<p>Idag används guld som kontaktmaterial på elektriska kontakter för lågströmstillämpningar. Guldhar emellertid låg nötningsbeständighet, är dyrt och miljömässigt påfrestande att utvinna. Ettalternativt kontaktmaterial till guld är nanokomposit Ti-Si-C-Ag belagt medlikströmsmagnetronsputtring. Nanokomposit Ti-Si-C-Ag har hittills belagts med sammansatt Ti-Si-C sputterkälla och separat silverkälla.</p><p>I detta arbete har filmer belagts från tre olika sammansatta Ti-Si-C-Ag-källor med tre olikakolhalter. Filmerna har belagts i två olika beläggningssystem: Ett konventionellt batchladdat ochett sekventiellt med sluss.</p><p>Filmernas fas- och ämnessammansättning har studerats med XRD och EDX. Tjocklek ochmikrostruktur har analyserats med SEM. Vidhäftning och resistivitet har analyserats medRockwellindentation och ytresistansmätning med fyrpunktsprob. Kontaktresistansen har ävenstuderats i begränsad mån.</p><p>Arbetet visar att ökat kolinnehåll i källan ger kolrikare filmer med större titankarbidkorn.Resistiviteten ökar p.g.a. tilltagen amorf fas mellan kornen men kontaktresistansen sjunker givetduktilare film.</p> / <p>Today gold is used as contact material on electric contacts for low current applications. Gold, however,has low wear resistance, is expensive and environmentally stressful to produce. An alternative contactmaterial to gold is nano composite Ti-Si-C-Ag deposited with DC-magnetron sputtering. Nanocomposite Ti-Si-C-Ag has so far been deposited by a compound Ti-Si-C sputter source with a separateAg source.</p><p>In this work films have been deposited by three different compound Ti-Si-C-Ag sources with threedifferent carbon contents. The films have been deposited in two separate PVD systems: Oneconventional batch loaded and one sequential with a load-lock.</p><p>The phase- and elemental composition of the films has been studied with XRD and EDX respectively.Thickness and microstructure have been analysed with SEM. Adhesion and resistivity has beenanalysed with Rockwell indentation and surface resistivity measurement with four point probe. Contactresistance has also been studied to a limited extent.</p><p>The work shows that the increment of carbon content in the source yields more carbon rich films withlarger titanium carbide crystallites. The resistivity is increasing due to an increased amorphous phasebetween the crystallites but the contact resistance is decreasing due to a more ductile film.</p>

Idag används guld som kontaktmaterial på elektriska kontakter för lågströmstillämpningar. Guldhar emellertid låg nötningsbeständighet, är dyrt och miljömässigt påfrestande att utvinna. Ettalternativt kontaktmaterial till guld är nanokomposit Ti-Si-C-Ag belagt medlikströmsmagnetronsputtring. Nanokomposit Ti-Si-C-Ag har hittills belagts med sammansatt Ti-Si-C sputterkälla och separat silverkälla. I detta arbete har filmer belagts från tre olika sammansatta Ti-Si-C-Ag-källor med tre olikakolhalter. Filmerna har belagts i två olika beläggningssystem: Ett konventionellt batchladdat ochett sekventiellt med sluss. Filmernas fas- och ämnessammansättning har studerats med XRD och EDX. Tjocklek ochmikrostruktur har analyserats med SEM. Vidhäftning och resistivitet har analyserats medRockwellindentation och ytresistansmätning med fyrpunktsprob. Kontaktresistansen har ävenstuderats i begränsad mån. Arbetet visar att ökat kolinnehåll i källan ger kolrikare filmer med större titankarbidkorn.Resistiviteten ökar p.g.a. tilltagen amorf fas mellan kornen men kontaktresistansen sjunker givetduktilare film. / Today gold is used as contact material on electric contacts for low current applications. Gold, however,has low wear resistance, is expensive and environmentally stressful to produce. An alternative contactmaterial to gold is nano composite Ti-Si-C-Ag deposited with DC-magnetron sputtering. Nanocomposite Ti-Si-C-Ag has so far been deposited by a compound Ti-Si-C sputter source with a separateAg source. In this work films have been deposited by three different compound Ti-Si-C-Ag sources with threedifferent carbon contents. The films have been deposited in two separate PVD systems: Oneconventional batch loaded and one sequential with a load-lock. The phase- and elemental composition of the films has been studied with XRD and EDX respectively.Thickness and microstructure have been analysed with SEM. Adhesion and resistivity has beenanalysed with Rockwell indentation and surface resistivity measurement with four point probe. Contactresistance has also been studied to a limited extent. The work shows that the increment of carbon content in the source yields more carbon rich films withlarger titanium carbide crystallites. The resistivity is increasing due to an increased amorphous phasebetween the crystallites but the contact resistance is decreasing due to a more ductile film.

