No description available.

The subject of this dissertation is the development of three-dimensional (3D) surface profilers for semiconductor back-end inspection. The value of this study is: 1) to provide a new phase-to-height relationship for Fourier Transform Profilometry (FTP) that is universal as it allows alternate FTP system architectures for a micrometer scale object measurement, and 2) to provide a new method for full field substrate warpage and ball grid array (BGA) coplanarity inspection using machine vision. The desire to increase electronic device performance has resulted in denser and smaller IC packaging. As the dimensions of the devices decrease, the requirements for substrate flatness and surface quality become critical in avoiding device failure. For a high yield production, there is an increasing demand in the requirement for the dimensional verification of height, which requires 3D inspection. Based on the current demands from the semiconductor industry, this dissertation addresses the development of fast in-line surface profilers for large volume IC package inspection. Specifically, this dissertation studies two noncontact surface profilers. The first profiler is based on FTP for measuring the IC package front surface, the silicon die and the epoxy underfill profile. The second profiler is based on stereovision and it is intended for inspecting the BGA coplanarity and the substrate warpage. A geometrical shape based matching algorithm is also developed for finding point correspondences between IC package images. The FTP profiler provides a 1 σRMS error of about 4 μm for an IC package sample in an area of 14 mm x 6.5 mm with a 0.13 second data acquisition time. For evaluating the performance of the stereovision system, the linearity between our system and a confocal microscope is studied by measuring a particular IC sample with an area of 38 mm x 28.5 mm. The correlation coefficient is 0.965 and the 2σdifference in the two methods is 26.9 μm for the warpage measurement. For BGA coplanarity inspection the correlation coefficient is 0.952 and the 2difference is 31.2 μm. Data acquisition takes about 0.2 seconds for full field measurements.

