This thesis considers integration of antennas and active electronics manufactured on the same substrate. The main topic is on-chip antennas for commercial silicon processes, but hybrid integration using printed circuit board technology is also addressed. The possible use of micromachining techniques as a means of reducing substrate losses of antennas manufactured on low resistivity silicon wafers is investigated. Compact dipole, loop, and inverted-F antennas for the 20-40 GHz frequency range are designed, implemented, and characterized. The results show significantly improved antenna efficiency when micromachining is used as a post-processing step for on-chip antennas manufactured in silicon technology. High resistivity wafers are used in a commercial silicon germanium technology to improve the efficiency of dipole antennas realized using the available circuit metal layers in the process. Monolithically integrated 24 GHz receivers with on-chip antennas are designed and evaluated with regard to antenna and system performance. No noticeable degradation of the receiver performance caused by cross talk between the antenna and the integrated circuit is observed. For low frequency antenna arrays, such as base station antennas, hybrid integration of active devices within the antenna aperture is treated. A compact varactor based phase shifter for traveling wave antenna applications is proposed and evaluated. Electrically steerable traveling wave patch antenna arrays, with the phase shifters implemented in the same conductor layer as the radiating elements, are designed and manufactured in microstrip technology. It is experimentally verified that the radiation from the feed network and phase shifters in the proposed antenna configuration is small.

This thesis presents development of microwave lumped elements for a specific surface-micromachining based technology, a self-contained mechanical characterization of fixed-fixed type beams and realization of a shunt, capacitive-contact RF MEMS switch for millimeter-wave applications. Interdigital capacitor, planar spiral inductor and microstrip patch lumped elements developed in this thesis are tailored for a surface-micromachining technology incorporating a single metallization layer, which allows an easy and low-cost fabrication process while permitting mass production. Utilizing these elements, a bandpass filter is fabricated monolithically with success, which exhibits a measured in-band return loss better than -20 dB and insertion loss of 1.2 dB, a pass-band located in S-band and a stop-band extending up to 20 GHz. Analytical derivations for deflection profile and spring constant of fixed-fixed beams are derived for constant distributed loads while taking axial effects into account. Having built experience with the mechanical domain, next, Finite Difference solution schemes are established for pre-pull-in and post-pull-in electrostatic actuation problems. Using the developed numerical tools / pull-in, release and zipping phenomena are investigated. In particular, semi-empirical expressions are developed for the pull-in voltage with associated errors not exceeding 3.7 % of FEA (Finite Element Analysis) results for typical configurations. The shunt, capacitive-contact RF MEMS switch is designed in electromagnetic and mechanical domains for Ka-band operation. Switches fabricated in the first process run could not meet the design specifications. After identifying sources of relevant discrepancies, a design modification is attempted and re-fabricated devices are operated successfully. In particular, measured OFF-state return and insertion losses better than -16.4 dB and 0.27 dB are attained in 1-40 GHz. By applying a 20-25V actuation, ON-state resonances are tuned precisely to 35 GHz with an optimum isolation level of 39 dB.

This thesis presents the design, fabrication and characterization of high performance and high fill factor surface micromachined uncooled infrared resistive microbolometer detectors which can be used in large format focal plane arrays (FPAs). The detector pixels, which have a pixel pitch of 25 &mu / m, are designed and fabricated as two-level structures using the enhanced sandwich type resistor while the active material is selected as Yttrium Barium Copper Oxide (YBCO). First level of the pixel structure is allocated for the formation of the support arms in order to obtain longer support arms hence lower thermal conductance values to get the desired high performance levels. The pixel body is built in the second level such that the fill factor and absorption of the detector is maximized. Structural and sacrificial layer thicknesses are also optimized in order to increase the absorption coefficient of the pixel in the 8-12 &mu / m wavelength range. The thermal simulations are conducted using finite element method (FEM) by CoventorWare software. The designed pixel has a fill factor of 92 % together with the thermal conductance and thermal time constant values calculated as 16.8 nW/K and 19.3 ms in the simulations, respectively. The pixels are fabricated at METU MEMS facilities after the design of a CMOS compatible process flow. All process steps are optimized individually to obtain the expected high performance. Characterization step of the pixels includes the measurements of temperature coefficient of resistance (TCR), noise and thermal conductance value together with the thermal time constant. Effective TCR of the pixel is measured as -2.81 %/K for a pixel with a support arm resistance of 8 k&Omega / and total resistance of 55 k&Omega / . The corner frequency of 1/f noise in the pixel is 9.5 kHz and 1.4 kHz under 20 &mu / A and 10 &mu / A current bias, respectively. The total rms noise is 192 pA within 8.4 kHz bandwidth for a current bias of 20 &mu / A. Thermal conductance, Gth, of the pixel is measured as 17.4 nW/K with a time constant of 17.5 ms. The measurement results indicate that the single pixels designed and fabricated in the scope of this thesis are applicable to large format FPAs in order to obtain a high performance imager. The expected NETD values are 33 mK and 36 mK for 384x288 and 640x480 format FPAs, respectively.

