This investigation examines a novel means of integrating high-performance AlN piezoelectric thin films with a flexible stainless steel substrate (SUS 304) to fabricate a double-sided piezoelectric transducer. Various sputtering parameters, such as sputtering pressure, substrate temperature, nitrogen concentration, and RF power, were investigated to improve the piezoelectric characteristics of AlN thin films. Scanning electron microscopy and X-ray diffraction of AlN piezoelectric film reveal a rigid surface structure and highly c-axis-preferring orientation. The maximum output power per unit thickness was discussed, and the optimal sputtering parameters were determined. The double-sided piezoelectric transducer is constructed by depositing AlN piezoelectric thin films on both the front and the back sides of SUS 304 substrate. The titanium (Ti) and platinum(Pt) layers were deposited using a dual-gun DC sputtering system between the AlN piezoelectric thin film and the SUS 304 substrate. The optimal deposition parameters for AlN thin films are sputtering pressure of 5 mTorr, substrate temperature of 300 ¢J, nitrogen concentration of 40 %, and RF power of 250 W. The maximum open circuit voltage of the transducer under the vibrational frequency of 80 Hz, vibration amplitude of 4mm, and mass loading of 0.5g, is approximately 20 V, or 5.3 V/£gm. After full-wave rectification and filtering through a 33 nF capacitor, a specific output power of 1.462 £gW/cm2 is obtained from the transducer with a load resistance of 7 M£[.

This thesis presents the development and microfabrication of capacitive micromachined ultrasonic transducers (CMUT) with diamond membranes for the first time in the literature. Although silicon and silicon nitride (Si3N4) membranes have been generally used as the membrane material in CMUTs. These membrane materials have moderate properties that can cause damage during the operation of CMUTs. In this thesis, a new material for the membrane is introduced for CMUTs. Diamond has exceptional potential in the area of micro-nano technologies due to unrivalled stiffness and hardness, excellent tribological performance, highly tailorable and stable surface chemistry, high thermal conductivity and low thermal expansion, high acoustic velocity of propagating waves, and biocompatibility. Based on these excellent material properties, diamond is employed in the new generation CMUT structures for more robust and reliable operations. The microfabrication process of CMUT has been generally performed with either sacrificial release process or wafer bonding technique. High yield and low cost features of wafer bonding process makes it preferable for CMUT devices. In this thesis, plasma-activated direct wafer bonding process was developed for the microfabrication of 16-element 1-D CMUT arrays with diamond membranes. They were designed to operate at different resonance frequencies in the range of 1 MHz and 10 MHz with different cell diameters (120, 88, 72, 54, 44 &mu / m) and element spacing (250, 375 &mu / m). 1-D CMUT array devices can be used for focusing ultrasound applications. The electronic circuit for 1-D CMUT devices with diamond membranes was designed and implemented on PCB for the ultrasound focusing experiment. This electronic circuit generates continuous or burst AC signals of &plusmn / 15 V with different and adjustable phase shifting options at 3 MHz frequency. 16 elements of 72 &mu / m 1-D CMUT array were successfully tested. Fully functional 7 elements of 1-D CMUT array are focused at an axial distance of 5.81 mm on the normal to the CMUT center plane. The CMUT array was excited using 10 Vp&minus / p with 10 cycles sinusoidal signals at 3 MHz. The microfabrication process and focusing ultrasound of 1-D CMUT devices with diamond membranes are done successfully in this thesis.

Welded steel pipes are an essential structural part of any power plant. Longer lifetimes and higher pressures in the pipes cause an increased probability of failure due to creep damage. To maintain safe operation, nondestructive evaluation techniques to detect creep damage are needed. Nonlinear acoustic techniques employing longitudinal waves have been proven to be sensitive to creep damage. The objective of this research is to develop a robust experimental procedure to reliably measure the acoustic nonlinearity parameter using longitudinal waves, and then to validate the procedure on samples of different materials and sizes. Finally the technique is applied to characterize creep damage levels around the weld of a welded steel pipe. While the experimental technique presented can only measure the relative nonlinearity, it is accurate enough to detect changes in nonlinearity due to creep damage. Measurements show an increase in nonlinearity in the heat affected zone (HAZ). Experiments after annealing the creep damaged specimen show a decrease in nonlinearity in accordance with a decrease in dislocation density. Measurements on an undamaged welded A36 steel component suggest that the heat itself is not responsible for the increase in nonlinearity.

