Accelerometer sensors fabricated with micromachining technologies started to take place of yesterday&rsquo / s bulky sensors in many application areas. The application areas include a wide range from consumer electronics and health systems to military and aerospace applications. Therefore, the performance requirements extend form 1 &mu / g&rsquo / s to 100 thousand g&rsquo / s. However, high performance strategic grade MEMS accelerometer sensors still do not exist in the literature. Smart designs utilizing the MEMS technology is necessary in order to acquire high performance specifications. This thesis reports a high performance accelerometer with a new process by making the use of bulk micromachining technology. The new process includes the utilization of Silicon-on-Insulator (SOI) wafer and its buried oxide (BOX) layer. The BOX layer helps to realize interdigitated finger structures, which commonly find place in surface micromachined CMOS-MEMS capacitive accelerometers. The multi-metal layered CMOS-MEMS devices inherently incorporate interdigitated finger structures. Interdigitated finger structures are highly sensitive to acceleration in comparison with comb-finger structures, which generally find usage in bulk-micromachined devices, due to absence of anti-gap. The designed sensors based on this fabrication process is sought to form a fully-differential signal interfaced sensor with incorporation of the advantages of high sensitive interdigitated finger electrodes and high aspect ratio SOI wafer&rsquo / s bulk single crystal silicon device. Under the light of the envisaged process, sensor designs were made, and verified using a computing environment, MATLAB, and a finite element analysis simulator, CoventorWARE. The verified two designs were fabricated, and all the tests, except the centrifuge test, were made at METU-MEMS Research Center. Among the fabricated sensors, the one designed for the high performance achieves a capacitance sensitivity of 178 fF with a rest capacitance of 8.1 pF by employing interdigitated finger electrodes, while its comb-finger implementation can only achieve a capacitance sensitivity of 75 fF with a rest capacitance of 10 pF.

Orientador: Luiz Otavio Saraiva Ferreira / Dissertação (mestrado) - Universidade Estadual de Campinas, Faculdade de Engenharia Mecanica / Made available in DSpace on 2018-08-06T16:27:32Z (GMT). No. of bitstreams: 1 Espindola_AlexeyMarques_M.pdf: 1293939 bytes, checksum: 66ab2d16dc552294762d6c3708cda71b (MD5) Previous issue date: 2006 / Resumo: Os sistemas microfluidicos estão evoluindo rapidamente, encontrando vastas aplicações na mais diversas áreas do conhecimento. Os Lab-on-Chips, LOCs, são dispositivos capazes de realizar análises químicas e bioquímicas em um único chip. Este dispositivo pode causar grande impacto no mercado de análises laboratoriais, por este motivo vem ganhando grande atenção Para realizar estas análises os LOCs necessitam de microbombas capazes de transportar quantidades ínfimas de fluidos em seus canais de maneira acurada e uniforme. Desta forma, o interesse em modelar e fabricar microbombas tomou-se uma área fértil para a pesquisa. Neste trabalho foi desenvolvida a modelagem de uma microbomba peristáltica de elastõmero, tipo de bomba mais conveniente para Lab-on-Chips, utilizando a técnica de analogias eletro-mecânicas que consiste em representar um dispositivo por um circuito elétrico equivalente. As análises das simulações podem ser realizadas usando programas de análise de circuitos elétricos. Dois modelos foram apresentados neste trabalho. O primeiro é a reprodução do modelo de bomba criado por Jacques Goulpeau, em que o modelo de uma válvula é extrapolando para toda a microbomba. O segundo contém o circuito elétrico equivalente da bomba completa mostrando a interações entre suas partes. Os resultados mostram que o comportamento da microbomba não pode ser completamente descrito pelo modelo extrapolado a partir de uma válvula, devido às interações entre três válvulas. As simulações do circuito equivalente da bomba completa mostraram que