Utilizando métodos de primeiros princípios, baseados na Teoria do Funcional da Desidade, investigamos, de forma sistemática, problemas de interesse na física de semicondutores: (i) A liga SixGe1-x: observa-se um pequeno desvio da linearidade, para o parâmetro de rede da liga, em função da concentração, sendo que as distâncias entre átomos de Ge são as que mais variam. O comportamento de vacâncias nessa liga se mostrou intermediário entre o Ge e o Si, e a energia de formação (EF) das vacâncias variou entre 2,06 eV e 2,90 eV, dependendo da vizinhança dessa. Propusemos um modelo para a difusão de Ge nessa liga. O fato das vacâncias com mais átomos de Ge como vizinhos ter menor energia de formação, faz com que a difusão das vacâncias se dê por caminhos lembrando o Ge puro, ou seja, a tendência será de que os vizinhos dessa vacância sejam de Ge, para ligas ricas em Ge; (ii) Superfícies: estudamos a adsorção de monômeros e dímeros de Ge sobre Si (100). Verificamos que, para monômeros, podem existir diversos mínimos locais da superfície de energia potencial para a mesma posição (x, y) na superfície, cuja diferença está na inclinação dos dímeros da superfície perto deste átomo. Mostramos que isso pode ser identificado em imagens teóricas de STM (Scanning Tunelling Microscopy) e propomos que isso seja verificado experimentalmente. Este tipo de efeito também ocorre com dímeros, sendo que isso já foi observado experimentalmente, mas com uma interpretação errônea. Através do nosso estudo podemos propor uma estrutura mais condizente com as imagens experimentais. O comportamento de átomos e dímeros de Si e Ge perto de degraus também foi analisado. Devido à diferença no parâmetro de rede do Si e do Ge, mostramos que a adsorção se torna diferente quando somente dois átomos estão na superfície. Através desses resultados, propomos um modelo para explicar a reversão da rugosidade dos degraus durante o crescimento de Ge sobre Si(100); (iii) Impurezas de Mn em Si: analisamos o comportamento de impurezas de Mn no cristal de Si e sobre a superfície. No cristal, observamos que a EF de sítios intersticiais é menor do que os sítios substitucionais. Sobre a superfície, existe um sítio substitucional que possue a mesma EF de um sítio intersticial. Esse é um fato importante para o desenvolvimento de semicondutores ferromagnéticos à base de Si. Propomos um método para que esse fato seja verificado experimentalmente, através de imagens de STM. / Using ab initio methods, based on Density Functional Theory, we have systematically investigated problems of interest for semiconductor physics: (i)The SixGe1-x alloy: we observe a small bowing in the lattice parameter, as a function of concentration, and that a larger variation in interatomic distances occurs for Ge-Ge bonds. The behavior of vacancies in this alloy is intermediate between Si and Ge, with formation energies (EF) varying from 2,06 eV to 2,90 eV, depending on the neighborhood of the vacancy. We propose a model for the diffusion of Ge in this alloy. As the vacancy with four Ge atoms as first neighbors hás smaller formation energy, the diffusion of the vacancies Will take place along paths that resemble purê Ge, for Ge-rich alloys; (ii)Surfaces: we study the adsorption of Ge monomers and dimers on Si(100). For monomers, there are several local mínima of the potential energy surface, for the same (x, y) position in the surface, depending on the buckling of the surface dimers near the adatom. We show that this can be identified in theoretical STM (Scanning Tunelling Microscopy) images. This kind of effect also occurs for dimers, and hás already been observed experimentally, but with a wrong interpretation. Through our study, we propose a new structure for the experimental images. The behavior of Si and Ge atoms and dimers near steps is also analyzed. Due to the differencein the lattice parameter of Si and Ge, we show that the adsorption becomes different when only two atoms are in the surface. Through these results, we propose a model to explain the reversion of step roughness due to Ge deposition on Si(100); (iii)Mn impurities in Si: we analise the behavior of Mn impurities in bulk Si ando n the surface. For the bulk, we observe that EF is lower for intersititial than for substitutional sites. On the surface, there is a substitutional site that hás the same EF AS A INTESTITIAL ONE. This fact may be important to the development of Si based ferromagnetic semiconductors. A method is proposed to verify this fact experimentally, through STM images.

