Diese Arbeit beschreibt eine ausfŸhrliche Untersuchung der physikalischen Eigenschaften von Mikrokugelresonatoren aus Quarzglas. Diese Resonatoren unterstŸtzen sogennante whispering-gallery Moden (WGM), die GŸten so hoch bis 109 bieten. Als experimentelle Hilfsmittel wurden ein Nahfeld- und ein Konfokalmikroskop benutzt, um die Struktur der Moden bezŸglich der Topographie des Resonators eindeutig zu identifizieren, oder um einzelne Quantenemitter zu detektieren und anzuregen. Die resonante †berhšhung des elektromagnetischen Feldes in den Moden des Resonators wurde ausgenutzt, um stimulierte Raman-Streuung mit extrem niedrigem Schwellenwert im Quarzglas zu beobachten. Ein Rekordschwellenwert von 4.5 Mikrowatts wurde gemessen. Mittels einer Nahfeldsonde wurde die Modenstruktur des Mikro-Ramanlasers gemessen. Mikroresonatoren stellen einen Grundbaustein der Resonator-Quantenelektrodynamik dar. In dieser Arbeit wurde die Kopplung von einem einzelnen strahlenden Dipol an die WGM sowohl theoretisch als auch experimentell untersucht. Die kontrollierte Kopplung von einem einzelnen Nanoteilchen an die WGM eines Mikrokugelresonators wurde nachgewiesen. Erste Ergebnisse in der Kopplung eines einzelnen Emitters an die Moden des Resonators wurden erzielt. Die resonante Wechselwirkung mit Resonatormoden wurde ausgenutzt, um den Photonentransfer zwischen zwei Nanoteilchen dramatisch zu verstŠrken. Schlie§lich wurde die bislang unbeachtete Analogie zwischen dem Quantensystem eines einzelnen Emitters in Wechselwirkung mit einer einzelnen Resonatormode und dem klassischen System zweier gekoppelten Moden experimentell untersucht. Es wurde bewiesen, wie die aus der Resonatorquantenelektrodynamik bekannten Kopplungsregime der starken und schwachen Kopplung in Analogie auch an einem klassischen System beobachtet werden kšnnen. Der †bergang von schwacher zu starker Kopplung wurde beobachtet, und bislang gemessene unerwartet hohe Kopplungsraten konnten einfach erklŠrt werden. / This work presents an extensive study of the physical properties of silica microsphere resonators, which support whispering-gallery modes (WGMs). These modes feature Q-factors as high as 109 corresponding to a finesse of 3 millions for spheres with a diameter of about 80 micrometers. These are to date among the highest available Q-factors, leading to cavity lifetimes of up to few microseconds. A near-field microscope and a confocal microscope are used as tools to unequivocally identify the mode structure related to the sphere topography, and for excitation and detection of single quantum emitters. The high field enhancement of the cavity modes is exploited to observe ultra-low threshold stimulated Raman scattering in silica glass. A record ultra-low threshold of 4.5 microwatts was recorded. The mode structure of the laser is investigated by means of a near-field probe, and the interaction of the probe itself with the lasing properties is investigated in a systematic way. Microcavities also one of the building blocks of Cavity QED. Here, the coupling of a radiative dipole to the whispering-gallery modes has been studied both theoretically and experimentally. The controlled coupling of a single nanoparticle to the WGMs is demonstrated, and first results in coupling a single quantum emitter to the modes of a microsphere are reported. The resonant interaction with these modes is exploited to enhance photon exchange between two nanoparticles. Finally a novel analogy between a system composed of a single atom interacting with one cavity mode on one side and intramodal coupling in microsphere resonators induced by a near-field probe on the other side is presented and experimentally explored. The induced coupling regimes reflect the different regimes of weak and strong coupling typical of Cavity QED. The transition between the two coupling regimes is observed, and a previously observed unexpectedly large coupling rate is explained.

