O objetivo desta tese é o projeto e a síntese de filtros passa-faixa sintonizáveis em frequências de micro-ondas utilizando ressoadores planares tipo patch. As características dos filtros projetados, tais como frequência central, largura de banda e/ou seletividade, são eletronicamente ajustadas por uma tensão de controle DC. Uma metodologia para a concepção e síntese de filtros sintonizáveis patch é desenvolvida e aplicada a dois filtros com topologias triangular e circular. A metodologia fornece técnicas para extrair o esquema de acoplamento que modela o comportamento do filtro e as equações necessárias para calcular a matriz de acoplamento. Então, a resposta teórica do filtro resultante da análise dos coeficientes da matriz de acoplamento é comparada com os resultados das simulações completas. As simulações completas combinam os resultados da simulação eletromagnética 3D do layout do filtro com os resultados da simulação elétrica dos dispositivos de ajuste, representados por seu modelo elétrico equivalente de elementos discretos. Isso permite o correto modelamento das características do ajuste e a definição de seus limites. A fim de validar a metodologia, os filtros patch sintonizáveis são fabricados usando tecnologia de micro-ondas de circuito Integrado (MIC) sobre substratos flexíveis. As dimensões mínimas são maiores do que 0,5 mm, garantindo um processo de fabricação de baixo custo. O primeiro filtro é um filtro patch dual-mode sintonizável que utiliza um ressonador triangular com duas fendas perpendiculares. A frequência central e a largura de banda do filtro podem ser ajustadas individualmente por um controle independente de cada modo fundamental degenerado. O controle dos modos é feito através de diodos varactor montados nas fendas do ressoador patch. O filtro apresenta variação de 20 % de frequência central de 2,9 GHz a 3,5 GHz. A banda relativa de 3 dB varia de 4 % a 12 %. Duas tensões de polarização DC diferentes variando de 2,5 V a 22 V são usadas para ajustar este filtro. O segundo filtro é um filtro patch triple-mode sintonizável que utiliza um ressoador circular com quatro fendas radiais, nas quais são conectados os diodos varactor. A frequência central e a largura de banda deste filtro variam simultaneamente. O filtro apresenta 27 % de variação da frequência central de 1,8 GHz a 2,35 GHz com variação concomitante da largura de banda relativa de 8,5 % para 26 %. Apenas uma única tensão de polarização DC variando de 0,5 V a 20 V é usada para sintonizar este filtro. Ambos os filtros são capazes de lidar com níveis de potência de no mínimo +14,5 dBm (filtro com ressoador triangular) e +12,9 dBm (filtro com ressoador circular). / The objective of this thesis is the design and synthesis of tunable bandpass filters at microwave frequencies using planar patch resonators. The characteristics of the designed filters, such as center frequency, bandwidth, and/or selectivity, are electronically adjusted by a DC voltage control. A methodology for the design and synthesis of tunable patch filters is developed and applied to two filters with triangular and circular topologies. The methodology provides techniques to extract the coupling scheme that models the filter behavior and the necessary equations for calculating the corresponding coupling matrix. Then, the theoretical filter response resulting from the analysis of the coupling matrix coefficients is compared to the results of complete simulations. The complete simulations combine the results of the 3D electromagnetic (EM) simulation of the filter layout with the results of the electrical simulation of the tuning devices, represented by their lumped elements equivalent model. This allows the correct model of the tuning effect and the definition of the tuning possibilities and limits. In order to validate the methodology, the tunable patch filters are fabricated using Microwave Integrated Circuit (MIC) technology on flexible substrates. The minimum dimensions are greater than 0.5 mm, ensuring a low cost fabrication process. The first filter is a tunable dual-mode patch filter using a triangular resonator with two perpendicular slots. The central frequency and the bandwidth of the filter are individually tuned by independently controlling each degenerate fundamental mode. The topology with uncoupled modes allows the control of each resonant mode frequency by varactor diodes mounted across the slots of the patch resonator. This filter presents a center frequency tuning range of 20 %, varying from 2.9 GHz to 3.5 GHz. The FBW 3dB can be varied from 4 % to 12 %. Two different DC bias voltages ranging from 2.5 V to 22 V are used to tune this filter. The second filter is a tunable triple-mode patch filter using a circular resonator with four slots, across which the varactor diodes are connected. The center frequency and bandwidth of this filter vary simultaneously. This filter presents a center frequency tuning range of 27 %, varying from 1.8 GHz to 2.35 GHz, changing concomitantly with the bandwidth from 8.5 % to 26 %. Only a single DC bias voltage ranging from 0.5 V to 20 V is used to tune the filter. Both filters are able to handle power levels as high as +14.5 dBm (triangular patch filter) and +12.9 dBm (circular patch filter).

