Stress in silicon structures plays an essential role in modern semiconductor technology. This stress has to be measured and due to the ongoing miniaturization in today’s semiconductor industry, the measuring method has to meet certain requirements. The present thesis deals with the question how Raman spectroscopy can be used to measure the state of stress in semiconductor structures. In the first chapter the relation between Raman peakshift and stress in the material is explained. It is shown that detailed stress maps with a spatial resolution close to the diffraction limit can be obtained in structured semiconductor samples. Furthermore a novel procedure, the so called Stokes-AntiStokes-Difference method is introduced. With this method, topography, tool or drift effects can be distinguished from stress related influences in the sample. In the next chapter Tip-enhanced Raman Scattering (TERS) and its application for an improvement in lateral resolution is discussed. For this, a study is presented, which shows the influence of metal particles on the intensity and localization of the Raman signal. A method to attach metal particles to scannable tips is successfully applied. First TERS scans are shown and their impact on and challenges for high resolution stress measurements on semiconductor structures is explained. / Spannungen in Siliziumstrukturen spielen eine entscheidende Rolle für die moderne Halbleitertechnologie. Diese mechanischen Verspannungen müssen gemessen werden und die fortlaufende Miniaturisierung in der Halbleiterindustrie stellt besondere Anforderungen an die benutzte Messmethode. Diese Arbeit beschäftigt sich mit dem Thema, inwieweit Raman Spektroskopie zur Spannungsmessung in Halbleiterstrukturen geeignet ist. Im ersten Kapitel wird der Zusammenhang zwischen Raman Peakverschiebung und mechanischer Spannung erläutert. Es wird gezeigt wie man detaillierte stress maps in strukturierten Halbleiterproben erhält mit einer Auflösung nahe am Diffraktionslimit. Darüber hinaus wird ein neuartiges Verfahren, die sogenannte Stokes-AntiStokes-Differenz Methode vorgestellt mit deren Hilfe man Einflüsse von Topographie, Geräteeffekten und Drift von den zu messenden Spannungszuständen in der Probe unterscheiden kann. Im nächsten Kapitel wird diskutiert, inwiefern der Ansatz von Tip-enhanced Raman Scattering (TERS), also spitzenverstärkter Raman Streuung genutzt werden kann um die laterale Auflösung bei Raman Spannungsmessungen zu erhöhen. Hierzu wird eine Studie präsentiert, die zeigt, welchen Einfluss Metallpartikel auf Erhöhung und Lokalisierung des Ramansignals haben. Eine Methode um Metallpartikel an scannbare Spitzen anzubringen wird erfolgreich angewendet. Erste TERS-Scans werden gezeigt und deren Bedeutung und Herausforderungen bei der hochaufgelösten Messung von Spannungen in Halbleiterstrukturen wird erläutert.

Stress in silicon structures plays an essential role in modern semiconductor technology. This stress has to be measured and due to the ongoing miniaturization in today’s semiconductor industry, the measuring method has to meet certain requirements. The present thesis deals with the question how Raman spectroscopy can be used to measure the state of stress in semiconductor structures. In the first chapter the relation between Raman peakshift and stress in the material is explained. It is shown that detailed stress maps with a spatial resolution close to the diffraction limit can be obtained in structured semiconductor samples. Furthermore a novel procedure, the so called Stokes-AntiStokes-Difference method is introduced. With this method, topography, tool or drift effects can be distinguished from stress related influences in the sample. In the next chapter Tip-enhanced Raman Scattering (TERS) and its application for an improvement in lateral resolution is discussed. For this, a study is presented, which shows the influence of metal particles on the intensity and localization of the Raman signal. A method to attach metal particles to scannable tips is successfully applied. First TERS scans are shown and their impact on and challenges for high resolution stress measurements on semiconductor structures is explained. / Spannungen in Siliziumstrukturen spielen eine entscheidende Rolle für die moderne Halbleitertechnologie. Diese mechanischen Verspannungen müssen gemessen werden und die fortlaufende Miniaturisierung in der Halbleiterindustrie stellt besondere Anforderungen an die benutzte Messmethode. Diese Arbeit beschäftigt sich mit dem Thema, inwieweit Raman Spektroskopie zur Spannungsmessung in Halbleiterstrukturen geeignet ist. Im ersten Kapitel wird der Zusammenhang zwischen Raman Peakverschiebung und mechanischer Spannung erläutert. Es wird gezeigt wie man detaillierte stress maps in strukturierten Halbleiterproben erhält mit einer Auflösung nahe am Diffraktionslimit. Darüber hinaus wird ein neuartiges Verfahren, die sogenannte Stokes-AntiStokes-Differenz Methode vorgestellt mit deren Hilfe man Einflüsse von Topographie, Geräteeffekten und Drift von den zu messenden Spannungszuständen in der Probe unterscheiden kann. Im nächsten Kapitel wird diskutiert, inwiefern der Ansatz von Tip-enhanced Raman Scattering (TERS), also spitzenverstärkter Raman Streuung genutzt werden kann um die laterale Auflösung bei Raman Spannungsmessungen zu erhöhen. Hierzu wird eine Studie präsentiert, die zeigt, welchen Einfluss Metallpartikel auf Erhöhung und Lokalisierung des Ramansignals haben. Eine Methode um Metallpartikel an scannbare Spitzen anzubringen wird erfolgreich angewendet. Erste TERS-Scans werden gezeigt und deren Bedeutung und Herausforderungen bei der hochaufgelösten Messung von Spannungen in Halbleiterstrukturen wird erläutert.