Avec la diminution perpétuelle des dimensions des circuits intégrés, la gravure de dispositifs à l’échelle nanométrique constitue un véritable défi pour les procédés plasma qui montrent des limites dans le cas d’empilement de couches minces notamment. L’anisotropie de gravure réside sur la formation de couches de passivations sur les flancs des motifs, qui agissent comme film protecteur bloquant la gravure latérale par les radicaux du plasma. Cependant, cette fine couche est responsable de l’apparition de pente dans les profils gravés et il est difficile de contrôler son épaisseur. De plus, une deuxième couche réactive est aussi formée en fond de motifs. Les produits de gravures sont formés au sein de cette couche permettant d’augmenter la vitesse de gravure du substrat. Il a récemment été admis que contrôler l’épaisseur de ces couches réactives constitue le paramètre clé pour obtenir une gravure à très haute sélectivité.Cependant, les couches réactives à analyser hautement réactives, en raison de leur forte concentration en halogènes, s’oxydent immédiatement lors de la remise à l’air.Cette étude se propose de développer une approche originale, simple et extrêmement puissante pour observer ces couches de passivation quasi in-situ (sans contact avec l’air ambiant) : Apres gravure, l’échantillon est transporté sous vide à l’intérieur d’une valise spécifique jusqu’à une enceinte de dépôt, où il est alors encapsulé par une couche métallique (PVD assisté par magnétron). L’échantillon ainsi encapsulé peut être observé ex-situ sans modification chimique grâce à des analyses STEM EDX. / As the size of integrated circuit continues to shrink, plasma processes are more and more challenged and show limitations to etch nanometer size features in complex stacks of thin layers. The achievement of anisotropic etching relies on the formation of passivation layers on the sidewalls of the etched features, which act like a protective film that prevents lateral etching by the plasma radicals. However, this layer also generate a slope in the etch profile and it’s difficult to control its thickness. Another thin layer called “reactive layer” is also formed at the bottom of the features. Etch products are formed in this layer allowing a high etch rate of the substrate. It starts to be realized that controlling the thickness of this reactive layer is the key to achieve very high selective processes.However, the layers to be analyzed are chemically highly reactive because they contain large concentrations of halogens and they get immediately modified (oxidized) when exposed to ambient atmosphere.In this work we develop an original, simple and extremely powerful approach to observe passivation layers quasi in-situ (i.e. without air exposure): After plasma etching, the wafer is transported under vacuum inside an adapted suitcase to a deposition chamber where it is encapsulated by a metallic layer (magnetron sputtering PVD). Then, the encapsulated features can be observed ex situ without chemical / thickness modification thanks to (S)TEM-EDX analysis.

Conselho Nacional de Desenvolvimento CientÃfico e TecnolÃgico / Os nanotubos de carbono apresentam extraordinÃrias propriedades fÃsico-quÃmicas que tÃm sido exploradas para aplicaÃÃes que vÃo desde a ciÃncia de materiais atà a biologia. No entanto, a maioria das aplicaÃÃes requer modificaÃÃes quÃmicas dos nanotubos de modo a explorar ao mÃximo seu potencial. Neste contexto, o desenvolvimento de protocolos de tratamento e de purificaÃÃo à muito importante. O objetivo deste estudo à contribuir para o entendimento de como a mudanÃa de uma variÃvel especÃfica, a temperatura, afeta as propriedades fÃsico-quÃmicas dos nanotubos de carbono de paredes mÃltiplas (MWNTs) durante a purificaÃÃo. Um grama (1g) de MWNTs (Ctube 100, CNT Co. Ltd., Incheon - CorÃia do Sul) foram submetidos a um refluxo de Ãcido nÃtrico 9 mol/L por 12 horas em temperaturas de 25ÂC, 75ÂC, 125ÂC e 175ÂC. ApÃs o refluxo, as amostras foram resfriadas em um banho tÃrmico, filtradas em condiÃÃes de vÃcuo com uma membrana de PTFE de 0, 2 Âm e lavadas com Ãgua deionizada atà que o pH neutro