In this thesis work, a systematic quantitative study has been undertaken, on the performance of etched fiber Bragg Grating (FBG) sensors in the investigation of surface molecular adsorption in real-time; it is shown that the limit of detection (LOD) of FBGs etched below 2 microns diameter, is better compared to prominent optical label-free molecular sensing techniques such as Surface Plasmon Resonance (SPR). Novel fiber optic sensors based on FBG and etched FBG with various nano materials (polyelectrolytes, carbon nanotubes, hydrogel, metals and chalcogenides) coated on the surface of the core or cladding, have been proposed for sensing multi parameters such as pH, protein, humidity, gas, strain, temperature, and light etc. Besides being reproducible and repeatable, the proposed methods are fast, compact, and highly sensitive. A novel optical instrument has also been developed to measure angular deviation, binocular deviation and refractive index of glass slabs, and liquids, based on a shadow casting technique. This method uses the deviation in the geometrical shadow cast by a periodic dot pattern trans-illuminated by a distorted light beam from the transparent test specimen relative to a reference pattern.

Die vorliegende Arbeit beschäftigt sich mit den Transporteigenschaften defektbehafteter Kohlenstoffnanoröhrchen (CNTs). Als Beispiel werden dabei einfache und doppelte Fehlstellen betrachtet. Der Fokus liegt auf der Berechnung des Transmissionsspektrums und der Leitfähigkeit mit einem schnellen, linear skalierenden rekursiven Greenfunktions-Formalismus, mit dem große Systeme quantenmechanisch behandelt werden können. Als Grundlage wird ein dichtefunktionalbasiertes Tight-Binding-Modell verwendet. Der Einfluss der Defektdichte und des CNT-Durchmessers wird im Rahmen einer statistischen Analyse untersucht. Es wird gezeigt, dass im Grenzfall kleiner Transmission die Leitfähigkeit exponentiell mit der Defektanzahl skaliert. Das System befindet sich im Regime starker Lokalisierung, wobei die Lokalisierungslänge von der Defektdichte und dem CNT-Durchmesser abhängt.

Exploring new technologies that can meet the world’s energy demands in an efficient and clean manner is critically important due to the depletion of natural resources and environmental concerns. Dye-sensitized solar cells (DSSCs) are low-cost and clean technology options that use solar energy efficiently and are being intensively studied. How to further reduce the cost of this technology while enhancing device performance is one of the demanding issues for large scale application and commercialization of DSSCs. In this research dissertation, four main contributions are made in this regard with the motivation to reduce further cost of DSSC technology. Firstly, ~10% efficiencies were achieved after developing understanding of key concepts and procedures involved in DSSCs fabrication. These efficiencies were achieved after step-by-step modifications in the DSSC design. Secondly, carbon nanotubes (CNTs) were successfully employed as an alternative to Pt in the counter electrodes of DSSCs. DSSCs fabricated with CNTs were ~86% as efficient as Pt-based cells. Non-aligned CNTs were successfully grown using four different CVD methods and finally, multi-walled vertically aligned CNTs (MW-VACNTs) were synthesized using water-assisted chemical vapor deposition (WA-CVD). Thirdly, carbon derived from pyrolysis of nanocrystalline cellulose (NCC) was successfully employed in counter electrodes of DSSCs instead of Pt. DSSCs with NCC were ~58% as efficient as Pt-based DSSCs. Fourthly, novel organic metal-free dyes were designed and employed instead of commonly used Ru-based dyes. DSSCs with these novel sensitizers were ~62% as efficient as those using the conventional Ru-based dyes. Characterization techniques including current-voltage measurements, scanning electron microscopy (SEM), electrochemical impedance spectroscopy (EIS), cyclic voltammetery (CV), thermogravimetric analysis (TGA), small angle x-ray scattering (SAXS), atomic force microscopy (AFM) and x-ray photoelectron spectroscopy (XPS) were used.

Cette thèse étudie expérimentalement le mécanisme de couplage entre les degrés de liberté de charge et de spin dans des doubles boîtes quantiques et des cavités supraconductrices de grande finesse. Nous utilisons des nanotubes de carbone comme conducteurs cohérents pour nos boîtes quantiques. Nous avons conçu une expérience et développé de nouvelles méthodes de fabrication afin de pouvoir contrôler ces dispositifs. Avec ces méthodes, nous examinons le couplage résonant entre les transitions électroniques de charge dans les boîtes quantiques et la cavité micro-onde. Nous poussons le système hors équilibre pour caractériser sa dynamique et extraire ses paramètres intrinsèques. Nous étudions la possibilité d'un couplage de photons uniques avec un spin électronique individuel, en utilisant des champs effectifs non colinéaires induits par des interfaces ferromagnétiques comme ingrédient clef pour construire ce couplage. Les résultats préliminaires dans cette architecture en circuit sont prometteurs pour de futures expériences d'électrodynamique quantique en cavité avec des spins uniques.