os efeitos das interações entre as válvulas explicam claramente a diferença entre a vazão prevista pelo modelo de Goulpeau e os dados experimentais por ele obtidos, sendo possível ajustar o modelo aos dados experimentais / Abstract: Microfluidies systems are growing rapidly, finding a large nwnber of applications in many fields. Lab-on-ehips, LOC, are deviees that ean perform ehemical and biochemical analyses in a ehip. This device ean cause high impact on laboratorial analyses market, and then it is gaining large attention. In order to execute these analyses on LOC, mieropumps are necessary to transport a tiny quantity of fluid between the channeIs with accuracy and uniformity. Thus, the interests of modeling and fabrication mieropwnps are increasing and become a fertile research field. The goal of this work were a modeling of elastomer peristaltic micropwnp, the most suitable pwnp for LOCs, using the electro- mechanical analogy technique that consist in represent the device in a electrical equivalent networks. Then the simulation analyses can be done on electrical simulation tools. Two models were presented in this work. The first is reproduction of the pwnp model made by Jacques Goulpeau et aI., where the valve model is extrapolated to the whole mieropwnp. The second contains the electrical equivalent circuit that represents the whole device showing the interactions between its eomponents. The results showed that micropump behavior eouldn't completely deseribe by the extrapolated model ftom a valve, because the interactions between the three valves. The simulations of electrical equivalent eircuit of the whole pwnp showed that the interaction between the valves explain the difference between of flow rate foreseen by Goulpeau model and his experimental data, being possible to adjust the model to the experimental data / Mestrado / Mecanica dos Sólidos e Projeto Mecanico / Mestre em Engenharia Mecânica

The dissertation thesis is focused on research and development of modern emission MEMS sensors. The emission sensor based on the field emission from nanostructured materials represents innovative approach to pressure sensing. The nanostructures serve as electron emitter in an electric field between the cathode and anode in the pressure sensor. This electric field is constant and the change in ambient pressure causes the change of distance between electrodes, thereby the electric field is increasing. This intensity is proportional to the emission from the cathode made of nanostructured material. Changing the distance between the electrodes is caused by the deflection of the deformation element - the membrane, which operates the measured pressure. In the current state of the art an extensive research is carried out to find new nanostructured materials with good emission properties. Four nanostructured materials have been chosen and then experimentally prepared and characterized inside the vacuum chamber. For the simulation of diaphragm bending, the chamber is equipped with linear nano-motion drive SmarAct that enables precise changes of the distance between two electrodes inside the vacuum chamber. The computer model to predict the deformation of diaphragm was prepared in the simulation program CoventorWare. The behavior of diaphragm in a wide range of dimensions of the membrane, its thickness and the applied pressure are possible to predict. The dependencies of the current density on the electric field are plotted from the measured emission characteristics of nanostructured materials and thus characterized nanostructured materials can be compared. The dependencies are further converted by Fowler-Nordheimovy theory on the curve (ln(J/E2) vs. 1/E), whose advantage is linear shape. Basic parameters describing the emission properties of characterized nanostructured materials are deducted. Two methods for vacuum packaging of the sensor electrodes are designed. Anodic bonding technology and encapsulating using glass frit bonding are tested. To evaluate the bonding strength, the bonded substrates are tested for tensile strength.

