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Estudo da influ?ncia da temperatura de brasagem nas uni?es zirc?nia/a?o inox 304 utilizando metaliza??o mec?nica / Study on the influence of brazing temperature in the joint zirconia/steel using mechanical metallizationCarneiro, Jaciane Mora?sa 30 July 2014 (has links)
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JacianeMC_DISSERT.pdf: 3460773 bytes, checksum: d19c1cd7ea69109eb74a87fddcc67376 (MD5)
Previous issue date: 2014-07-30 / Coordena??o de Aperfei?oamento de Pessoal de N?vel Superior / Metal-Ceramic (M/C) Zirconia-stainless steel interfaces have been processed through brazing techniques due to the excellent combination of properties such as high temperature stability, high corrosion resistance and good mechanical properties. However, some M/C interfaces show some defects, like porosity and cracks results in the degradation of the interfaces, leading even to its total rupture. Most of time, those defects are associated with an improper brazing parameters selection to the M/C system. In this work, ZrO2 Y-TZP and ZrO2 Mg - PSZ were joint with the stainless steel grade 304 by brazing using a eutectic silver-copper (Ag28Cu) interlayer alloy with different thermal cycles. Ceramic surfaces were previous mechanically metallized with titanium to improve adhesion of the system. The effect of temperature on the M/C interface was studied. SEM-EDS and 3 point flexural bend test were performed to evaluate morphology, chemical composition and mechanical resistance of the M/C interfaces. Lower thermal cycle temperatures produced better results of mechanical resistance, and more regular/ homogeneous reaction layers between braze alloy and metal-ceramic surfaces. Also was proved the AgCu braze alloy activation in situ by titanium / Interfaces metal/cer?mica zirc?nia/a?o inox processadas via brasagem v?m sendo utilizadas devido a sua combina??o de propriedades tais como: estabilidade em altas temperaturas, elevada resist?ncia ? corros?o e boas propriedades mec?nicas. Contudo, alguns pares apresentam problemas a n?vel da interface, como trincas, fissuras e porosidades, contribuindo assim para a deteriora??o do par metal/cer?mica, podendo at? conduzir ? ruptura total da interface. Esses defeitos na interface podem estar associados a uma sele??o menos criteriosa dos par?metros de brasagem para cada sistema. No presente trabalho utilizou-se a uni?o entre zirc?nia (Y-TZP e Mg PSZ) com a?o inox 304. Essas jun??es foram metalizadas mecanicamente com Ti e brasadas em diferentes ciclos t?rmicos utilizando liga de adi??o Ag-Cu. Microscopia Eletr?nica de Varredura (MEV) com microan?lise por espectroscopia de Energia Dispersiva (EDS) e teste de flex?o em 3 pontos foram empregadas para investigar as propriedades da uni?o zirc?nia/a?o. Os resultados revelaram que para menores temperaturas de brasagem houve uma melhor resist?ncia a flex?o e camadas de rea??o mais homog?neas entre a liga de adi??o e os pares metal/cer?mica. Ficou tamb?m comprovado a ativa??o in situ da liga de adi??o AgCu
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Diamonds : synthesis and contacting for detector applications / Diamants : synthèse et fabrication de contacts électriques pour des applications de détection / Diamanti : sintesi e fabbricazione di contatti per applicazioni di rivelazioneDe Feudis, Mary 30 March 2018 (has links)
Ce travail de doctorat a été réalisé dans le cadre d'un accord de cotutelle international entre l'Université de Salento (L3, Italie) et l'Université de Paris 13 (LSPM, France). L'objectif principal était la fabrication de contacts ohmiques sur des surfaces de diamant pour des applications telles que les détecteurs et les dispositifs de l’électronique. Les travaux au L3 ont été consacrés à l'étude du processus de graphitisation du diamant induit par laser afin de produire des électrodes de graphite sur des diamants intrinsèques. L'étude se concentre en particulier sur le développement d’un appareil expérimental pour l’écriture laser sur diamant tant sur les aspects matériel que logiciel, et un protocole a ainsi été développé pour la fabrication de contacts graphitiques segmentés sur de larges surfaces de diamant (cm²). Des travaux approfondis de caractérisation ont démontré la transition de phase diamant-graphite et le comportement ohmique pour les contacts électriques avec une résistivité de l'ordre de 10⁻⁵ Ω.m. Des détecteurs tout-carbone ont ainsi été développés et testés avec des faisceaux électroniques et positroniques de 450 MeV. Ils permettent d’ouvrir des perspectives