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No. of bitstreams: 1 nogueira_dmsa_dr_sjc.pdf: 3223504 bytes, checksum: 4fb1f4d8c973655db14666b0dd98ca44 (MD5) Previous issue date: 2018-07-02 / Coordenação de Aperfeiçoamento de Pessoal de Nível Superior (CAPES) / Fundação de Amparo à Pesquisa do Estado de São Paulo (FAPESP) / O efeito protetor do flúor contra erosão tem sido relacionado principalmente à formação de depósitos de fluoreto de cálcio e à adsorção de íons flúor na superfície dental, assim hipotetizou-se que a incorporação ao polímero Carbopol 980 poderia potencializar o efeito protetor de soluções fluoretadas no controle do desgaste erosivo do esmalte com a formação de um filme superficial protetor. A proposta foi dividida em duas etapas. A primeira etapa consistiu em um estudo in vitro no qual foi testada a associação do polímero Carbopol ao Fluoreto de sódio (NaF) e Fluoreto de Sódio mais Cloreto de Estanho (NaF + Sn) quanto ao efeito remineralizante e protetor contra a erosão inicial, na presença da película adquirida. O teste de estabilidade de pH (pH stat) foi realizado, tratando cristais de hidroxiapatita com as soluções descritas, a fim de testar o potencial protetor dos componentes isolados ou associados, quanto à dissolução da hidroxiapatita, prevendo assim o potencial protetor das soluções testadas. Em seguida, espécimes cilíndricos em esmalte bovino polido (3 mm diâmetro) foram desmineralizados com ácido cítrico a 0,3% (pH 2,6) por 2 minutos (n=15). Os espécimes foram imersos em saliva humana por 2 horas para formação da película adquirida e foi então realizado o tratamento com as soluções experimentais por 2 minutos [NaF (500 ppm F), NaF + Carbopol (0,1%), NaF + Sn (500 ppm F + 800 ppm Sn), NaF + Sn + Carbopol], água deionizada (controle negativo) e solução comercial (Elmex – controle positivo). Uma nova imersão em saliva humana (2 h) foi realizada para remineralização, seguida por novo desafio ácido. A microdureza Knoop foi medida em diferentes tempos: inicial, após o primeiro desafio ácido, após a imersão nas soluções de tratamento (potencial de remineralização) e após o segundo desafio ácido (potencial protetor). Foi realizada uma nova imersão nas soluções-teste para mensuração do fluoreto solúvel em álcali da superfície do esmalte. Foram utilizados os testes ANOVA e Tukey (5%). Observou-se que a dissolução da hidroxiapatita foi menor nos grupos tratados com NaF + Sn + Carbopol se comparado aos demais grupos, resultado que corrobora com o maior potencial remineralizante e protetor, medidos por microdureza. A mensuração de flúor adsorvido na superfície também foi maior para o grupo com associação NaF + Sn + Carbopol comparado aos demais grupos. A segunda etapa foi um estudo in situ, realizado com as soluções experimentais que apresentaram o maior potencial protetor no estudo in vitro. Para tal, os espécimes em esmalte bovino polido foram divididos em três grupos (n=60): solução NaF + Sn (controle positivo), solução NaF + Sn + Carbopol, e água deionizada (controle negativo). Foi testado um modelo in situ em 3 fases. Quinze voluntários participaram do estudo. Em cada fase, os voluntários usaram um dispositivo palatal contendo 4 espécimes cada, sendo que dois foram submetidos a um ciclo de erosão e remineralização por 5 dias. Este ciclo consistiu na utilização dos dispositivos palatais por 2 horas para formação da película, seguido por imersão extra oral em ácido cítrico 1% (pH 2,3 - 5 minutos -4x/dia), com intervalos de 1 hora de exposição à saliva in situ entre os desafios, e tratamento com as soluções 2x/dia, por 1 minuto. Os outros dois espécimes foram submetidos à erosão/abrasão/remineralização, sendo a abrasão realizada 2x/dia, por 15 segundos com a escova elétrica ativa sobre os espécimes, antes dos tratamentos diários com as soluções e a erosão/remineralização conforme descrito. Ao final do experimento, a perda superficial (em μm) dos espécimes foi avaliada por perfilometria e os dados foram submetidos aos testes ANOVA dois fatores e Tukey (5%). Houve diferença entre os desafios (erosão e erosão+abrasão), assim como os tratamentos com soluções fluoretadas foram capazes de proteger o esmalte contra o desgaste erosivo, significantemente diferentes do controle negativo. Pode-se concluir que tanto para o estudo in vitro quanto para o estudo in situ a associação do NaF ao Sn e também estes ao Carbopol apresentaram resultados promissores diminuindo o desenvolvimento do desgaste erosivo. / The protective effect of fluoride against erosion has been related mainly to the formation of calcium fluoride deposits and the adsorption of fluoride ions on the dental surface, so it was hypothesized that the incorporation to the Carbopol 980 polymer could potentiate the protective effect of fluoride solutions in the control of the enamel erosive wear with the formation of a protective film. The proposal was divided in two stages. The first stage consisted of an in vitro study in which the association of Carbopol polymer to sodium fluoride (NaF) and sodium fluoride with tin chloride (NaF + Sn) was tested in the presence of acquired pellicle. The ph stat test was used to test the protective potential of these components isolated or associated, in relation to the dissolution of hydroxyapatite, thus predicting the protective potential of the solutions tested. The remineralizing and protective effect against initial erosion measured by microhardness was investigated. Cylindrical polished bovine enamel specimens (3 mm diameter) was prepared and demineralized with 0.3% citric acid (pH 2.6) for 2 minutes (n=15). The specimens were immersed in human saliva for 2 hours to allow acquired pellicle formation and then, treatment with experimental solutions for 2 minutes were performed [NaF (500 ppm F), NaF + Carbopol (0,1%), NaF + Sn (500 ppm F + 800 ppm Sn), NaF + Sn + Carbopol], deionized water (negative control) and comercial mouthrinse (Elmex – positive control). A new immersion in human saliva (2 h) for remineralization and then new acid challenge were performed. The Knoop microhardness was measured at different times: baseline, after the first acid challenge, after treatments (remineralization potential), and after second acid challenge (protective potential). Additionally, a new immersion in test solutions was conducted for the measurement of alkali-soluble fluoride on enamel surface. ANOVA and Tukey tests were applied (5%). It was observed that the dissolution of hydroxyapatite was lower in the groups treated with NaF + Sn + Carbopol compared to the other groups. This result was also observed with the remineralizing and protective potentials, measured by microhardness. The measurement of alkali-soluble fluoride on enamel surface was also higher to the NaF + Sn + Carbopol association group compared to the other groups. The second stage was an in situ study carried out with the experimental solutions that present the greatest protective potential in the previous in vitro study. For this, polished enamel specimens were divided into three groups (n = 60): NaF + Sn (positive control), NaF + Sn + Carbopol, and deionized water (negative control). An in situ model with three stages was tested. Fifteen volunteers participated in the study. In each phase, volunteers used a palatal appliance containing 4 specimens each, in which two were submitted to an erosion and remineralization cycle for 5 days. This cycle consisted of using the appliance for 2 hours for pellicle formation, followed by extra oral immersion in 1% citric acid (pH 2.3 - 5 minutes - 4x/day) with intervals of 1 hour of in situ saliva exposure between challenges and treatment with the solutions 2x/day for 1 minute. The other two specimens were subjected to erosion/abrasion/remineralization cycle, in which abrasion was performed 2x/day - 15 seconds, with active electric toothbrush, before the daily treatment with the solutions, and erosion/remineralization as previously described. At the end of the experiment, enamel surface loss (µm) was evaluated by profilometry and the data were analyzed by two-way ANOVA and Tukey tests (5%). There were differences between the challenges (erosion and erosion + abrasion), as well as treatments with fluoride solutions were able to protect the enamel against erosive wear, significantly different from the negative control. It can be concluded that for both the in vitro and the in situ study, the association of NaF to Sn, and these to Carbopol, presented promising results reducing the development of erosive wear. / FAPESP 2015/19585-4