Darbe pristatomi eksperimentiniai bei teoriniai rezultatai, susiję su skaidriųjų terpių lūžio rodiklio pokyčio indukavimu. Parodoma, kad lydytą kvarcą veikiant Yb:KGV lazerine sistema generuojamais impulsais, jame galima sukurti modifikuoto lūžio rodiklio sritis. Šios sritys pasižymi dvejopu šviesos lūžimu, atsirandančiu dėl medžiagos tūryje besiformuojančių nanogardelių, o modifikuotų sričių vienalytiškumas priklauso nuo akumuliacinių efektų. Pakitusio lūžio rodiklio sritis taip pat galima formuoti ir ličio niobato kristale. Priklausomai nuo spinduliuotės parametrų, šiame kristale galima įrašyti stabilius modifikuoto lūžio rodiklio darinius, o taip pat ir nestabilias modifikacijas, atsirandančias dėl fotorefrakcinio reiškinio. Pastarąjį efektą galima panaudoti daugkartiniam informacijos įrašymui. Pademonstruoti efektyvūs fotoniniai elementai, tūrinės Brego gardelės, įrašytos tiek lydyto kvarco, tiek ličio niobato kristalo tūryje. Pateikiama metodika, skirta lazerio indukuoto lūžio rodiklio pokyčiui nustatyti matuojant Brego gardelių difrakcinius efektyvumus. Taip pat tyrinėjama kaip modifikuoti dariniai lemia superkontinuumo ir šviesos gijos formavimosi reiškinius lydytame kvarce. / The study on refractive index modification of transparent materials with ultrashort laser pulses is presented in this dissertation. Based on experimental data it was demonstrated, that using ultrashort pulses, generated with Yb:KGW laser system, it is possible to produce modified refractive index zones in the fused silica glass, that possess birefringence. This effect is caused by nanogratings that form in the bulk of the material. Homogeneity of the modified zones is determined by the accumulation effects, mainly the number of pulses that affect each area. Refractive index variations can be created also in crystalline material such as lithium niobate. Depending on the writing pulse parameters different types of modifications can be created: permanent modification that is caused by crystal amorphization and non-stable modifications that originate from the photorefractive properties of the crystal. Latter modifications can be used for three-dimensional, rewritable data recording. Highly efficient photonic elements, such as volume Bragg gratings, recorded in fused silica and lithium niobate crystal are demonstrated. The technique allowing the evaluation of refractive index change applying Bragg gratings is described. Also modification influence on nonlinear processes that appear in fused silica such as filament formation and supercontinuum generation is experimentally investigated.