Microdispositivos piezelétricos tem uma vasta aplicação em mecânica de precisão, como, por exemplo, manipulação de células, microcirurgias, equipamentos de nanotecnologia e principalmente em microeletromecanismos (MEMS). Os microdispositivos piezelétricos considerados nesta tese essencialmente consistem de uma estrutura multi-flexível atuada por duas ou mais piezocerâmicas, que geram deslocamentos e forças em direções e regiões pré-determinadas do domínio, ou seja, a estrutura multi-flexível atua como um transformador mecânico amplificando e alterando os deslocamentos gerados pelas piezocerâmicas nos movimentos de atuação. O desenvolvimento destes microdispositivos piezelétricos em sua grande maioria não utiliza ferramentas sistemáticas e genéricas. A complexidade dos movimentos de atuação torna o desenvolvimento dos microdispositivos piezelétricos complexo, principalmente devido ao surgimento de movimentos indesejados ou acoplados durante a sua atuação. Portanto, é necessário um método sistemático e eficiente como o método de otimização topológica (MOT), que incorpore na sua formulação as principais exigências de projeto dos microdispositivos, como apresentado nesse trabalho. O MOT implementado é baseado na abordagem CAMD (Distribuição Contínua da Distribuição de Material), onde as pseudo-densidades são interpoladas nos nós de cada elemento finito, resultando numa distribuição contínua de material no domínio. Um método adjunto foi implementado para o cálculo das sensibilidades. São consideradas três formulações. A primeira denominada de MAPs (Multi-Atuadores Piezelétricos) considera as regiões piezocerâmicas fixas, otimizando apenas a estrutura multi-flexível no domínio de projeto. Nesta formulação materiais não-piezelétricos (como, por exemplo, Alumínio) e vazio são distribuídos no domínio de projeto, mantendo as regiões piezocerâmicas fixas e homogêneas. Para validar os resultados obtidos com essa formulação foram fabricados protótipos de nanoposicionadores $XY$, que foram caracterizados experimentalmente utilizando técnicas de interferometria laser, considerando excitação quasi-estática. No entanto, essa primeira formulação impõe restrições no problema, limitando a optimalidade da solução obtida pela otimização topológica. Assim, surgiu a necessidade de desenvolver uma segunda formulação, que permite distribuir simultaneamente material não-piezelétrico, piezelétrico e vazio no domínio de projeto, denominada de LOMPs (Localização Ótima do Material Piezelétrico). A formulação dos LOMPs obtém simultaneamente a localização do material piezelétrico na estrutura flexível otimizada pela OT, e inclui também uma variável de projeto para determinar o ângulo ótimo entre as direções de polarização e do campo elétrico. Nesta formulação como as posições dos eletrodos não são conhecidas, ``a priori\'\', é utilizado como abordagem aplicar um campo elétrico constante para determinar a localização do material piezelétrico e conseqüentemente dos eletrodos. Finalmente, foi explorado o conceito de materiais com gradação funcional (MGFs) no projeto dos MAPs. Os MGFs apresentam uma distribuição contínua de materiais na sua microestrutura, não possuindo interface entre os materiais distribuídos, o que possibilita aumentar a vida útil do dispositivo piezelétrico. Assim, foi implementado uma terceira formulação denominada de MAPs MGFs, que permite obter a gradação ótima de materiais piezelétricos e não-piezelétricos no domínio piezocerâmico dos MAPs, conjuntamente com a topologia da estrutura multi-flexível. Essa formulação foi estendida para projetar atuadores bilaminares MGFs. Todas as formulações desenvolvidas utilizam uma função multi-objetivo, que permite controlar a rigidez e a flexibilidade minimizando o movimento acoplado, de cada movimento de atuação. Os exemplos numéricos são limitados a modelos bi-dimensionais, utilizando o estado plano de tensões e deformações mecânicas e elétricas, uma vez que a grande maioria das aplicações dos microdispositivos piezelétricos são bi-dimensionais. / Microtools offer significant promise in a wide range of applications such as cell manipulation, microsurgery, nanotechnology processes, and many other fields. The microtools considered in this doctoral thesis essentially consist of a multi-flexible structure actuated by two or more piezoceramic devices that when each piezoceramic is actuated, it generates an output displacement and force at a specified point of the domain and direction. The multi-flexible structure acts as a mechanical transformer by amplifying and changing the direction of the piezoceramic output displacements. Thus, the development of microtools requires the design of actuated flexible structures that can perform complex movements. The development of these microtools is still in the beginning and it can be strongly enhanced by using design tools. In addition, when multiple piezoceramic devices are involved, coupling effects in their movements become critical, especially the appearance of undesired movements, which makes the design task very complex. One way to avoid such undesirable effects is the use of a systematic design method, such as topology optimization, with appropriate formulation of the optimization problem. The topology optimization method implemented is based on the CAMD (Continuous Approximation of Material Distribution) approach where fictitious densities are interpolated at each finite element, providing a continuum material distribution in the domain. The corresponding sensitivity analysis is presented using the adjoint method. Three formulations are considered. The first formulation, called Piezoelectric Multi-Actuators (PMAs), keeps fixed piezoceramic positions in the design domain and only the flexible