Ces travaux de thèse portent sur la conception et sur la caractérisation expérimentale de résonateurs opto-phononiques. Ces structures permettent le confinement simultané de modes optiques et de vibrations mécaniques de très haute fréquence (plusieurs dizaines jusqu’à plusieurs centaines de GHz). Cette étude a été effectuée sur des systèmes multicouches à l’échelle nanométrique, fabriqués à partir de matériaux semiconducteurs de type III-V. Ces derniers ont été caractérisés par des mesures de spectroscopie Raman de haute résolution. Grâce aux méthodes expérimentales et aux outils numériques développés, nous avons pu explorer de nouvelles stratégies de confinement pour des phonons acoustiques au sein de super-réseaux nanophononiques, à des fréquences de résonance de l’ordre de 350 GHz. En particulier, nous avons étudié les propriétés acoustiques de deux types de résonateurs planaires. Le premier est basé sur la modification adiabatique du diagramme de bande d’un cristal phononique unidimensionnel. Dans le deuxième système, nous utilisons les invariants topologiques caractérisant ces structures périodiques, afin de créer un état d’interface entre deux miroirs de Bragg phononiques. Nous nous sommes ensuite intéressés à l’étude de cavités opto-phononiques permettant le confinement tridimensionnel de la lumière et de vibrations mécaniques de haute fréquence. Nous avons mesuré par spectroscopie Raman les propriétés acoustiques de résonateurs phononiques planaires placés à l’intérieur de cavités optiques tridimensionnelles, de type micropiliers. Enfin, la dernière partie de cette thèse porte sur l’étude théorique des propriétés optomécaniques de micropiliers GaAs/AlAs. Nous avons effectué des simulations numériques par éléments finis, nous permettant d’expliquer les mécanismes de confinement tridimensionnel de modes acoustiques et optiques dans ces systèmes, et de calculer les principaux paramètres optomécaniques. Les résultats de cette étude démontrent que les micropilier GaAs/AlAs possèdent des caractéristiques prometteuses pour de futures expériences en optomécanique, telles que des fréquences de résonance acoustiques très élevées, de hauts facteurs de qualités mécaniques et optiques à température ambiante, ou encore de fortes valeurs pour les facteurs de couplage optomécaniques et pour le produit Q • f / The work carried out in this thesis addresses the conception and the experimental characterization of opto-phononic resonators. These structures enable the confinement of optical modes and mechanical vibrations at very high frequencies (from few tens up to few hundreds of GHz). This study has been carried out on multilayered nanometric systems, fabricated from III-V semiconductor materials. These nanophononic platforms have been characterized through high resolution Raman scattering measurements. The experimental methods and the numerical tools that we have developed in this thesis have allowed us to explore novel confinement strategies for acoustic phonons in acoustic superlattices, with resonance frequencies around 350 GHz. In particular, we have studied the acoustic properties of two nanophononic resonators. The first acoustic cavity proposed in this manuscript enables the confinement of mechanical vibrations by adiabatically changing the acoustic band-diagram of a one-dimensional phononic crystal. In the second system, we take advantage of the topological invariants characterizing one dimensional periodic structures, in order to create an interface state between two phononic distributed Bragg reflectors. We have then focused on the study of opto-phononic cavities allowing the simultaneous confinement of light and of high frequency mechanical vibrations. We have measured, by Raman scattering spectroscopy, the acoustic properties of planar nanophononic structures embedded in three-dimensional micropillar optical resonators. Finally, in the last sections of this manuscript, we investigate the optomechanical properties of GaAs/AlAs micropillar cavities. We have performed numerical simulations through the finite element method that allowed us to explain the three-dimensional confinement mechanisms of optical and mechanical modes in these systems, and to calculate the main optomechanical parameters. This work shows that GaAs/AlAs micropillars present very interesting properties for future optomechanical experiments, such as very high mechanical resonance frequencies, large optical and mechanical quality factors at room temperature, and high values for the vacuum optomechanical coupling factors and for the Q • f products