The study on refractive index modification of transparent materials with ultrashort laser pulses is presented in this work. Based on experimental data it was demonstrated, that using ultrashort pulses, generated with Yb:KGW laser system, it is possible to produce modified refractive index zones in the fused silica glass, that possess birefringence. This effect is caused by nanogratings that form in the bulk of the material. Homogeneity of the modified zones is determined by the accumulation effects, mainly the number of pulses that affect each area. Refractive index variations can be created also in crystalline material such as lithium niobate. Depending on the writing pulse parameters different types of modifications can be created: permanent modification that is caused by crystal amorphization and non-stable modifications that originate from the photorefractive properties of the crystal. Latter modifications can be used for three-dimensional, rewritable data recording. Highly efficient photonic elements, such as volume Bragg gratings, recorded in fused silica and lithium niobate crystal are demonstrated. The technique, allowing the evaluation of refractive index change applying Bragg gratings, is described. Also modification influence on nonlinear processes that appear in fused silica such as filament formation and supercontinuum generation is experimentally investigated. / Darbe pristatomi eksperimentiniai bei teoriniai rezultatai, susiję su skaidriųjų terpių lūžio rodiklio pokyčio indukavimu. Parodoma, kad lydytą kvarcą veikiant Yb:KGV lazerine sistema generuojamais impulsais, jame galima sukurti modifikuoto lūžio rodiklio sritis. Šios sritys pasižymi dvejopu šviesos lūžimu, atsirandančiu dėl medžiagos tūryje besiformuojančių nanogardelių, o modifikuotų sričių vienalytiškumas priklauso nuo akumuliacinių efektų. Pakitusio lūžio rodiklio sritis taip pat galima formuoti ir ličio niobato kristale. Priklausomai nuo spinduliuotės parametrų, šiame kristale galima įrašyti stabilius modifikuoto lūžio rodiklio darinius, o taip pat ir nestabilias modifikacijas, atsirandančias dėl fotorefrakcinio reiškinio. Pastarąjį efektą galima panaudoti daugkartiniam informacijos įrašymui. Pademonstruoti efektyvūs fotoniniai elementai, tūrinės Brego gardelės, įrašytos tiek lydyto kvarco, tiek ličio niobato kristalo tūryje. Pateikiama metodika, skirta lazerio indukuoto lūžio rodiklio pokyčiui nustatyti matuojant Brego gardelių difrakcinius efektyvumus. Taip pat tyrinėjama kaip modifikuoti dariniai lemia superkontinuumo ir šviesos gijos formavimosi reiškinius lydytame kvarce.

Submitted by Izabel Franco (izabel-franco@ufscar.br) on 2016-10-06T13:50:45Z No. of bitstreams: 1 TeseMM.pdf: 4347312 bytes, checksum: a5a64729ea719b0ac57b31c2cdeeb425 (MD5) / Approved for entry into archive by Marina Freitas (marinapf@ufscar.br) on 2016-10-20T16:14:11Z (GMT) No. of bitstreams: 1 TeseMM.pdf: 4347312 bytes, checksum: a5a64729ea719b0ac57b31c2cdeeb425 (MD5) / Approved for entry into archive by Marina Freitas (marinapf@ufscar.br) on 2016-10-20T16:14:17Z (GMT) No. of bitstreams: 1 TeseMM.pdf: 4347312 bytes, checksum: a5a64729ea719b0ac57b31c2cdeeb425 (MD5) / Made available in DSpace on 2016-10-20T16:14:23Z (GMT). No. of bitstreams: 1 TeseMM.pdf: 4347312 bytes, checksum: a5a64729ea719b0ac57b31c2cdeeb425 (MD5) Previous issue date: 2016-03-23 / Coordenação de Aperfeiçoamento de Pessoal de Nível Superior (CAPES) / In this study, we present the production and characterization of a novel binary glass system: (100-x)SbPO4-xGeO2 where x = 30, 40, 50, 60, 70, 80 and 90 mol %. The dependence of GeO2 content on thermal, structural and optical properties were investigated by thermal analysis (DSC), Raman spectroscopy, UV-Visible absorption, infrared transmittance and M-lines techniques. Glass transition temperatures (Tg) shows an almost constant value around 400 °C when GeO2 content was increased. Thermal stability (ΔT = Tx-Tg) increases almost linearly with GeO2 content reaching a maximum value (300 °C). Ions Er3+ and Yb3+ were further incorporated into system SG in different proportions. Infrared and up-conversion emission processes were investigated. The emission spectra in the infrared region showed that the incorporation of Yb3+ ions into the glass composition increases the emission intensity at 1538 nm (4I13/2  4I15/2). The up-conversion processes showed a higher intensity emission at 522 nm and 544 nm (green) and 652 nm (red) regions and the emission mechanism has been the same as proposed in several works in literature. Finally, the glass sample showing the highest emission intensity at 1538 nm was chosen for micromachining using femtosecond laser. The waveguides having the lowest propagation losses were used for the optical internal gain proceeds. The best result obtained for internal gain at 1535 nm was around 1.7 dB/cm and this value is in agreement with other glass systems based on germanium and phosphates glasses present in literature. / Neste estudo, foi realizado a preparação e caracterização do sistema vítreo: (100-x) SbPO4-xGeO2 (SG), onde x varia entre 30 e 90% em mol. A dependência da concentração de GeO2 nas propriedades térmicas, ópticas e estruturais foram estudadas. O comportamento térmico foi investigado através da análise térmica (DSC), enquanto as propriedades estruturais foram estudadas por espectroscopia de espalhamento Raman. As propriedades ópticas foram avaliadas usando as espectroscopias na região do UV-Vis, infravermelho e M-Lines. No sistema SG a temperatura de transição vítrea (Tg) apresenta uma pequena variação e se encontra por volta de 400 °C quando a concentração de GeO2 foi alterada. O parâmetro de estabilidade térmica (ΔT = Tx-Tg) aumenta quase linearmente com o aumento da quantidade de GeO2, alcançando um valor máximo de 300 °C. Para o sistema SG foram incorporados ainda íons Er3+ e Yb3+ em diferentes proporções e as emissões na região do infravermelho e os processos de conversão ascendente de energia (upconversion) foram investigados. Os espectros de emissão na região do infravermelho mostram que a incorporação de íons Yb3+ na composição química do vidro, aumenta a intensidade de emissão em 1538 nm (4I13/2  4I15/2). Os processos de up-conversion mostram emissões de alta intensidade na região do verde (522 e 544 nm) e vermelho (652 nm), e os mecanismos das emissões foram estudados e propostos. Por fim, a amostra com a maior intensidade de emissão em 1538 nm foi escolhida para a realização da microfabricação de guias ópticos, usando lasers de femtossegundo. Os guias de onda que apresentaram as menores perdas por propagação, foram utilizados para as medidas de amplificação óptica.

