abstract: This work focuses on simulation of electrical resistivity and optical behaviors of thin films, where an Ag or Au thin layer is embedded in zinc oxide. Enhanced conductivity and transparency were earlier achieved with multilayer structured transparent conducting oxide (TCO) sandwich layer with metal (TCO/metal/TCO). Sputtering pattern of metal layer is simulated to obtain the morphology, covered area fraction, and the percolation strength. The resistivity as a function of the metal layer thickness fits the modeled trend of covered area fraction beyond the percolation threshold. This result not only presents the robustness of the simulation, but also demonstrates the influence of metal morphology in multilayer structure. Effective medium coefficients are defined from the coverage and percolation strength to obtain simulated optical transmittance which matches experimental observation. The coherence of resistivity and optical transmittance validates the simulation of the sputtered pattern and the incorporation of percolation theory in the model. / Dissertation/Thesis / M.S. Materials Science and Engineering 2012

No description available.

Interest exists in the development of transparent conducting oxide materials, which have diverse applications in areas such as transparent coatings for display technologies, solar cells, and optoelectronics. Since many of the applications require the use of thin film forms, the need is to establish useful experimental approaches to the fabrication of such structures. One relatively new method in this area is oxygen-plasma assisted atomic beam epitaxy (OPABE) in which oxide layers are grown under normal molecular beam epitaxy (MBE) conditions with the addition of an oxygen atom beam to ensure full oxidation of the depositing metallic species. Work in this area has to date mainly focussed on the growth of relatively stable oxides such as ZnO, MgO and In₂O₃ which are the strongly thermodynamically favoured reaction products, across a broad range of reaction conditions. In contrast, the present work is concerned with the growth of Cu2O and a range of delafossite materials, namely CuInO₂, CuCrO₂ and CuGaO₂, which are expected to require much more sensitive control to achieve the desired reaction product. Studies of the OPABE growth of Cu₂O on MgO (100) and MgO (110) substrates have been carried out, using a broad range of physical techniques to characterise the grown Cu₂O deposits. It is demonstrated that CuO is the favoured reaction product at low growth temperatures, although Cu₂O becomes increasingly favoured as the growth temperature increases. Alternatively, it is also shown that a novel bilayer growth method, whereby some pure Cu is deposited prior to oxide growth, can be used to form the desired Cu (I) phase. Varying crystal orientations are seen, depending on the exact growth conditions; core level and valence band X-ray photoelectron spectroscopy (XPS), optical band gap and atomic force microscopy (AFM) measurements are used to characterise the deposits. Further growth investigations of the delafossite compounds CuInO₂, CuCrO₂ and CuGaO₂ using OPABE are also recorded, and for the case of CuInO₂, comparison is also made with the pulsed laser deposition approach. For all three materials systems, oriented crystal growth on basal planes sapphire substrates is seen, with either the (001) plane or the (015) plane orienting parallel to the substrate depending on the growth temperature, provided approximately correct metal fluxes are used as set by the Knudsen-cell temperatures. The typical valence band electronic structure of delafossite materials is observed in all three cases, and XPS peak shifts suggest that the layers can be electrically doped by adding appropriate metal fluxes during growth. AFM measurements show the grown films are relatively rough and it is suggested that the growth mode follows an island growth mechanism in which oriented three dimensional islands formed at the start of growth gradually enlarge and coalesce as the film thickens. Optical absorption measurements are consistent with the generally accepted optical band gaps of the materials concerned.