Grid-scale integration of renewable energy sources and smart grid devices has created new demands in flexible power conversion. State-of-the-art semiconductor power switches present limitations in power handling capability, as well as forward and reverse breakdown voltages. Superconducting materials are a viable alternative due to their robustness against high ampacities, large electric fields and abrupt changes in power flow. This work pays focus to material testing and apparatus design for an antenna-coupled cryotron (ACC), which is a superconducting power switch.Design, fabrication and testing are examined for a longitudinal resonant cavity, paired with monopole transmit and modified slot receive antennae. These couple radio frequency (RF) energy into superconducting thin film niobium (Nb) carrying high current densities (∼105A/cm2), thereby creating an antenna-coupled cryotron.Induced electromagnetic field effects at the receive antenna alter superconductive fluid dynamics. The theorized quality in manipulating this mechanism is a rapid normal-conductivity transition (µs), which affects a switch "off" state. Functional evaluation of the device as a waveguide revealed evanescent mode resonance at frequencies below the waveguide cut-off of ∼18GHz. The thin film Nb was deposited on a quartz dielectric, which penetrated the waveguide and supported evanescent resonances within the structure.Altered resistivity and critical transition-point properties emerged from device testing at applied RF. When the Nb film temperature-dependent coherence length was comparable to its thickness, perpendicular magnetic field application generated an Abrikosov vortex state, energetically favoring a mixed domain condensate. Interaction of the magnetically-induced flux vortex lattice with Lorentz current forces gave rise to resistive changes within the metal. Three resistive transition mechanisms developed: a latch to normal state resistance, attributed to cooper-pair destruction avalanche induced near critical transition points; a small reversible increase in resistance (∼mV), arising from flux-flow within an intermediate state at peak resonance; as well as temporal alterations in superfluid dynamics from disequilibrium in the quasi-particle population. The RF induced superfluid effects were observable in separate terms of electric and thermodynamic fluctuations.Motivation for this work is the eventual design of a high voltage, high current and low cost power switch, able to function where existing semiconductor technology fails. Concentration is paid to the fundamental theory, physics and methodology in conceptual testing and design of prototype ACCs. Assessment focuses on preliminary findings and concludes with next stage design requirements.

No description available.

A two-dimensional isotropic metamaterials formed by crossed split-ring resonators (CSRRs) are studied in this paper. The effective characteristic parameters of this media are determined by quasi-static Lorentz theory. The induced current distributions of a single CSRR at the resonant frequency are presented. Moreover, the dependence of the resonant frequency on the dimensions of single CSRR and the spaces of the array are also discussed. / Singapore-MIT Alliance (SMA)

The study of optical phenomena related to the strong electromagnetic response of noble metals (silver (Ag) and gold (Au) being most popular) over the last couple of decades has led to the emergence of a fast growing research area called plasmonics named after 'surface plasmons' which are electron density waves that propagate along the interface of a metal and a dielectric medium. Surface plasmons are formed by the coupling of light to the electrons on the metal surface subject to the fulfillment of certain physical conditions and they are bound to the metal surface. Depending on whether the metallic medium is a continuous film or a structure having dimensions less than or comparable to the wavelength of the exciting light, propagating or localized surface plasmons can be excited. The structure can be either a hole or an arbitrary pattern in a metal film, or a metallic particle. An array of subwavelength structures can behave as an effective homogeneous medium to incident light and this is the basis of a new class of media known as metamaterials. Metallic metamaterials enable one to engineer the electromagnetic response to  incident light and provide unconventional optical properties like negative refractive index as one prominent example. Metamaterials exhibiting negative index (also called negative index materials (NIMs)) open the door for super resolution imaging  and development of invisibility cloaks. However, the only problem affecting the utilization of plasmonic media to their fullest potential is the intrinsic loss of the metal, and it becomes a major issue especially at visible-near infrared (NIR) frequencies. The frequency of the surface plasmon is the same as that of the exciting light but its wavelength could be as short as that of X-rays. This property allows light of a given optical frequency to be conned into very small volumes via subwave lengthmetallic structures, that can be used to develop ecient sensors, solar cells, antennas and ultrasensitive molecular detectors to name a few applications. Also, interaction of surface plasmons excited in two or more metallic subwavelength structures in close proximity inuences the far-eld optical properties of the overall coupled system. Some eects of plasmonic interaction in certain coupled particles include polarization conversion, optical activity and transmission spectra mimicking electromagnetically-induced transparency (EIT) as observed in gas based atomicsy stems. In this thesis, we mainly focus on the optical properties of square arrays of certain plasmonic structures popularly researched in the last decade. The structures considered are as follows: (1) subwavelength holes of a composite hole-shape providing superior near-eld enhancement such as two intersecting circles (called' double hole') in an optically thick Au/Ag lm, (2) double layer shnets, (3) subwavelength U-shaped particles and (4) rectangular bars. The entire work is based on electromagnetic simulations using time and frequency domain methods. Au/Ag lms with periodic subwavelength holes provide extraordinarily high transmission of light at certain wavelengths much larger than the dimension of the perforations or holes. The spectral positions of the maxima depend on the shape of the hole and the intra-hole medium, thereby making such lms function as a refractive index sensor in the transmission mode. The sensing performance of the double-hole geometry is analyzed in detail and compared to rectangular holes. Fishnet metamaterials are highly preferred when it comes to constructing a NIM at optical frequencies. A shnet design that theoretically oers a negative refractive index with least losses at telecommunication wavelengths (1.4 1.5 microns) is presented. U-shaped subwavelength metallic particles, in particular single-slit split-ring resonators (SSRRs), provide a large negative response to the magnetic eld of light at a specic resonance frequency. The spectral positions of the structural resonances of the U-shaped particle can be found from its array far field transmission spectrum at normal incidence. An effort is made to clarify our understanding of these resonances with the help of localized surface plasmon modes excited in the overall particle. From an application point of view, it is found that a planar square array of SSRRs eectively functions as an optical half-wave waveplate at the main resonance frequency by creating a polarization in transmission that is orthogonal to that of incident light. A similar waveplate eect can be obtained purely by exploiting the near-eld interaction of dierently oriented neighbouring SSRRs. The physical reasons behind polarization conversion in dierent SSRR-array systems are discussed. A rectangular metallic bar having its dipolar resonance in the visible-NIR is called a nanoantenna, owing to its physical length in the order of nanometers. The excitation of localized surface plasmons, metal dispersion and the geometry of the rectangular nanoantenna make an analytical estimation of the physical length of the antenna from the desired dipolar resonance dicult. A practical map of simulated resonance values corresponding to a variation in geometrical parameters of Au bar is presented. A square array of a coupled plasmonic system comprising of three nanoantennas provides a net transmission response that mimicks the EIT effect. The high transmission spectral window possesses a peculiar dispersion profile that enables light with frequencies in that region to be slowed down. Two popular designs of such plasmonic EIT systems are numerically characterized and compared. / <p>QC 20121017</p>