(ULSI) causes an increase of the resistance of the wiring system by increased scattering of electrons at side walls and grain boundaries in the state of the art Cu technology, which increases the RC delay of the interconnect system and thus degrades the performance of the device. The outstanding properties of carbon nanotubes (CNT) such as a large mean free path, a high thermal conductance and a large resistance against electromigration make them an ideal candidate to replace Cu in future feature nodes. The present thesis contributes to the preparation and properties of CNT based vertical interconnections (vias). In addition, all processes applied during the fabrication are compatible to ULSI and an interface between CNT based vias and a Cu metallization is studied. The methodology for the evaluation of CNT based vias is improved; it is highlighted that by measuring the resistance of one multiwall CNT and taking into account the CNT density, the performance of the CNT based vias can be predicted accurately. This provides the means for a systematic evaluation of different integration procedures and materials. The lowest contact resistance is obtained for carbide forming metals, as long as oxidation during the integration is avoided. Even though metal-nitrides exhibit an enhanced contact resistance, they are recommended to be used at the bottom metallization in order to minimize the oxidation of the metal-CNT contact during subsequent processing steps. Overall a ranking for the materials from the lowest to the highest contact resistance is obtained: Ta < Ti < TaN < TiN « TiO2 « Ta2O5 Furthermore the impact of post CNT growth procedures as chemical mechanical planarization, HF treatment and annealing procedures after the CNT based via fabrication are evaluated. The conductance of the incorporated CNTs and the applicable electrical transport regime relative to the CNT quality and the CNT length is discussed. In addition, a strong correlation between the temperature coefficient of resistance and the initial resistance of the CNT based vias at room temperature has been observed. / Die kontinuierliche Miniaturisierung der charakteristischen Abmessungen in hochintegrierten Schaltungen (ULSI) verursacht einen Anstieg des Widerstandes im Zuleitungssystem aufgrund der erhöhten Streuung von Elektronen an Seitenwänden und Korngrenzen in der Cu-Technologie, wodurch die Verzögerungszeit des Zuleitungssystems ansteigt. Die herausragenden Eigenschaften von Kohlenstoffnanoröhren (CNT), wie eine große mittlere freie Weglänge, hohe thermische Leitfähigkeit und eine starke Resistenz gegenüber Elektromigration machen diese zu einem idealen Kandidaten, um Cu in zukünftigen Technologiegenerationen zu ersetzen. Die vorliegende Arbeit beschreibt die Herstellung und daraus resultierenden Eigenschaften von Zwischenebenenkontakten (Vias) basierend auf CNTs. Alle verwendeten Prozessierungsschritte sind kompatibel mit der Herstellung von hochintegrierten Schaltkreisen und eine Schnittstelle zwischen den CNT Vias und einer Cu-Metallisierung ist vorhanden. Insbesondere das Verfahren zur Evaluierung von CNT Vias wurde durch den Einsatz verschiedener Methoden verbessert. Insbesondere soll hervorgehoben werden, dass durch die Messung des Widerstandes eines einzelnen CNTs, bei bekannter CNT Dichte, der Via Widerstand sehr genau vorausgesagt werden kann. Dies ermöglicht eine systematische Untersuchung des Einflusses der verschiedenen Prozessschritte und der darin verwendeten Materialien auf den Via Widerstand. Der niedrigste Kontaktwiderstand wird für Karbidformierende Metalle erreicht, solange Oxidationsprozesse ausgeschlossen werden können. Obwohl Metallnitride einen höheren Kontaktwiderstand aufweisen, sind diese für die Unterseitenmetallisierung zu empfehlen, da dadurch die Oxidation der leitfähigen Schicht minimiert wird. Insgesamt kann eine Reihenfolge beginnend mit dem niedrigsten zum höchsten Kontaktwiderstand aufgestellt werden: Ta < Ti < TaN < TiN « TiO2 « Ta2O5 Desweiteren wurde der Einfluss von Verfahren nach dem CNTWachstum wie die chemischmechanische Planarisierung, eine HF Behandlung und einer Temperaturbehandlung evaluiert, sowie deren Einfluss auf die elektrischen Parameter des Vias untersucht. Die Leitfähigkeit der integrierten CNTs und die daraus resultierenden elektrischen Transporteigenschaften in Abhängigkeit der CNT Qualität und Länge werden besprochen. Ebenso wird die starke Korrelation zwischen dem Temperaturkoeffizienten des elektrischen Widerstandes und des Ausgangswiderstandes der CNT basierten Vias bei Raumtemperatur diskutiert.