structure is designed by distributing some non-piezoelectric material (Aluminum, for example). $XY$ Piezoelectric Nanopositioner are manufactured and experimentally analyzed to validate the results of the topology optimization obtained using this formulation. Experimental analyses are conducted using laser interferometry to measure displacement, while considering a quasi-static excitation. However, this first formulation imposes a constraint to the position of piezoelectric material in the optimization problem limiting the optimality of the solution. Thus, the second formulation presented, called LOMPs, allows the simultaneous distribution of non-piezoelectric and piezoelectric material in the design domain, to achieve certain specified actuation movements. The optimization problem is posed as the simultaneous search for an optimal topology of a flexible structure as well as the optimal position of piezoceramics in the design domain and optimal rotation angle of piezoceramic material axes that maximize output displacements or output forces at a specified point of the domain and direction. When the distribution of a non-piezoelectric conductor material and a piezoceramic material is considered in the design domain, the electrode positions are not known ``a priori\'\'. To circumvent this problem, an electric field is applied as electrical excitation. Finally, the concept of functionally graded materials (FGM) is applied to PMAs design. FGMs are special materials that possess continuously graded properties without interfaces which can increase lifetime of piezoelectric devices. Thus, a third formulation is implemented to find the optimum gradation and polarization sign variation of piezoceramic FGMs, while simultaneously optimizing the multi-flexible structural configuration. This formulation is extended to design bimorph type FGM actuators. For all developed formulations, a multi-objective function is defined that controls the stiffness and flexibility, minimizing the coupling movement of each actuated movement. The present examples are limited to two-dimensional models because most part of the applications for such micro-tools are planar devices.

Hypersonic flow is both fascinating and intriguing mainly because of presence of strong entropy and viscous interactions in the flow field. Notwithstanding the tremendous advancements in numerical modeling in the last decade separated hypersonic flow still remains an area where considerable differences are observed between experiments and numerical results. Lack of reliable data base of surface static pressures with good spatial resolution in hypersonic separated flow field is one of the main motivations for the present study. The experiments in hypersonic shock tunnels has an advantage compared to wind tunnels for simulating the total energy content of the flow in addition to the Mach and Reynolds numbers. However the useful test time in shock tunnels is of the order of few milliseconds. Hence in shock tunnel experiments it is essential to have pressure measurement devices which has special features such as small in size, faster response time and the sensors in array form with improved spatial resolutions. Micro Electro Mechanical Systems (MEMS) is an emerging technology, which holds lot of promise in these types of applications. In view of the above requirement, MEMS based pressure sensor array was developed to measure the static pressure distribution. The study is comprised of two parts: one is on the development of MEMS based pressure sensor array, which can be used for hypersonic application and other is on experimental static pressure measurement using MEMS based sensors in separated hypersonic flow over a backward facing step model. Initially a static pressure sensor array with 25 sensors was developed. The static calibration of sensor array was carried out to characterize the sensor array for various characteristic parameters. The preliminary experimental study with cluster of 25 MEMS sensor array mounted on the flat plate did not provide reliable and repeatable results, but gave valuable inputs on the typical problems of using MEMS sensors in short duration hypersonic ground test facilities like shock tunnels. Incidentally, to the best of our knowledge this is first report on use of MEMS based pressure sensors in hypersonic shock tunnel. Later cluster of 5 sensor array was developed with improved electronic packaging and surface finish. The experiments were conducted with flat plate by mounting 5 sensor array shows good agreement in static pressure measurement compared with standard sensors. In the second part of the study a backward facing step model, which simulates the typical gasdynamic flow features associated with hypersonic flow separation is designed. Backward facing step model with step height of 3 mm was mounted with sensor array along the length of model. Just after the step, static pressure measurements were carried out with MEMS sensors. It is important to note that, in the space available in backward facing step model we could mount only one conventional Kulite pressure transducer. The experiments were conducted at Mach number of 6.3 and at stagnation enthalpy of 1.5 MJ/kg in hypersonic shock tunnel (HST-5) at IISc. Based on the static pressure measurement on backward facing step, the location of separation and reattachment points were clearly identified. The static pressure values show that reattachment of flow takes place at about 7 step heights. Numerical simulations were carried out using commercial CFD code, FLUENT for flat plate and backward facing step models to compliment the experiments. The experimental tests results match well with the illustrative numerical simulations results.