Due to a lack of fundamental knowledge about the role of molecular structures in molecular electronic devices, this research is focused on the development of instruments to understand the relation between device design and the electronic properties of electroactive components. The overall goal is to apply this insight to obtain a more efficient and reliable scheme and greater functional control over each component. This work developed a fabrication method for porphyrinoids on graphene-based field effect transistors (FETs), and a chemical sensing platform under an ambient environment by integrating a tip-enhanced Raman spectroscope (TERS), atomic force microscope (AFM), and electronic testing circuit. The study is divided into three aspects. The first is aimed at demonstrating fabrication processes of nanoscale FETs of graphene and porphyrinoid composites based entirely on scanning probe lithography (SPL). A nanoshaving mechanism was used to define patterns on octadecanethiol self-assembled monolayers on gold film evaporated on graphene flakes, followed by metal wet etching and/or oxygen plasma etching to develop patterns on Au films and graphene, respectively. The integrity and optoelectronic properties were examined to validate the processes. The second area of study focused on the development of the chemical sensing platform, enabling chemical changes to be monitored during charge transports under an ambient environment. The localized Raman enhancement was induced by exciting surface plasmon resonance in nanoscale silver enhancing probes made by thermal silver evaporation on sharp AFM tips. As the system was designed along an off-axis illumination/collection scheme, it was demonstrated that it was capable of observing molecular decomposition on opaque and conductive substrates induced by an electric bias. The third line of work proposed a novel TERS system and a probe preparation method. Silver nanowires mounted on AFM tips were used to locally enhance the Raman scattering. The observed Raman enhancement allows quick chemical analysis from a nanoscale region, and thus enables chemical mapping beyond the diffraction limit. Compared with other TERS geometries, the new optical design not only allows analysis on large or opaque samples, but also simplifies the design of the optical components and the alignment processes of the setup.

No description available.

No description available.

Um hochsensitive räumliche Auflösung zu erreichen, wurden oberflächenverstärkte Raman-Spektroskopie (SERS) und spitzenverstärkte Raman-Spektroskopie (TERS) weiterentwickelt. Das grundlegende Funktionsprinzip ist jedoch noch nicht vollständig verstanden und auch Experimente dazu fehlen teilweise. In dieser Arbeit habe ich zuerst Gap-mode TERS eingesetzt, bei welcher ein starkes elektromagnetisches Feld es ermöglicht, dünne Schichten von sehr schwach streuenden Molekülen zu untersuchen. Mit der Nanometerauflösung von TERS konnte ein auf der Goldoberfläche spontan phasen-getrennten, gemischtes Thiolsystem räumlich aufgelöst werden, während STM die Nanodomänen nicht über ihre Höhenunterschiede erkennen konnte. Neue Studien deuten auf eine Raman-Verstärkung durch Graphen und Flachgold aufgrund eines chemischen Mechanismus hin. Kupfer Phthalocyanin (CuPc)-Moleküle zwischen Graphen und einer flachen Goldoberfläche erlauben Elektronenübertragungen in beide Richtungen und damit stellt sich die Frage, ob chemische Verstärkungen von SERS zueinander addiert werden können. Die Ergebnisse deuten auf eine Kopplung von den zwei einzelnen Oberflächen hin. Es wurde eine 68-fache Verstärkung von geschichtetem CuPc zwischen Graphen und Gold beobachtet, jeweils bezogen auf CuPc auf Glimmer. Zuletzt wurde mittels TERS diese Schichtstruktur untersucht. Moleküle, die sich auf der Goldoberfläche selbstanordnen und mit Graphen bedeckt worden sind, fungieren als optische Sensoren, bei welchen die Graphenverkapselung die Moleküle beschützt. Außerdem kann eine sehr hohe Raman-Verstärkung mit großer lokaler Auflösung aufgrund der kombinierten Effekte von SERS und TERS herbeigeführt werden. Die Ergebnisse zeigen, dass eine Spitze, die Graphen-verstärkte Raman-Streuung (GERS) zusätzlich um vier Größenordnungen verbessern kann, aber Gap-mode TERS abschirmt. / The quest to achieve ultrahigh sensitivity, surface specificity and high spatial resolution has led to the development of plasmon- and chemically- enhanced Raman spectroscopy, including techniques such as surface-enhanced Raman spectroscopy (SERS) and tip-enhanced Raman spectroscopy (TERS). However, a lack of fundamentally experimental demonstrations still remains. In this thesis, I firstly used gap-mode TERS, which allows studying even molecularly thin layers of very weakly