Capacitive Micromachined Ultrasonic Transducers (CMUTs) have demonstrated significant potential to advance the state of medical ultrasound imaging beyond the capabilities of the currently employed piezoelectric technology. Because they rely on well-established micro-fabrication techniques, they can achieve complex geometries, densely populated arrays, and tight integration with electronics, all of which are required for advanced intravascular ultrasound (IVUS) applications such as high-frequency or forward-looking catheters. Moreover, they also offer higher bandwidth than their piezoelectric counterparts. Before CMUTs can be effectively used, they must be fully characterized and optimized through experimentation and modeling. Unfortunately, immersed transducer arrays are inherently difficult to simulate due to a phenomenon known as acoustic crosstalk, which refers to the fact that every membrane in an array affects the dynamic behavior of every other membrane in an array as their respective pressure fields interact with one another. In essence, it implies that modeling a single CMUT membrane is not sufficient; the entire array must be modeled for complete accuracy. Finite element models (FEMs) are the most accurate technique for simulating CMUT behavior, but they can become extremely large considering that most CMUT arrays contain hundreds of membranes. This thesis focuses on the development and application of a more efficient model for transducer arrays first introduced by Meynier et al. [1], which provides accuracy comparable to FEM, but with greatly decreased computation time. It models the stiffness of each membrane using a finite difference approximation of thin plate equations. This stiffness is incorporated into a force balance which accounts for effects from the electrostatic actuation, pressure forces from the fluid environment, mass and damping from the membrane, etc. For fluid coupling effects, a Boundary Element Matrix (BEM) is employed that is based on the Green's function for a baffled point source in a semi-infinite fluid. The BEM utilizes the nodal mesh created for the finite difference method, and relates the dynamic displacement of each node to the pressure at every node in the array. Use of the thin plate equations and the BEM implies that the entire CMUT array can be reduced to a 2D nodal mesh, allowing for a drastic improvement in computation time compared with FEM. After the model was developed, it was then validated through comparison with FEM. From these tests, it demonstrated a capability to accurately predict collapse voltage, center frequency, bandwidth, and pressure magnitudes to within 5% difference of FEM simulations. Further validation with experimental results revealed a close correlation with predicted impedance/admittance plots, radiation patterns, frequency responses, and noise current spectrums. More specifically, it accurately predicted how acoustic crosstalk would create sharp peaks and notches in the frequency responses, and enhance side lobes and nulls in the angular radiation pattern. Preliminary design studies with the model were also performed. They revealed that membranes with larger lateral dimensions effectively increased the bandwidth of isolated membranes. They also demonstrated potential for various crosstalk reduction techniques in array design such as disrupting array periodicity, optimizing inter-membrane pitch, and adjusting the number of membranes per element. It is expected that the model developed in this thesis will serve as a useful tool for future iterations of CMUT array optimizations.

Structural health monitoring (SHM) is an active research area devoted to the assessment of the structural integrity of critical components of aerospace, civil and mechanical systems. Guided wave methods have been proposed for SHM of plate-like structures using permanently attached piezoelectric transducers, which generate and sense waves to evaluate the presence of damage. Effective interrogation of structural health is often facilitated by sensors and actuators with the ability to perform directional scanning. In this research, the novel class of Frequency Steerable Acoustic Transducers (FSATs) is proposed for directional generation/sensing of guided waves. The FSATs are characterized by a spatial arrangement of the piezoelectric material which leads to frequency-dependent directionality. The resulting FSATs can be employed both for directional sensing and generation of guided waves, without relying on phasing and control of a large number of channels. Because there is no need for individual control of transducer elements, hardware and power requirements are drastically reduced so that cost and hardware limitations of traditional phased arrays can be partially overcome. The FSATs can be also good candidates for remote sensing and actuation applications, due to their hardware simplicity and robustness. Validation of the proposed concepts first employs numerical methods. Next, the prototyping of the FSATs allows an experimental investigation confirming the analytical and numerical predictions. Imaging algorithm based on frequency warping is also proposed to enhance results representation.

Models based on various types of automata are ubiquitous in modern science. These models allow reasoning about deep theoretical questions and provide a basis for the development of efficient algorithms to solve related computational problems. This work discusses several types of automata used in such models, including cellular automata and mandatory results automata. The first part of this work is dedicated to cellular automata. These automata form an important class of discrete dynamical systems widely used to model physical, biological, and chemical processes. Here we discuss a way to study the dynamics of one-dimensional cellular automata through the theory of two-dimensional picture languages. The connection between cellular automata and picture languages stems from the fact that the set of all space-time diagrams of a cellular automaton defines a picture language. We will discuss a hierarchy of cellular automata based on the complexity of the picture languages that they define. In addition to this, we present a characterization of cellular automata that can be described by finite-state transducers. The second part of this work presents a theory of runtime enforcement based on mech- anism models called Mandatory Results Automata (MRAs). MRAs can monitor and trans- form security-relevant actions and their results. Because previous work could not model general security monitors transforming results, MRAs capture realistic behaviors outside the scope of previous models. MRAs also have a simple but realistic operational seman- tics that makes it straightforward to define concrete MRAs. Moreover, the definitions of policies and enforcement with MRAs are significantly simpler and more expressive than those of previous models. Putting all these features together, we argue that MRAs make good general models of (synchronous) runtime mechanisms, upon which a theory of run- time enforcement can be based. We develop some enforceability theory by characterizing the policies deterministic and nondeterministic MRAs enforce.