Femtosecond laser has been an essential tool for nonlinear optics and materials processing at micrometer scale, in which chalcogenide and heavy metal oxide glasses have received special attention not only for their high third-order optical nonlinearities but also due to their transparency up to the infrared regions. Although metallic nanoparticles are expected to improve the optical properties of glasses, there are no enough experimental researches about their influence on the nonlinear refractive index (n2) and nonlinear absorption coefficient (&#946), moreover at femtosecond regime. Based on the scientific and technological interests on highly nonlinear glasses, the goal of this thesis was to apply femtosecond laser pulses in two main domains: (i) at the basis of fundamental science, to study the effect of metallic nanoparticles in the third-order nonlinear optical properties of glasses; and (ii) at the field of applied science, aiming the development of photonic devices, performed by the fabrication of 3D optical waveguides containing metallic nanoparticles. This aim was achieved through the techniques of z-scan and femtosecond laser micromachining, which provided the nonlinear optical characterization and waveguides development, respectively. First, we analyzed the third-order nonlinear optical properties of the GeO2-Bi2O3 glass containing gold nanoparticles, which promoted saturation of the absorption in the region of the surface plasmon resonance band. On the other hand, these gold nanoparticles did not affect the n2 that kept constant in the wavelength range of 480 - 1500 nm. The same features were investigated for a Pb2P2O7-WO3 matrix doped with copper nanoparticles. In contrast to the gold doped ones, these samples showed a slight enhancement of the nonlinear refractive index when the energy of the excitation approaches the surface plasmon band. We also found out that the Pb2P2O7-WO3 matrix is a good host to grow silver nanoparticles by fs-laser micromachining. Similarly, copper nanoparticles were produced in a borosilicate glass using single-step laser processing. The explanation for metallic nanoparticle formation is addressed in this thesis, as well as, its application in waveguides. Thus, we demonstrated the functionality of optical waveguides containing Cu0 or Ag0 nanoparticles. Still based on the technological interests on glasses doped with nanoparticles, we showed a single-step synthesis of silver sulfide nanoparticles in chalcogenide glass, which was carried in partnership with researches at Princeton University. The materials investigated in this PhD work are of great importance for photonics, in which the synthesis of nanoparticles, fabrication of waveguides and nonlinear optical characterization have been performed. / O laser de femtossegundos tem sido uma ferramenta essencial tanto para a óptica não-linear quanto para o processamento de materiais na escala micrométrica, na qual os vidros calcogenetos e óxidos de metais pesados têm recebido atenção especial, não apenas pelas suas elevadas não-linearidades ópticas de terceira ordem, mas também devido à sua transparência até o infravermelho. Embora seja esperado que nanopartículas metálicas melhorem as propriedades ópticas dos vidros, não existe investigações experimentais suficientes sobre a sua influência no índice de refração não linear (n2) e no coeficiente de absorção linear (&#946), sobretudo no regime de femtossegundos. Com base nos interesses científicos e tecnológicos de vidros altamente não-lineares, o objetivo deste trabalho foi aplicar pulsos laser de femtossegundos em dois domínios principais: (i) na campo da ciência fundamental, para estudar o efeito de nanopartículas metálicas nas propriedades ópticas não lineares de terceira ordem destes materiais; e (ii) no domínio da ciência aplicada, visando o desenvolvimento de dispositivos fotônicos, realizado pelo fabricação de guias de onda tridimensionais contendo nanopartículas metálicas. Este objetivo foi alcançado através das técnicas de varredura-z e microfabricação com laser de femtossegundos, que proporcionaram a caracterização óptica não-linear e o desenvolvimento de guias de onda, respectivamente. Primeiramente, foram investigadas as propriedades ópticas não-lineares de terceira ordem do vidro GeO2-Bi2O3 contendo nanopartículas de ouro, as quais promoveram saturação da absorção na região da banda de ressonância de plásmon. Por outro lado, essas nanopartículas não afetaram o n2, que se manteve constante no intervalo de comprimento de onda 480 - 1500 nm. As mesmas características foram investigadas para uma matriz Pb2P2O7-WO3 dopada com nanopartículas de cobre. Em contraste com os vidros dopados com ouro, estas amostras apresentaram um ligeiro aumento do índice de refração não linear quando a energia de excitação está próxima da banda de ressonância