The purpose of this thesis is to design and fabricate Gigahertz range voltage controlled oscillator based on intrinsically tunable film bulk acoustic resonator.Modified Butterworth Van Dyke (MBVD) model was studied and implemented to simulate FBAR behavior. Advanced designed system (ADS) was used as the simulation tool.Oscillator theory is studied and an oscillator based on non-tunable FBAR at 2GHz is simulated which shows -132 dBc/Hz phase noise @ 100 kHz offset frequency.A 5.5 GHz Voltage controlled oscillator based on intrinsically tunable FBAR is designed. Frequency tuning of 129 MHz with phase noise of -106 dBc/Hz @ 100 kHz is achieved. The circuit is designed on a novel carrier substrate which includes integrated resonators and passive components. Bipolar junction transistors are mounted on the carrier substrate by silver epoxy. The thesis describes the design, development and processing of the carrier substrate, BSTO based resonators, and the oscillator circuit.

This work presents the design, theory, and measurement of a phase-reconfigurable reflectarray (RA) element for beamforming applications enabled by fluidic networks and colloidal dispersions. The element is a linearly polarized microstrip patch antenna loaded with a Coaxial Stub Microfluidic Impedance Transformer (COSMIX). Specifically, adjusting the concentration of highly dielectric particulate in the dispersion provides localized permittivity manipulation within the COSMIX. This results in variable impedance load on the patch and ultimately continuous, low-loss phase control of a signal reflected from the patch. Different aspects of design, modeling, and measurement are discussed for a proof-of-concept prototype and three further iterations. Initial measurements with manual injections of materials into a fabricated proof-of-concept demonstrate up to 200 degrees of phase shift and a return loss of less than 1.2 dB at the operating frequency of 3 GHz. The next design iteration addresses fabrication challenges as well the general cumbersomeness of the proof-of-concept by replacing the static material delivery system with a dynamic closed-loop fluidic network. It also makes use of a design procedure to maximize the phase sensitivity. Measurements demonstrate progressive phase shifts through dilution of the system reservoir; however, the initial measurements with this system are not in line with simulated predictions. Investigations suggest the primary culprit to be inaccurate material data. The dielectric constant of the particulate (colloidal BSTO) was overrated and the loss tangent of the fluid medium (a silicone-based oil) was underrated. After accounting for these issues the measurement a second measurement with the system demonstrates 270 degrees of phase shift with return loss of 9 dB. The next design iteration examines a trade-off between phase sensitivity and reduced losses. The design also features modifications to the fluidic system to allow for layered fabrication in the GND plane as well integration with a 2-port coaxial measurement cell. Attempted measurements discover the fluidic system cannot flow the higher concentrations of nanoparticles necessary for phase shifting. A final design iteration addresses this challenge by expanding and repositioning inlets to the fluidic system. Free space reflection measurements with this element initially demonstrate phase shifting until a buildup of nanoparticles form within the COSMIX.

This thesis presents the design, theory, and measurement of a linearly polarized microstrip patch antenna with a novel substrate-integrated mechanism that can compensate the detuning effects from a physical deformation. Specifically, this antenna bends sharply through the center up to 90 (pivoted about the ground plane) and retuning (compensation) occurs by displacing electromagnetically functionalized colloidal dispersions (EFCDs) through a capillary in the substrate (parallel to the radiating edge). The displacement of a high permittivity EFCD by a low permittivity EFCD acts as a net length reduction (shown mathematically using perturbation theory). This mitigates the physical length extension from the deformation and stretching of the conductors. The design can be considered cognitive (conceptually in this thesis) by allowing the deformation and resulting compressive forces in the substrate to actuate displacement. The antennas to demonstrate this concept have been chosen to operate at 3 GHz and use a Sylgard 184 (a flexible silicone-based elastomer) substrate material with a height of 4 mm. Simulations of an HFSS model demonstrate a stable VSWR 2:1 bandwidth of 141 MHz across the entire range of bending. Currently available fabrication methods and EFCD material systems provide some limitations. Therefore, proof-of-concept is provided using 2 microstrip patch antennas (one flat patch and one patch bent 90) designed using 4 mm thick Rochelle Foam substrates and rigid copper sheets. A flexible patch was fabricated using Sylgard 184 and SEC 1233 (a conductive elastomer) but bending created several tears in the material and delaminating of the flexible conductor. However, the comparison of trends between simulated and measured results show good agreement and are used to validate this compensation mechanism.

