Photon detectors based on single-crystalline materials are of great interest for high performance imaging applications due to their low noise and fast response. The major detector materials for sensing in the long-wavelength infrared (LWIR) band (8-14 µm) are currently HgCdTe (MCT) and AlGaAs/GaAs quantum wells (QW) used in intraband-based quantum-well infrared photodetectors (QWIPs). These either suffer from compositional variations that are detrimental to the system performance as in the case of MCT, or, have an efficient dark current generation mechanism that limits the operating temperature as for QWIPs. The need for increased on-wafer uniformity and elevated operating temperatures has resulted in the development of various alternative approaches, such as type-II strained-layer superlattice detectors (SLSs) and intraband quantum-dot infrared photodetectors (QDIPs). In this work, we mainly explore two self-assembled quantum-dot (QD) materials for use as the absorber material in photon detectors for the LWIR, with the aim to develop low-dark current devices that can allow for high operating temperatures and high manufacturability. The detection mechanism is here based on type-II interband transitions from bound hole states in the QDs to continuum states in the matrix material. Metal-organic vapor-phase epitaxy (MOVPE) was used to fabricate (Al)GaAs(Sb)/InAs and In(Ga)Sb/InAs QD structures for the development of an LWIR active material. A successive analysis of (Al)GaAs(Sb) QDs using absorption spectroscopy shows strong absorption in the range 6-12 µm interpreted to originate in intra-valence band transitions. Moreover, record-long photoluminescence (PL) wavelength up to 12 µm is demonstrated in InSb- and InGaSb QDs. Mesa-etched single-pixel photodiodes were fabricated in which photoresponse is demonstrated up to 8 µm at 230 K with 10 In0.5Ga0.5Sb QD layers as the active region. The photoresponse is observed to be strongly temperature-dependent which is explained by hole trapping in the QDs. In the current design, the photoresponse is thermally limited at typical LWIR sensor operating temperatures (60-120 K), which is detrimental to the imaging performance. This can potentially be resolved by selecting a matrix material with a smaller barrier for thermionic emission of photo-excited holes. If such an arrangement can be achieved, type-II interband InGaSb QD structures can turn out to be interesting as a high-operating-temperature sensor material for thermal imaging applications. / <p>QC 20130521</p>

Nous avons étudié la croissance de boîtes quantiques InAs/InP(001) par épitaxie en phase vapeur aux organométalliques en vue de la réalisation de composants à 1,55 µm. Les propriétés structurales des boîtes, étudiées par microscopie électronique en transmission, et leurs propriétés optiques, étudiées par photoluminescence, ont été corrélées aux conditions de croissance. Notre étude met en évidence d'une part les influences d'origine thermodynamique et cinétique des paramètres de croissance de l'InAs, et d'autre part une influence de l'étape de recouvrement des boîtes (encapsulation). <br />Nous montrons que la longueur d'onde d'émission des boîtes peut être ajustée soit en modifiant la vitesse d'encapsulation, soit en incorporant volontairement du phosphore (formation de boîtes InAsP). Le bon contrôle de la morphologie et de la longueur d'onde d'émission des boîtes permet d'envisager des applications dans le domaine des télécommunications à 1,55 µm qui ont motivé ce travail. L'encapsulation des boîtes InAs/InP à forte vitesse de croissance nous a par ailleurs permis d'obtenir une émission au delà de 2 µm, ce qui ouvre de nouvelles perspectives d'applications dans la réalisation de sources pour la détection de gaz. <br />Enfin, l'observation à basse température (4 K) de l'exciton et du biexciton d'une boîte quantique InAs/InP(001) unique en micro-photoluminescence montre que ces boîtes pourraient être utilisées pour la réalisation de sources de photons uniques pour la cryptographie quantique à 1,55 µm.