The development and fabrication of silicon-based phononic band gap crystals has been gaining interest since phononic band gap crystals have implications in fundamental science and display the potential for application in engineering by providing a relatively new platform for the realization of sensors and signal processing elements. The seminal study of phononic band gap phenomenon for classical elastic wave localization in structures with periodicity in two- or three-physical dimensions occurred in the early 1990’s. Micro-integration of silicon devices that leverage this phenomenon followed from the mid-2000’s until the present. The reported micro-integration relies on exotic piezoelectric transduction, phononic band gap crystals that are etched into semi-infinite or finite-thickness slabs which support surface or slab waves, phononic band gap crystals of numerous lattice constants in dimension and phononic band gap crystal truncation by homogeneous mediums or piezoelectric transducers. The thesis reports, to the best of the author's knowledge, for the first time, the theory, design methodology and experiment of an electrostatically actuated silicon-plate phononic band gap quasi-crystal architecture, which may serve as a platform for the development of a new generation of silicon-integrated sensors, signal processing elements and improved mechanical systems. Electrostatic actuation mitigates the utilization of piezoelectric transducers and provides action at a distance type forces so that the phononic band gap quasi-crystal edges may be free standing for potentially reduced anchor and substrate mode loss and improved energy confinement compared with traditional surface and slab wave phononic band gap crystals. The proposed phononic band gap quasi-crystal architecture is physically scaled for fabrication as MEMS in a silicon-on-insulator process. Reasonable experimental verification of the model of the electrostatically actuated phononic band gap quasi-crystal architecture is obtained through extensive dynamic harmonic analysis and mode shape topography measurements utilizing optical non-destructive laser-Doppler velocimetry. We have utilized our devices to obtain fundamental information regarding novel transduction mechanisms and behavioral characteristics of the phononic band gap quasi-crystal architecture. Applicability of the phononic band gap quasi-crystal architecture to physical temperature sensors is demonstrated experimentally. Vibration stabilized resonators are demonstrated numerically.

This thesis reports the characterization and development of nanolithography using Electron Beam Lithography system and nanoscale plasma etching. The standard Bosch process and a modified three-pulse Bosch process were developed in STS ICP and Plasma ICP system separately. The limit of the Bosch process at the nanoscale regime was investigated and documented. Furthermore, the effect of different control parameters on the process were studied and summarized in this report. 28nm-wide trench with aspect-ratio of 25 (smallest trench), and 50nm-wide trench with aspect ratio of 37 (highest aspect-ratio) have been demonstrated using the modified three-pulse process. Capacitive resonators, SiBAR and IBAR devices have been fabricated using the process developed in this work. IBARs (15MHz) with ultra-high Q (210,000) have been reported.