Les systèmes de récupération d'énergie sont prometteurs pour l'auto-alimentation des dispositifs intégrés. Les matériaux pyroélectriques couplant un changement de température à un changement de polarisation électrique peuvent être utilisés pour la conversion de l'énergie thermique en énergie électrique sans nécessité de maintien de gradients thermiques qui constitue un inconvénient majeur dans les modules thermoélectriques compacts. Dans cette thèse, le PbZro.52Tio.48O3 (PZT) et le BaxSr1-xTiUO3 (x = l et x = 0.7) à fort coefficients pyroélectriques, sont choisis, élaborés en couches minces épitaxiées, caractérisés pour étudier leur potentiel de récupération d'énergie thermique. Ce travail comporte deux aspects : le premier consiste au développement et l'optimisation des conditions de croissance des hétérostructures intégrées et épitaxiées sur silicium. Le deuxième est focalisé sur l'étude des propriétés fonctionnelles (ferroélectriques, diélectriques et pyroélectriques) et à l' estimation du pouvoir de récupération d'énergie principalement des couches de PZT. Une corrélation entre ces deux aspects est ainsi présente. Un changement de la structure cristalline est montré sur les empilements intégrés sur Si, en comparaison avec des structures équivalentes réalisées sur substrat de STO. L'impact de ceci a été directement constaté sur les propriétés fonctionnelles des couches hétéroépitaxiées de PZT. Ainsi une anisotropie importante de ces propriétés a pu être mise en évidence, en complétant cette étude par des mesures dans le plan a l'aide de peignes interdigités. Ces observations ont été cohérentes avec les mesures de la diffraction des rayons X en fonction de la température. Par ailleurs, les différentes méthodes et configurations de mesures du coefficient pyroélectrique sur PZT ont permis une meilleure compréhension du phénomène et la distinction des diverses contributions existantes. La mesure statique indirecte issue de la variation de la polarisation rémanente en fonction de la température renseigne sur l'effet pyroélectrique intrinsèque (et secondaire). Cependant les mesures dynamiques du courant pyroélectrique pendant un changement de la température contiennent toutes les contributions pyroélectriques et non pyroélectriques, comme les effets extrinsèques et le courant de relaxation. Des mesures pyroélectriques dynamiques sous champ électrique, se rapprochant des conditions de cycles de récupération d'énergie thermique, ont permis de montrer que des courants de conduction apparaissaient même pour des bonnes couches de PZT diélectriques épaisses. Ces courants masquent les courants pyroélectriques et rendent l'application de générateur électrique par cycles thermodynamiques sous champ électrique rédhibitoire. Des composants passifs n'utilisant pas ou peu de champs électriques tels que des capteurs devront plutôt être envisagées. / Due to the wasted heat in ever more compact microelectronic devices, the harvesting of thermal energy has become interesting for self-powering small devices. Consequently, pyroelectric materials witch couple a change in temperature to a change in electrical polarization may be used for the conversion of the thermal energy to an electric energy without necessity of maintaining thermal gradients that is a main drawback in compact devices with thermoelectric materials. In this thesis, PbZro.52Tio.48O3 (PZT) and BaxSr1-xTiUO3 (x = l and x = 0.7), with high pyroelectric coefficients are chosen, elaborated in thin epitaxial layers, characterized structurally and electrically to study their potential for thermal energy harvesting. This work has two aspects: the first consists in the development and optimization of the growth conditions of epitaxial heterostructures integrated on Si. The second one focuses on the study of the functional properties ( ferroelectric, dielectric and pyroelectric) and the estimation of the energy harvesting efficiency mainly of PZT layers. A correlation between these two aspects is then done. A change in the crystal structure is shown on the Si-integrated stacks in comparison with equivalent structures grown on STO substrate. This structural behavior impacts directly the functional properties of the heteroepitaxial layers of PZT. Th us, an important anisotropy of these properties was demonstrated and completed by a study of the in plane properties using measurements by interdigital capacitors. These observations were consistent with measurements of X - ray diffraction as a function of temperature. Otherwise, different methods and configurations of pyroelectric coefficient measurements on PZT have allowed a better understanding of the phenomenon and the distinction of the various existing contributions. The indirect static measurement resulting from the variation of the remnant polarization as a function of the temperature gives the intrinsic (and secondary) pyroelectric contributions. However, the dynamic measurements of the pyroelectric current during a change of the temperature contain all the pyroelectric and non-pyroelectric contributions, such as the extrinsic effects and the relaxation current . Dynamic pyroelectric measurements under an electric field are near to the conditions of thermal energy harvesting cycles. Conduction currents appeared, even for good layers of thick dielectric PZT, and mask the pyroelectric currents. This makes the application of electric generator by thermodynamic cycles under electric field prohibitive. Passive components using low or no electrical field such as sensors should be considered.

Frequency selective surfaces (FSSs) provide a variety of spatial filtering functions, such as band-pass or band-stop properties in a radome or other multilayer structure. This filtering is typically achieved through closely-spaced periodic arrangements of metallic shapes on top of a dielectric substrate (or within a stack of dielectric materials). In most cases, the unit cell size, its shape, the substrate parameters, and the inter-element spacing collectively impact the response of the FSS. Expanding this design space to include reconfigurable FSSs provides opportunities for applications requiring frequency agility and/or other properties. Tuning can also enable operation over a potentially wider range of frequencies and can in some cases be used as a loading mechanism or quasi-ground plane. Many technologies have been considered for this type of agility (RF MEMS, PIN diodes, etc.). This includes the recent use of microfluidics and dispersions of nanoparticles, or fluids with controllable dielectrics, which have entered the design space of numerous other EM applications including stub-tuners, antennas, and filters. In this work they provide a material based approach to reconfiguring an FSS. An FSS based on a four-arm spiral with tunable band-stop characteristics is presented in this work. A thin colloidal dispersion above each element provides this tuning capability. The radial expansion and contraction of this dispersion, as well as the variable permittivity of the dispersion, are used to load each element individually. This design incorporates thin fluidic channels within a PDMS layer below the substrate leading to individual unit cells that provide a closed pressure-driven subsystem that contains the dispersion. With the capability to individually control each cell, groups of cells can be locally altered (individually or in groups) to create gratings and other electromagnetically agile features across the surface or within the volume of a radome or other covering. Simulations and measurements of an S-band tunable design using colloidal Barium Strontium Titanate dispersed Silicone oil are provided to demonstrate the capability to adjust the stop-band characteristics of the FSS across the S-band.