Ce travail porte sur la croissance épitaxiale et la caractérisation optique de boîtes quantiques d'InAs/InP(001) en faible densité en vue de la réalisation de nouveaux composants nanophotoniques émettant à 1,55 µm. Les propriétés structurales et optiques des îlots ont été corrélés pour différents paramètres de croissance d'un système d'épitaxie par jet moléculaire à sources solides. Nos résultats soulignent l'influence des reconstructions de surface d'InAs sur la forme des îlots. Des boîtes, plutôt que des bâtonnets allongés généralement observés,peuvent être directement formées dans des conditions de croissance adéquates. Une transition de forme de bâtonnets vers des boîtes est également démontrée par des traitements postcroissance sous arsenic. Les faibles densités de boîtes sont obtenues pour des faibles épaisseurs d'InAs déposées. Leur émission est facilement contrôlée à 1,55 µm par une procédure d'encapsulation spécifique appelé " double cap ". Quelques propriétés des boîtes individuelles d'InAs/InP sont ensuite évaluées. Les études de micro-photoluminescence révèlent des pics d'émission très fins et distincts autour de 1,55 µm confirmant les propriétés" quasi-atomiques " de ces boîtes uniques. Enfin, nous proposons pour la première fois une méthode à haute résolution spatiale qui permet d'étudier le transport de charges autour d'une boîte unique grâce à une technique de cathodoluminescence à basse tension d'accélération.Une mesure directe de la longueur de diffusion des porteurs avant capture dans une boîte a été obtenue. Ces résultats ouvrent de nouvelles perspectives quant à l'intégration de ces boîtes uniques dans des microcavités optiques pour la réalisation de sources de lumières quantiques à 1,55 µm.

abstract: High-performance III-V semiconductors based on ternary alloys and superlattice systems are fabricated, studied, and compared for infrared optoelectronic applications. InAsBi is a ternary alloy near the GaSb lattice constant that is not as thoroughly investigated as other III-V alloys and that is challenging to produce as Bi has a tendency to surface segregate and form droplets during growth rather than incorporate. A growth window is identified within which high-quality droplet-free bulk InAsBi is produced and Bi mole fractions up to 6.4% are obtained. Photoluminescence with high internal quantum efficiency is observed from InAs/InAsBi quantum wells. The high structural and optical quality of the InAsBi materials examined demonstrates that bulk, quantum well, and superlattice structures utilizing InAsBi are an important design option for efficient infrared coverage. Another important infrared material system is InAsSb and the strain-balanced InAs/InAsSb superlattice on GaSb. Detailed examination of X-ray diffraction, photoluminescence, and spectroscopic ellipsometry data provides the temperature and composition dependent bandgap of bulk InAsSb. The unintentional incorporation of approximately 1% Sb into the InAs layers of the superlattice is measured and found to significantly impact the analysis of the InAs/InAsSb band alignment. In the analysis of the absorption spectra, the ground state absorption coefficient and transition strength of the superlattice are proportional to the square of the electron-hole wavefunction overlap; wavefunction overlap is therefore a major design parameter in terms of optimizing absorption in these materials. Furthermore in addition to improvements through design optimization, the optical quality of the materials studied is found to be positively enhanced with the use of Bi as a surfactant during molecular beam epitaxy growth. A software tool is developed that calculates and optimizes the miniband structure of semiconductor superlattices, including bismide-based designs. The software has the capability to limit results to designs that can be produced with high structural and optical quality, and optimized designs in terms of maximizing absorption are identified for several infrared superlattice systems at the GaSb lattice constant. The accuracy of the software predictions are tested with the design and growth of an optimized mid-wave infrared InAs/InAsSb superlattice which exhibits superior optical and absorption properties. / Dissertation/Thesis / Doctoral Dissertation Electrical Engineering 2016