scattering molecules. With the nanoscale spatial resolution provided by TERS, the spontaneous segregation in a mixed thiol system on a gold surface could be resolved, while scanning tunneling microscopy (STM) could not discern the nanodomains via their apparent height difference. Furthermore, since graphene and a flat gold surface both were known to provide some Raman enhancement through mainly a chemical mechanism, sandwiching copper phthalocyanine (CuPc) molecules between graphene and a flat gold surface allowed electrons to be transferred in both directions, and thereby to address the question whether chemical enhancements with different origins in SERS can add to each other. The results suggest that the chemical enhancements were influenced by the two individual surfaces, and a 68-fold enhancement of sandwiched CuPc between graphene and gold was observed, as compared to CuPc on mica. Last, TERS was applied to study this sandwiched structure. Molecules self-assembled on a gold surface and covered by transferred graphene acted as optical probes. Such an arrangement has interesting properties in the sense that molecules are protected and encapsulated by graphene. Also, a possible ultrahigh Raman enhancement together with localized spatial resolution may be achieved due to the combined effects from SERS and TERS. The results showed that a tip can improve graphene-enhanced Raman scattering (GERS) further by 4 orders of magnitude, but graphene exerts some shielding effect to gap-mode TERS.

Ces travaux de thèse portent sur les phénomènes d’amplification du signal de diffusion Raman par effet de surface et par effet de pointe. Des réseaux de motifs métalliques de taille nanométrique arrangés spatialement ont été fabriqués par la méthode de transfert Langmuir-Blodgett et par lithographie à faisceau d’électrons. De telles structures de géométries contrôlées déposées à la surface de lamelles de microscope ont été développées afin d’amplifier le signal Raman de molécules adsorbées par effet SERS (Surface Enhanced Raman Spectroscopy). Ces nanostructures triangulaires en or de taille proche de la longueur d’onde ont des bandes de résonance plasmon dans le domaine spectral visible. En utilisant une source de laser appropriée dans ce domaine spectral, les facteurs d’amplification Raman d’une couche mono-moléculaire d’un dérivé azobenzène sont de plusieurs ordres de grandeur, et ce pour les deux techniques de nano-lithographie employées. Afin de compléter ces premiers résultats, des réseaux de fils d’or avec de grands facteurs de forme ont été fabriqués. Ces derniers montrent des résonances plasmons multipolaires et des facteurs d’amplification de l’ordre de 105. Les techniques de microscopie en champ proche ont également été développées afin de localiser précisément l’exaltation Raman et d’accroitre la résolution spatiale de mesures Raman. Des pointes métalliques en or de taille nanométrique ont ainsi permis d’amplifier localement le signal de diffusion de molécules placées à leur proximité par effet TERS (Tip Enhanced Raman Spectroscopy). Les développements logiciels et mécaniques entre un microscope confocal Raman et un microscope à force atomique ont été implémentés afin de contrôler simultanément les deux instruments. Ce montage expérimental a été appliqué à l’étude de nanofils semi-conducteurs de nitrure de gallium permettant de suivre leur signal vibrationnel avec une résolution spatiale inférieure à 200 nm. / This thesis work focuses on Raman scattering enhancements by metallic nanostructures. In the first part of this work, arrays of metallic patterns with nanometer dimensions were fabricated by the Langmuir-Blodgett deposition technique and electron-beam lithography. Such structures made of gold were fabricated onto microscope slides with the goal to enhance the Raman signal through SERS effect (Surface Enhanced Raman Spectroscopy). These patterns formed by an assembly of triangular nanostructures with sizes of hundreds of nanometers, exhibit plasmon resonance bands in the visible spectral region. By using an appropriate excitation laser source with respect to the plasmon frequency, Raman enhancement factors of a monolayer were found to be of several order of magnitude for both Langmuir-Blodgett and electron-beam lithography platforms. To further complement these results, gold wires arrays with large aspect ratio made by electron-beam lithography showed multipolar plasmon resonances with enhancement factors up to 105. In the second part of this thesis, near-field Raman microscopy has been developed with the aim to localize precisely the Raman enhancement and improve spatial resolution of Raman measurements. Atomic force microscopy gold tips have been used to locally enhance scattering signal of molecules in close proximity to the tip opening new opportunities. This approach known as TERS (Tip Enhanced Raman Spectroscopy) is of significant interest to probe nanomaterials, nanostructures or monolayers. Software and mechanical developments have been made between a confocal Raman microscope and an atomic force microscope to control simultaneously both instruments. This experimental setup was used to characterize gallium nitride semi-conductors nanowires with spatial resolution better than 200 nm.