In this thesis, Rayleigh-mode and Sezawa-mode surface acoustic wave devices, and SMR-based (solidly mounted resonator, SMR) thin film bulk acoustic wave devices were employed to construct the UV sensors. The oscillators are composed of acoustic wave devices, high-frequency amplifier and matching networks. Due to the fact that the different acoustic wave devices are associated with the different propagating behaviors, electromechanical coefficient and resonance characteristics, they lead to the diversely sensing properties. Although Rayleigh-mode and Sezawa-mode SAW devices are both constructed by a ZnO sensing layer, they operate with different resonance behaviors and propagate with different phase velocities in the layered structures. Therefore, they result in different frequency shifts and sensitivities while illuminating UV light on the surface of ZnO thin films. As to the SMR device, the acoustic waves are confined within the ZnO piezoelectric layer sandwiched between two metal electrodes and then resonance as standing waves. In general, thin film bulk acoustic wave devices, which are SMR devices in this thesis, possess a higher operating frequency and better frequency response than those of SAW devices. Therefore, it is expected that UV sensors based on SMR devices will lead to an excellent performance. The Rayleigh-mode SAW-based UV sensors consisted of a 3£gm-thickness ZnO thin film for sensing UV light and a 2mm-thickness LiNbO3 substrate for generating surface acoustic waves in the ZnO/ LiNbO3 layered structure. Because surface acoustic waves travel along the surface within the depth of one wavelength, 32 £gm herein, most of them propagate in the LiNbO3 substrate. SAWs were perturbed slightly and consequently resulted in an unsatisfactorily maximum frequency shift of 63.75 kHz when a UV light intensity of 1250 £gW/cm2 was illuminated on the surface of ZnO thin film. Because ZnO films in this thesis are used as the sensing layer for UV light, we adjusted the sputtering parameter of deposition temperature to improve their crystalline properties and further enhance the sensitivity of ZnO/LiNbO3 layered SAW devices. Finally, the maximum frequency shift was raised to 264 kHz with the same UV light intensity using the deposition temperature of 400 ¢J. The ZnO thin films in the ZnO/Si layered structure were simultaneously employed as the piezoelectric layer for generating SAWs and the sensing layer for UV light. Therefore, all of the acoustic waves propagate within the ZnO thin films and are easier disturbed than the devices operated with the ZnO/LiNbO3 layered structure. This accounts for the relatively large frequency shift of 1017 kHz with the UV light intensity of 551 £gW/cm2. The ½ £f type SMR device was adopted to construct the UV sensor due to their better resonance characteristics than those of ¼ £f type. As can be seen from the results that SMR-based UV sensor presented better UV sensing properties compared with SAW-based UV sensors. The reasons for the considerable frequency shifts and sensitivities can be attributed to that SMR-based sensor possesses a shorter resonance wavelength and a larger electromechanical coefficient than those of SAW-based devices. Finally, the maximum frequency shift of 552 kHz can be obtained when the illumination intensity of UV light was 212 £gW/cm2.

Coherent optical signal processing systems typically require dynamic, low-loss phase changes of an optical signal. Waveform generation employing phase modulation is an important application area. In particular, laser radar systems have been shown to perform better with non-linear frequency chirps. This work shows how dynamically tunable integrated optical ring resonators are able to produce such phase changes to a signal in an effective manner and offer new possibilities for the detection of phase-modulated optical signals. When designing and fabricating dynamically tunable integrated optical ring resonators for any application, system level requirements must be taken into account. For frequency chirped laser radar systems, the primary system level requirements are good long range performance and fine range resolution. These mainly depend on the first sidelobe level and mainlobe width of the autocorrelation of the chirp. Through simulation, the sidelobe level and mainlobe width of the autocorrelation of the non-linear frequency modulated chirp generated by a series of integrated optical ring resonators is shown to be significantly lower than the well-known tangent-FM chirp. Proof-of-concept experimentation is also important to verify simulation assumptions. A proof-of-concept experiment employing thermally tunable Silicon-Nitride integrated optical ring resonators is shown to generate non-linear frequency modulated chirp waveforms with peak instantaneous frequencies of 28 kHz. Besides laser radar waveform generation, three other system level applications of dynamically tunable integrated optical ring resonators are explored in this work. A series of dynamically tunable integrated optical ring resonators is shown to produce constant dispersion which can then help extract complex spectral information. Broadband photonic RF phase shifting for beam steering of a phased array antenna is also shown using dynamically tunable integrated optical ring resonators. Finally all-optical pulse compression for laser radar using dynamically tunable integrated optical ring resonators is shown through simulation and proof-of-concept experimentation.