abstract: Sb-based type-II superlattices (T2SLs) are potential alternative to HgCdTe for infrared detection due to their low manufacturing cost, good uniformity, high structural stability, and suppressed Auger recombination. The emerging InAs/InAsSb T2SLs have minority carrier lifetimes 1-2 orders of magnitude longer than those of the well-studied InAs/InGaSb T2SLs, and therefore have the potential to achieve photodetectors with higher performance. This work develops a novel method to measure the minority carrier lifetimes in infrared materials, and reports a comprehensive characterization of minority carrier lifetime and transport in InAs/InAsSb T2SLs at temperatures below 77 K. A real-time baseline correction (RBC) method for minority carrier lifetime measurement is developed by upgrading a conventional boxcar-based time-resolved photoluminescence (TRPL) experimental system that suffers from low signal-to-noise ratio due to strong low frequency noise. The key is to modify the impulse response of the conventional TRPL system, and therefore the system becomes less sensitive to the dominant noise. Using this RBC method, the signal-to-noise ratio is improved by 2 orders of magnitude. A record long minority carrier lifetime of 12.8 μs is observed in a high-quality mid-wavelength infrared InAs/InAsSb T2SLs at 15 K. It is further discovered that this long lifetime is partially due to strong carrier localization, which is revealed by temperature-dependent photoluminescence (PL) and TRPL measurements for InAs/InAsSb T2SLs with different period thicknesses. Moreover, the PL and TRPL results suggest that the atomic layer thickness variation is the main origin of carrier localization, which is further confirmed by a calculation using transfer matrix method. To study the impact of the carrier localization on the device performance of InAs/InAsSb photodetectors, minority hole diffusion lengths are determined by the simulation of external quantum efficiency (EQE). A comparative study shows that carrier localization has negligible effect on the minority hole diffusion length in InAs/InAsSb T2SLs, and the long minority carrier lifetimes enhanced by carrier localization is not beneficial for photodetector operation. / Dissertation/Thesis / Doctoral Dissertation Electrical Engineering 2016

Neste trabalho apresentamos um estudo sistemático das propriedades ópticas e estruturais de super-redes de pontos quânticos auto-organizados de lnAs. As superredes foram crescidas por epitaxia de feixes moleculares sobre substratos de GaAs orientados na direção (100) com diferentes números de camadas de pontos quânticos e diferentes valores do espaçamento entre elas. As propriedades estruturais das super-redes foram observadas em seção transversal por microscopia eletrônica de transmissão convencional e de alta resolução. Os resultados permitem determinar a evolução da altura, do diâmetro e da densidade dos pontos quânticos em função da modificação da espessura da camada de espaçamento. Também observamos que pontos quânticos empilhados muito próximos tendem a relaxar através da formação de defeitos estruturais identificados como micromaclas. As propriedades ópticas foram investigadas por meio de fotoluminescência a baixa temperatura, bem como variando-se a potência de excitação e a temperatura da amostra. Reportamos um novo comportamento da posição do pico de fotoluminescência com a redução da espessura da camada de espaçamento. Interpretamos este comportamento em termos de modificação do tamanho dos pontos quânticos, acoplamento eletrônico, relaxamento parcial da tensão e formação de centros de recombinação não-radiativa. Usando essas interpretações, calculamos os espectros de fotoluminescência das super-redes, que ajustam muito bem os dados experimentais. As interpretações propostas são também sustentadas pela influência da espessura da camada de espaçamento na intensidade integrada de fotoluminescência e nas energias de ativação / In this work we present a comprehensive and systematic study of the optical and structural properties of self-organized InAs quantum dots superlattices. The superlattices were grown by molecular beam epitaxy on GaAs (100) substrates with different number of quantum dot layers and different thicknesses between these layers. Their structural properties have been observed by conventional and highresolution cross-sectional transmission electron microscopy. The results allow us to sketch the evolution of the dot height, diameter and density when the spacer layer thickness is modified in a wide range. We also observe that closely stacked quantum dots tend to relax through the formation of structural defects identified as microtwins. The optical properties have been investigated by means of conventional, power dependent- and temperature dependent photoluminescence. We report for the first time on an unusual behavior of the photoluminescence peak position when the spacer layer thickness is reduced. We interpret this behavior in terms of quantum dot size modification, electronic coupling, partial strain relaxation and non-radiative recombination centers formation. Using these interpretations, we then produce simulated photoluminescence spectra that fit very well the experimental data. These interpretations are further supported by the spacer layer thickness influence upon photoluminescence integrated intensity and activation energies.