ANDRADE, Nádia Ferreira de. Propriedades vibracionais e estruturais de cadeias lineares de carbono. 2014. 213 f. Tese (Doutorado em Física) - Programa de Pós-Graduação em Física, Departamento de Física, Centro de Ciências, Universidade Federal do Ceará, Fortaleza, 2014. / Submitted by Edvander Pires (edvanderpires@gmail.com) on 2016-01-05T19:46:56Z No. of bitstreams: 1 2014_tese_nfandrade.pdf: 12228920 bytes, checksum: 9f6aef6ce2c60c7d88f7ecb59b39e43f (MD5) / Approved for entry into archive by Edvander Pires(edvanderpires@gmail.com) on 2016-01-05T19:55:18Z (GMT) No. of bitstreams: 1 2014_tese_nfandrade.pdf: 12228920 bytes, checksum: 9f6aef6ce2c60c7d88f7ecb59b39e43f (MD5) / Made available in DSpace on 2016-01-05T19:55:18Z (GMT). No. of bitstreams: 1 2014_tese_nfandrade.pdf: 12228920 bytes, checksum: 9f6aef6ce2c60c7d88f7ecb59b39e43f (MD5) Previous issue date: 2014 / We present a study of linear carbon chains encapsulated in multi-wall carbon nanotubes (Cn@MWCNT) using electron microscopy and Raman spectroscopy in ambient and extreme conditions. The linear chains were characterized by resonance Raman, thermal analysis, ion bombardment and using high resolution and scanning transmission electron microscopy. The HRTEM images obtained here shown the chain within the innermost MWCNT and in this work we obtain the first image of ``cross-section$"$ described for this system Cn@MWCNT. A Raman experiment was carried out in high pressure conditions (from 0 to 9.54 GPa) using a paraffin oil as pressure transmitting medium.The G band frequency of nanotube increase as pressure increase while the C-C stretching mode of linear carbon chain decreases. Theoretical results based on atomistic simulations allowed an understanding of vibrational behavior of the chains. Furthermore, we conducted works that involved instrumentation in order to set in the Department of Physics of the Federal University of Ceara, the instrumentation needed for the development of a device that enables to perform Raman spectroscopy and AFM measurements. For this purpose is necessary to integrate a scan-head, a controller system that controls the probe scan-head and an optical system that communicates with an APD (avalanche photodiode device), responsible for carrying the images with a spectrometer dedicated for obtaining Raman spectra. The system is functional as regards the ability to perform confocal measurements and ready for setting the near field measurements. / Apresentamos um estudo de cadeias lineares de carbono encapsuladas em nanotubos de carbono de paredes múltiplas (Cn@MWCNT) utilizando microscopia eletrônica e espectroscopia Raman em condições ambientes e extremas. As cadeias lineares foram caracterizadas por espectroscopia Raman ressonante, análise térmica, bombardeamento de íons e com microscopia eletrônica de transmissão. As imagens de alta resolução aqui obtidas mostraram a presença das cadeias dentro do tubo mais interno do MWCNT e neste trabalho obtivemos a primeira imagem de "seção transversal" descrita na literatura para um sistema deste tipo. Um experimento Raman foi conduzido em condições de altas pressões (0 - 9,54 GPa), utilizando um óleo de parafina como meio transmissor de pressão. A frequência da banda G dos nanotubos aumentou com o aumento da pressão enquanto o modo de estiramento C-C das cadeias de carbono lineares diminuiu. Resultados teóricos baseados em simulações atomísticas permitiram uma compreensão do comportamento vibracional da cadeia. Além disso, realizamos trabalhos que envolveram instrumentação afim de instalar no Departamento de Física da Universidade Federal do Ceará toda a instrumentação necessária para o desenvolvimento de um equipamento que permite realizar espectroscopia Raman e medidas de microscopia de força atômica (AFM). Para isto, é necessário integrar uma "scan-head", um sistema controlador que controla a sonda da "scan-head" e um sistema óptico que se comunica com uma APD (dispositivo fotodiodo avalanche) responsável pela aquisição das imagens, com um espectrômetro dedicado à obtenção dos espectros Raman. O sistema ficou funcional no que diz respeito a capacidade de executar medidas confocal e está pronto para a realização de medidas de campo próximo.

