Dans les technologies d'aujourd'hui, l’épitaxie est une technique indispensable pour la fabrication des composants. Avec la diminution continue de la taille des transistors les objets epitaxiés rétrécissent aussi. Par conséquence, des effets morphologiques qui sont négligeables à grande échelle, doivent être considéré dans les petits motifs, et de plus des anisotropies doivent être prises en compte. C'est pour cela que cette thèse est consacrée à l'étude de la morphologie en fonction de la taille et de l'orientation des motifs. La caractérisation de la morphologie du SiGe comme déposé sur des motifs orientés selon <100> et <110> nous conduit à introduire de nouveaux effets de charge, pas encore reportés dans la littérature. Après avoir étudié en profondeur la morphologie après croissance, les épitaxies sont soumises à des températures légèrement supérieures à celle de dépôt, et les changements sont discutés en fonction de l'orientation et de la largeur des lignes. Des recuits sous H2 à des températures plus élevées sont réalisés sur des motifs différents ce qui permet l'observation des effets morphologiques en bord et en coin de motif. Ces effets dominent la morphologie globale des couches epitaxiées quand la taille des motifs diminue. En particulier, la stabilité des lignes de Si et SiGe lors des recuits est étudiée, ce qui permet de déterminer les facteurs importants pour la stabilité des lignes. Dans des expériences supplémentaires un procédé est développé pour augmenter la stabilité thermique des couches SiGe. En outre, l'épitaxie cyclique - nécessaire pour réaliser les sources/drains des CMOS avancés - est discutée. L'influence des changements dans l'étape de gravure d'un procédé cyclique de Si, en gardant l'étape de dépôt inchangée, est étudiée pour des motifs orientés selon <100>. Nous avons trouvé des conditions dans lesquelles la couche n'est plus continue. Des expériences pour étudier la gravure séparément permettent d'expliquer les phénomènes observés. / In current technology nodes, epitaxy is an indispensable technique in device fabrication. With the continuous decrease of the transistor size, the epitaxial objects shrink as well. As a consequence, morphology effects which can be neglected at the large scale, have to be considered in small patterns and in addition, anisotropies have to be taken into account. Therefore, this thesis is dedicated to morphology studies as a function of pattern size and orientation. The characterization of the SiGe morphology in the as-deposited state on <100> and <110> oriented patterns leads to the introduction of new loading effects, which have not been reported elsewhere so far. After having studied thoroughly the as-deposited morphology, the epitaxial layers are exposed to a temperature slightly higher than the deposition temperature and the changes are discussed as a function of line width and orientation. H2 annealing at higher temperatures are performed with various Si and SiGe patterns leading to the observation of morphology effects at the pattern edges and corners. These effects dominate the global layer appearance with decreasing pattern size. In particular, the stability of annealed Si and SiGe lines is studied which allows to determine the crucial factors for line stability. In additional experiments, a process is developed which can increase the thermal stability of epitaxial SiGe. Moreover, cyclic epitaxy - required for sources/drains of advanced CMOS devices - is discussed. The influence of changes in the etch step of a cyclic Si process, by keeping the deposition step unchanged, is studied for <100> oriented patterns. Conditions are found, where cyclic epitaxy results in a discontinuous layer. Experiments, which consider the etching separately can explain the observed phenomena.