Inspection of optical components is essential to assure the quality and performance of optical systems. Evaluation of optical components includes metrology measurements of surface topography. It also requires optical measurements including refractive index, thin film thickness, reflectivity and transmission. The dispersion characteristics of optical constants including refractive index are also required. Hence, various instruments are used to make these measurements in research laboratories and for quality assurance. Clearly, it would be a significant advantage and cost saving if a technique was developed that could combine surface metrology with optical measurements. {Coherence Scanning Interferometry} (CSI) (also referred to as {Scanning White Light Interferometry} (SWLI)) has been used widely to measure surface topography with sub-nanometre vertical resolution. One of the benefits of the CSI is that the technique is non-contacting and hence non-destructive. Thus the test surfaces are not affected by the measurement using a CSI instrument whereas damage to the surfaces can occur when using traditional contact methods such as stylus profilometry. However use of CSI is geometrically limited to small areas ($\lesssim 10 \times 10$ mm) with gentle slopes ($\lesssim \ang{40}$) because of the numerical aperture of objective lens whereas stylus profilometry works well with larger areas and higher slopes due to the range of motion of the gauge and the traverse unit. Since the CSI technique is optical and involves light reflection and interference it is possible to extend the technique for the measurement of the thickness of transparent films, the roughness of surfaces buried beneath thin films or interfacial surfaces. It may also be used to determine spectral complex refractive index. This thesis provides an analytical framework of new methods to obtain complex refractive index in a visible light domain and interfacial surface roughness (ISR). It also provides experimental verification of these new capabilities using actual thin film model systems. The original Helical Complex Field (HCF) function theory is presented followed by its existing extensions that enable determination of complex refractive index and interfacial surface roughness. Further theoretical extensions of the HCF theory are also provided: A novel theory to determine the refractive index of a (semi-)transparent film is developed to address the constraint of the current HCF theory that restricted its use to opaque materials; Another novel theory is provided to measure ISR with noise compensation, which avoids erroneous surface roughness caused by the numerical optimisation affected by the existence of noise. The effectiveness of the ISR measurement with noise compensation has been verified using a number of computer simulations. Stylus profilometry is a well established method to provide a profile and has been used extensively as a 'reference' for other techniques. It normally provides a profile on which the roughness and the waviness are computed. Extension of the stylus profilometry technique to areal measurement of asymmetrical surfaces, namely raster scan measurement, requires a system to include error compensation between each traverse. The system errors and the random errors need to be separately understood particular when the measurement of a surface with nanometre-order accuracy is required. In this thesis a mathematical model to locate a stylus tip considering five mechanical errors occurring in a common raster scan profilometer is provided. Based on the model, the simulator which provides an areal measurement of a sphere was developed. The simulator clarified the relationship between the Zernike coefficients obtained from the form residual and the size of the errors in the form of partial derivatives of Zernike coefficients with respect to the errors. This provides theoretical support to the empirical knowledge of the relationship between the coefficients and the errors. Furthermore, a method to determine the size of errors directly from Zernike coefficients is proposed supported by simulations. Some of the error parameters were accurately determined avoiding iterative computation with this method whereas the errors are currently being determined by iterative computation.