de plásmon. Observou-se ainda que a matriz Pb2P2O7-WO3 é ideal para a obtenção de nanopartículas de prata através da microfabricação com laser de femtossegundos. Similarmente, nanopartículas de cobre foram produzidas em vidro de borosilicato usando somente uma varredura a laser. A explicação para a formação de nanopartículas metálicas é abordada nesta tese, bem como sua aplicação em guias de onda. Deste modo, demonstrou-se a funcionalidade de guias de onda ópticos compostos por nanopartículas de Cu0 e Ag0. Ainda com base nos interesses tecnológicos em vidros dopados com nanopartículas, demonstrou-se uma síntese de nanopartículas de sulfeto de prata em vidro calcogeneto usando o processamento de única etapa, realizada em parceria com pesquisadores da Universidade de Princeton. Os materiais investigados neste trabalho de doutorado são de grande importância para aplicações em fotônica, em que a síntese de nanopartículas, a fabricação de guias de onda e a caracterização óptica não-linear foram realizadas.

Due to their inherent BW capacity, optical interconnect (OI) offers a means of replacement to BW limited copper as bottlenecks begin to appear within the various interconnect levels of electronics systems. Low-cost optically enabled printed circuit boards are a key milestone on many electronics roadmaps, e.g. iNEMI. Current OI solutions found in industry are based upon optical fibres and are capable of providing a suitable platform for inter-board applications especially on the backplane. However, to allow component assembly onto high BW interconnects, an integral requirement for intra-board applications, optically enabled printed circuit boards containing waveguides are essential. Major barriers to the deployment of optical printed circuit boards include the compatibility of the technique, the cost of acquiring OI and the optical power budget. The purpose of this PhD research programme is to explore suitable techniques to address these barriers, primarily by means of laser material processing using UV and IR source lasers namely 248 nm KrF Excimer, 355 nm UV Nd:YAG and 10.6 μm IR CO2. The use of these three main lasers, the trio of which dominates most PCB production assembly, provides underpinning drive for the deployment of this technology into the industry at a very low cost without the need for any additional system or system modification. It further provides trade-offs among the suitable candidates in terms of processing speed, cost and quality of waveguides that could be achieved. This thesis presents the context of the research and the underlying governing science, i.e. theoretical analysis, involving laser-matter interactions. Experimental investigation of thermal (or pyrolitic) and bond-breaking (or photolytic) nature of laser ablation was studied in relation to each of the chosen lasers with regression analysis used to explain the experimental results. Optimal parameters necessary for achieving minimum Heat Affected Zone (HAZ) and surface/wall roughness were explored, both of which are key to achieving low loss waveguides. While photochemical dominance - a function of wavelength and pulse duration - is desired in laser ablation of photopolymers, the author has been able to find out that photothermallyprocessed materials, for example at 10.6 μm, can also provide desirable waveguides. Although there are literature information detailing the effect of certain parameters such as fluence, pulse repetition rate, pulse duration and wavelength among others, in relation to the etch rate of different materials, the machining of new materials requires new data to be obtained. In fact various models are available to try to explain the laser-matter interaction in a mathematical way, but these cannot be taken universally as they are deficient to general applications. For this reason, experimental optimisation appears to be the logical way forward at this stage of the research and thus requiring material-system characterisation to be conducted for each case thereby forming an integral achievement of this research. In this work, laser ablation of a single-layer optical polymer (Truemode™) multimode waveguides were successfully demonstrated using the aforementioned chosen lasers, thus providing opportunities for rapid deployment of OI to the PCB manufacturing industry. Truemode™ was chosen as it provides a very low absorption loss value < 0.04 dB/cm at 850 nm datacom wavelength used for VSR interconnections - a key to optical power budget - and its compatibility with current PCB fabrication processes. A wet-Truemode™ formulation was used which required that optical polymer layer on an FR4 substrate be formed using spin coating and then UV-cured in a nitrogen oxygen-free chamber. Layer thickness, chiefly influenced by spinning speed and duration, was studied in order to meet the optical layer