Biomolecular interactions, including protein-protein, protein-DNA, and protein-ligand interactions, are of special importance in all biological systems. These interactions may occer during the loading of biomolecules to interfaces, the translocation of biomolecules through transmembrane protein pores, and the movement of biomolecules in a crowded intracellular environment. The molecular interaction of a protein with its binding partners is crucial in fundamental biological processes such as electron transfer, intracellular signal transmission and regulation, neuroprotective mechanisms, and regulation of DNA topology. In this dissertation, a customized surface plasmon resonance (SPR) has been optimized and new theoretical and label free experimental methods with related analytical calculations have been developed for the analysis of biomolecular interactions. Human neuroglobin (hNgb) and cytochrome c from equine heart (Cyt c) proteins have been used to optimize the customized SPR instrument. The obtained Kd value (~13 µM), from SPR results, for Cyt c-hNgb molecular interactions is in general agreement with a previously published result. The SPR results also confirmed no significant impact of the internal disulfide bridge between Cys 46 and Cys 55 on hNgb binding to Cyt c. Using SPR, E. coli topoisomerase I enzyme turnover during plasmid DNA relaxation was found to be enhanced in the presence of Mg2+. In addition, a new theoretical approach of analyzing biphasic SPR data has been introduced based on analytical solutions of the biphasic rate equations. In order to develop a new label free method to quantitatively study protein-protein interactions, quartz nanopipettes were chemically modified. The derived Kd (~20 µM) value for the Cyt c-hNgb complex formations matched very well with SPR measurements (Kd ~16 µM). The finite element numerical simulation results were similar to the nanopipette experimental results. These results demonstrate that nanopipettes can potentially be used as a new class of a label-free analytical method to quantitatively characterize protein-protein interactions in attoliter sensing volumes, based on a charge sensing mechanism. Moreover, the molecule-based selective nature of hydrophobic and nanometer sized carbon nanotube (CNT) pores was observed. This result might be helpful to understand the selective nature of cellular transport through transmembrane protein pores.

This thesis deals with several aspects of the structure and dynamics of water molecules confined in nanoscopic pores. Water molecules confined in hydrophobic nanocavities exhibit unusual structural and dynamic properties. Confining walls of single-wall carbon nanotubes (SWCNTs) promote strong inter-water hydrogen bonding which in turn leads to several novel structural, dynamic and thermodynamic features not found in bulk water. Confined water molecules form ordered hydrogen-bonded networks, exhibit exceptionally high flow rates as compared to conventional flow in pipes, allow fast proton conduction and exhibit various other anomalous properties. Proteins are known to exploit some of the properties of confined water to perform certain physiological functions. Various properties of confined water can also be exploited in the design of nanofludic devices such as those for desalination and flow sensors. In addition, water molecules confined in SWCNTs and near graphene sheets serve as model systems to study various effects of confinement on the properties of liquids. In this thesis, we present the results of detailed molecular dynamics simulation studies of confined water molecules. In chapter 1, we summarize the findings of existing simulations and experimental studies of bulk and confined water molecules. We also highlight the significance of studying the structure and dynamics of confined water molecules in biological and biotechnological applications. Chapter 2 provides a brief ac-count of the methods and techniques used to perform the simulations described in subsequent chapters of the thesis. We also present a brief overview of the methods used to extract physical properties of water molecules from simulation data, with emphasis on the Two Phase Thermodynamics (2PT) method which we have used to compute the entropy of confined and bulk water molecules. In chapter 3, we discuss the thermodynamics of water entry in SWCNTs of various diameters. Experiments and computer simulations demonstrate that water spontaneously fills the interior of a carbon nanotube. Given the hydrophobic nature of the interior of carbon nanotubes and the strong confinement produced by narrow nanotubes, the spontaneous entry of water molecules in the pores of such nanotubes is surprising. To gain a quantitative thermodynamic understanding of this phenomenon, we use the recently developed Two Phase Thermodynamics (2PT) method to compute translational and rotational entropies of water molecules confined in SWCNTs and show that the increase in energy of a water molecule inside the nanotube is compensated by the gain in its rotational entropy. The confined water is in equilibrium with the bulk water and the Helmholtz