Persons with paraplegia who use a manual wheelchair for mobility are at high risk for overuse injuries in the upper extremities. Years of shoulder overuse performing transfers, wheelchair propulsion, dressing, bathing, and household chores, (activities of daily living or ADL) leads to an increased incidence of cumulative trauma to the shoulders. Few studies have addressed the stressful task of wheelchair transfers among SCI individuals. The goal of this pilot study is to develop valid and reliable measurement technologies to quantify shoulder musculoskeletal stressors during wheelchair transfers and pressure relief tasks among individuals with SCI. Using a standard wheelchair, 10 participants were asked to perform 3 typical pairs of independent transfer tasks: wheelchair to/from bed, wheelchair to/from commode, and wheelchair to/from vehicle. Also, two pressure relief tasks (P/R) were performed sitting in a wheelchair, one using the armrest and one using the wheels. By observation, the transfers in descending order from the most demanding to the least demanding were as follows: vehicle, commode, and bed. During a P/R using the wheels there is a 40% greater max shoulder force and a 47% greater mean shoulder force than when using the armrest. The max shoulder force of over 1000 N is generated at the initial push off, during a P/R using the wheels, then the force drops 45% to an average of 558 N. The max shoulder force of 722 N at the initial push off, during a P/R using the Armrest, drops 48% and then averages 378 N. During a P/R using the wheels there is a 104% greater max shoulder torque and a 17% greater mean shoulder torque than when using the armrest. As in the initial large amount of shoulder force there is also a large amount of shoulder torque that drops 77% during a P/R using the wheels. The shoulder torque decreases 62% during a P/R using the armrest. Because of the greater distance the body's Center of Mass (COM) travels during the P/R using the armrest, 24% more work is done.

This research covers modeling of Electro Magnetic Acoustic Transducers (EMATs) and their application in excitation and detection of longitudinal guided Lamb wave modes for evaluation of flaws in cylindrical pipes. The combination of the configuration of transducers and the frequency of the input current is essential for successful excitation of desired guided wave modes and for proper interpretation of the results. In this study EMATs were successfully constructed and longitudinal modes L(0,1) and L(0,2) were excited in the pipe. From the recorded signals the level of simulated damage in pipes could be assessed. It is also possible to theoretically predict the location of the pipe flaws. Theoretical predictions are matched with experimental results. Dents and holes in pipes are detected by appropriate signal processing of received L(0,1) and L(0,2) modes.