<p> Semiconductor quantum wire (QWR) structure is a promising candidate for potential applications in long wavelength laser devices. In this thesis, the investigations were focused on the growth and characterization on the structural and optical properties of InAs quantum wires deposited on InGaAlAs lattice matched with InP substrate by gas source molecular beam epitaxy. </p> <P> The practical growth parameters were first determined by studying the samples containing single InAs layer embedded within Ino.s3Gll{)_37Alo.10As barrier layers. These parameters were then employed for fabricating multilayer quantum wires with different (1) spacer layer thicknesses; (2) quantum wire layer thicknesses; and (3) different Al concentrations in the spacer/barrier layer materials. </P> <P>Structural properties of the quantum wires were characterized by (scanning) transmission electron microscopy based techniques. The composition variation, elastic field and the variation of QWR stacking patterns in multilayer samples were qualitatively studied through diffraction contrast imaging. Quantification of the In distribution in individual QWRs and the QWR-induced In composition modulation in barrier layers were obtained by electron energy loss spectrometry and energy dispersive X-ray spectrometry, respectively. These experimentally observed structural features were explained through finite element simulations. </P> <P> The optical properties of the QWR structures were studied by photoluminescence. Optical emission at room temperature was achieved from selected multilayer QWR samples after etching and rapid thermal annealing. The emission wavelength ranging from 1.53 to 1.72 μm makes the QWR structure suitable candidates for laser device applications. </P> / Thesis / Doctor of Philosophy (PhD)

Das zentrale Ziel der vorliegenden Arbeit besteht einerseits darin, die Verteilung von Gd in GaN:Gd mit Gd-Konzentrationen von 10^16–10^19 cm^-3 mittels fortgeschrittener (Raster-) Transmissionselektronenmikroskopie [(S)TEM] zu bestimmen. Darauf basierend wird zum anderen das Verständnis des Mechanismus, der diese Verteilungen bewirkt, entwickelt. Wir diskutieren detailliert die Anwendung und die Grenzen von (S)TEM-Abbildungsmethoden und quantitativen Analysenmethoden und von Modellierungsmethoden, um Nano-Cluster in epitaktischen Halbleiterschichten zu beobachten und zu analysieren. Außerdem werden Fallstudien zweier Materialsysteme betrachtet, die offensichtlich Nano-Cluster aufweisen. Schließlich sind wir in der Lage, die in GaN:Gd auftretenden GdN-Cluster zu identifizieren und ihre atomare Struktur zu bestimmen. Dehnungskontrastabbildungen mit Kontrastberechnungen belegen eindeutig das Auftreten von kleinen, plättchenförmigen GdN-Clustern. Diese Cluster weisen nahezu gleiche Abmessungen auf und liegen mit der ausgedehnten Fläche parallel zu den GaN(0001)-Basalebenen. Dieses Ergebnis wird durch Dunkelfeld-STEM-Abbildungen (Z-Kontrast), bestätigt. Die starke, lokale Gitterdehnung (Verzerrungsfeld), die durch die Cluster hervorgerufen wird, ist in HRTEM-Aufnahmen abgebildet und quantitativ ausgewertet worden. Durch den Vergleich von Verzerrungsfeldern, die experimentell ermittelt worden sind, mit theroretischen Feldern schließen wir auf Cluster aus zweilagigen GdN-Plättchen mit einem Durchmesser von wenigen Gd-Atomen. Ihre interne Struktur entspricht etwa der NaCl-Phase des GdN. Dieses atomare Strukturmodell erlaubt unsere Diskussion der Energieverhältnisse der Cluster. Die Ergebnisse implizieren, dass die treibende Kraft für die beobachtete Plättchengröße ein Gleichgewicht zwischen der Zunahme von kohäsiver Energie und der Einschränkung durch die Dehnungsenergie an der Grenzfläche zwischen GdN-Cluster und GaN-Wirtsgitter aufgrund der Gitterfehlanpassung ist. / The central goal of this dissertation is (1) to clarify the distribution of Gd atoms in GaN:Gd with Gd concentration in the range between 10^16–10^19 cm^-3 by means of advanced (scanning) transmission electron microscopy [(S)TEM]; and based on that, (2) to understand the mechanisms that control such distribution. We discuss in detail the application and limitations of (S)TEM imaging and analysis techniques and modeling methods dedicated to the study of embedded nano-clusters. Besides, two case studies of semiconductor material systems that contain apparently observable nano-clusters are considered. One is about intentionally grown InAs nano-clusters embedded in Si and the other study the formation and phase transformation of Bi-containing clusters in annealed GaAsBi epilayers. Finally, we are able to identify the occurrence of GdN clusters in GaN:Gd samples and to determine their atomic structure. Strain contrast imaging in conjunction with contrast simulation unambiguously identifies the occurrence of small, platelet-shaped GdN clusters. These clusters are nearly uniform in size with their broader face parallel to the GaN (0001) basal plane. The result is confirmed by dark-field STEM Z-contrast imaging. The strong local lattice distortion (displacement field) induced by the clusters is recorded by HRTEM images and quantitatively analyzed. By comparing the displacement fields which are analyzed experimentally with these fields that are derived from energetically favored models, we conclude that the clusters are bilayer GdN with platelet diameter of only few Gd atoms; their internal structure is close to rocksalt GdN. This atomic structure model enables our discussion about the energetics of the clusters. The results indicate that the driving force for the formation of observed platelet in specific size is a compromise between the gain in cohesive energy and the penalty from interfacial strain energy due to lattice mismatch between the GdN cluster and GaN host.