free energy per water molecule of confined water is the same as that in the bulk within the accuracy of the simulation results. A comparison of translational and rotational spectra of water molecules confined in carbon nanotubes with those of bulk water shows significant shifts in the positions of spectral peaks that are directly related to the tube radius. These peaks are experimentally accessible and can be used to characterize water dynamics from spectroscopy experiments. We have also computed the free-energy transfer when a bulk water molecule enters a SWCNT for various temperatures and carbon-water interactions. We show that for reduced carbon-oxygen interaction, the free energy transfer is unfavourable and the SWCNT remains unoccupied for significant periods of time. As the temperature is increased, the free energy of confined water becomes unfavourable and reduced occupancy of water is observed. Bulk water exhibits many anomalous properties. No single water model is able to reproduce all properties of bulk water. Different empirical water models have been developed to reproduce different properties of water. In chapter 4, a comparative study of the structure, dynamics and thermodynamic proper-ties of water molecules confined in narrow SWCNTs, obtained from simulations using several water models including polarizable ones, is presented. We show that the inclusion of polarizability quantitatively affects the nature of hydro-gen bonding which governs different properties of water molecules. The SPC/E water model is shown to reproduce results in close agreement with those from polarizable water models with much less computational cost. In chapter 5, we report results obtained from simulations of the properties of water confined in the space between two planar surfaces. We consider three cases: two graphene surfaces, two Boron Nitride (BN) surfaces and one graphene and one BN surface. This is the first detailed study of the behaviour of water near extended BN surfaces. We show that the hydrophilic nature of the BN surface leads to several interesting effects on the dynamics of water molecules near it. We have observed a change in the activation energy, extracted from the temperature dependence of the translational and rotational dynamics, near 280K. This change in activation energy coincides with a change in the structure of the confined sheet of water, indicated by a sudden change in energy. We have also found signatures of glassy dynamics at low temperatures for all three cases, the glassy effects being the strongest for water molecules confined between two BN sheets. These results are similar to those of earlier studies in which novel phases of water have been found for water molecules confined between other surfaces at high pressure. In chapter 6, we have described our observation of a novel phenomenon exhibited by water molecules flowing through a SWCNT under a pressure gradient. We have shown that the flow induces changes in the orientation of the water molecules flowing through the nanotube. In particular, the dipole moments of the water molecules inside the nanotube get aligned along the axis of the nanotube under the effect of the flow. With increasing flow velocities, the net dipole moment first increases and eventually saturates to a constant value. This behaviour is similar to the Langevin theory of paramagnetism with the flow velocity acting as an effective aligning field. Preferential entry of water molecules with dipole moments pointing inward is shown to be the main cause of this effect. This observation provides a way to control the dipolar alignment of water molecules inside nano-channels, with possible applications in nanofluidic devices. Chapter 7 contains a summary of our main results and a few concluding re-marks.

Kohlenstoffnanoröhrchen (engl. carbon nanotube, CNT) sind vielversprechende Kandidaten für den Ersatz von Kupferleitbahnen die bei weiterer Strukturverkleinerung von integrierten Schaltkreisen notwendig wird. In dieser Arbeit wird mit Hilfe von ab-initio Simulationen auf Basis der Dichtefunktionaltheorie die elektronische Struktur von halbleitenden CNTs beispielhaft anhand des (8,4)-CNTs untersucht. Nach Besetzung des CNT mit Metallatomen, hier Kobalt, zeigen sich massive Änderungen der Bandstruktur. Es reichen bereits überraschend kleine Mengen des Metalls aus, um einen starken Effekt zu erreichen. Die Änderungen der elektronischen Struktur sind stark abhängig von der genauen Position der Metallatome relativ zum Kohlenstoffgerüst der CNTs, der Einfluss der mechanischen Verformung des CNTs als Reaktion auf die Anlagerung ist hingegen sehr gering. Die relevanten Bänder der Kobaltatome liegen leicht unterhalt der Fermi-Energie und sorgen bei der Integration in die Bandstruktur des CNTs für die Schließung der Bandlücke und somit für die Transformation eines vorher halbleitenden CNTs in ein leitendes. Diese Transformation konnte auch mit Simulationsrechnungen zum Elektronentransport bestätigt werden. Ferner wurden bei weiteren Rechnungen eine ausgeprägte Spinabhängigkeit der Bandstruktur ermittelt, welche noch weiterer Untersuchung bedarf.