en tant que cible active pour de nouvelles expériences de physique des hautes énergies (PADME) dans le cadre de l’étude de la matière noire. Le travail au LSPM a été consacré au développement d'un protocole permettant d'obtenir des contacts ohmiques sur des films diamant faiblement dopé au bore et terminé oxygène, élaborés par MPACVD. Les procédés de fabrication de contacts métalliques Ti/Au sur une structure mesa ainsi que l’implantation par des ions He, ont été développés afin d'induire une couche de graphite juste en dessous de la surface de diamant. Les mesures électriques sur des diamants légèrement dopés ([B] = 4 × 10¹⁷ cm⁻³) avec seulement des contacts métalliques ou graphitiques / métalliques ont montré que la présence de la couche graphitique rend les contacts ohmiques et conduisent à une résistance spécifique de contact égale à 3.3 × 10⁻⁴ Ω.cm². / This PhD work has been carried out in international cotutelle agreement between the University of Salento (L3, Italy) and the University of Paris 13 (LSPM, France). The main aim was the manufacturing of ohmic contacts on diamond surface for detector and electronic device applications. The work at L3 was dedicated to the laser-induced diamond graphitization process in order to produce graphitic electrodes on intrinsic diamonds. An experimental set-up dedicated to the laser writing technique on diamond has been developed in both hardware and software aspects and a protocol for the manufacturing of segmented graphitic contacts on diamond surface of large scale (cm²) has been implemented. An extensive characterization work has demonstrated the diamond-graphite phase transition and an ohmic electrical behaviour for the contacts with a resistivity of the order of ≈ 10⁻⁵ Ω.m. Eventually, an all-carbon detector has been developed and tested with 450 MeV electron and positron beams proving to be a good candidate in the role of active target for a new high-energy experiment (PADME) in the framework of the dark matter. The work at LSPM has been dedicated to the development of a protocol allowing reaching ohmic contacts on lightly boron doped diamond with oxygenated surface grown by MPACVD. The fabrication of Ti/Au metallic contact above a mesa structure has relied on a He ion implantation treatment to induce a graphitic layer underneath the diamond surface. The electrical measurements on lightly doped diamonds ([B] = 4 × 10¹⁷ cm⁻³) with metal or graphite / metal contacts have shown that the graphitic layer makes ohmic the contacts leading to a specific contact resistance as low as 3.3 × 10⁻⁴ Ω.cm². / Questo dottorato di ricerca è stato svolto in convenzione di cotutela internazionale tra l’Università del Salento (L3, Italia) e l’Università di Parigi 13 (LSPM, Francia). Il principale obiettivo è stato la fabbricazione di contatti ohmici su superficie di diamante per applicazioni come rivelatori e dispositivi elettronici. Il lavoro a L3 è stato dedicato allo studio del processo di grafitizzazione del diamante indotto da laser al fine di produrre elettrodi grafitici su diamanti intrinseci. In particolare, è stato sviluppato un apparato sperimentale dedicato alla tecnica di scrittura laser su diamante sia nelle componenti hardware che software, ed è stato realizzato un protocollo per la fabbricazione di contatti grafitici segmentati su superfici di diamante di grande scala (cm²). Un ampio lavoro di caratterizzazione ha dimostrato la transizione di fase diamante-grafite e il comportamento ohmico per i contatti elettrici con una resistività dell’ordine di 10⁻⁵ Ω.m. Pertanto, un rivelatore costituito solo di carbonio è stato sviluppato e testato con fasci elettronici e positronici di 450 MeV risultando essere un buon candidato nel ruolo di bersaglio attivo per un nuovo esperimento di fisica delle alte energie (PADME) nel contesto della materia oscura. Il lavoro a LSPM è stato dedicato allo sviluppo di un protocollo che ha consentito di ottenere contatti ohmici su diamanti leggermente drogati con boro e con superficie terminata con ossigeno, cresciuti mediante MPACVD. I processi di fabbricazione di contatti metallici Ti/Au sopra una struttura mesa sono stati sviluppato così come un trattamento di impiantazione a base di ioni di He al fine di indurre uno strato grafitico appena sotto la superficie del diamante. Le misure elettriche su diamanti leggermente drogati ([B] = 4 × 10¹⁷ cm⁻³) con contatti o solo metallici o grafitici / metallici hanno dimostrato che la presenza dello strato grafitico rende i contatti ohmici e comporta una resistenza specifica di contatto pari a 3.3 × 10⁻⁴ Ω.cm².