Dans le cadre des études sur le contrôle électronique de molécules individuelles pour l'électronique mono-moléculaire, ce travail de thèse aborde la problématique du transfert de charges à l'échelle atomique. Les études, utilisant un microscope à effet tunnel (STM), ont été menées de manière privilégiée sur la surface de silicium (100) hydrogénée à basse température (5K). Ce travail démontre la possibilité d'activer à distance un bistable atomique, composé d'un dimère de silicium portant un unique atome d'hydrogène. La manipulation atomique s'effectue grâce à un transfert de charges au travers des états de surface du Si:H (dopage de type n). Ces résultats montrent l'importance d'un contrôle à l'échelle atomique de la zone de contact entre les lignes atomiques considérées et le bistable. Par ailleurs, il a été observé que suivant la nature du dopage le bistable atomique présente différents états de charge. En particulier, sur un substrat de type p, il est possible de modifier l'état de charge de la liaison pendante d'un état neutre à un état chargé négativement et ce de manière réversible. D'autre part, cette thèse présente des résultats préliminaires sur des systèmes qui permettront d'étudier le transfert de charges entre deux molécules. Ce processus peut être envisagé de deux façons: soit en rapprochant deux molécules de sorte que la charge injectée par l'intermédiaire d'une pointe STM dans l'une des molécules puisse être transférée à une molécule voisine; soit en utilisant un polymère conducteur comme support au transfert de charges afin de permettre l'activation d'une fonction moléculaire chimiquement liée au polymère.

Room-temperature chemisorption of hexacyclic aromatic hydrocarbons on the 2x1, sputtered, oxidized and H-terminated Si(100) surfaces, as well as those upon post treatments of hydrogenation, oxidization and electron irradiation have been investigated by using thermal desorption spectrometry (TDS), Auger electron spectroscopy (AES) and low energy electron diffraction (LEED). This work focuses on the effects of the functional groups (phenyl, methyl, vinyl, heteroatom, and H atom) in the chemisorbed aromatic hydrocarbons (benzene, toluene, xylene isomers, styrene and pyridine) on organic functionalization of the Si(100) surface, particularly on such surface processes as cycloaddition, dative adsorption, hydrogen abstraction, desorption, dissociation, diffusion, and condensation polymerization. Unlike the earlier notion that hydrogen evolution in the hydrocarbon/Si(100) systems is the result of hydrocarbon dissociation (into smaller hydrocarbon fragments and H atoms) on the surface, condensation polymerization of the adsorbed aromatic hydrocarbons is proposed in the present work, in order to explain the higher-temperature hydrogen evolution feature in the toluene/Si(100) system. This hypothesis is supported by our TDS results for other hydrocarbon adsorbates, especially in the pyridine/Si(100) system where electron-induced condensation polymerization has been observed at room temperature. The improved techniques in the TDS experiments developed in the present work have enabled us to observe condensation polymerization and the effect of H on the surface processes (via surface reconstruction) on Si(100) for the first time. New analysis methods have also been developed to determine the adsorption coverage from the AES data, and this work has not only improved the accuracy of the elemental-coverage evaluation, but also provided a means to estimate the rate and the order of chemisorption. By using the density functional theory with the Gaussian 98 program, the adsorption geometries and the corresponding adsorption energies of various adsorption phases have been calculated. These computational results have provided useful insights into the chemisorption structures on the Si(100) surface. The present work also presents the development of three kinetics models for hydrogen evolution in the aforementioned aromatic-hydrocarbon systems on Si(100). Based on a modified collision theory with consideration of diffusion, these theoretical models have proven to be quite successful in simulating the observed TDS profiles and in estimating the kinetic parameters for the analysis of condensation polymerization in 2-dimensional diffusion systems. The present work illustrates that TDS experiments can be used effectively with quantum computation and theoretical kinetics modelling to elucidate the intricate nature of organosilicon surface chemistry.