Microdispositivos piezelétricos tem uma vasta aplicação em mecânica de precisão, como, por exemplo, manipulação de células, microcirurgias, equipamentos de nanotecnologia e principalmente em microeletromecanismos (MEMS). Os microdispositivos piezelétricos considerados nesta tese essencialmente consistem de uma estrutura multi-flexível atuada por duas ou mais piezocerâmicas, que geram deslocamentos e forças em direções e regiões pré-determinadas do domínio, ou seja, a estrutura multi-flexível atua como um transformador mecânico amplificando e alterando os deslocamentos gerados pelas piezocerâmicas nos movimentos de atuação. O desenvolvimento destes microdispositivos piezelétricos em sua grande maioria não utiliza ferramentas sistemáticas e genéricas. A complexidade dos movimentos de atuação torna o desenvolvimento dos microdispositivos piezelétricos complexo, principalmente devido ao surgimento de movimentos indesejados ou acoplados durante a sua atuação. Portanto, é necessário um método sistemático e eficiente como o método de otimização topológica (MOT), que incorpore na sua formulação as principais exigências de projeto dos microdispositivos, como apresentado nesse trabalho. O MOT implementado é baseado na abordagem CAMD (Distribuição Contínua da Distribuição de Material), onde as pseudo-densidades são interpoladas nos nós de cada elemento finito, resultando numa distribuição contínua de material no domínio. Um método adjunto foi implementado para o cálculo das sensibilidades. São consideradas três formulações. A primeira denominada de MAPs (Multi-Atuadores Piezelétricos) considera as regiões piezocerâmicas fixas, otimizando apenas a estrutura multi-flexível no domínio de projeto. Nesta formulação materiais não-piezelétricos (como, por exemplo, Alumínio) e vazio são distribuídos no domínio de projeto, mantendo as regiões piezocerâmicas fixas e homogêneas. Para validar os resultados obtidos com essa formulação foram fabricados protótipos de nanoposicionadores $XY$, que foram caracterizados experimentalmente utilizando técnicas de interferometria laser, considerando excitação quasi-estática. No entanto, essa primeira formulação impõe restrições no problema, limitando a optimalidade da solução obtida pela otimização topológica. Assim, surgiu a necessidade de desenvolver uma segunda formulação, que permite distribuir simultaneamente material não-piezelétrico, piezelétrico e vazio no domínio de projeto, denominada de LOMPs (Localização Ótima do Material Piezelétrico). A formulação dos LOMPs obtém simultaneamente a localização do material piezelétrico na estrutura flexível otimizada pela OT, e inclui também uma variável de projeto para determinar o ângulo ótimo entre as direções de polarização e do campo elétrico. Nesta formulação como as posições dos eletrodos não são conhecidas, ``a priori\'\', é utilizado como abordagem aplicar um campo elétrico constante para determinar a localização do material piezelétrico e conseqüentemente dos eletrodos. Finalmente, foi explorado o conceito de materiais com gradação funcional (MGFs) no projeto dos MAPs. Os MGFs apresentam uma distribuição contínua de materiais na sua microestrutura, não possuindo interface entre os materiais distribuídos, o que possibilita aumentar a vida útil do dispositivo piezelétrico. Assim, foi implementado uma terceira formulação denominada de MAPs MGFs, que permite obter a gradação ótima de materiais piezelétricos e não-piezelétricos no domínio piezocerâmico dos MAPs, conjuntamente com a topologia da estrutura multi-flexível. Essa formulação foi estendida para projetar atuadores bilaminares MGFs. Todas as formulações desenvolvidas utilizam uma função multi-objetivo, que permite controlar a rigidez e a flexibilidade minimizando o movimento acoplado, de cada movimento de atuação. Os exemplos numéricos são limitados a modelos bi-dimensionais, utilizando o estado plano de tensões e deformações mecânicas e elétricas, uma vez que a grande maioria das aplicações dos microdispositivos piezelétricos são bi-dimensionais. / Microtools offer significant promise in a