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Analyse de matériaux pour la modélisation des mécanismes de défaillance dans les modules électroniques de puissance / Analysis of materials for the modelling of the mechanisms of failure in power electronic devicesPietranico, Sylvain 10 December 2010 (has links)
Cette thèse porte sur l'étude de la durée de vie de composants et modules de puissance dans des environnements thermiques sévères, lorsque les modules de puissance sont amenés à travailler à haute température ou sous des cycles de température de forte amplitude. Les domaines visés par cette étude concernent plus particulièrement des applications extrêmement contraignantes telles que les applications aéronautiques. Un module de puissance est un assemblage de plusieurs matériaux (semi-conducteurs, brasures, céramiques, conducteurs) présentant des propriétés mécaniques, notamment de coefficient de dilatation thermiques (CTE) différentes. Les pertes dans les puces actives et les variations de température ambiante (profils de mission) sont responsables de contraintes mécaniques liées aux différences de CTE entre les différents matériaux. Les modes de défaillance étant principalement d'origine mécanique, ces travaux ont été effectués entre le SATIE et le LMT (Institut Farman). L'étude mécanique a complété des travaux expérimentaux de caractérisation et de vieillissement accéléré de modules de puissance à semi-conducteur. Ces études ont nécessité la mise en place d'essais de vieillissement spécifiques, passifs (utilisation d'une étuve permettant de contraindre les assemblages de puissance sous des cycles thermiques de grande amplitude) et actifs (utilisation de régimes extrêmes de fonctionnement tels que le court-circuit pour accélérer le vieillissement de certaines parties de l'assemblage).La première partie de ce manuscrit présente les principes physiques mis en jeu. Nous présenterons succinctement les concepts de mécanique de la rupture ainsi que les couplages physiques.La deuxième partie porte sur la rupture de la céramique des substrats DCB. Cette rupture peut provenir de défauts répartis aléatoirement dans le matériau. Nous aborderons le problème par une approche statistique où nous introduirons la "Théorie du maillon faible". L'autre cause de rupture est la présence de défauts géométriques que l'on appelle singularité où il existe une concentration des contraintes nécessitant une approche déterministe. A cette occasion nous introduirons le facteur d'intensité des contraintes qui permet d'étudier les problèmes de rupture liés à des zones singulières.La dernière partie portera sur la dégradation de la métallisation du transistor. La recherche d'indicateurs de vieillissement a demandé la mise au point de différents bancs de caractérisation électrique pour la mesure fine de différentes grandeurs électriques (courants de fuite, tensions de seuil, chute de tension à l'état passant...) dans un environnement thermique contrôlé. De plus ces caractérisations électriques sont corrélées à des observations de la métallisation effectuées par un microscope électronique à balayage de manière régulière. Nous chercherons à montrer comment la modification de la morphologie de la métallisation peut modifier les caractéristiques électriques des transistors de puissance testés. / This PhD focuses on the study of the lifetime of components and power semiconductor modules under thermal constraints, when power devices are used at high temperature or under high temperature cycles. The areas covered by this study relate more particularly to extremely harsh applications such as aerospace constraints. A power device is an assembly of different materials (semiconductors, solders, ceramics, conductors) with mechanical properties, including coefficient of thermal expansion (CTE). Losses in the die and ambient temperature variations (mission pro les) are responsible for strain constraints at material interfaces due to CTE mismatch between the different materials. Failure modes result for mechanical constraints so study was done in collaboration between LMT and SATIE laboratories (Farman Institute). The mechanical study completed experimental characterizations and accelerated aging of power semiconductor modules. These studies involved the development of specific aging tests allowing