by reactive ions etching (RIE). The plasmon sensitivity and wavelength excitation are influenced by the nanohole arrays characteristics. In the work presented here, the chemical composition of the metal surface, the diameter and the periodicity of the nanohole arrays are shown to the influence the LSPR bands. The transmission maximum and minimum position of some LSPR bands are sensitive to refractive index change, which can be exploited in a biosensor format to detect biomolecules. The optimization of these nanohole arrays characteristics allows the maximization of this sensitivity to build a biosensor. The best index refraction sensitive results were with silver surfaces, with nanohole diameters smaller than 200 nm for a periodicity of 450 nm and the nanoholes with a periodicity of 650 nm show a potential for an increased sensitivity.

The initiation and high resolution control of surface confined chemical reactions would be both beneficial for nanofabrication and fundamentally interesting. In this work, spatially controlled scanning probe directed organometallic coupling, patterned functional protein immobilisation and highly localised reversible redox reactions on SAMs were investigated. Catalytically active palladium nanoparticles were mounted on a scanning probe and an appropriate reagent SAM was scanned in a reagent solution. This instigated a spatially resolved organometallic coupling reaction between the solution and SAM-phase reagents. Within this catalytic nanolithography a spatial resolution of ~10nm is possible, equating to zeptomole-scale reaction. The methodology was applied to reactions such as Sonogashira coupling and local oligo(phenylene vinylene) synthesis. By altering the experimental protocols, relating probe scan velocity to reaction yield and characterising the nanopattern, a PVP matrix model describing a proposed mechanism of catalytic nanolithography, was presented. Though ultimately limited by probe deactivation, calculations indicated that activity per immobilised nanoparticle is very high in this configuration. For biopatterning, surface nanopatterns defined by carboxylic functionality were generated from methyl-terminated SAMs by local anodic oxidation (LAO) initiated by a conductive AFM probe. By employing suitable linker compounds, avidin and Stefin-A quadruple Mutant (SQM) receptive peptide aptamers were patterned at sub-100nm resolution. The multiplexed sensing capability of an SQM array was demonstrated by reacting generated patterns with single or a mixture of multiple antibodies. The reversible redox conversion and switching of reactivity of hydroquinone-terminated SAMs was electrochemically demonstrated prior to an application in redox nanolithography. In this methodology, spatially controlled probe-induced in situ "writing" and "erasing" based on reversible redox conversion were conducted on hydroquinone terminated SAM. In combination with dip-pen nanolithography, a novel method of redox electro-pen nanolithography was designed and the method’s application for lithography was examined.