This work is devoted to investigate light confinement in rolled-up microtubular cavities and their optofluidic applications. The microcavities are fabricated by a roll-up mechanism based on releasing pre-strained silicon-oxide nanomembranes. By defining the shape and thickness of the nanomembranes, the geometrical tube structure is well controlled. Micro-photoluminescence spectroscopy at room temperature is employed to study the optical modes and their dependence on the structural characteristics of the microtubes. Finite-difference-time-domain simulations are performed to elucidate the experimental results. In addition, a theoretical model (based on a wave description) is applied to describe the optical modes in the tubular microcavities, supporting quantitatively and qualitatively the experimental findings. Precise spectral tuning of the optical modes is achieved by two post-fabrication methods. One method employs conformal coating of the tube wall with Al2O3 monolayers by atomic-layer-deposition, which permits a mode tuning over a wide spectral range (larger than one free-spectral-range). An average mode tuning to longer wavelengths of 0.11nm/ Al2O3-monolayer is obtained. The other method consists in asymmetric material deposition onto the tube surface. Besides the possibility of mode tuning, this method permits to detect small shape deformations (at the nanometer scale) of an optical microcavity. Controlled confinement of resonant light is demonstrated by using an asymmetric cone-like microtube, which is fabricated by unevenly rolling-up circular-shaped nanomembranes. Localized three-dimensional optical modes are obtained due to an axial confinement mechanism that is defined by the variation of the tube radius and wall windings along the tube axis. Optofluidic functions of the rolled-up microtubes are explored by immersing the tubes or filling their core with a liquid medium. Refractive index sensing of liquids is demonstrated by correlating spectral shift of the optical modes when a liquid interacts with the resonant light of the microtube. In addition, a novel sensing methodology is proposed by monitoring axial mode spacing changes. Lab-on-a-chip methods are employed to fabricate an optofluidic chip device, allowing a high degree of liquid handling. A maximum sensitivity of 880 nm/refractive-index-unit is achieved. The developed optofluidic sensors show high potential for lab-on-a-chip applications, such as real-time bio/chemical analytic systems.

Vertically rolled-up microcavities are fabricated using differentially strained nanomembranes by employing rate and temperature gradients during electron beam evaporation of SiO2. The geometry of the rolled-up tubes is defined by a photo-lithographically patterned polymer sacrificial layer beneath the SiO2 layers that is dissolved to start the rolling. Rolled-up tubes support resonances formed by constructive interference of light propagating along the circumference. Optical studies are performed in the visible spectral range using a micro-photoluminescence (µPL) setup to excite and detect optical modes. Record high quality factors (Q factors) of 5400 for rolled-up resonators probed in PL-emission mode are found and their limits are theoretically investigated. Axial modes can also be supported when an increased winding number in the center is realized by appropriate pattern designs. In addition, higher order radial modes can be confined when atomic layer deposition (ALD) coatings are applied. Both types of modes are identified using polarization and spatially resolved µPL maps. Evanescent-wave coupling by tapered fibers and tubes on substrates is the second method used to study light confinement and to demonstrate frequency filtering in ALD coated rolled-up microcavities. Scans are performed by monitoring light from a tunable laser in the range of 1520-1570 nm after transmission through the tapered fiber. Dips in the spectrum are found and attributed to fundamental and axial resonant modes. Moreover, by coupling two tapered fibers to a lifted rolled-up microcavity, a four-port add-drop filter is demonstrated as a future component for vertical resonant light transfer in on-chip optical networks. Simulations show that the subwavelength tube wall thickness limits the Q factor at infrared wavelengths and ALD coatings are necessary to enhance the light confinement. After coating, two linear polarization states are found in experiment and fundamental and axial modes can be selectively excited by coupling the fiber to different positions along the tube axis. Spatially and polarization resolved transmission maps reveal a polarization dependent axial mode distribution which is verified theoretically. The results of this thesis are important for lab-on-chip applications where rolled-up microcavities are employed as high resolution optofluidic sensors as well as for future uses as waveguide coupled components in three-dimensional multi-level optical data processing units to provide resonant interlayer signal transfer.