Silver (Ag) is an ideal low-loss platform for plasmonic applications, but from a materials standpoint it presents challenges. Development of plasmonic devices based on Ag thin film has been hindered both by the dificulty of fabricating such film and by its fragility out of vacuum. Silver is non-wetting on semiconducting and insulating substrates, but on certain semiconductors and insulators can adopt a metastable atomically at epitaxial film morphology if it is deposited using the "two-step" growth method. This method consists of deposition at low temperature and annealing to room temperature. However, epitaxial Ag is metastable, and dewets out of vacuum. The mechanisms of dewetting in this system remain little understood. The fragility of Ag film presents a particular problem for the engineering of plasmonic devices, which are predicted to have important industrial applications if robust low-loss platforms can be developed. This dissertation presents two sets of experiments. In the first set, scanning probe techniques and low energy electron microscopy have been used to characterize Ag(111) growth and dewetting on two orientations of silicon (Si), Si(111) and Si(100). These studies reveal that multiple mechanisms contribute to Ag film dewetting. Film stability is observed to increase with thickness, and thickness to play a decisive role in determining dewetting processes. A method has been developed to cap Ag film with germanium (Ge) to stabilize it against dewetting. The second set of experiments consists of optical studies that focus on the plasmonic properties of epitaxial Ag film. Because of the problems posed until now by epitaxial Ag growth and stabilization, research and development in the area of plasmonics has been limited to devices based on rough, thermally evaporated Ag film, which is robust and simple to produce. However, plasmonic damping in such film is higher than in epitaxial film. The optical studies presented here establish that Ag film can now be stabilized sufficiently to allow optical probing and device applications out of vacuum. Furthermore, they demonstrate the superiority of epitaxial Ag film relative to thermally evaporated film as a low-loss platform for plasmonic devices spanning the visible and infrared regimes. / text

Utilizando métodos de primeiros princípios, baseados na Teoria do Funcional da Desidade, investigamos, de forma sistemática, problemas de interesse na física de semicondutores: (i) A liga SixGe1-x: observa-se um pequeno desvio da linearidade, para o parâmetro de rede da liga, em função da concentração, sendo que as distâncias entre átomos de Ge são as que mais variam. O comportamento de vacâncias nessa liga se mostrou intermediário entre o Ge e o Si, e a energia de formação (EF) das vacâncias variou entre 2,06 eV e 2,90 eV, dependendo da vizinhança dessa. Propusemos um modelo para a difusão de Ge nessa liga. O fato das vacâncias com mais átomos de Ge como vizinhos ter menor energia de formação, faz com que a difusão das vacâncias se dê por caminhos lembrando o Ge puro, ou seja, a tendência será de que os vizinhos dessa vacância sejam de Ge, para ligas ricas em Ge; (ii) Superfícies: estudamos a adsorção de monômeros e dímeros de Ge sobre Si (100). Verificamos que, para monômeros, podem existir diversos mínimos locais da superfície de energia potencial para a mesma posição (x, y) na superfície, cuja diferença está na inclinação dos dímeros da superfície perto deste átomo. Mostramos que isso pode ser identificado em imagens teóricas de STM (Scanning Tunelling Microscopy) e propomos que isso seja verificado experimentalmente. Este tipo de efeito também ocorre com dímeros, sendo que isso já foi observado experimentalmente, mas com uma interpretação errônea. Através do nosso estudo podemos propor uma estrutura mais condizente com as imagens experimentais. O comportamento de átomos e dímeros de Si e Ge perto de degraus também foi analisado. Devido à diferença no parâmetro de rede do Si e do Ge, mostramos que a adsorção se torna diferente quando somente dois átomos estão na superfície. Através desses resultados, propomos um modelo para explicar a reversão da rugosidade dos degraus durante o crescimento de Ge sobre Si(100); (iii) Impurezas de Mn em Si: analisamos o comportamento de impurezas de Mn no cristal de Si e sobre a superfície. No cristal, observamos que a EF de sítios intersticiais é menor do que os sítios substitucionais. Sobre a superfície, existe um sítio substitucional que possue a mesma EF de um sítio intersticial. Esse é um fato importante para o desenvolvimento de semicondutores ferromagnéticos à base de Si. Propomos um método para que esse fato seja verificado experimentalmente, através de imagens de STM. / Using ab initio methods, based on Density Functional Theory, we have systematically investigated problems of interest for semiconductor physics: (i)The SixGe1-x alloy: we observe a small bowing in the lattice parameter, as a function of concentration, and that a larger variation in interatomic distances occurs for Ge-Ge bonds. The behavior of vacancies in this alloy is intermediate between Si and Ge, with formation energies (EF) varying from 2,06 eV to 2,90 eV, depending on the neighborhood of the vacancy. We propose a model for the diffusion of Ge in this alloy. As the vacancy with four Ge atoms as first neighbors hás smaller formation energy, the diffusion of the vacancies Will take place along paths that resemble purê Ge, for Ge-rich alloys; (ii)Surfaces: we study the adsorption of Ge monomers and dimers on Si(100). For monomers, there are several local mínima of the potential energy surface, for the same (x, y) position in the surface, depending on the buckling of the surface dimers near the adatom. We show that this can be identified in theoretical STM (Scanning Tunelling Microscopy) images. This kind of effect also occurs for dimers, and hás already been observed experimentally, but with a wrong interpretation. Through our study, we propose a new structure for the experimental images. The behavior of Si and Ge atoms and dimers near steps is also analyzed. Due to the differencein the lattice parameter of Si and Ge, we show that the adsorption becomes different when only two atoms are in the surface. Through these results, we propose a model to explain the reversion of step roughness due to Ge deposition on Si(100); (iii)Mn impurities in Si: we analise the behavior of Mn impurities in bulk Si ando n the surface. For the bulk, we observe that EF is lower for intersititial than for substitutional sites. On the surface, there is a substitutional site that hás the same EF AS A INTESTITIAL ONE. This fact may be important to the development of Si based ferromagnetic semiconductors. A method is proposed to verify this fact experimentally, through STM images.