thermal cycles (thermal air streamer to force the power assemblies under thermal cycles of high amplitude) and active power cycles (use of hard working conditions such as short circuit for accelerating the aging of parts of the assembly).The first part of this manuscript presents the physical principles set in. We briefly introduce the concepts of fracture mechanics and the physical couplings.The second part focuses on the fractured DCB ceramic substrates. This failure can arise from defects randomly distributed in the material. We consider the problem using a statistical approach where we introduce the "weak link theory". The other cause of failure is the presence of geometrical defects called singularity where there is stress concentration requiring a deterministic approach. On this occasion we introduce the stress intensity factor which allows to study the failure problems associated with singular zone.The last part will focus on the aging of the transistor metallization. The search for indicators of aging has requested the development of several electrical characterization test benches for the precise measurement of different electrical parameters (leakage currents, threshold voltages, voltage drop in the on state ...) in a controlled thermal environment. Moreover, these electrical characterizations are correlated with observations at different aging states of the metallization degradation using a scanning electron microscope. We seek to show how the change in the morphology of the metallization can change the electrical characteristics of tested power transistors.
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Numerical study for acoustic micro-imaging of three dimensional microelectronic packagesChean Shen, Lee January 2014 (has links)
Complex structures and multiple interfaces of modern microelectronic packages complicate the interpretation of acoustic data. This study has four novel contributions. 1) Contributions to the finite element method. 2) Novel approaches to reduce computational cost. 3) New post processing technologies to interpret the simulation data. 4) Formation of theoretical guidance for acoustic image interpretation. The impact of simulation resolution on the numerical dispersion error and the exploration of quadrilateral infinite boundaries make up the first part of this thesis's contributions. The former focuses on establishing the convergence score of varying resolution densities in the time and spatial domain against a very high fidelity numerical solution. The latter evaluates the configuration of quadrilateral infinite boundaries in comparison against traditional circular infinite boundaries and quadrilateral Perfectly Matched Layers. The second part of this study features the modelling of a flip chip with a 140µm solder bump assembly, which is implemented with a 230MHz virtual raster scanning transducer with a spot size of 17µm. The Virtual Transducer was designed to reduce the total numerical elements from hundreds of millions to hundreds of thousands. Thirdly, two techniques are invented to analyze and evaluate simulated acoustic data: 1) The C-Line plot is a 2D max plot of specific gate interfaces that allows quantitative characterization of acoustic phenomena. 2) The Acoustic Propagation Map, contour maps an overall summary of intra sample wave propagation across the time domain in one image. Lastly, combining all the developments. The physical mechanics of edge effects was studied and verified against experimental data. A direct relationship between transducer spot size and edge effect severity was established. At regions with edge effect, the acoustic pulse interfacing with the solder bump edge is scattered mainly along the horizontal axis. The edge effect did not manifest in solder bump models without Under Bump Metallization (UBM). Measurements found acoustic penetration improvements of up to 44% with the removal of (UBM). Other acoustic mechanisms were also discovered and explored. Defect detection mechanism was investigated by modelling crack propagation in the solder bump assembly. Gradual progression of the crack was found have a predictable influence on the edge effect profile. By exploiting this feature, the progress of crack propagation from experimental data can be interpreted by evaluating the C-Scan image.