Das gitterfehlangepaßte Kristallwachstum führt unter bestimmten Bedingungen zu einem 3-D Wachstumsmodus, der oft Stranski-Krastanow-Wachstum genannt wird. Resultierende Strukturgrößen liegen in der Größenordnung 10 nm und die Halbleiterstrukturen besitzen daher Quanteneigenschaften. Sie stehen im Fokus grundlagenwissenschaftlichen Interesses, da künstliche Atome und Dimensionalitätseffekte an ihnen untersucht werden können. Auch von der Anwendungsseite wächst das Interesse, da niederdimensionale Strukturen hoher Kristallqualität und mit hoher gestalterischer Freiheit geschaffen werden können. In dieser Arbeit wurden Mischhalbleiter-Heterostrukturen der Dimensionalität d= 0,1 und 2 mittels Gasphasen-MBE hergestellt. Ziel war eine Korrelation der strukturellen mit den elektronischen und optischen Eigenschaften. Selbstformierende Quantendrähte und Quantenpunkte in leitfähigen Kanälen wurden in ihrem Einfluß auf den lateralen Transport untersucht. Weiterhin wird dargestellt, wie zusätzliche, durch Quantenpunkte induzierte Oberflächenzustände eine deutliche Verschiebung der Energie des Oberflächen-Ferminiveau-Pinning einer (100)-GaAs-Oberfläche verursachen. Der senkrechte Elektronentransport durch Quantenpunkte dient der Untersuchung von Dot-induzierten, tiefen elektronischen Zuständen und der Erklärung eines eindimensionalen Modells elektronischer Kopplung zwischen denselben. Zusätzlich führen uns die Ergebnisse optischer Messungen zu einem besseren Verständnis des Vorgangs der Dotformierung und der elektronischen Kopplung zwischen zufällig verteilten Quantenpunkten. / The lattice-mismatched epitaxial growth is known to induce a three-dimensional growth mode often referred to as Stranski-Krastanov growth. The resulting structures have typical sizes of 10 nm and possess quantum properties, which are of fundamental physical interest, since artificial atoms and dimensionality effects can be studied. There is a growing interest from an applicational point of view also, since low dimensional structures of a high crystal quality and of a high degree of designerabillity can be created. In this work such structures of a dimensionality d=0,1 and 2 based on compound semiconductors have been designed and prepared by molecular beam epitaxy to perform comparative studies with respect to their electronic, structural and optical properties. Self assembled quantum wires and dots in conductive channels have been examined according to their influence on lateral electrical transport. It is demonstrated how additional surface states from quantum dots cause a distinct shift in the Surface Fermi-level of a GaAs (100) surface. Vertical transport through dots is used to support a model of one-dimensional coupling between deep states induced by the dots. Additionally, optical investigations let us attain a better understanding of the process of dot formation and the electronic coupling between the randomly distributed dots.

