The objective of the proposed research is to present a compact system-on-package (SOP)-based passive front-end solution for millimeter-wave wireless communication/sensor applications, that consists of fully integrated three dimensional (3D) cavity filters/duplexers and antenna. The presented concept is applied to the design, fabrication and testing of V-band transceiver front-end modules using multilayer low temperature co-fired (LTCC) technology. The millimeter-wave front-end module is the foundation of 60 GHz (V-band) wireless systems for short-range multimedia applications, such as high-speed internet access, video streaming and content download. Its integration poses stringent challenges in terms of high performance, large number of embedded passive components, low power consumption, low interference between integrated components and compactness. To overcome these major challenges, a high level of integration of embedded passive functions using low-cost and high-performance materials that can be laminated in 3D, such as the multilayer LTCC, is significantly critical in the module-level design. In this work, various compact and high-performance passive building blocks have been developed in both microstrip and cavity configurations and their integration, enabling a complete passives integration solution for 3D low-cost wireless millimeter-wave front-end modules. It is worthy to note that most of the designs implemented comes away with novel ideas and is presented as the first extensive state-of-art components, entirely validated by measured data at 60 GHz bands.

Vertical integration technologies, such as three-dimensional integration and interposers, are technologies that support high integration densities while offering shorter interconnect lengths as compared to planar integration and other packaging technologies. To exploit these advantages, however, several challenges lay across the designing, manufacturing and testing stages of integrated systems. Considering the high complexity of modern microelectronic devices and the diverse features of vertical integration technologies, this thesis sheds light on the circuit design process. New methodologies and tools are offered in order to assess and improve traditional objectives in circuit design, such as performance, power, and area for vertically integrated circuits. Interconnects on different interposer materials are investigated, demonstrating the several trade-offs between power, performance, area, and crosstalk. A backend design flow is proposed to capture the performance and power gains from the introduction of the third dimension. Emphasis is also placed on the power consumption of modern circuits due to the immense growth of battery-operated devices in the last fifteen years. Therefore, the effect of scaling the operating voltage in three-dimensional circuits is investigated as it is one of the most efficient techniques for reducing power while considering the performance of the circuit. Furthermore, a solution to eliminate timing penalties from the usage of voltage scaling technique at finer circuits granularities is also presented in this thesis.

The main objective of this thesis is to design reliable clock-distribution networks and power-delivery networks for three-dimensional integrated circuits (3D ICs) using through-silicon vias (TSVs). This dissertation supports this goal by addressing six research topics. The first four works focus on 3D clock tree synthesis for low power, pre-bond testability, TSV-induced obstacle avoidance, and TSV utilization. The last two works develop modeling approaches for reliability analysis on 3D power-delivery networks. In the first work, a clock synthesis algorithm is developed for low-power and low-slew 3D clock network design. The impact of various design parameters on clock performance, including the wirelength, clock power, clock slew, and skew, is investigated. These parameters cover the TSV count, TSV parasitics, the maximum loading capacitance of the clock buffers, and the supply voltage. In the second work, a clock synthesis algorithm is developed to construct 3D clock networks for both pre-bond testability and post-bond operability. Pre-bond testing of 3D stacked ICs involves testing each individual die before bonding, which can improve the overall yield of 3D ICs by avoiding stacking defective dies with good ones. Two key techniques including TSV-buffer insertion and redundant tree generation are implemented to minimize clock skew and ensure pre-bond testing. The impact of TSV utilization and TSV parasitics on clock power is also investigated. In the third work, an obstacle-aware clock tree synthesis method is presented for through-silicon-via (TSV)-based 3D ICs. A unique aspect of this problem lies in the fact that various types of TSVs become obstacles during 