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Metaliza??o mec?nica de ZrO2 com Ti para brasagem ZrO2/A?o com ligas de adi??o sem metal ativoSilva, Jo?o Moreno Vilas Boas de Souza 21 December 2011 (has links)
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JoaoMVBSS_TESE.pdf: 1637052 bytes, checksum: 5b9631c974cd41d9288d624c302d0cfb (MD5)
Previous issue date: 2011-12-21 / Metal/ceramic interfaces using zirconia have dominated the industrial
applications in the last decade, due to the high mechanical strength and fracture
toughness of zirconia, especially at temperatures below 300 ?C. Also noteworthy is the
good ionic conductivity in high temperatures of this component. In this work joining
between ZrO2 Y-TZP and ZrO2 Mg-PSZ with austenitic stainless steel was studied.
These joints were brazed at high-vacuum after mechanical metallization with Ti using
filler alloys composed by Ag-Cu and Ag-Cu-Ni. The influence of the metallization, and
the affinity between the different groups (ceramic / filler alloys) was evaluated, in order
to achieve strong metal/ceramic joints. Evaluation of joints and interfaces, also the
characterization of base materials was implemented using various techniques, such as:
x-ray diffraction, leak test, three-point flexural test and scanning electron microscopy
with chemical analysis. The microstructural analysis revealed physical and chemical
bonds in the metal/ceramic interfaces, providing superior leak proof joints and stress
cracking, in order to a good joint in all brazed samples. Precipitation zones and reaction
layers with eutetic characteristics were observed between the steel and the filler metal / As interfaces metal/cer?micas utilizando zirc?nia t?m dominado as
aplica??es industriais na ?ltima d?cada, em virtude da alta resist?ncia
mec?nica e tenacidade ? fratura da zirc?nia, especialmente em temperaturas
abaixo de 300 ?C. Destaca-se tamb?m a boa condutividade i?nica em
temperaturas elevadas deste componente. No presente trabalho, estudou-se as uni?es
entre ZrO2 Y-TZP e ZrO2 Mg-PSZ com o a?o inox austen?tico 304. Estas jun??es foram
produzidas por brasagem a alto-v?cuo ap?s a metaliza??o mec?nica com Ti utilizandose
ligas de adi??o compostas por Ag-Cu e Ag-Cu-Ni. Avaliou-se a influ?ncia da
metaliza??o, bem como a afinidade entre os diversos grupos (cer?mica / liga de adi??o)
com o intuito de se conseguir a melhor uni?o metal/cer?mica. A avalia??o das uni?es e
interfaces, bem como a caracteriza??o dos materiais de base foi feita com recurso de
diversas t?cnicas, tais como: difra??o de raios-x, ensaios de estanqueidade, flex?o em 3-
pontos e microscopia eletr?nica de varredura com microan?lise por espectroscopia de
energia dispersiva de raios-x. A an?lise microestrutural revelou liga??es f?sicas e
qu?micas na interface metal/cer?mica, proporcionando boa estanqueidade e tens?o de
ruptura e, consequentemente, uma boa uni?o em todas as amostras brasadas. Foram
observadas zonas de precipita??o e camadas de rea??o com caracter?sticas eut?ticas
entre o a?o e o metal de adi??o
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[en] EXPERIMENTAL SIMULATION AND COMPUTATIONAL MODELLING OF PELLETS REDUCTION AND DRI CARBURIZATION IN DR SHAFT FURNACES / [pt] SIMULAÇÃO EXPERIMENTAL E MODELAMENTO COMPUTACIONAL DA REDUÇÃO DE PELOTAS E CARBURIZAÇÃO DE DRI EM REATORES DE CUBAEDELINK EFRAIN TINOCO FALERO 06 September 2017 (has links)
[pt] A produção e o uso de DRI (Direct Reduction Iron) são cada vez maiores hoje em dia nos países desenvolvidos, essencialmente pela redução do preço do gás natural e do sucesso da tecnologia de extração de gás de xisto. Além disso, o menor teor de elementos contaminantes em DRI do que nas sucatas de aço, levou-o a ser considerado uma boa alternativa como carga metálica para o Forno Elétrico a Arco (FEA) e o processo no conversor LD /BOF. Os custos operacionais e os problemas ambientais, são atualmente dois fatores tecnológicos importantes a serem considerados na otimização da produção de DRI, afetando à produtividade, sustentabilidade e competitividade do