Un gran nombre de plataformes de detecció biològica han incorporat materials nanoestructurats com una estratègia per a millorar diversos paràmetres operacionals i de qualitat tals com reduir els temps d'anàlisis i els límits de detecció. Les tècniques electroquímiques de detecció es prefereixen sobre altres tècniques ja que presenten una sèrie d'avantatges com a rapidesa, facilitat de maneig, cost reduït i la reduïda mida dels detectors comercials. Entre les tècniques electroquímiques, les metodologies més simples, comunes i més fàcils de transportar són aquelles basades en la potenciometria. La nova tendència seguida amb els elèctrodes potenciomètrics d'estat sòlid representa una eina atractiva en l'anàlisi de mostres líquides en temps real. No obstant això, fins avui ha estat difícil dur a terme la detecció electroquímica directa de bacteris i proteïnes, sense utilitzar marcadors químics, donat que les interaccions receptor‐bacteri i receptor‐proteïna no produeixen un senyal elèctric mesurable. En aquesta tesi, es demostra per primera vegada la detecció potenciomètrica en temps real de bacteris i proteïnes relacionades amb diverses malalties. Aquesta tasca va ser duta a terme mitjançant el disseny d'una plataforma universal de detecció utilitzant nanotubs de carboni com a transductors potenciomètrics i aptàmers com a elements de reconeixement molecular. Les excel•lents propietats de transducció ofertes pels nanotubs de carboni combinades amb la gairebé il•limitada possibilitat dels aptàmers de ser dissenyats in vitro per reconèixer ions, proteïnes, virus i bacteris converteix aquesta plataforma en una eina amb possibilitats inesgotables de detecció biològica en temps real. / Un gran número de plataformas de detección biológica han incorporado materiales nanoestructurados como una estrategia para mejorar varios parámetros operacionales y de calidad tales como reducir los tiempos de análisis y los límites de detección. Las técnicas electroquímicas de detección se prefieren sobre otras técnicas debido a que presentan una serie de ventajas tales como rapidez, facilidad de manejo, coste reducido y el reducido tamaño de los detectores comerciales. Entre las técnicas electroquímicas, las metodologías más simples, comunes y más fáciles de transportar son aquellas basadas en la potenciometría. La nueva tendencia seguida con los electrodos potenciométricos de estado sólido representa una herramienta atractiva para el análisis de muestras líquidas en tiempo real. Sin embargo, hasta hoy ha sido difícil llevar a cabo la detección electroquímica directa de bacterias y proteínas sin ULTRASENSITIVE DETECTION OF PATHOGENS IN REAL‐TIME POTENTIOMETRIC BIOSENSORS BASED ON SINGLE‐WALLED CARBON NANOTUBES AND APTAMERS utilizar marcadores químicos, dado que las interacciones receptor‐bacteria y receptor‐proteína no producen una señal eléctrica medible. En esta tesis, se demuestra por primera vez la detección potenciométrica en tiempo real de bacterias y proteínas relacionadas con varias enfermedades. Esta tarea fue llevada a cabo mediante el diseño de una plataforma universal de detección utilizando nanotubos de carbono como transductores potenciométricos y aptámeros como elementos de reconocimiento molecular. Las excelentes propiedades transductoras de los nanotubos de carbono combinadas con la casi ilimitada posibilidad de los aptámeros de ser diseñados in vitro para reconocer iones, proteínas, virus y bacterias convierte esta plataforma en una herramienta con posibilidades inagotables de detección biológica en tiempo real. / Numerous biosensing platforms have incorporated nanostructured materials as a strategy for improving several performance and operational parameters such as reducing the limits of detection or the assay times in both pathogen and protein detection. Electrochemical sensing techniques are preferred over other detection methods because they present a series of advantages such as rapid response, ease of use, low‐cost and small sized commercial detectors. Among the electrochemical techniques, the simplest, most widespread and fieldportable methodologies are based on potentiometry. The new wave of potentiometric solidstate electrodes represents an attractive tool for real‐time bioanalysis in liquid samples. However, to date, it has been difficult to carry out the specific and direct electrochemical detection of whole living bacterial cells or disease‐related proteins without chemical labelling because the interaction receptor‐bacteria/receptor‐protein does not provide a measurable electrochemical signal. In this Thesis, the real‐time potentiometric detection of bacteria and disease‐related proteins is demonstrated for the first time. To accomplish such a challenging task, a novel and universal biosensing platform is designed using single‐walled carbon nanotubes as potentiometric transducers, and aptamers as biorecognition elements. The excellent potentiometric transduction properties of carbon nanotubes combined with the quasi‐unlimited capability of aptamers (RNA and DNA synthetic oligonucleotide segments) to be tailored in vitro against ions, proteins, viruses and bacteria converts such a platform into a

A high resolution pressure gauge has been developed for use in thermodynamic measurements along the lambda line in liquid helium. The gauge was designed to operate at cryogenic temperatures and provide pressure measurements up to 30bar, with an accuracy of 3 × 10¯¹ºbar in a 1Hz bandwidth. Experiments reported here show the gauge to have met these specifications; at least for measurements close to zero pressure, at temperatures close to 4.5K. It is expected that operation at higher pressures, and at temperatures closer to the lambda transition, will result in similar or even improved performance. The gauge consists of a titanium-alloy diaphragm with a superconducting position transducer read-out. Compensation techniques internal to the superconducting circuit were used to eliminate any significant sensitivity to temperature fluctuations and in-line acceleration. For high values of common-mode rejection, thermal compensation revealed a non-linear temperature characteristic which was exploited to provide a further reduction in the temperature sensitivity. Acceleration compensation was achieved up to a common-mode rejection of more than 78dB. Present performance appears to be limited by thermal gradient fluctuations at low frequencies and at higher frequencies by a noise source which appears to originate beyond the superconducting transducer. It is expected that some further improvement may be gained in this higher frequency band simply by trapping a larger persistent current in the superconducting circuit. In the course of development and characterization of the gauge several anomalous effects were discovered and investigated. In response to changes in temperature, the gauge was found to exhibit irreversible behaviour in a variety of ways. These phenomena were fully investigated and found to be complex in nature. A critical state model was employed which was successful in explaining many of the observed effects. Other authors have observed apparently related behaviour in samples of niobium and some have developed similar critical state models which give results generally consistent with those reported here. However, these latter works have not investigated the presence of such effects within superconducting wires; neither have they considered the implications for devices based upon superconducting wire circuits. It appears this anomalous behaviour may be relevant to a broad range of instruments employing superconducting wire circuits similar to that used here. If this is the case, the results presented here have significant consequences for the performance of such devices