Des MEMS supraconducteurs ont été développés par l’IRAM pour des besoins instrumentaux dans les récepteurs hétérodyne large bande en millimétrique. Dans ce mémoire, la caractérisation de ces MEMS capacitifs par des mesures profilométriques, vibrométriques, aux rayons X , électriques et thermiques est présentée. Ils ont en outre été modélisés avec un modèle analytique électromécanique simple. Ce modèle est complété par un schéma équivalent haute fréquence semi-distribué facilement implantable dans le simulateur multiphysique COMSOL pour prendre en compte la supraconductivité. Ce travail a permis de déterminer quelles géométries de ces MEMS sont satisfaisantes pour une utilisation dans les récepteurs hétérodyne large bande en hyperfréquence. / Superconducting MEMS were developed by IRAM for millimetre wave heterodyne receivers improvements. In this report, the characterization of these capacitive MEMS is presented (profilometry, vibrometry, X rays, electric and thermal). They were described with a simple analytical electromechanical model which can be easily implemented with an equivalent high frequency circuit in the COMSOL multiphysic software to take into account the superconductivity. This work answers to the question of what are the MEMS geometries well suited for broadband heterodyne receivers requirements.

Reflected-light digital holographic microscope developed at IPE FME BUT uses off-axis holography principle and low spatial and temporal coherence illumination. Microscope allows reconstruction of the image amplitude and the image phase, which can be handled in real time. The only limiting factors are imaging speed of the detector and computer performance when processing holograms. Reconstruction of image phase and amplitude allows high-resolution profilometric measurements in the vertical axis direction. This thesis deals with the automatization of profilometric measurement method proposed in [2]. Proposed method uses the combination of the image phase and the image amplitude for the measurement of specimens with surface structure the vertical size of which cause the uncertainty of the image phase by a factor of 2pí. Futher the thesis deals with the construction design of the illumination system of the microscope and its realization together with experimental verification of functionality of proposed method automatization.

No description available.

Of the wide variety of existing optical techniques for non-contact 3D surface mapping, Fourier Transform Interferometry (FTI) is the method that most elegantly combines simplicity with high speed and high resolution. FTI generates continuous-phase surface maps from a projected optical interference pattern, which is generated with a simple double-pinhole source and collected in a single snapshot using conventional digital camera technology. For enhanced stability and reduced system size, the fringe source can be made from a fiber optic coupler. Unfortunately, many applications require mapping of surfaces that contain challenging features not ideally suited for reconstruction using FTI. Rough and discontinuous surfaces, commonly seen in applications requiring imaging of rock particles, present a unique set of obstacles that cannot be overcome using existing FTI techniques. This work is based on an original analysis of the limitations of FTI and the means in which errors are generated by the particular features encountered in the aggregate mapping application. Several innovative solutions have been developed to enable the use of FTI on rough and discontinuous surfaces. Through filter optimization and development of a novel phase unwrapping and referencing technique, the Method of Multiple References (MoMR), this work has enabled surface error correction and simultaneous imaging of multiple particles using FTI. A complete aggregate profilometry system has been constructed, including a MoMR-FTI software package and graphical user interface, to implement these concepts. The system achieves better than 22µm z-axis resolution, and comprehensive testing has proven it capable to handle a wide variety of particle surfaces. A range of additional features have been developed, such as error correction, particle boundary mapping, and automatic data quality windowing, to enhance the usefulness of the system in its intended application. Because of its high accuracy, high speed and ability to map varied particles, the developed system is ideally suited for large-scale aggregate characterization in highway research laboratories. Additionally, the techniques developed in this work are potentially useful in a large number of applications in which surface roughness or discontinuities pose a challenge. / Ph. D.