do filtrado foi atingido. Por Ãltimo, os MWNTs oxidados foram secos em vÃcuo durante 48 h. As tÃcnicas utilizadas neste trabalho para a realizaÃÃo das caracterizaÃÃes forneceram resultados que tratam desde caracterÃsticas macro e de superfÃcie atà as associadas ao nÃvel atÃmico. A estabilidade tÃrmica foi analisada por meio de medidas de TGA, uma vez que muitos dos grupos funcionais criados no tratamento sÃo termicamente instÃveis. A oxidaÃÃo resultante do tratamento introduz grupos polares na superfÃcie dos MWNTs e assim cria a estabilidade eletrostÃtica necessÃria para uma dispersÃo estÃvel em meio aquoso. A estabilidade foi avaliada para cada amostra por meio de medidas de potencial zeta. A quantidade e o tipo de resÃduos catalÃticos presentes nas amostras antes e depois do tratamento foram analisados atravÃs de medidas de EDX e UV-VIS. Medidas de espectroscopia Raman Confocal permitiram a anÃlise especÃfica dos defeitos estruturais criados sobre a superfÃcie dos tubos, em conseqÃÃncia do processo de oxidaÃÃo. Constatou-se que os experimentos Raman devem ser realizados sobre muitos pontos para poder acessar as propriedades mÃdias das amostras. A capacidade de adsorÃÃo da superfÃcie de cada amostra apÃs o tratamento foi inspecionada atravÃs de medidas de Ãrea superficial especÃfica (mÃtodo BET). Ao comparar os resultados de diferentes tÃcnicas, foi possÃvel acessar os efeitos da temperatura do tratamento sobre as propriedades fÃsico-quÃmicas relevantes, permitindo assim a obtenÃÃo de amostras bem caracterizadas que serÃo Ãteis para futuros estudos em Ãreas bio-relacionadas. / Carbon nanotubes exhibit remarkable physico-chemical properties which have been exploited for applications ranging from materials science to biology. However, most of the aplications requires the chemical modification of the nanotubes in order to exploit their maximum potential. In this context, the development of protocols for treatment and purification is very important. The purpose of this study is to contribute for the understand on how the change of a particular purification parameter, temperature, affects the physico-chemical properties of multi-walled carbon nanotubes (MWNTs) during the purification. One gram (1g) of MWNTs (Ctube 100, CNT Co. Ltd., Incheon - South Korea) were subjected to a reflux with nitric acid 9 mol/L for 12 hours at temperatures 25ÂC, 75ÂC, 125ÂC and 175ÂC. After refluxed, the samples were cooled down in a heat bath, filtered in vacuum condition using a PTFE membrane of 0, 2 Âm and washed with deionized water until the neutral pH of the filtrate was reached. Afterwards, the oxidized MWCNTs were dried in vacuum for 48 h. The experimental techniques used in this work to perform the samples characterization provide results that allow to get information from macro and surface characteristics to those associated with the atomic level. Thermal stability was analyzed by TGA measurements, since many of the functional groups created during the treatment are thermally unstable. Oxidation resulting from treatment introduces polar groups on the surface of MWNTs thus creating the electrostatic stability required for a stable dispersion in aqueous medium. The stability was evaluated for each sample by zeta potential measurements. The amount and type of catalytic residues present in the samples before and after treatment were analyzed by means of EDX and UV-VIS. Techniques confocal Raman spectroscopy measurements allowed the specific analysis of the structural defects created on the surface of the tubes as a consequence of oxidation process. It was found that Raman experiments should be performed on may points of the sample in order to access their average properties. The adsorption capacity of the surface of each sample after treatment, were inspected through specific surface area measurements (BET method). By comparing the results of different techniques it was possible to access the effects of temperature on the treatment on the relevant physico-chemical properties thus allowing us to have well characterized samples that will be useful for further studies in biorelated areas.