processo industrial. O teor de carbono do DRI, por exemplo, tem se tornado cada vez mais importante, devido à sua capacidade de gerar energia química nas aciarias, complementando o uso de energia elétrica nos FEA e os inputs energéticos no LD. Este trabalho foi uma das partes do programa de cooperação entre a Companhia de Mineração Samarco e o Grupo de Siderurgia da Pontifícia Universidade Católica do Rio de Janeiro / PUC-Rio, que tratou especificamente do modelo cinético para a metalização e carburização simultâneas em fornos RD tipo cuba. No âmbito deste objetivo o reator foi dividido em três zonas: Redução, Transição e Resfriamento. Foram também consideradas mais três camadas concêntricas: periférica, media e central. Com base nos resultados obtidos em experiências que abrangeram diferentes tipos de pelotas, empregando misturas gasosas semelhantes às presentes nos processos industriais e obedecendo às suas correspondentes semelhanças fluidodinâmicas, foi desenvolvido um software, denominado METCARB, que incluiu na sua elaboração todas as equações e modelos cinéticos desenvolvidos experimentalmente nas três zonas do reator RD. A parte experimental foi, portanto, uma das partes principais do presente trabalho, conjuntamente com a concepção do modelo computacional e suas validações industriais. Com o METCARB, as previsões acerca da metalização e carburização simultâneas, em qualquer região interna do forno, se tornou possível, utilizando como entradas as dimensões do forno, medidas de temperaturas, composições dos gases, etc. Os resultados de metalização e carburização, também em formato gráfico, são gerados pelo sistema computacional, bem como as curvas cronométricas e tabelas de resultados. Estudos sobre dois casos reais foram realizados, a fim de validarem a ferramenta computacional desenvolvida. Constatou-se que a carburização do ferro metálico sempre ocorre simultaneamente com a redução dos óxidos de ferro e que, dependendo da temperatura e composição dos gases, pode ocorrer precipitação de finos de carbono. As simulações realizadas com o modelo METCARB mostraram que na periferia da ZR é gerado um DRI mais metalizado que na região do centro. Fenômeno contrário foi, entretanto, verificado com a carburização; Nas condições experimentais empregadas neste trabalho, os valores médios obtidos para a carburização e a metalização, no final da ZR, variam entre 0,4 - 0,7 por cento C, e 92 por cento - 97 por cento, respectivamente; Constatou-se não ocorrer progresso do grau de redução nas zonas de Transição (ZT) e de Arrefecimento (ZA), ou seja, mantiveram-se ao longo dessas zonas os valores de metalização obtidos no fundo da ZR; A influência do vapor de água no processo da carburização no caso estudado (0 - 4.25 por cento H2O) leva menor porcentagem de carburização (2,7 por cento C – 2,35). / [en] The production and the use of DRI (Direct Reduction Iron) are increasing today in developed countries, mainly by reducing the price of natural gas and the success of shale gas extraction technology. In addition, the lower level of contaminants in DRI than in metal scraps, led it to be considered a good alternative as metallic charge for the Electric Arc Furnace (EAF) and the process in LD / BOF converter. This work was one part of the cooperation program between Samarco Mining Company and Steel Group of the Pontifical Catholic University of Rio de Janeiro / PUC-Rio, which specifically dealt with the kinetic model for the metallization and carburization simultaneous in RD shaft furnaces. Under this purpose the reactor was divided into three zones: Reduction, Transition and Cooling. There were also three concentric regions considered: peripheral, media and center. Based on the results from experiments covering different types of pellets, using gas mixtures similar to those present in the industrial processes and obeying their corresponding fluid dynamic similarities, it developed a software called METCARB, which included in its preparation all kinetic equations and models developed experimentally in the three reactor zones of RD.