Im Rahmen dieser Arbeit werden zwei Perylen-Derivate als Zwischenschichten in Ag/organischen Schichten/GaAs(100)-Heterostrukturen eingesetzt, um den Einfluss von unterschiedlichen chemischen Endgruppen auf die chemischen und strukturellen Eigenschaften beider Grenzflächen, sowie auf die Morphologie, Struktur und Kristallinität von organischen Schichten zu charakterisieren. Die molekularen Schichten von 3,4,9,10-Perylentetracarbonsäure Dianhydrid (PTCDA) und Dimethyl-3,4,9,10-Perylentetracarbonsäure Diimid (DiMe-PTCDI) werden durch organische Molekularstrahldeposition (OMBD) im Ultrahochvakuum auf S-passivierten GaAs(100):2x1-Substraten hergestellt. Weiterhin wird der Einfluss des Substrats untersucht, indem PTCDA-Wachstum auf H-passiviertem Si(100):1x1 durchgeführt wird. Als Hauptcharakterisierungsmethode wird die Ramanspektroskopie eingesetzt. Diese ist eine nicht-destruktive Methode, die auch in situ Untersuchungen des Wachstumsprozesses ermöglicht. Die komplementäre Infrarotspektroskopie sowie die Rasterkraftmikroskopie, Rasterelektronenmikroskopie und Röntgenbeugung (XRD) werden zur Ergänzung des Verständnisses der Heterostruktureigenschaften verwendet. Die Empfindlichkeit von Raman- und Infrarot-Spektroskopien auf die chemisch unterschiedlichen Endgruppen wird durch experimentelle Untersuchungen an PTCDA- und DiMe-PTCDI-Kristallen, beziehungsweise dicken Schichten und mit Hilfe theoretischer Berechnungen nachgewiesen. So wird zum ersten Mal eine vollständige Zuordnung der Schwingunsfrequenzen zu den internen Schwingungsmoden von DiMe-PTCDI vorgeschlagen. Im niedrigen Frequenzbereich der Ramanspektren werden die externen molekularen Schwingungsmoden, oder molekularen „Phononen“, die eine Signatur der Kristallinität darstellen, beobachtet. Die Phononen von DiMe-PTCDI werden in dieser Arbeit zum ersten Mal in einem Ramanexperiment beobachtet. Mittels resonanter Ramanspektroskopie wird die Detektion von C-H-Deformationsmoden und C-C-Streckmoden sogar im Sub-Monolagenbereich molekularer Bedeckung auf Halbleiteroberflächen möglich. Anhand dieser Ramanspektren konnte die Art der Wechselwirkung zwischen Molekülen und passivierten Oberflächen näher charakterisiert werden. Zusätzliche Information bringen die GaAs LO- und Plasmon-gekoppelten LO- Phononen, deren Intensitätsverhältnis im Ramanspektrum die Bandverbiegung im GaAs-Substrat widerspiegelt. Die Kristallinität der hergestellten organischen Schichten mit Dicken größer als 2 nm wird durch Beobachtung der molekularen „Phononen“ nachgewiesen. Als allgemeine Tendenz konnte bewiesen werden, dass mit steigender Substrattemperatur während des Wachstums größere Kristalldomänen entstehen. Weiterhin wird eine Methode vorgeschlagen, um den Anteil von zwei PTCDA- Kristallphasen mit ähnlichen Gitterparametern anhand der Raman- beziehungsweise XRD-Spektren zu bestimmen. Durch ihre sehr gute Ordnung können die DiMe-PTCDI- Schichten als Modellsystem dienen, um eine Methode zu entwickeln, die die Molekülorientierung im Bezug zum Substrat aus polarisationsabhängigen Raman- und Infrarotmessungen bestimmt. Bei der Metall-Bedampfung wird die Empfindlichkeit der Ramanstreuung an internen molekularen Schwingungsmoden von PTCDA und DiMe-PTCDI-Schichten durch oberflächenverstärkte Ramanstreuung (SERS) erhöht. Anhand der unterschiedlichen Signalverstärkungsmechanismen werden Informationen über die Ag/Molekül- Wechselwirkung und die Morphologie der Ag-Schichten abgeleitet.