wide range of applications such as cell manipulation, microsurgery, nanotechnology processes, and many other fields. The microtools considered in this doctoral thesis essentially consist of a multi-flexible structure actuated by two or more piezoceramic devices that when each piezoceramic is actuated, it generates an output displacement and force at a specified point of the domain and direction. The multi-flexible structure acts as a mechanical transformer by amplifying and changing the direction of the piezoceramic output displacements. Thus, the development of microtools requires the design of actuated flexible structures that can perform complex movements. The development of these microtools is still in the beginning and it can be strongly enhanced by using design tools. In addition, when multiple piezoceramic devices are involved, coupling effects in their movements become critical, especially the appearance of undesired movements, which makes the design task very complex. One way to avoid such undesirable effects is the use of a systematic design method, such as topology optimization, with appropriate formulation of the optimization problem. The topology optimization method implemented is based on the CAMD (Continuous Approximation of Material Distribution) approach where fictitious densities are interpolated at each finite element, providing a continuum material distribution in the domain. The corresponding sensitivity analysis is presented using the adjoint method. Three formulations are considered. The first formulation, called Piezoelectric Multi-Actuators (PMAs), keeps fixed piezoceramic positions in the design domain and only the flexible structure is designed by distributing some non-piezoelectric material (Aluminum, for example). $XY$ Piezoelectric Nanopositioner are manufactured and experimentally analyzed to validate the results of the topology optimization obtained using this formulation. Experimental analyses are conducted using laser interferometry to measure displacement, while considering a quasi-static excitation. However, this first formulation imposes a constraint to the position of piezoelectric material in the optimization problem limiting the optimality of the solution. Thus, the second formulation presented, called LOMPs, allows the simultaneous distribution of non-piezoelectric and piezoelectric material in the design domain, to achieve certain specified actuation movements. The optimization problem is posed as the simultaneous search for an optimal topology of a flexible structure as well as the optimal position of piezoceramics in the design domain and optimal rotation angle of piezoceramic material axes that maximize output displacements or output forces at a specified point of the domain and direction. When the distribution of a non-piezoelectric conductor material and a piezoceramic material is considered in the design domain, the electrode positions are not known ``a priori\'\'. To circumvent this problem, an electric field is applied as electrical excitation. Finally, the concept of functionally graded materials (FGM) is applied to PMAs design. FGMs are special materials that possess continuously graded properties without interfaces which can increase lifetime of piezoelectric devices. Thus, a third formulation is implemented to find the optimum gradation and polarization sign variation of piezoceramic FGMs, while simultaneously optimizing the multi-flexible structural configuration. This formulation is extended to design bimorph type FGM actuators. For all developed formulations, a multi-objective function is defined that controls the stiffness and flexibility, minimizing the coupling movement of each actuated movement. The present examples are limited to two-dimensional models because most part of the applications for such micro-tools are planar devices.

The main goal of this work is to introduce new carbon structures - carbon nanotubes. The main objective of this work is to take advantage of the unique characteristic of carbon nanotubes to emit electrons at very low supply voltage.