Aerosol particles, especially in the high Arctic are still not very well represented in climate models. Particle size and number concentrations are strongly under-predicted and temporal variations of aerosol composition and size are still not very well understood, mainly due to the sparsity of observations. The main objective of this thesis is the characterization of the high Arctic summer aerosol by means of electron microscopy in order to extend the existing data set from previous expeditions by size resolved data on aerosol number, morphology and chemical composition and to gain a better understanding of the evolution of the aerosol in the atmosphere. Ambient aerosol was collected over the pack ice during the Arctic Summer Cloud and Ocean (ASCOS) campaign to the high Arctic in summer 2008. Aerosol particles were evaluated with scanning electron microscopy and subsequent digital image processing to assess particle size and morphology. More than 3900 aerosol particles from 9 sampling events were imaged with scanning electron microscopy and merged into groups of similar morphology which contributed to different degrees to the total aerosol: single particles (82%), gel particles (11%) and halo particles (7%). Single particles were observed over the whole size range with a maximum at 64 nm in diameter, gel particles appeared &gt; 45 nm with a maximum in number at 174 nm, halo particles appeared &gt; 75 nm with a maximum in number at 161 nm. The majority of particles showed the morphology of marine gels, no sea salt or otherwise crystalline particles were observed. Transmission electron microscopy enabled more subtle insights into particle morphology and allowed further subdivision of gel particles into aggregates, aggregates with film and mucus-like particles. Energy dispersive X-ray spectroscopy of individual particles revealed a gradual transition in the content of Na+/K+ and Ca2+/Mg2+ between particle morphologies. Single particles and aggregate particles preferentially contained Na+/K+ whereas aggregate with film particles and mucus-like particles mainly contained Ca2+/Mg2+ suggesting a connection between particle morphology and ion content. Back-trajectory analysis was used to identify aerosol sources and to understand the evolution of the aerosol as a function of the synoptic weather situation. Particle numbers, size and morphology changed with the days the air mass spent over the pack-ice. A morphological descriptor applied to gel particles showed a clear trend suggesting that the contour of the particles becomes sharper and more distinct with increased time spent over the pack-ice. For a very long time over the pack-ice, however, we observed a morphology comparable to freshly emitted particles suggesting aerosol sources over the inner pack-ice. Size resolved aerosol chemical composition measurements were utilized to investigate the inorganic composition of laboratory generated nascent sea spray aerosol particles and ambient aerosol samples collected during ASCOS. A significant enrichment of Ca2+ was observed in submicrometer particles in either case with a tendency for increasing Ca2+ enrichment with decreasing particle size. This has strong implications for the alkalinity of sea spray aerosol particles with consequences for the sulfur chemistry in the marine boundary layer, the hygroscopicity and thus the potential of sea spray aerosol particles to act as cloud condensation nuclei. / <p>At the time of the doctoral defense, the following paper was unpublished and had a status as follows: Paper 4: Manuscript.</p>

Les illites et les chlorites sont des minéraux ubiquistes dans la plupart des roches diagénétiques. Leurs compositions chimiques dépendent des conditions physiques subies (pression, P ; température, T) et de la composition de l’encaissant (e.g. Vidal et al., 1999 ; Parra et al., 2002a, 2002b). Ces minéraux peuvent donc potentiellement être de très bons marqueurs de l’histoire de l’enfouissement, et sont à la base de nombreuses méthodes empiriques ou thermodynamiques d’estimation des conditions P-T.Une compilation de données naturelles et la comparaison des thermobaromètres existants ont permis d’établir leurs limitations respectives. Pour s’en affranchir, un nouveau modèle ordonné de solution solide pour les chlorites a été développé, qui rend compte des forts contenus en silicium observés dans les chlorites naturelles de basses températures. La calibration de ce nouveau thermobaromètre sur des domaines géologiques variés de BT-BP a été testée sur des analyses de chlorites naturelles de la Gulf Coast (Texas) au pic de température (où les données P-T ont été mesurées in situ) et montre d’excellents résultats. Concernant les illites, le modèle thermodynamique le plus abouti (Dubacq et al., 2010) a également été testé de manière à estimer sa précision. L’étude a été complétée par la quantification de l’influence du fer ferrique. Les analyses chimiques utilisées ont été obtenues grâce à un protocole analytique à haute résolution spatiale. Alliant FIB et MET-EDS, ce protocole a permis une étude microtexturale et chimique fine des chlorites et des illites. Il en ressort que ces minéraux possèdent une diversité intracristalline dans leurs compositions et que la zonation chimique résultante apparaît comme une potentielle source d’erreurs dans la calibration des thermobaromètres, tout en permettant d’envisager la notion d’équilibre à l’échelle locale.Cette approche a été utilisée pour quantifier les trajets P-T d’unités géologiques des Alpes de Glarus. Ces résultats, comparés à ceux obtenus avec des méthodes thermobarométriques conventionnelles, donnent une bonne image des processus d’enfouissement et d’exhumation des roches de