Title Interaction of Organic Molecules with Metal Passivated Silicon Surfaces Studied via STM Author Petr Zimmermann Department Department of Plasma and Surface Science Supervisor Doc. RNDr. Pavel Sobotík, CSc. Department of Plasma and Surface Science Abstract Organic molecules offer a wide range of optical, electronic or chemical properties. Coupling them to silicon could pave way to novel applications and devices, however, a controlled molecular functionalization of silicon remains challenging due to the presence of highly reactive dangling bonds on its surfaces. We attempt to decrease the reactivity of low index silicon surfaces with an ultra-thin layer of a metal adsorbates and study their interaction with organic molecules via scanning tunnelling microscopy. In the first part we investigate the interaction of ethylene, a small unsaturated molecule, with tin and indium 1D chains grown on Si(001) - 2 × 1. The chains consist of dimers structurally analogous to the dimers of the underlying Si(001) - 2 × 1 surface. Aided by photoelectron spectroscopy we find that the Sn chains are less reactive than the Si(001) surface and that the absence of a π dimer bond renders indium chains inert. In the second part we study the interaction of copper phthalocyanine, a small macrocyclic heteroaromatic compound, with the...

Parmi les polytypes les plus connus du carbure de silicium (SiC), le polytype cubique (3C-SiC), est le seul qui peut croitre sur des substrats silicium. L’hétérostructure 3C-SiC/Si est intéressante non seulement pour son faible coût de production mais aussi pour la conception de Systèmes Micro-Electro-Mécaniques (« MEMS »). La valeur élevée du module de Young du 3C-SiC, comparé à celui du silicium, permettrait à des cantilevers submicroniques, fabriqués à partir de films minces de 3C-SiC, de vibrer à ultra-hautes fréquences (>100MHz). Cette haute fréquence de résonance est la clé pour obtenir un système AFM non-contact ultra-sensible et rapide. Cependant, il n’existe pas de cantilever en SiC disponible sur le marché en raison de la difficulté à élaborer des films minces de 3C-SiC de bonne qualité, la technique de synthèse la plus utilisée étant le Dépôt Chimique en phase Vapeur (CVD). La raison première de cette difficulté à obtenir un matériau de bonne qualité réside essentiellement dans l’important désaccord de maille et la différence de dilatation thermique entre le 3C-SiC et Si qui génèrent des défauts cristallins à l’interface et jusqu’à la surface du film de 3C-SiC, la zone la plus défectueuse se localisant auprès de l’interface……. / Among aIl the well known polytypes ofihe silicon carbide (SiC), the cubic polytype (3C-SiC) is the only one that min be grown on silicon substrates. This heterostructure 3C SiC/Si ta interesting not only for its low production cost but also for the design of tise Micro-Electro-Mechanical Systems (MEMS). The high value ofthe Young’s modulis the 3C-SiC, compared to the silicon, allows submicronic cantilevers, fabrmcated from tIse 3C-SiC thin filins, to resonate at ultra-high frequency (>100MHz). The high resonant frequency is the key to obtain s fast, ultra-sensitive non-contact AFM systein.However, there isn’t any SiC cantilevers available on the market because of the difficulty to elaborate gond quality 3C-SiC thin films, with tIse Chemical Vapor Deposition (CVD) technique being tIse most frequently used synthesis technology. Tise first reason of tIse difficulty with the CVD technology to obtain gond quality thin film rests essentially in the important lattice mismatch and the difference in thermal expansion coefficient existing between 3C SiC and Si which generate crystalline defects at the interface and propagating tilI the 3C-SiC filin surface, with the inost defective zone localizing near the interface…….