Les récupérateurs d'énergie vibratoire électrostatiques (REV) sont des systèmes convertissant une partie de l'énergie cinétique de leur environnement en énergie électrique, afin d'alimenter de petits systèmes électroniques. Les REV inertiels sont constituées d'un sous-système mécanique bâti autour d'une masse mobile, ainsi que d'une interface électrique. Ces deux blocs sont couplés par un transducteur électrostatique. Cette thèse étudie l'amélioration des performances des REV par la conception optimisée de leur interface électrique. La première partie de cette thèse étudie une famille d'interfaces électriques appelées pompes de charge (PC). On commence par la construction d'une théorie formelle des PC. Des interfaces rapportées dans la littérature sont identifiées comme membres de cette famille. Cette dernière est ensuite complétée par une nouvelle topologie de PC. Une comparaison des différents PC est alors faite dans le domaine électrique, puis un outil semi-analytique est présenté pour la comparaison des PC en prenant en compte le couplage électromécanique. L'étude des PC se termine par la présentation d'une nouvelle méthode de mesure du potentiel d'électret des REV. La deuxième partie de la thèse présente une approche de conception radicalement différente de ce qui est présenté dans les travaux actuels sur les REV. Elle préconise une synthèse active de la dynamique de la masse des REV à travers leur interface électrique. Nous montrons d'abord que cela permet la conversion d'énergie en quantités proches des limites physiques, et ce à partir de vibrations d'entrée de forme arbitraire. Enfin, une architecture pour un tel REV est proposée et testée en simulation. / Electrostatic vibration energy harvesters (e-VEHs) are systems that convert part of their surroundings' kinetic energy into electrical energy, in order to supply small-scale electronic systems. Inertial E-VEHs are comprised of a mechanical subsystem that revolves around a mobile mass, and of an electrical interface. The mechanical and electrical parts are coupled by an electrostatic transducer. This thesis is focused on improving the performances of e-VEHs by the design of their electrical interface. The first part of this thesis consists in the study of a family of electrical interfaces called charge-pumps conditioning circuits (CPCC). It starts by building a formal theory of CPCCs. State-of-the-art reported conditioning circuits are shown to belong to this family. This family is then completed by a new CPCC topology. An electrical domain comparison of different CPCCs is then reported. Next, a semi-analytical tool allowing for the comparison of CPCC-based e-VEHs accounting for electromechanical effects is reported. The first part of the thesis ends by presenting a novel method for the measurement of e-VEHs' built-in electret potential. The second part of the thesis presents a radically different design approach than what is followed in most of state-of-the-art works on e-VEHs. It advocates for e-VEHs that actively synthesize the dynamics of their mobile mass through their electrical interface. We first show that this enables to convert energy in amounts approaching the physical limits, and from arbitrary types of input vibrations. Then, a complete architecture such an e-VEH is proposed and tested in simulations submitted to human body vibrations.