thickness requirement for multimode (typically > 9 μm) waveguides. Two alternative polymers, namely polysiloxane-based photopolymer (OE4140 and OE 4141) from Dow Corning and PMMA, were sparingly utilized at some point in the research, mainly during laser machining using UV Nd:YAG and CO2 lasers. While Excimer laser was widely considered for polymer waveguide due to its high quality potential, the successful fabrication at 10.6 μm IR and 355 nm UV wavelengths and at relatively low propagation loss at datacom wavelength of 850 nm (estimated to be < 1.5 dB/cm) were unprecedented. The author considered further reduction in the optical loss by looking at the effect of fluence, power, pulse repetition rate, speed and optical density on the achievable propagation but found no direct relationship between these parameters; it is therefore concluded that process optimisation is the best practice. In addition, a novel in-plane 45-degree coupling mirror fabrication using Excimer laser ablation was demonstrated for the first time, which was considered to be vital for communication between chips (or other suitable components) at board-level.

In this study we applied ultra-short laser pulses on a biological sample (Arabidopsis), in order to cut it precisely in a square pattern and subsequently use it for studying stress generation mechanisms. For this purpose, we utilized femtosecond laser pulses at 100 fs pulse width and 80 MHz repetition rate. We took two processing parameters into consideration such as laser power, laser exposure time which is related to the stage speed. Therefore, we were able to find the laser optimum conditions for ablation of biological tissues. The mutant and wildtype (control) obtained from laser cutting with a size of 500 µm × 500 µm were directly transferred (in-situ with laser cutting) into a microfabricated chamber containing ~500 nanoliters deionized water for measuring ion conductivity. The ion conductivity is a signature of cell-death mechanisms caused by various stresses. A light with intensity of 100 µmol was exposed to the samples for 2 hours and 20 minutes as a source of stress. A quantitative electrical analysis with high accuracy was assured by utilizing a microchamber, which enables a measurement in nanoliter volume. We measured the impedance which is reciprocal of conductivity using a lock-in amplifier and a precise current source at frequency of 130 Hz. Initially high impedance of mutant sample tended to drop within 2 hours and finally approached the constant value which signified that the cell death mechanism was complete. However, the wildtype sample demonstrated approximately constant impedance (conductivity) during the experiment.

The dissertation thesis is focused on research and development of modern emission MEMS sensors. The emission sensor based on the field emission from nanostructured materials represents innovative approach to pressure sensing. The nanostructures serve as electron emitter in an electric field between the cathode and anode in the pressure sensor. This electric field is constant and the change in ambient pressure causes the change of distance between electrodes, thereby the electric field is increasing. This intensity is proportional to the emission from the cathode made of nanostructured material. Changing the distance between the electrodes is caused by the deflection of the deformation element - the membrane, which operates the measured pressure. In the current state of the art an extensive research is carried out to find new nanostructured materials with good emission properties. Four nanostructured materials have been chosen and then experimentally prepared and characterized inside the vacuum chamber. For the simulation of diaphragm bending, the chamber is equipped with linear nano-motion drive SmarAct that enables precise changes of the distance between two electrodes inside the vacuum chamber. The computer model to predict the deformation of diaphragm was prepared in the simulation program CoventorWare. The behavior of diaphragm in a wide range of dimensions of the membrane, its thickness and the applied pressure are possible to predict. The dependencies of the current density on the electric field are plotted from the measured emission characteristics of nanostructured materials and thus characterized nanostructured materials can be compared. The dependencies are further converted by Fowler-Nordheimovy theory on the curve (ln(J/E2) vs. 1/E), whose advantage is linear shape. Basic parameters describing the emission properties of characterized nanostructured materials are deducted. Two methods for vacuum packaging of the sensor electrodes are designed. Anodic bonding technology and encapsulating using glass frit bonding are tested. To evaluate the bonding strength, the bonded substrates are tested for tensile strength.