3D clock routing including signal, power/ground, and clock TSVs. These TSVs may occupy silicon area or routing layers. The generated clock tree does not sacrifice wirelength or clock power too much and avoids TSV-induced obstacles. In the fourth work, a decision-tree-based clock synthesis (DTCS) method is developed for low-power 3D clock network design, where TSVs form a regular 2D array. This TSV array style is shown to be more manufacturable and practical than layouts with TSVs located at irregular spots. The DTCS method explores the entire solution space for the best TSV array utilization in terms of low power. Close-to-optimal solutions can be found for power efficiency with skew minimization in short runtime. In the fifth work, current crowding and its impact on 3D power grid integrity is investigated. Due to the geometry of TSVs and connections to the global power grid, significant current crowding can occur. The current density distribution within a TSV and its connections to the global power grid is explored. A simple TSV model is implemented to obtain current density distributions within a TSV and its local environment. This model is checked for accuracy by comparing with identical models simulated using finite element modeling methods. The simple TSV models are integrated with the global power wires for detailed chip-scale power analysis. In the sixth work, a comprehensive multi-physics modeling approach is developed to analyze electromigration (EM) in TSV-based 3D connections. Since a TSV has regions of high current density, grain boundaries play a significant role in EM dominating atomic transport. The transient analysis is performed on atomic transport including grain and grain boundary structures. The evolution of atomic depletion and accumulation is simulated due to current crowding. And the TSV resistance change is modeled.

For decades, advances in device scaling has proven to be critical in improving the performance and productivity of 2D systems. In this thesis, we explore how advances in technology have pushed functional integration to such a high-level that interconnection and packaging issues represent real barriers to further progress. While three-dimensional (3D) integration offers to be a potential contender to overcome the barriers of increased energy consumption due to interconnects and bandwidth limitations, there are certain challenges that must be overcome before systems can be successfully stacked. Cooling and power delivery are among these key challenges in the integration of high performance 3D ICs. To address these challenges, microchannel heat sinks for inter-stratum cooling and through-silicon vias (TSVs) for signaling and power delivery between stacked ICs were explored. Novel integration schemes to integrate these uidic and electrical interconnects in conventional CMOS processes were also explored. Compact physical modeling was utilized to understand the trade-offs involved in the integration of electrical and microfluidic interconnects in a 3D IC stack. These concepts were demonstrated experimentally by showing different CMOS compatible methods of fabricating microchannels and integration of high aspect ratio (~20:1) and high density (200,000/cm²) electrical TSVs in the fins of the microchannels for signaling and power delivery. A novel mesh process for bottom up plating of high aspect ratio TSVs is also shown in this work. Fluidic reliability measurements are shown to demonstrate the feasibility of this technology. This work also demonstrates the design and fabrication of a 3D testbed which consists of a 2 chip stack with microchannel cooling on each level. Preliminary testing of the stack along with interlayer electro-fluidic I/Os has also been demonstrated.

L'utilisation de la troisième dimension peut entraîner une réduction significative de la puissance et de la latence moyenne du trafic dans les réseaux sur puce (Network-on-Chip). La technologie des vias à travers le substrat (ou Through-Silicon Via) est la technologie la plus prometteuse pour l'intégration 3D, car elle offre des liens verticaux courts qui remédient au problème des longs fils dans les NoCs-2D. Les TSVs sont cependant énormes et les processus de fabrication sont immatures, ce qui réduit le rendement des systèmes sur puce à base de NoC-3D. Par conséquent, l'idée de réseaux sur puce 3D partiellement connectés verticalement a été introduite pour bénéficier de la technologie 3D tout en conservant un haut rendement. En outre, de tels réseaux sont flexibles, car le nombre, l'emplacement et l'affectation des liens verticaux dans chaque couche peuvent être décidés en fonction des exigences de l'application. Cependant, ce type de réseaux pose un certain nombre de défis : Le routage est le problème majeur, car l'élimination de certains liens verticaux fait que