The experimental part was therefore a major part of this work, together with the design of computational model and its industrial validations. With METCARB predictions about the simultaneous metallization and carburization in any internal region of the furnaces, it became possible, using as inputs the dimensions of the furnace, temperature measurements, compositions of gases, etc. The results of metallization and carburization also in graphic format are generated by the computer system, and the chronometric curves and results tables. Studies on two real cases were performed in order to validate the developed computational tool. It was found that the carburization always occurs simultaneously with the reduction of iron oxides and, depending on the temperature and composition of the gases; precipitation of fine carbon may occur. The simulations with METCARB model showed that the periphery of the ZR generated more DRI metallized than the center area. A contrary phenomenon has been verified with the carburization; With the experimental conditions used in this study, averages values obtained for the metallization and carburization in the final ZR vary between 0.4 - 0.7 percent C and 92 percent - 97 percent, respectively; It was not found that the progress of reduction degree occurred in the transition (ZT) and cooling (ZA) regions, in other words, it remained along these zones of the metallization values obtained at the bottom of ZR; The influence of water vapor in the carburization process in the case studies (0 - 4.25 percent H 2 O) takes a smaller percentage of carburization (2.7 percent C - 2.35).
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Interfacial Studies of Bimetallic Corrosion in Copper/Ruthenium Systems and Silicon Surface Modification with Organic and Organometallic ChemistryNalla, Praveen Reddy 08 1900 (has links)
To form Cu interconnects, dual-damascene techniques like chemical mechanical planarization (CMP) and post-CMP became inevitable for removing the "overburden" Cu and for planarizing the wafer surface. During the CMP processing, Cu interconnects and barrier metal layers experience different electrochemical interactions depending on the slurry composition, pH, and ohmic contact with adjacent metal layers that would set corrosion process. Ruthenium as a replacement of existing diffusion barrier layer will require extensive investigation to eliminate or control the corrosion process during CMP and post CMP. Bimetallic corrosion process was investigated in the ammonium citrate (a complexing agent of Cu in CMP solutions) using micro test patterns and potentiodynamic measurements. The enhanced bimetallic corrosion of copper observed is due to noble behavior of the ruthenium metal. Cu formed Cu(II)-amine and Cu(II)-citrate complexes in alkaline and acidic solutions and a corrosion mechanism has been proposed. The currently used metallization process (PVD, CVD and ALD) require ultra-high vacuum and are expensive. A novel method of Si surface metallization process is discussed that can be achieved at room temperature and does not require ultra-high vacuum. Ruthenation of Si surface through strong Si-Ru covalent bond formation is demonstrated using different ruthenium carbonyl compounds. RBS analysis accounted for monolayer to sub-monolayer coverage of Si surface. Interaction of other metal carbonyl (like Fe, Re, and Rh) is also discussed. The silicon (111) surface modifications with vinyl terminated organic compounds were investigated to form self-assembled monolayers (SAMs) and there after these surfaces were further functionalized. Acrylonitrile and vinylbenzophenone were employed for these studies. Ketone group of vinylbenzophenone anchored to Si surface demonstrated reactivity with reducing and oxidizing agents.