This manuscript has been realized in the frame of SELENE experiment research activities. SELENE is the ac-ronym of Self-rewetting fluids for ENErgy management and consists of a space project aiming to investigate heat and mass transfer phenomena in mono-groove configuration with self-rewetting fluids (SRFs). Self-rewetting fluids are mixture showing an anomalous trend of surface tension with temperature, an inversion of the surface tension slope after certain temperature. As consequence, when the minimum in surface ten-sion is crossed, surface tension gradient at the meniscus interface pulls the liquid towards the warmest region, preventing hot spots. This mechanism is completely spontaneous and has an interesting potential when applied to heat transfer applications as heat pipes (HPs). In HPs heat is removed by the liquid at the warmest region (the evaporator) and transported at the coldest zone (the condenser) by phase change; here, heat is removed by the pipe and dissipated outside through a radiator. To operate correctly, liquid is supplied to the evaporator by capillarity and the liquid vapour is allowed to flow back to condenser from a dedicated pipe region where liquid is not allowed. Vapour condensation releases at the condenser the heat to be dissipated. When SRFs are replacing working fluid in HP applications and temperatures are higher than the characteristic minimum in surface tension, capillary force is assisted by inverse Marangoni flow at the vapour-liquid interface.Since heat pipe performances are related to liquid supplied at the evaporator, in order to compare SRFs and not SRFs working fluids, it is needed to split the contribution of Marangoni and capillary force in the liquid flow. Marangoni effect is related to surface tension gradient that, in a mixture as SRF, is dependent on temperature and local composition at the liquid interface. For all these reasons, SELENE is designed to be the link between scientific research on HPs and heat transfer applications using SRFs. SELENE consists of a mono-groove with trapezoidal section that can be considered as a “clump” of an Inner Grooved Heat Pipe (IGHP) and, in order to split capillary and Marangoni contribution, it is integrated dedicated tools providing the required data in terms of concentration and liquid meniscus shape. Experimental data are used to build a simplified thermo-soluto-fluido dynamic model describing the thermo-mechanic mechanisms between the liquid bulk and the vapour flow. In the manuscript here presented it has been carried on a technology development of the required diag-nostics for the SELENE space project. The diagnostics have been designed to work in microgravity condi-tions even if they are tested on ground. As concentration diagnostic, in the text are proposed several tech-niques and more interest is spent on the adaptation of I-VED (In vivo Embolic Detection) technology meas-uring fluid AC impedance to retrieve composition information; the technology is not yet mature to be inte-grated in SELENE but it presents interesting features to be investigated in microgravity conditions. As me-niscus reconstruction technique it is proposed a new and innovative technology developed in the frame of the presented thesis and it consists of a non-intrusive optical technique aiming to retrieve liquid meniscus shape (and so curvature) from a single visualization window mounted at the top of the SELENE breadboard.An analytical approach aiming to retrieve a simplified mathematical model of the transfer mechanisms is also provided in the text. The analytical analysis clearly shows the relations between the experimental measured data and the velocity profiles in the liquid and vapour regions. In addition, since in SELENE exper-iment the heat conduction across the groove itself is not negligible, in the text it is provided a semi-empirical thermal model based on the Multi Lumped Model (MLM) theory and able to retrieve local heat exchanged information along the pipe length. The model is used to compare experiments with different working fluids at different operational regimes. / Doctorat en Sciences de l'ingénieur et technologie / info:eu-repo/semantics/nonPublished

Nous avons développé un microscope tomographique diffractif en réflexion, qui permet d’observer la surface d’un échantillon avec une résolution latérale améliorée comparée à un microscope holographique conventionnel. À partir des même données expérimentales (les hologrammes acquis sous différents angles d’illumination), des mesures à haute précision longitudinale peuvent être réalisées sur la surface d’un échantillon purement réfléchissant, par reconstruction du profil de hauteur à partir de la phase. Cette méthode d’imagerie multimodale présente plusieurs avantages comparée aux mesures en holographie interférométrique classique : amélioration de la résolution latérale sur la partie diffractive, déroulement de phase facilité, réduction du bruit cohérent, l’ensemble étant associé à la grande précision longitudinale fournie par les mesures de phase. Nous montrons ces possibilités en imageant divers échantillons minces. / We have developed a tomographic diffractive microscope in reflection, which permits observation of sample surfaces with an improved lateral resolution, compared to a conventional holographic microscope. From the same set of data, high-precision measurements can be performed on the shape of the reflective surface by reconstructing the phase of the diffracted field. doing so allows for several advantages compared to classical holographic interferometric measurements: improvement in lateral resolution, easier phase unwrapping, reduction of the coherent noise, combined with the high-longitudinal precision provided by interferometric phase measurements. We demonstrate these capabilities by imaging various test samples.