basse température. Ainsi, il apparaît que chaque composition enregistre une portion du chemin P-T rétrograde. D’une manière générale, chaque zone d’un même cristal renvoie à une partie de l’histoire de la roche. / Illite and chlorite are ubiquitous in most diagenetic rocks. Their chemical compositions are sensitive to thermobarometric conditions (pressure, P; temperature, T) and the bulk composition (e.g. Vidal et al., 1999; Parra et al., 2002a, 2002b). These minerals can be good indicators of burial history, and are the basis of several empiric or thermodynamic methods to estimate P-T conditions. A compilation of natural data and the comparison of existing thermobarometers allowed to establish their limitations. To circumvent it, an ordered model of solid solution for chlorites was developed which considers Si-rich low-T compositions. The calibration of this new thermobarometer on various LT-LP geologic fields was tested on natural chlorites analysis of Gulf Coast (Texas) at metamorphic peak, and gives accurate results. Concerning illites, the thermodynamic model of Dubacq et al. (2010) was also tested to estimate its precision. The study was completed by the quantification of the Fe3+ effects. Chemical analyses were obtained by an analytical protocol with high spatial resolution. Combining FIB and EDX-TEM, this protocol allowed an accurate microstructural study of chlorites and illites. These minerals have an intracristalline diversity of their chemical composition. The resulting chemical zonation is a potential error in calibration of thermometers, but allowed consideration of local equilibrium.This approach was used to quantify the P-T path of geologic units in Alps (near Glarus). These results, compared to results of conventional thermobarometers, give a good representation of burial and exhumation process for low-T rocks. Thus, the chemistry records a part of retrograde P-T path and each part of a crystal zoning corresponds to a part of rocks history.

This study investigates the tool wear of advanced PVD TiALN/TiN multilayer coated end mill inserts when dry and semi-dry machining 4340 low alloy medium carbon steel. A factorial design of experiment setup consisting of two levels of speed, three levels of feed, two levels of depth of cut, and two levels of cutting conditions (semi-dry and dry) was used for the study. The combination of cutting conditions that gave the best response for different components of cutting force, cutting power, surface roughness and tool life were determined using MANOVA & ANOVA analysis and Tukey comparison of means test using MINITAB statistical software package. From a study of the Energy Dispersive X ray (EDX) analysis and primary back scatter images obtained from the worn out crater surface of the insert, it was observed that diffusion wear prevailed under both dry and semi-dry machining conditions. A tool life model was developed using multiple regression analysis within the range of cutting conditions selected. A model for flank wear progression was also developed using mixed effects modeling technique using S Plus statistical software package. This technique takes into account between and within work piece variations during end milling and produces a very accurate model for tool wear progression. This is the first time application of the mixed effects modeling technique in metal cutting literature.

EDS is a tool for quantitative and qualitative analysis of the materials. In electron microscopy, the energy of the electrons determines the depth of the region where the X-rays come from. By varying the energy of the electrons, the depth of the region where the X-rays come from can be changed. If a thin film is used as a specimen, different quantitative ratios of the elements for different electron energies can be obtained. Unique thickness of a specific film on a specific substrate gives unique energy-ratio diagram so the thickness of a thin film can be calculated by analyzing the fingerprints of the energy-ratio diagram of the EDS data obtained from the film.

Das Wasser der Elbe auf der Höhe von Dresden enthält anorganische Kolloidpartikel, deren Partikelgrößenverteilung nahezu den gesamten kolloidalen Definitionsbereich (1 nm bis 1 µm) überstreicht und die vor allem aus sekundär ausgeschiedener amorpher Kieselsäure sowie aus Oxyhydroxiden des Fe, Al und Mn bestehen. Als wichtigstes Schwermetall führen sie Zn. Ihre Konzentration liegt unter 5×10-1 mg/l, um etwa Faktor 30 unter der Konzentration der Schwebstoffe des Elbwassers (Partikel >1 µm). Wegen ihrer hohen spezifischen Oberfläche sind die Kolloidpartikel als potentielle Träger für Schadstoffe trotz dieser geringeren Massekonzentration nicht gegenüber den Schwebstoffen zu vernachlässigen. Die in der Elbe gemessene Partikelgrößenverteilung ähnelt derjenigen, die zu einem früheren Zeitpunkt im Rhein gefunden worden war. Auch die chemische Zusammensetzung der Kolloidpartikel in der Elbe ist der der Partikel des Rheins ähnlich. Die Konzentration der Kolloidpartikel in der Elbe war aber um Faktor 5 bis 10 höher als im Rhein. Grund für letzteres ist wahrscheinlich der höhere Gehalt des Elbwassers an gelöstem Kohlenstoff (DOC). Im "Bulk" eines Flusses sind kolloidgetragene Schadstoffe - anders als schwebstoffgetragene - vermutlich fast genauso mobil wie echt gelöste. Unterschiede zwischen den Transportgeschwindigkeiten der kolloidgetragenen und der echt gelösten Spurenstoffe treten in bestimmten Situationen auf, in denen das Wasser den "Bulk" eines Flusses verlässt (Sickerbereich unter dem Fluss, Ästuar). Es werden Schlussfolgerungen über die Rolle von Kolloidpartikeln im Ökosystem eines Flusses gezogen und noch bestehende Forschungsdesiderate benannt.