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Erzeugung und Charakterisierung von Nanostrukturen auf DNARichter, Jan 16 May 2001 (has links)
Die Dissertation verfolgt die Fragestellung biologische Materialien in herkömmlichen elektronischen Strukturen einzusetzen. Im Verlauf der Darstellung werden deshalb die elektrischen Eigenschaften von DNA mit Hinblick auf diesen Einsatz untersucht. Dabei wird zunächst gezeigt, dass sich native DNA durch seine geringe elektrische Leitfähigkeit wahrscheinlich nicht für einen Einsatz in elektronischen Stromkreisen eignet. Deswegen wird ein alternativer Ansatz entwickelt, bei dem DNA zur Assemblierung von dünnen Metalldrähten verwendet wird. Es wird ein Verfahren entwickelt, mit dem Palladium- und Platincluster mit einer Größe von 3 nm auf der DNA erzeugt werden können. Durch die weitere Anlagerung von Metall gelang die kontinuierliche Bedeckung der DNA mit Metall. Im Ergebnis entstehen metallische Clusterketten und Nanodrähte mit einem Durchmesser von 20 bis 100 nm und mehreren Mikrometern Länge. Diese metallischen Strukturen wurden erfolgreich zwischen zwei Goldkontakte integriert. Bei den Messungen konnte eine gute elektrische Leitfähigkeit mit linearer Strom-Spannungsabhängigkeit beobachtet werden. Damit sind diese Strukturen als Verbindungselemente in Schaltkreisen geeignet und somit kann DNA in einem Schaltkreis als strukturgebendes Element für die Assemblierung von Metalldrähten Verwendung finden. Die Anwendungsmöglichkeiten der in dieser Arbeit entwickelten DNA-Metallisierung erstrecken sich jedoch nicht nur auf den technologischen Bereich. Insbesondere konnten in den erzeugten Nanostrukturen Quanteneffekte der schwachen Lokalisierung und Elektron-Elektron-Wechselwirkung nachgewiesen werden. Diese Phänomene führen bei tiefen Temperaturen zu einem Widerstandsanstieg mit sinkender Temperatur. Grund für dieses Verhalten sind die geringen Abmessungen der Probe und eine stark gestörte innere Struktur der Nanodrähte. Damit erscheint die Assemblierung von nanoskaligen Strukturen auf einem biologischen Template als realistisches Konzept zur Untersuchung von Quantenphänomenen kleinster Strukturen.
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Design and fabrication of planar inductor using a fully-additive sequential build up methodKarlquist, Linus January 2021 (has links)
The miniaturization of electronics packaging is an ongoing trend. The manufacturers are increasing the packaging density to accommodate for more complex designs and increase in operating frequencies. The surface mount devices (SMDs) and today's manufacturing processes are starting to become a limiting factor to this miniaturization. The solution to these problems are embedded passives and new fully-additive manufacturing processes. In this work, a planar inductor is fabricated using a fully-additive process called Sequential Build-Up - Covalent Bonded Metallization (SBU-CBM). A new grafting material for the CBM process is tested, but found to be worse than the previously used one when tested on FR4 substrates. The best design of a planar inductor for high inductance and high Q factor is found to be the circular spiral inductor. A planar circular spiral inductor with a feature size of 75 µm is successfully fabricated using the SBU-CBM process.
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Solární články z monokrystalického křemíku typu n s vysokou účinností / High Efficiency n-type Monocrystalline Silicon Solar CellsMojrová, Barbora January 2019 (has links)
Tato dizertační práce je zaměřena vývoj a ověřování nových postupů přispívajících ke zvýšení účinnosti bifaciálních solárních článků založených na monokrystalickém křemíku n-typové vodivosti. Tato práce přináší nové poznatky o vylepšených výrobních procesech a postupech použitých během výroby článků v ISC Konstanz. V rámci práce byly vyrobeny solární články typu n-PERT (Passivated Emitter Rear Totally diffused) s vysokou účinností, a to pomocí standartních procesů a zařízení používaných běžně při průmyslové výrobě. Zapojení těchto průmyslových postupů a metod umožnilo ověřit možnosti výroby n-typových článků za použití téměř totožného vybavení, jaké je potřeba pro výrobu p-typových článků. Zvýšení účinnosti bylo založeno především na vylepšení jednotlivých procesních kroků. Experimenty popsané v této práci dosvědčují zlepšení procesu difúze bóru, přizpůsobení parametrů pasivační a antireflexní vrstvy nově navrženému emitoru, zlepšení procesu metalizace ve smyslu využití past neobsahujících hliník, testování tisku rozličných motivů spolu s různými sekvencemi výpalu. V rámci práce byla testována možnost zamezení jevu potenciální indukované degradace (Potential Induced Degradation – PID) pomocí vhodného složení ARC a pasivační vrstvy. Vyrobené n-typové solární články dosáhly maximální hodnoty účinnosti 20,9 %.
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