La généralisation des communications numériques (téléphonie mobile, courrier électronique, commerce électronique...) rend nécessaire la mise au point de systèmes dont la confidentialité des informations est garantie de manière absolue. L'utilisation des lois de la mécanique quantique comme moyen de cryptage répond à ce critère. Bien que les physiciens théoriciens aient commencé à réfléchir sur ce type de cryptage depuis les années 1970, les dispositifs effectivement utilisables et industrialisables à grande échelle ne sont pas encore disponibles. Parmi les dispositifs qu’il convient de développer et maîtriser, les sources de lumières capables de générer des photons à l’unité tiennent une place centrale. Une des principales difficultés rencontrées dans leur mise au point réside dans la nécessité d’atteindre une efficacité de collection de la lumière émise proche de l’unité. La solution généralement proposée consiste à maitriser leur environnement électromagnétique à l'aide de résonateurs optiques miniaturisés à l’échelle de la longueur d’onde. On peut ainsi bénéficier d'effets d’électrodynamique quantique, tel que l'effet Purcell, pour améliorer, par exemple, la dynamique et/ou la directivité d'émission des photons. La réalisation pratique de sources de photons n'a été rendue possible que par les progrès des nanotechnologies. L'utilisation de la technologie des semi-conducteurs est la voie prometteuse choisie dans ce travail, dans l'objectif de développer des composants miniaturisés et facilement intégrables, à la base d’une nouvelle génération de résonateurs optiques de taille ultime. Dans ce travail de thèse, nous proposons de développer une source de photons uniques utilisant des boites quantiques InAs -comme émetteurs uniques- incluses dans une membrane GaAs dans laquelle on réalise un résonateur optique consistant en une cavité à cristal photonique membranaire. On exploite la technologie des cristaux photoniques afin d’utiliser un unique mode optique résonant, dit mode de Bloch lent non dégénéré, opérant au-dessus de la ligne de lumière. On exploite diverses méthodes numériques pour la conception et la simulation du comportement électromagnétique des dispositifs. Nous effectuons ainsi une ingénierie fine de modes optiques permettant : (1) d'optimiser le facteur de Purcell dans une hétérostructure photonique(puits photonique analogue des puits quantiques électroniques). Nous montrons que le report de cette cavité sur un miroir de Bragg entraîne le doublement du taux de collection des photons, ainsi que de la dynamique d’émission; (2) de contrôler la directivité d'émission du mode pour améliorer l’efficacité d'extraction /collection des photons. Une étude détaillée de l’ingénierie du diagramme de rayonnement est présentée permettant d’appréhender la physique et de prévoir les caractéristiques10de l’émission du mode. Nous montrons, notamment, que la présence du miroir de Bragg peut fortement modifier la directivité d’émission. Les développements technologiques effectués en vue d'obtenir des résonateurs photoniques de hautes qualités sont également exposés. A la longueur d’onde d’émission de 900nm, choisie pour une adaptation optimale aux caractéristiques des détecteurs, la période du cristal photonique nécessaire est de l’ordre de quelques centaines de nm. Les outils et les paramètres de technologie de fabrication (par exemple, calibration de l’épaisseur du masque dur et des paramètres d’exposition de la résine par lithographie électronique) sont exposés en détail. / The current demand of digital communications (mobile phones, email, e-commerce ...) requires the development of systems which can guarantee full confidentiality. The use of quantum mechanics laws as a way of encryption is considered as an efficient way to meet confidentiality requirements. While physicists have begun to think about this type of encryption since the 1970s, the practical devices with large scale manufacturability are not yet available. Among devices to be developed, light sources capable of generating photons per unit are the most promising. One of the main difficulties encountered in their development is the need to achieve a collection efficiency of the emitted light close to unity. The solution usually proposed is to control their electromagnetic environment using optical resonators miniaturized at the wavelength scale. Thus, we can benefit from quantum electrodynamics effects, as the Purcell effect, in order to improve for example the dynamics and/or the directivity of the emitted photons. The practical realization of photon sources has been made possible by advances in nanotechnology. The use of semiconductor technology is the promising way chosen in this work, in view of developing miniaturized and easily integrated components to lay foundations for a new generation of ultimate-size optical resonators. In this thesis, we propose to develop a single photon source using InAs/GaAs quantum dots -as single emitters - inserted in a GaAs membrane. The quantum dots are coupled to an optical resonator consisting in a photonic crystal cavity formed in the GaAs membrane. Use of the photonic crystal approach allows for the generation of a single-resonant-optical mode so called non degenerated slow Bloch mode, operating above the light line, hence providing efficient communication with free space. We employ various numerical methods for designing and simulating the electromagnetic behaviours of the devices. Thus, we perform a fine engineering of the optical modes in order to:(1) optimize the Purcell factor in a photonic heterostructure (where photonics wells are equivalent to electronic quantum wells). We show that the positioning of a Bragg mirror above the cavity results in a two-fold increase of the collection efficiency of photons, as well as of their emission dynamics;(2) control the directivity of the emission diagram, thus improving the efficiency of extraction/collection of photons. A detailed engineering study of the radiation pattern is presented in12order to predict the features of the emission diagram. We show in particular that the presence of the Bragg mirror may alter the directivity of the emission if its location is not properly optimized. Technological developments meant to result in high quality photonic resonators are described. A wavelength of 900nm of the emission is chosen for an optimal matching to the detector characteristics, which requires a period of the photonic crystal in the range of a few hundreds of nm. The tools and technological parameters of manufacturing (eg, calibration of the thickness of hard mask and exposure parameters of the resist by electron beam lithography) are detailed.