No description available.

Diese Arbeit untersucht das Aufwachsen von dünnen GaP-Schichten auf Si(100)-Oberflächen mittels metallorganischer Gasphasenabscheidung (MOVPE) und die damit verbundene Entstehung von Antiphasendomänen (APDs). Die Vermessung der Si(100)-Substratoberfläche, der III-V/Si(100)-Grenzfläche und der abgeschiedenen GaP-Filme mit oberflächenempfindlichen Messverfahren dient der Etablierung APD-freier III-V-Heteroepitaxie auf Si(100). Die Präparation reiner Si(100)-Oberflächen frei von Sauerstoff in der MOVPE-Umgebung konnte durch Röntgenphotoelektronenspektroskopie (XPS) belegt werden. Vorwiegend doppelgestufte Substrate wurden sowohl auf 0.1°, 2° als auch 6° fehlorientierten Substraten erzielt. Im Widerspruch zu etablierten Ergebnissen im Ultrahochvakuum richteten sich die Dimere auf 0.1° und 2° Proben senkrecht zu den Doppelstufenkanten aus, vermutlich durch den Einfluss des Wasserstoffs in der MOVPE. Infrarotspektroskopie (FTIR) belegte eine Monohydridterminierung infolge der Präparation, während in-situ Reflexions-Anisotropie-Spectroskopie (RAS) zeigte, dass diese bei höheren Prozesstemperaturen nicht vorliegt. Für die GaP-Heteroepitaxie auf diesen Substraten wurde ein optisches in-situ Messverfahren für die quantitative Bestimmung des APD-Gehaltes entwickelt, welches auf dem eingehenden Verständnis der Rekonstruktionen von GaP(100), der assozierten RAS-Signaturen und dem mit Rastertunnelmikroskopie (STM) und Beugung niedrigenergetischer Elektronen (LEED) etablierten mikroskopischen Verständnis der Oberflächen beruht. Die APD-Quantifizierung mittels RAS wurde durch empirische Korrektur von Interferenzeffekten und optische Modellrechnungen, die auch Rückschlüsse auf die Grenzflächenanisotropie erlauben, deutlich verbessert. Der Abgleich mit unterschiedlichsten Mikroskopiemethoden, basierend auf niedrigenergetischen Elektronen (LEEM), Elektronentransmission (TEM) und Rasterkraftverfahren (AFM) bestätigt die erzielten Ergebnisse. / The present work investigates the growth of thin, pseudomorphic GaP films by metalorganic vapor phase epitaxy (MOVPE) on Si(100) surfaces by a variety of surface-sensitive methods and pays with specific attention to the substrate induced anti-phase disorder in this lattice matched model system for III-V/Si(100) heteroepitaxy. Thorough X-ray photoelectron spectroscopy investigations verified the preparation of clean Si(100) surfaces free of oxygen in the MOVPE ambient. Predominantly double-layer stepped Si(100) surfaces were obtained for 0.1°, 2°, and 6° misoriented substrates. In contrast to results established in ultra-high vacuum (UHV), double-layer steps with dimers oriented perpendicular to their edges were observed, which was attributed to the presence of hydrogen as a process gas in the MOVPE environment. A monohydride termination of Si(100) was determined after substrate preparation by Fourier-transform infrared spectroscopy (FTIR), while reflectance anisotropy spectroscopy (RAS) showed the absence of hydrogen termination at higher temperatures. Optical in situ spectroscopy was established as a method for the quantitative evaluation of anti-phase disorder in GaP heteroepitaxy based on a detailed understanding of the GaP(100) surface reconstructions, of the development of the corresponding RAS signatures, and of the associated surface structure studied by scanning tunneling microscopy (STM) and low-energy electron diffraction (LEED). The in situ RAS quantification was greatly improved by empirical correction of thin film interference and optical model calculations, which also enable extraction of the GaP/Si(100) interface anisotropy. The characterization was supported by benchmarking to atomic force microscopy (AFM) and transmission electron microscopy (TEM) results as well as to low energy electron microscopy (LEEM), which was used for surface sensitive visualization of anti-phase domains on a mesoscopic length scale.