l'on ne peut utiliser les algorithmes classiques qui suivent l'ordre des dimensions. Pour répondre à cette question nous expliquons et évaluons un algorithme de routage déterministe appelé “Elevator First”, qui garanti d'une part que si un chemin existe, alors on le trouve, et que d'autre part il n'y aura pas d'interblocages. Fondamentalement, la performance du NoC est affecté par a) la micro architecture des routeurs et b) l'architecture d'interconnexion. L'architecture du routeur a un effet significatif sur la performance du NoC, à cause de la latence qu'il induit. Nous présentons la conception et la mise en œuvre de la micro-architecture d'un routeur à faible latence implantant​​l'algorithme de routage Elevator First, qui consomme une quantité raisonnable de surface et de puissance. Du point de vue de l'architecture, le nombre et le placement des liens verticaux ont un rôle important dans la performance des réseaux 3D partiellement connectés verticalement, car ils affectent le nombre moyen de sauts et le taux d'utilisation des FIFOs dans le réseau. En outre, l'affectation des liens verticaux vers les routeurs qui n'ont pas de ports vers le haut ou/et le bas est une question importante qui influe fortement sur les performances. Par conséquent, l'exploration architecturale des réseaux sur puce 3D partiellement connectés verticalement est importante. Nous définissons, étudions et évaluons des paramètres qui décrivent le comportement du réseau, de manière à déterminer le placement et l'affectation des liens verticaux dans les couches de manière simple et efficace. Nous proposons une méthode d'estimation quadratique visantà anticiper le seuil de saturation basée sur ces paramètres. / Utilization of the third dimension can lead to a significant reduction in power and average hop-count in Networks- on-Chip (NoC). TSV technology, as the most promising technology in 3D integration, offers short and fast vertical links which copes with the long wire problem in 2D NoCs. Nonetheless, TSVs are huge and their manufacturing process is still immature, which reduces the yield of 3D NoC based SoC. Therefore, Vertically-Partially-Connected 3D-NoC has been introduced to benefit from both 3D technology and high yield. Moreover, Vertically-Partially-Connected 3D-NoC is flexible, due to the fact that the number, placement, and assignment of the vertical links in each layer can be decided based on the limitations and requirements of the design. However, there are challenges to present a feasible and high-performance Vertically-Partially-Connected Mesh-based 3D-NoC due to the removed vertical links between the layers. This thesis addresses the challenges of Vertically-Partially-Connected Mesh-based 3D-NoC: Routing is the major problem of the Vertically-Partially-Connected 3D-NoC. Since some vertical links are removed, some of the routers do not have up or/and down ports. Therefore, there should be a path to send a packet to upper or lower layer which obviously has to be determined by a routing algorithm. The suggested paths should not cause deadlock through the network. To cope with this problem we explain and evaluate a deadlock- and livelock-free routing algorithm called Elevator First. Fundamentally, the NoC performance is affected by both 1) micro-architecture of routers and 2) architecture of interconnection. The router architecture has a significant effect on the performance of NoC, as it is a part of transportation delay. Therefore, the simplicity and efficiency of the design of NoC router micro architecture are the critical issues, especially in Vertically-Partially-Connected 3D-NoC which has already suffered from high average latency due to some removed vertical links. Therefore, we present the design and implementation the micro-architecture of a router which not only exactly and quickly transfers the packets based on the Elevator First routing algorithm, but it also consumes a reasonable amount of area and power. From the architecture point of view, the number and placement of vertical links have a key role in the performance of the Vertically-Partially-Connected Mesh-based 3D-NoC, since they affect the average hop-count and link and buffer utilization in the network. Furthermore, the assignment of the vertical links to the routers which do not have up or/and down port(s) is an important issue which influences the performance of the 3D routers. Therefore, the architectural exploration of Vertically-Partially-Connected Mesh-based 3D-NoC is both important and non-trivial. We define, study, and evaluate the parameters which describe the behavior of the network. The parameters can be helpful to place and assign the vertical links in the layers effectively. Finally, we propose a quadratic-based estimation method to anticipate the saturation threshold of the network's average latency.