Denna rapport sammanfattar resultat av ett examensarbete på en högskoleingenjörsutbildningsom utfördes av två studenter på Malmö högskola.Arbetets syfte var att genomföra en mängd olika experiment med accelerometer, barometeroch GPS i en modern smarttelefon. Ett antal scenarier för en tänkbar sensoranvändning i applikationerformulerades för att vägleda olika experiment. Experimentdata dokumenterades noggrantoch analyserades med avsikten att skapa en databank med information för framtida studier.Analys av data inkluderar höjdbestämning i naturen och i byggnader med hjälp av barometersensor,geografisk position med hjälp av GPS, hastighet och acceleration under en hissfärdmed hjälp av accelerometer.Rapporten innehåller en omfattande litteraturstudie om användning av sensorer vid inomhuspositionering.Från analys av mätdata, kom vi fram till slutsatsen att är möjligt att beräkna höjdenfrån barometerdata med bra noggrannhet under optimala omständigheter. GPS höjdenfrån mätningarna har stor felmarginal jämfört med den verkliga höjden samt när den jämförsmed den beräknade höjden från barometern.Genom att utföra en numerisk integration på accelerometer-data kom vi fram till att det är möjligtatt beräkna ungefär hur långt man har färdats med en hiss, dock att vissa detaljer måste tasi beaktning. / This report summarizes the results of a degree Bachelor of engineering in Computer Scienceconducted by two students at Malmo University.Work aim was to conduct a variety of experiments with accelerometer, barometer and GPS in amodern smartphone. A number of scenarios for a possible sensor use in applications formulatedto guided experiments. Data is carefully documented and analyzed, with the intention tocreate a database of information for future studies. Analysis of the data includes the altitudedetermination in nature and in buildings using barometric sensor, geographic location usingGPS, speed and acceleration during an elevator journey with the help of accelerometer.The report contains a comprehensive literature review on the use of sensors for indoorpositioning.From our analysis of the measurement data, we conclude that it is possible to calculate thealtitude from barometric- information but good accuracy if there are optimum circumstances.GPS altitude from our measurements show faulty height by a large margin compared with theactual height and when it is compared with the calculated height of the barometer the barometricheight is closer to the actual height.By performing a numerical integration of the accelerometer data, the results show that it ispossible to calculate approximately how far you have traveled in meters in an elevator, howeverthere are some things that must be taken into consideration.

Cette thèse traite le problème d'intégration hardware optimale de contrôleurs linéaires à taille de mot finie, dédiés aux applications MEMS. Le plus grand défi est d'assurer des performances de contrôle satisfaisantes avec un minimum de ressources logiques. Afin d'y parvenir, deux optimisations distinctes mais complémentaires peuvent être entreprises: en théorie de contrôle et en arithmétique binaire. Seule cette dernière est considérée dans ce travail.Comme cette arithmétique cible des applications MEMS, elle doit faire preuve de vitesse afin de prendre en charge la dynamique rapide des MEMS, à faible consommation de puissance pour un contrôle intégré, hautement re-configurabe pour un ajustement facile des performances de contrôle, et facilement prédictible pour fournir une idée précise sur les ressources logiques nécessaires avant l'implémentation même.L'exploration d'un certain nombre d'arithmétiques binaires a montré que l'arithmétique radix-2r est celle qui répond au mieux aux exigences précitées. Elle a été pleinement exploitée afin de concevoir des circuits de multiplication efficaces, qui sont au fait, le véritable moteur des systèmes linéaires.L'arithmétique radix-2r a été appliquée à l'intégration hardware de deux structures linéaires à taille de mot finie: un contrôleur PID variant dans le temps et à un contrôleur LQG invariant dans le temps,avec un filtre de Kalman. Le contrôleur PID a montré une nette supériorité sur ses homologues existants. Quant au contrôleur LQG, une réduction très importante des ressources logiques a été obtenue par rapport à sa forme initiale non optimisée / This thesis addresses the problem of optimal hardware-realization of finite-word-length(FWL) linear controllers dedicated to MEMS applications. The biggest challenge is to ensuresatisfactory control performances with a minimal hardware. To come up, two distinct butcomplementary optimizations can be undertaken: in control theory and in binary arithmetic. Only thelatter is involved in this work.Because MEMS applications are targeted, the binary arithmetic must be fast enough to cope withthe rapid dynamic of MEMS; power-efficient for an embedded control; highly scalable for an easyadjustment of the control performances; and easily predictable to provide a precise idea on therequired logic resources before the implementation.The exploration of a number of binary arithmetics showed that radix-2r is the best candidate that fitsthe aforementioned requirements. It has been fully exploited to designing efficient multiplier cores,which are the real engine of the linear systems.The radix-2r arithmetic was applied to the hardware integration of two FWL structures: a linear timevariant PID controller and a linear time invariant LQG controller with a Kalman filter. Both controllersshowed a clear superiority over their existing counterparts, or in comparison to their initial forms.