This thesis examines the problem of the automated re-assembly of jigsaw puzzles. The objectives of this research are as follows: to provide a clear statement of the jigsaw puzzle re-assembly problem; to find out which solution technique is best suited to this problem; to determine the level of sensitivity of the proposed solution technique when solving different variations of this problem; and to explore solution methods for solving incomplete jigsaw puzzles (puzzles with missing pieces). The jigsaw puzzle re-assembly problem has been investigated only intermittently in the research literature. This work presents an extensive examination of the suitability and efficiency of the standard solution techniques that can be applied to this problem. A detailed comparison between different solution methods including Genetic Algorithms, Simulated Annealing, Tabu Search and Constraint Satisfaction Programming, shows that a constraint-based approach is the most efficient method of generating solutions to the jigsaw puzzle problem. The proposed re-assembly algorithm is successful. Consequently, it can be used in development of automated solution generators for other problems in the same domain, thus creating new theoretical and applied directions in this field of research. One potential theoretical line of research concerns jigsaw puzzles that do not have a complete set of puzzle pieces. These incomplete puzzles represent a difficult aspect of this problem that is outlined but can not be resolved in the current research. The computational experiments conducted in this thesis demonstrate that the proposed algorithm being optimised to re-assemble the jigsaw puzzles is not efficient when applied to the puzzles with missing pieces. Further work was undertaken to modify the proposed algorithm to enable efficient re-assembly of incomplete jigsaw puzzles. Consequently, an original heuristic strategy, termed Empty Slot Prediction, was developed to support the proposed algorithm, and proved successful when applied to certain sub-classes of this problem. The results obtained indicate that no one algorithm can be used to solve the multitude of possible scenarios involved in the re-assembly of incomplete jigsaw puzzles. Other variations of the jigsaw puzzle problem that still remain unsolved are presented as avenues for future research. The solution of this problem involves a number of procedures with significant applications in other computer-related areas such as pattern recognition, feature and shape description, boundary-matching, and heuristic modelling. It also has more practical applications in robotic vision and reconstruction of broken artefacts in archaeology.

隨著典型相關分析應用的日益廣泛，線性典型相關分析並不足以描述兩個主題事務間確實的關連及與其個別相關事務的互動關係，為了更適切地解釋資料數據背後所表達的現象，近來不斷地有關於非線性典型相關分析的理論發表，本文利用1992年Sheng所發表的非線性典型相關分析的理論，將之應用在對臺灣地區民國八十二年的前二十五名最有聲望的企業的資料分析上，並比較應用線性典型相關分析與非線性典型相關分析做資料分析的結果。

<p>This thesis presents a complete and fully automatic method for estimating the volume of an airbag, through all stages of its inflation, with multiple synchronized high-speed cameras.</p><p>Using recorded contours of the inflating airbag, its visual hull is reconstructed with a novel method: The intersections of all back-projected contours are first identified with an accelerated epipolar algorithm. These intersections, together with additional points sampled from concave surface regions of the visual hull, are then Delaunay triangulated to a connected set of tetrahedra. Finally, the visual hull is extracted by carving away the tetrahedra that are classified as inconsistent with the contours, according to a voting procedure.</p><p>The volume of an airbag's visual hull is always larger than the airbag's real volume. By projecting a known synthetic model of the airbag into the cameras, this volume offset is computed, and an accurate estimate of the real airbag volume is extracted. </p><p>Even though volume estimates can be computed for all camera setups, the cameras should be specially posed to achieve optimal results. Such poses are uniquely found for different airbag models with a separate, fully automatic, simulated annealing algorithm.</p><p>Satisfying results are presented for both synthetic and real-world data.</p>

This paper will analyze the effects of using hybrid optimization methods for optimizing objective functions that are determined by computational fluid dynamics solvers for compressible viscous flow for optimal design of airfoils. Previous studies on this topic by the authors had examined the application of deterministic optimization methods and stochastic optimization methods such as Simulated Annealing and Simultaneous Perturbation Stochastic Analysis (SPSA). The studies indicated that SPSA method has a greater or equal efficiency as compared with SA method in reaching optimal airfoil designs for the design problem in question. However, in some situations SPSA method has a tendency to demonstrate an oscillatory behavior in the vicinity of a local optima. To overcome this tendency, a hybrid method designed to take full advantage of SPSA’s high rate of reduction of the objective function at the inception of the design process to drive the design cycles towards the optimal zone at first, and then combining with other methods to perform the final stages of the convergence towards the optimal solutions is considered. SPSA method has been combined with the gradient-based Broydon-Fletcher-Goldfarb-Shanno (BFGS) method as well as Simulated Annealing method for the transonic inverse airfoil design problem that is concerned with the specification of a target airfoil surface pressure distribution and starting from an initial guess of an airfoil shape, the target airfoil shape is reached by way of minimization of a quantity that depends on the difference between the target and current airfoil surface pressure distribution. For a typical transonic flow test case, the effects of using hybrid optimization techniques such as SPSA+BFGS and SPSA+SA as opposed to using SPSA alone can be seen in Figure 1. After 800 design cycles using SPSA, the hybrid SPSA+SA method took 2521 function evaluations of SA while the SPSA+BFGS method took 271 function evaluations to reach similar values which are much better than that reached by using SPSA alone in the entire minimization process. Results indicate that both of the two hybrid methods have capability to find a global optimum more efficiently than the SPSA method. The paper will address issues related to hybridization and its impact on the optimal airfoil shape designs in various contexts. / Singapore-MIT Alliance (SMA)