Carbon nanotubes (CNTs) are a highly promising material for future interconnects. It is expected that the decoration of CNTs with Cu particles or also the filling of the interspaces between the CNTs with Cu instead of the currently used SiO2 can enhance the performance of CNT-based interconnects. Due to the high aspect ratio of CNTs an appropriate deposition technique has to be applied which is able to coat such structures uniformly. The current work is therefore considered with thermal atomic layer deposition (ALD) of CuxO from the liquid Cu (I) β-diketonate precursor [(nBu3P)2Cu(acac)] and wet oxygen at 135°C on variously pretreated multi-walled CNTs. The different in-situ pre-treatments of the CNTs with oxygen, water vapor and wet oxygen in a temperature range from 100 to 300°C at a pressure of 1.33 mbar have been carried out prior to the ALD to enable uniform nucleation on the otherwise chemical inert CNT surface. The reduction of the CuxO as well as the filling of the space between the CNTs is not part of this work. Variations of the oxidation temperature as well as the oxidation agents resulted in different growth modes of the CuxO. An oxidation with wet oxygen at 300°C yielded in a partially layer like growth of the CuxO. It is expected that this growth mode is connected to a partial destruction of the outer CNT shell due to the oxidation. However, the damage introduced to the CNTs was not high enough to be detected by Raman spectroscopy. For all other investigated pretreatments, the formation of nanoparticles (NPs) was observed by electron microscopy. This formation of CuxO NPs can be explained by the metal-tube-interaction. Furthermore, the NPs probably decorate defect sites of the CNTs due to their higher reactivity. Additionally, analysis of energy-dispersive X-ray spectroscopy and spectroscopic ellipsometry measurements suggests that the used precursor [(nBu3P)2Cu(acac)] requires reactive oxygen surface groups for initiating the ALD growth. The observation of layer-like growth of CuxO on CNTs pretreated with wet oxygen at 300°C appears promising for deposition processes of Cu seed layers on CNTs. However, more aggressive pretreatments at higher temperatures or with more aggressive oxidation agents could be required to enable layer like growth on the entire CNTs.

Ever since their discovery in 1991, carbon nanotubes are of great interest to the scientific community due to their outstanding optical, mechanical and electrical properties. Considering their impressive properties, as for instance the high current carrying capability and the possibility of ballistic charge transport, carbon nanotubes are a desired channel material in field-effect transistors, especially with respect to high frequency communication electronics. Thus, many scientific studies on CNT-based field-effect transistors have been published so far. But despite the successful verification of excellent individual electric key values, corresponding experiments are mostly performed under synthetic conditions (considering e.g. temperature or gas atmosphere), which are not realizable during realistic application scenarios. Furthermore, technologically relevant factors like homogeneity, reproducibility and yield of functioning devices are often subordinated to the achievement of a single electric record value. Hence, this work focuses on the development of a fabrication technology for carbon nanotube field-effect transistors, that takes those factors into account. Thereby, this work expands the state of the art by introduction and statistical assessment of two cleaning processes: a) wet chemical removal of surfactant residues (sodium dodecylsulfate) from CNTs, integrated using the dielectrophoretic approach, by investigation and comparison of four procedures (de-ionized water, HNO3, oDCB, Ethanol); b) the reduction of process-related substrate contaminations by application of an oxygen plasma. Beyond that, the passivation of the final, working devices is developed further, as their typical definition as diffusion barrier is expanded