Made available in DSpace on 2014-06-11T19:31:25Z (GMT). No. of bitstreams: 0 Previous issue date: 2008-07-11Bitstream added on 2014-06-13T18:42:01Z : No. of bitstreams: 1 dutracorrea_m_dr_sjc_prot.pdf: 7276288 bytes, checksum: b030fe5d93bf385445adf0346edc979e (MD5) / Coordenação de Aperfeiçoamento de Pessoal de Nível Superior (CAPES) / Dentes bovinos têm sido convencionalmente utilizados em pesquisas odontológicas substituindo dentes humanos. Diferenças nas propriedades físico-químicas, estruturais e morfológicas dos substratos representarão diferenças na resposta frente a diversos tratamentos. Foi investigada a ablação em esmalte e dentina de dentes bovinos (30) e humanos (30) com laser de Ti:Safira, no regime de femtossegundos (70fs), com λ= 800±1 nm, taxa de repetição=1 KHz, utilizando diferentes potências médias com diferentes tempos de exposição. Foram realizadas análises morfológicas e físico-químicas. Os corpos-de-prova foram observados ao microscópio de luz, ao MEV e analisados por EDX. As microcavidades em esmalte (bovino e humano) apresentaram ablação precisa, integridade e definição das margens. No esmalte humano não houve danos térmicos ou microfraturas; o bovino apresentou microfraturas, provavelmente resultado de sua menor resistência à ablação com laser. As microcavidades da dentina (bovina e humana) apresentaram bordas definidas, entretanto com microfraturas, sendo que na dentina bovina foram mais numerosas, mais amplas e mais intensas, mostrando maior susceptibilidade frente à irradiação com laser. Quanto à proporção Ca/P, as alterações proporcionais entre números de átomos de Ca em relação ao P, não foram estatisticamente significantes, para nenhum tecido. Conclui-se que o laser de Ti:Safira no regime de femtossegundos, além de muito rápido, potente e seguro, tem a vantagem de poder ser bem controlado e preciso, promovendo profundidades pequenas e específicas. Diante dos resultados e dependendo do tipo de tecido, fica evidente a necessidade de prévio conhecimento das diferenças entre eles antes da direta extrapolação dos resultados obtidos em substrato bovino para humano. / Bovine teeth have been conventionally used in dental research to replace human teeth. Differences in the physicochemical, structural and morphological properties of these substrates cause differences in their response to several treatments. This study investigated the ablation of enamel and dentin of bovine teeth (30) and human teeth (30) using a Ti:Sapphire laser at Femtosecond pulse width (70fs), λ= 800±1nm and repetition rate of 1 KHz. Different output power levels and irradiation times were investigated. Morphological and physicochemical analysis were conducted. Irradiated specimens were evaluated under light microscopy, SEM and EDX. Microcavities in bovine and human enamel showed accurate ablation, with sharp margins and preserved morphologies. Human enamel did not exhibit induced thermal damage or microfractures; bovine enamel presented microfractures, probably due a lower resistance to laser ablation. The microcavities in dentin (bovine and human) presented defined borders, yet with microfractures, which were more frequent, wider and more intense in the bovine dentin, demonstrating a higher susceptibility to laser irradiation. Concerning the Ca/P ratio, the proportional alterations between the numbers of Ca atoms compared to P atoms were not statistically significant for any tissue. In this study Femtosecond Ti:Sapphire laser showed to be a fast, powerful and safe ablation system. Additionally, it promotes removal at small and specific depths. Considering the present results and depending on the type of tissue, it is clear that previous knowledge on the differences between them is required before direct extrapolation of results obtained in bovine substrate to the human substrate.