ANDRADE, Nádia Ferreira de. Propriedades vibracionais e estruturais de cadeias lineares de carbono. 2015. 213 f. Tese (Doutorado em Física) - Programa de Pós-Graduação em Física, Departamento de Física, Centro de Ciências, Universidade Federal do Ceará, Fortaleza, 2015. / Submitted by Edvander Pires (edvanderpires@gmail.com) on 2015-10-26T18:07:30Z No. of bitstreams: 1 2015_tese_nfandrade.pdf: 12228920 bytes, checksum: 9f6aef6ce2c60c7d88f7ecb59b39e43f (MD5) / Approved for entry into archive by Edvander Pires(edvanderpires@gmail.com) on 2015-10-26T18:14:26Z (GMT) No. of bitstreams: 1 2015_tese_nfandrade.pdf: 12228920 bytes, checksum: 9f6aef6ce2c60c7d88f7ecb59b39e43f (MD5) / Made available in DSpace on 2015-10-26T18:14:26Z (GMT). No. of bitstreams: 1 2015_tese_nfandrade.pdf: 12228920 bytes, checksum: 9f6aef6ce2c60c7d88f7ecb59b39e43f (MD5) Previous issue date: 2015 / We present a study of linear carbon chains encapsulated in multi-wall carbon nanotubes (Cn@MWCNT) using electron microscopy and Raman spectroscopy in ambient and extreme conditions. The linear chains were characterized by resonance Raman, thermal analysis, ion bombardment and using high resolution and scanning transmission electron microscopy. The HRTEM images obtained here shown the chain within the innermost MWCNT and in this work we obtain the first image of ``cross-section$"$ described for this system Cn@MWCNT. A Raman experiment was carried out in high pressure conditions (from 0 to 9.54 GPa) using a paraffin oil as pressure transmitting medium.The G band frequency of nanotube increase as pressure increase while the C-C stretching mode of linear carbon chain decreases. Theoretical results based on atomistic simulations allowed an understanding of vibrational behavior of the chains. Furthermore, we conducted works that involved instrumentation in order to set in the Department of Physics of the Federal University of Ceara, the instrumentation needed for the development of a device that enables to perform Raman spectroscopy and AFM measurements. For this purpose is necessary to integrate a scan-head, a controller system that controls the probe scan-head and an optical system that communicates with an APD (avalanche photodiode device), responsible for carrying the images with a spectrometer dedicated for obtaining Raman spectra. The system is functional as regards the ability to perform confocal measurements and ready for setting the near field measurements. / Apresentamos um estudo de cadeias lineares de carbono encapsuladas em nanotubos de carbono de paredes múltiplas (Cn@MWCNT) utilizando microscopia eletrônica e espectroscopia Raman em condições ambientes e extremas. As cadeias lineares foram caracterizadas por espectroscopia Raman ressonante, análise térmica, bombardeamento de íons e com microscopia eletrônica de transmissão. As imagens de alta resolução aqui obtidas mostraram a presença das cadeias dentro do tubo mais interno do MWCNT e neste trabalho obtivemos a primeira imagem de "seção transversal" descrita na literatura para um sistema deste tipo. Um experimento Raman foi conduzido em condições de altas pressões (0 - 9,54 GPa), utilizando um óleo de parafina como meio transmissor de pressão. A frequência da banda G dos nanotubos aumentou com o aumento da pressão enquanto o modo de estiramento C-C das cadeias de carbono lineares diminuiu. Resultados teóricos baseados em simulações atomísticas permitiram uma compreensão do comportamento vibracional da cadeia. Além disso, realizamos trabalhos que envolveram instrumentação afim de instalar no Departamento de Física da Universidade Federal do Ceará toda a instrumentação necessária para o desenvolvimento de um equipamento que permite realizar espectroscopia Raman e medidas de microscopia de força atômica (AFM). Para isto, é necessário integrar uma "scan-head", um sistema controlador que controla a sonda da "scan-head" e um sistema óptico que se comunica com uma APD (dispositivo fotodiodo avalanche) responsável pela aquisição das imagens, com um espectrômetro dedicado à obtenção dos espectros Raman. O sistema ficou funcional no que diz respeito a capacidade de executar medidas confocal e está pronto para a realização de medidas de campo próximo.