A generalized software capability has been developed for the pin-wise loading optimization of light water reactor (LWR) fuel lattices with the enhanced flexibility of control variables that characterize heterogeneous or blended target pins loaded with non-standard compositions, such as minor actinides (MAs). Furthermore, this study has developed the software coupling to evaluate the performance of optimized lattices outside their reflective boundary conditions and within the realistic three-dimensional core-wide environment of a LWR. The illustration of the methodologies and software tools developed helps provide a deeper understanding of the behavior of optimized lattices within a full core environment. The practical applications include the evaluation of the recycling (destruction) of “undesirable” minor actinides from spent nuclear fuel such as Am-241 in a thermal reactor environment, as well as the timely study of planting Np-237 (blended NpO2 + UO2) targets in the guide tubes of typical commercial pressurized water reactor (PWR) bundles for the production of Pu-238, a highly “desirable” radioisotope used as a heat source in radioisotope thermoelectric generators (RTGs). Both of these applications creatively stretch the potential utility of existing commercial nuclear reactors into areas historically reserved to research or hypothetical next-generation facilities. In an optimization sense, control variables include the loadings and placements of materials; U-235, burnable absorbers, and MAs (Am-241 or Np-237), while the objective functions are either the destruction (minimization) of Am-241 or the production (maximization) of Pu-238. The constraints include the standard reactivity and thermal operational margins of a commercial nuclear reactor. Aspects of the optimization, lattice-to-core coupling, and tools herein developed were tested in a concurrent study (Galloway, 2010) in which heterogeneous lattices developed by this study were coupled to three-dimensional boiling water reactor (BWR) core simulations and showed incineration rates of Am-241 targets of around 90%. This study focused primarily upon PWR demonstrations, whereby a benchmarked reference equilibrium core was used as a test bed for MA-spiked lattices and was shown to satisfy standard PWR reactivity and thermal operational margins while exhibiting consistently high destruction rates of Am-241 and Np to Pu conversion rates of approximately 30% for the production of Pu-238.

Nano scale processing of IC chips has become the prime production technique as the microelectronic industry aims towards scaling down product dimensions while increasing accuracy and performance. Accurate control of temperature and a good monitoring mechanism for thickness of the deposition layers during epitaxial growth are critical parameters influencing a good yield. The two-fold objective of this thesis is to establish the feasibility of an alternative to the current pyrometric and ellipsometric techniques to simultaneously measure temperature and thickness during wafer processing. TAP-NDE is a non-contact, non-invasive, laser-based ultrasound technique that is employed in this study to contemporarily profile the thermal and spatial characteristics of the wafer. The Gabor wavelet transform allows the wave dispersion to be unraveled and the group velocity of individual frequency components to be extracted from the experimentally acquired time waveform. The thesis illustrates the formulation of a theoretical model that is used to identify the frequencies sensitive to temperature and thickness changes. The group velocity of the corresponding frequency components is determined and their corresponding changes with respect to temperature for different thickness are analytically modeled. TAP-NDE is then used to perform an experimental analysis on Silicon wafers of different thickness to determine the maximum possible resolution of TAP-NDE towards temperature sensitivity, and to demonstrate the ability to differentiate between wafers of different deposition layer thickness at temperatures up to 600?C. Temperature resolution is demonstrated for ?10?C resolution and for ?5?C resolution; while thickness differentiation is carried out with wafers carrying 4000? and 8000? of aluminum deposition layer. The experimental group velocities of a set of selected frequency components extracted using the Gabor Wavelet time-frequency analysis as compared to their corresponding theoretical group velocities show satisfactory agreement. As a result of this work, it is seen that TAP-NDE is a suitable tool to identify and characterize thickness and temperature changes simultaneously during thermal annealing that can replace the current need for separate characterization of these two important parameters in semiconductor manufacturing.