by the reduction of parasitic capacitances in the transistor. In this context, two so far barely considered materials, hydrogen silsesquioxane and Xdi-dcs, a polymer mixture of poly(vinylphenol) and polymethylsilsesquioxane, are investigated and assessed. The novelty of the Xdi-dcs mixture causes the necessity of fundamental considerations on controllable etching procedures and resulting adaptions of the technological fabrication sequence.:Bibliographic description 3 List of abbreviations 10 List of symbols 10 1 Introduction 13 2 Basics of carbon nanotubes 15 2.1 Structural fundamentals 15 2.1.1 Hybridization of carbon 15 2.1.2 Structure of carbon nanotubes 17 2.2 Electronic properties 19 2.2.1 Band structure of graphene 19 2.2.2 Band structure of carbon nanotubes 20 2.2.3 Electronic transport in CNTs 22 2.3 Procedures for CNT integration 23 2.3.1 Growth by chemical vapor deposition 24 2.3.2 Transfer techniques 24 2.3.3 Dispersion-related integration procedures 25 2.4 Interaction of CNT and surfactant 28 3 Basics of CNT field-effect transistors 31 3.1 Principle of operation of conventional FETs 31 3.2 Distinctive features of CNT-based FETs 32 3.2.1 Metal - semiconductor contact 33 3.2.2 Linearity 38 3.3 Performance determining factors 41 3.3.1 Device architecture 41 3.3.2 Contact geometry 46 3.3.3 Other transistor dimensions 48 3.3.4 CNT-related characteristics 49 3.4 Hysteresis in transfer characteristics 51 3.4.1 Definition of hysteresis 51 3.4.2 Origins of hysteresis 52 3.4.3 Appearance of hysteresis 53 3.5 Passivation 56 3.5.1 Requirements 56 3.5.2 Importance of pre-treatments and process conditions 57 3.5.3 Overview of established passivation materials 58 4 Experimental work 63 4.1 Transistor design 63 4.2 Technology flow 66 4.3 Experimental procedures 71 4.3.1 Procedures for dissolution of SDS 71 4.3.2 Plasma treatment against surface contaminations 72 4.3.3 Evaluation of diffusion barriers 72 4.4 Instrumentation and characterization 74 4.4.1 Dielectrophoresis instrumentation 74 4.4.2 Topographical Characterization 74 4.4.3 Chemical characterization 75 4.4.4 Electrical characterization 76 5 Reduction of hysteresis 77 5.1 Removal of surfactant molecules from CNTs 77 5.1.1 Influence on molecule and CNT chemistry 78 5.1.2 Effect on transistor performance 80 5.2 Plasma-assisted removal of substrate contaminations 87 5.2.1 Influence on substrate surface 88 5.2.2 Effect on transistor performance 92 6 Passivation 97 6.1 Protection against environmental effects 97 6.1.1 Alterability of unpassivated CNT-FETs 98 6.1.2 Effects of O2 exclusion by dense passivation 99 6.1.3 Intentional doping using Y2O3 101 6.2 Passivation considering electrostatic aspects 106 6.2.1 Integration of Xdi-dcs as novel passivation 107 6.2.2 Comparison of two spin-coated dielectrics 111 6.3 Potential of double-layer approaches 113 6.3.1 Evaluation of the gas barrier performance 113 6.3.2 Influence on the transistor behavior 116 7 Summary and Outlook 121 Danksagung 127 Appendix 129 Bibliography 137 List of figures 156 List of tables 161 Selbstständigkeitserklärung 163 8 Thesen 165 9 Curriculum vitae 169 / Bereits seit ihrer Entdeckung 1991 sind Kohlenstoffnanoröhren, aufgrund ihrer herausragenden optischen, mechanischen und elektrischen Eigenschaften, für die wissenschaftliche Community von großem Interesse. Ihre Verwendung als Kanalmaterial in Feld-Effekt Transistoren ist in Anbetracht ihrer außergewöhnlichen Eigenschaften, wie z. B. die hohe Stromtragfähigkeit, sowie die Möglichkeit des ballistischen Transports von Ladungsträgern besonders für die hochfrequente Kommunikationselektronik erstrebenswert. Dementsprechend viele wissenschaftliche Arbeiten befassen sich mit der Erforschung von auf Kohlenstoffnanoröhren basierenden Transistoren. Doch trotz des erfolgreichen Nachweises ausgezeichneter Werte für viele individuelle elektrische Kenngrößen, finden entsprechenden Experimente zumeist unter anwendungsfernen Bedingungen bezüglich Temperatur bzw. Gasatmosphäre statt. Darüber hinaus werden dem Erreichen eines elektrischen