Conselho Nacional de Desenvolvimento CientÃfico e TecnolÃgico / We present a study of linear carbon chains encapsulated in multi-wall carbon nanotubes (Cn@MWCNT) using electron microscopy and Raman spectroscopy in ambient and extreme conditions. The linear chains were characterized by resonance Raman, thermal analysis, ion bombardment and using high resolution and scanning transmission electron microscopy. The HRTEM images obtained here shown the chain within the innermost MWCNT and in this work we obtain the first image of ``cross-section$"$ described for this system Cn@MWCNT. A Raman experiment was carried out in high pressure conditions (from 0 to 9.54 GPa) using a paraffin oil as pressure transmitting medium.The G band frequency of nanotube increase as pressure increase while the C-C stretching mode of linear carbon chain decreases. Theoretical results based on atomistic simulations allowed an understanding of vibrational behavior of the chains. Furthermore, we conducted works that involved instrumentation in order to set in the Department of Physics of the Federal University of Ceara, the instrumentation needed for the development of a device that enables to perform Raman spectroscopy and AFM measurements. For this purpose is necessary to integrate a scan-head, a controller system that controls the probe scan-head and an optical system that communicates with an APD (avalanche photodiode device), responsible for carrying the images with a spectrometer dedicated for obtaining Raman spectra. The system is functional as regards the ability to perform confocal measurements and ready for setting the near field measurements. / Apresentamos um estudo de cadeias lineares de carbono encapsuladas em nanotubos de carbono de paredes mÃltiplas (Cn@MWCNT) utilizando microscopia eletrÃnica e espectroscopia Raman em condiÃÃes ambientes e extremas. As cadeias lineares foram caracterizadas por espectroscopia Raman ressonante, anÃlise tÃrmica, bombardeamento de Ãons e com microscopia eletrÃnica de transmissÃo. As imagens de alta resoluÃÃo aqui obtidas mostraram a presenÃa das cadeias dentro do tubo mais interno do MWCNT e neste trabalho obtivemos a primeira imagem de "seÃÃo transversal" descrita na literatura para um sistema deste tipo. Um experimento Raman foi conduzido em condiÃÃes de altas pressÃes (0 - 9,54 GPa), utilizando um Ãleo de parafina como meio transmissor de pressÃo. A frequÃncia da banda G dos nanotubos aumentou com o aumento da pressÃo enquanto o modo de estiramento C-C das cadeias de carbono lineares diminuiu. Resultados teÃricos baseados em simulaÃÃes atomÃsticas permitiram uma compreensÃo do comportamento vibracional da cadeia. AlÃm disso, realizamos trabalhos que envolveram instrumentaÃÃo afim de instalar no Departamento de FÃsica da Universidade Federal do Cearà toda a instrumentaÃÃo necessÃria para o desenvolvimento de um equipamento que permite realizar espectroscopia Raman e medidas de microscopia de forÃa atÃmica (AFM). Para isto, à necessÃrio integrar uma "scan-head", um sistema controlador que controla a sonda da "scan-head" e um sistema Ãptico que se comunica com uma APD (dispositivo fotodiodo avalanche) responsÃvel pela aquisiÃÃo das imagens, com um espectrÃmetro dedicado à obtenÃÃo dos espectros Raman. O sistema ficou funcional no que diz respeito a capacidade de executar medidas confocal e està pronto para a realizaÃÃo de medidas de campo prÃximo.