A hybrid method that addresses the design and optimization of long-span steel trusses is presented. By utilizing advancements in present day computing and biologically inspired analysis and design, an effort has been made to automate the process of evolving optimal trusses in an unstructured problem domain. Topology, geometry and sizing optimization of trusses are simultaneously addressed using a three stage methodology. Multi-objective genetic algorithms are used to optimize the member section sizes of truss topologies and geometries. Converting constraints into additional objectives provides a robust algorithm that results in improved convergence to the pareto-optimal set of solutions. In addition, the pareto-curve plotted based on how well the different objectives are satisfied helps in identifying the trade-offs that exist between these objectives, while also providing an efficient way to rank the population of solutions during the search process. A comparison study between multi-objective genetic algorithms, simulated annealing, and reactive taboo search is conducted to evaluate the efficiency of each method with relation to its overall performance, computational expense, sensitivity to initial parameter settings, and repeatability of finding near-global optimal designs. The benefit of using a three stage approach, and also implementing the entire model on parallel computers, is the high level of computational efficiency that is obtained for the entire process and the near-optimal solutions obtained. The overall efficiency and effectiveness of this method has been established by comparing the truss design results obtained using this method on bridge and roof truss benchmark problems with truss designs obtained by other researchers. One of the salient features of thisresearch is the large number of optimal trusses that are produced as the final result. The range of designs available provides the user with the flexibility to select the truss design that best matches their design requirements. By supporting human-computer interactions between these stages, the program also incorporates subjective aesthetic criteria, which assist in producing final designs in consonance with the user's requirements.

No description available.

Dry etching is an important technique for pattern transferin fabrication of most opto-electronic devices, since it canprovide good control of both structure size and shape even on asub-micron scale. Unfortunately, this process step may causedamage to the material which is detrimental to deviceperformance. It is therefore an objective of this thesis todevelop and investigate low damage etching processes for InPbased devices. An ion beam system in combination with hydrocarbon (CH4) based chemistries is used for etching. At variousion energies and gas flows the etching is performed in twomodes, reactive ion beam etching (RIBE) and chemical assistedion beam etching (CAIBE). How these conditions affect both etchcharacteristics (e.g. etch rates and profiles, surfacemorphology and polymer formation) and etch induced damage (onoptical and electrical properties) is evaluated and discussed.Attention is also paid to the effects of typical post etchingtreatments such as annealing on the optical and electricalproperties. An important finding is the correlation betweenas-etched surface morphology and recovery/degradation inphotoluminescence upon annealing in PH3. Since this type of atmosphere is typical forcrystal regrowth (an important process step in III/Vprocessing) a positive result is imperative. A low ion energy N2/CH4/H2CAIBE process is developed which not onlysatisfies this criteria but also exhibits good etchcharacteristics. This process is used successfully in thefabrication of laser gratings. In addition to this, the abilityof the ion beam system to modify the surface morphology in acontrollable manner is exploited. By exposing such modifiedsurfaces to AsH3/PH3, a new way to vary size and density of InAs(P)islands formed on the InP surfaces by the As/P exchangereaction is presented. This thesis also proposes a new etch chemistry, namelytrimethylamine ((CH3)3N or TMA), which is a more efficient methyl sourcecompared to CH4because of the low energy required to break the H3C-N bond. Since methyl radicals are needed for theetching it is presumably a better etching chemistry. A similarinvestigation as for the CH4chemistry is performed, and it is found that bothin terms of etch characteristics and etch induced damage thisnew chemistry is superior. Extremely smooth morphologies, lowetch induced damage and an almost complete recovery uponannealing can be obtained with this process. Significantly,this is also so at relatively high ion energies which allowshigher etch rates. <b>Keywords:</b>InP, dry etching, ion beam etching, RIBE,CAIBE, hydrocarbon chemistry, trimethylamine, As/P exchangereaction, morpholoy, low damage, AFM, SCM, annealing