Rekordwertes oft technologisch relevante Größen wie Homogenität, Reproduzierbarkeit und Ausbeute an funktionsfähigen Bauteilen untergeordnet. Der Fokus dieser Arbeit liegt daher auf der Erarbeitung einer Technologie zur Herstellung Kohlenstoffnanoröhrenbasierter Feld-Effekt Transistoren, unter Berücksichtigung dieser Aspekte. Dabei erweitert diese Arbeit den Stand der Technik durch die Einführung und statistische Beurteilung zweier Reinigungsprozesse: a) der nasschemischen Beseitigung von Tensidresten (Natriumdodecylsulfat) an mittels Dielektrophorese integrierten CNTs, wobei insgesamt vier Prozeduren (de-ionisiertes Wasser, HNO3, oDCB, Ethanol) betrachtet und miteinander verglichen wurden; b) der Beseitigung von prozessbedingten Substratkontaminationen durch ein Sauerstoffplasma. Darüber hinaus wird die Passivierung der funktionsfähigen Bauelemente weiterentwickelt, indem ihre typische Definition als Diffusionsbarriere um den Aspekt der Verringerung parasitärer Kapazitäten im Transistor erweitert wird. In diesem Zusammenhang werden mit Wasserstoff-Silsesquioxane und Xdi-dcs, einem Polymergemisch aus Poly(vinylphenol) und Polymethylsilsesquioxane, zwei bislang wenig beachtete Materialien, untersucht und bewertet. Die Neuheit des Xdi-dcs Gemisches macht dabei fundamentale Untersuchungen zur Strukturierbarkeit und entsprechende technologische Anpassungen im Gesamtablauf nötig.:Bibliographic description 3 List of abbreviations 10 List of symbols 10 1 Introduction 13 2 Basics of carbon nanotubes 15 2.1 Structural fundamentals 15 2.1.1 Hybridization of carbon 15 2.1.2 Structure of carbon nanotubes 17 2.2 Electronic properties 19 2.2.1 Band structure of graphene 19 2.2.2 Band structure of carbon nanotubes 20 2.2.3 Electronic transport in CNTs 22 2.3 Procedures for CNT integration 23 2.3.1 Growth by chemical vapor deposition 24 2.3.2 Transfer techniques 24 2.3.3 Dispersion-related integration procedures 25 2.4 Interaction of CNT and surfactant 28 3 Basics of CNT field-effect transistors 31 3.1 Principle of operation of conventional FETs 31 3.2 Distinctive features of CNT-based FETs 32 3.2.1 Metal - semiconductor contact 33 3.2.2 Linearity 38 3.3 Performance determining factors 41 3.3.1 Device architecture 41 3.3.2 Contact geometry 46 3.3.3 Other transistor dimensions 48 3.3.4 CNT-related characteristics 49 3.4 Hysteresis in transfer characteristics 51 3.4.1 Definition of hysteresis 51 3.4.2 Origins of hysteresis 52 3.4.3 Appearance of hysteresis 53 3.5 Passivation 56 3.5.1 Requirements 56 3.5.2 Importance of pre-treatments and process conditions 57 3.5.3 Overview of established passivation materials 58 4 Experimental work 63 4.1 Transistor design 63 4.2 Technology flow 66 4.3 Experimental procedures 71 4.3.1 Procedures for dissolution of SDS 71 4.3.2 Plasma treatment against surface contaminations 72 4.3.3 Evaluation of diffusion barriers 72 4.4 Instrumentation and characterization 74 4.4.1 Dielectrophoresis instrumentation 74 4.4.2 Topographical Characterization 74 4.4.3 Chemical characterization 75 4.4.4 Electrical characterization 76 5 Reduction of hysteresis 77 5.1 Removal of surfactant molecules from CNTs 77 5.1.1 Influence on molecule and CNT chemistry 78 5.1.2 Effect on transistor performance 80 5.2 Plasma-assisted removal of substrate contaminations 87 5.2.1 Influence on substrate surface 88 5.2.2 Effect on transistor performance 92 6 Passivation 97 6.1 Protection against environmental effects 97 6.1.1 Alterability of unpassivated CNT-FETs 98 6.1.2 Effects of O2 exclusion by dense passivation 99 6.1.3 Intentional doping using Y2O3 101 6.2 Passivation considering electrostatic aspects 106 6.2.1 Integration of Xdi-dcs as novel passivation 107 6.2.2 Comparison of two spin-coated dielectrics 111 6.3 Potential of double-layer approaches 113 6.3.1 Evaluation of the gas barrier performance 113 6.3.2 Influence on the transistor behavior 116 7 Summary and Outlook 121 Danksagung 127 Appendix 129 Bibliography 137 List of figures 156 List of tables 161 Selbstständigkeitserklärung 163 8 Thesen 165 9 Curriculum vitae 169