Vertically rolled-up microcavities are fabricated using differentially strained nanomembranes by employing rate and temperature gradients during electron beam evaporation of SiO2. The geometry of the rolled-up tubes is defined by a photo-lithographically patterned polymer sacrificial layer beneath the SiO2 layers that is dissolved to start the rolling. Rolled-up tubes support resonances formed by constructive interference of light propagating along the circumference. Optical studies are performed in the visible spectral range using a micro-photoluminescence (µPL) setup to excite and detect optical modes. Record high quality factors (Q factors) of 5400 for rolled-up resonators probed in PL-emission mode are found and their limits are theoretically investigated. Axial modes can also be supported when an increased winding number in the center is realized by appropriate pattern designs. In addition, higher order radial modes can be confined when atomic layer deposition (ALD) coatings are applied. Both types of modes are identified using polarization and spatially resolved µPL maps. Evanescent-wave coupling by tapered fibers and tubes on substrates is the second method used to study light confinement and to demonstrate frequency filtering in ALD coated rolled-up microcavities. Scans are performed by monitoring light from a tunable laser in the range of 1520-1570 nm after transmission through the tapered fiber. Dips in the spectrum are found and attributed to fundamental and axial resonant modes. Moreover, by coupling two tapered fibers to a lifted rolled-up microcavity, a four-port add-drop filter is demonstrated as a future component for vertical resonant light transfer in on-chip optical networks. Simulations show that the subwavelength tube wall thickness limits the Q factor at infrared wavelengths and ALD coatings are necessary to enhance the light confinement. After coating, two linear polarization states are found in experiment and fundamental and axial modes can be selectively excited by coupling the fiber to different positions along the tube axis. Spatially and polarization resolved transmission maps reveal a polarization dependent axial mode distribution which is verified theoretically. The results of this thesis are important for lab-on-chip applications where rolled-up microcavities are employed as high resolution optofluidic sensors as well as for future uses as waveguide coupled components in three-dimensional multi-level optical data processing units to provide resonant interlayer signal transfer.

This work is devoted to investigate light confinement in rolled-up microtubular cavities and their optofluidic applications. The microcavities are fabricated by a roll-up mechanism based on releasing pre-strained silicon-oxide nanomembranes. By defining the shape and thickness of the nanomembranes, the geometrical tube structure is well controlled. Micro-photoluminescence spectroscopy at room temperature is employed to study the optical modes and their dependence on the structural characteristics of the microtubes. Finite-difference-time-domain simulations are performed to elucidate the experimental results. In addition, a theoretical model (based on a wave description) is applied to describe the optical modes in the tubular microcavities, supporting quantitatively and qualitatively the experimental findings. Precise spectral tuning of the optical modes is achieved by two post-fabrication methods. One method employs conformal coating of the tube wall with Al2O3 monolayers by atomic-layer-deposition, which permits a mode tuning over a wide spectral range (larger than one free-spectral-range). An average mode tuning to longer wavelengths of 0.11nm/ Al2O3-monolayer is obtained. The other method consists in asymmetric material deposition onto the tube surface. Besides the possibility of mode tuning, this method permits to detect small shape deformations (at the nanometer scale) of an optical microcavity. Controlled confinement of resonant light is demonstrated by using an asymmetric cone-like microtube, which is fabricated by unevenly rolling-up circular-shaped nanomembranes. Localized three-dimensional optical modes are obtained due to an axial confinement mechanism that is defined by the variation of the tube radius and wall windings along the tube axis. Optofluidic functions of the rolled-up microtubes are explored by immersing the tubes or filling their core with a liquid medium. Refractive index sensing of liquids is demonstrated by correlating spectral shift of the optical modes when a liquid interacts with the resonant light of the microtube. In addition, a novel sensing methodology is proposed by monitoring axial mode spacing changes. Lab-on-a-chip methods are employed to fabricate an optofluidic chip device, allowing a high degree of liquid handling. A maximum sensitivity of 880 nm/refractive-index-unit is achieved. The developed optofluidic sensors show high potential for lab-on-a-chip applications, such as real-time bio/chemical analytic systems.