Óxidos transparentes condutores (OTC) são materiais que possuem simultaneamente uma condutividade elétrica, com uma transparência de aproximadamente 90% no espectro visível. Devido a estas características, existe um grande interesse da indústria na aplicação dos OTC em dispositivos eletrônicos como células solares, transistores transparentes, display eletrônico, entre outros. Os OTC podem ser sintetizados tanto na fase cristalina quanto amorfa, mas é conhecido que o tamanho do raio catiônico tem papel fundamental na determinação das estruturas corundum e bixbyite no sistemas M2O3, que engloba o In2O3, Ga2O3 e Al2O3, materiais largamente utilizados. Embora estes óxidos tenham sido amplamente estudados, nesta tese que utiliza ferramentas teóricas baseadas na teria do funcional da densidade, é mostrado que o raio pequeno (grandes) do Al (In) favorece a cristalização da estrutura corundum (bixbyite). Por outro lado, devido ao raio intermediário do Ga, a hibridização entre os estados d do Ga e s do O, que é favorecida pelos sítios com coordenação quatro na estrutura gallia, é a chave fundamental para fazer o Ga2O3 cristaliza em gallia e não em corundum ou bixbyite. A estrutura cristalina, juntamente com os átomos que compões o sistema são fatores que determinam as propriedades eletrônicas e ópticas. Sabe-se que o In2O3 possui uma alta transparência devido a um número muito grande de transições proibidas entre os estados da banda de valência e condução, resultando em uma disparidade entre a banda proibida óptica e fundamental. Nesta tese é mostrado que três fatores são fundamentais para gerar a disparidade entre as bandas: (i) simetria de inversão na célula cristalina; (ii) mínimo da banda de condução formada por estados s do cátion e do O; (iii) vizinhança do máximo da banda de valência com um alto acoplamento entre os estados d do cátion e p do O. Estas três características, que determinam um mecanismo de geração da disparidade entre as bandas, levam os estados da banda de valência e banda de condução à mesma paridade, sendo assim, transições por dipolo são sempre proibida. Esta banda proibida óptica ainda pode depender de um outro fator: a intensidade luminosa. Sob a condição de alta iluminação, transições ópticas de pequena amplitude fora do ponto Γ, que poderiam ser desprezadas sob baixa iluminação, passam a ter uma importância muito maior. Uma consequência direta deste efeito é que sob forte (baixa) iluminação a banda proibida óptica \"clara\" (\"escura\") coincide (não necessariamente coincide) com a banda proibida fundamental. Tendo estes conhecimentos, é possível controlar as propriedades ópticas de um OTC através da composição catiônica de um multi composto, por exemplo. O acoplamento entre os estados p do O e d dos cátions é a principal característica eletrônica afetada de acordo com a composição estequiométrica dos multi compostos, refletindo diretamente nas propriedades ópticas. De acordo com o modelo de geração de disparidade entre as bandas mencionado anteriormente, a mistura de M2O3-ZnO é mais vantajosa para os OTC do que a mistura In2O3-SnO2 devido ao grande acoplamento dos estados d do Zn com os estados p do O nas proximidades do máximo da banda de valência. / Transparent conducting oxides (TCO) are materials that combine electrical conductivity, with transparency around 90% in visible spectrum. Due to these characteristics, there is strong industrial interest in applying TCO in electronic devices, such as solar cells, transparent transistors, electronic displays, etc. TCO can be synthesized in crystalline or amorphous phase, however it is know that the atomic radius plays an important rule in the corundum and bixbyite crystals structures of M2O3, associated with In2O3, Ga2O3 and Al2O3, which are materials widely used. Although these oxides was deeply studied, in this thesis which use theoretical tools based on density functional theory, it is shown that the small (large) radii of Al (In) favor the crystal structure corundum (bixbyite). On the other hand, because of the intermediate radii of Ga, the hybridization between the d states of Ga and the s states of O, which is favor by the four fold site in the gallia structure, is the fundamental key to makes Ga2O3 crystallize in gallia and not in corundum or bixbyite. The crystal structures with the atomic composition are facts that determine the electronic and optical properties. It is known that In2O3 have a high transparency because the large number of forbidden dipole transition between the valence and conduction bands states, resulting in a disparity between the optical and fundamental band gaps. In this thesis it is shown that three fundamental keys are necessary to generate the disparity between the gaps: (i) crystal structure with inversion symmetry; (ii) conduction band minimum formed by cations and O s states; (iii) high coupling between the cation d states and O p states in the vicinity of valence band maximum. These three characteristics, which determine a mechanism to generate the disparity between the gaps, leads the valence and conduction band states to the same parity, resulting in dipole forbidden optical transition. The optical band gap may depend on another effect: the light intensity. Under high illumination, optical transition with small amplitude out of Γ point, which are neglected under low illumination, became more important. A directly consequence of this effect is that under high (low) illumination the \"bright\" (\"dark\") optical band gap coincide (not necessary coincide) with the fundamental band gap. Having this knowledge, it is possible to tune the optical properties of the TCO through the cation composition in the multi compounds, for example. The coupling between the O p and cations d states is the main electronic characteristic affected by the stoichiometric composition, reflecting directly in the optical properties. According to the band gap disparity mechanism, mentioned previously, the mixture of M2O3-ZnO is more advantageous for TCO than the In2O3-SnO2 mixture due to the high coupling between the Zn d states with the O p states in the vicinity of valence band maximum.

Óxidos transparentes condutores (OTC) são materiais que possuem simultaneamente uma condutividade elétrica, com uma transparência de aproximadamente 90% no espectro visível. Devido a estas características, existe um grande interesse da indústria na aplicação dos OTC em dispositivos eletrônicos como células solares, transistores transparentes, display eletrônico, entre outros. Os OTC podem ser sintetizados tanto na fase cristalina quanto amorfa, mas é conhecido que o tamanho do raio catiônico tem papel fundamental na determinação das estruturas corundum e bixbyite no sistemas M2O3, que engloba o In2O3, Ga2O3 e Al2O3, materiais largamente utilizados. Embora estes óxidos tenham sido amplamente estudados, nesta tese que utiliza ferramentas teóricas baseadas na teria do funcional da densidade, é mostrado que o raio pequeno (grandes) do Al (In) favorece a cristalização da estrutura corundum (bixbyite). Por outro lado, devido ao raio intermediário do Ga, a hibridização entre os estados d do Ga e s do O, que é favorecida pelos sítios com coordenação quatro na estrutura gallia, é a chave fundamental para fazer o Ga2O3 cristaliza em gallia e não em corundum ou bixbyite. A estrutura cristalina, juntamente com os átomos que compões o sistema são fatores que determinam as propriedades eletrônicas e ópticas. Sabe-se que o In2O3 possui uma alta transparência devido a um número muito grande de transições proibidas entre os estados da banda de valência e condução, resultando em uma disparidade entre a banda proibida óptica e fundamental. Nesta tese é mostrado que três fatores são fundamentais para gerar a disparidade entre as bandas: (i) simetria de inversão na célula cristalina; (ii) mínimo da banda de condução formada por estados s do cátion e do O; (iii) vizinhança do máximo da banda de valência com um alto acoplamento entre os estados d do cátion e p do O. Estas três características, que determinam um mecanismo de geração da disparidade entre as bandas, levam os estados da banda de valência e banda de condução à mesma paridade, sendo assim, transições por dipolo são sempre proibida. Esta banda proibida óptica ainda pode depender de um outro fator: a intensidade luminosa. Sob a condição de alta iluminação, transições ópticas de pequena amplitude fora do ponto Γ, que poderiam ser desprezadas sob baixa iluminação, passam a ter uma importância muito maior. Uma consequência direta deste efeito é que sob forte (baixa) iluminação a banda proibida óptica \"clara\" (\"escura\") coincide (não necessariamente coincide) com a banda proibida fundamental. Tendo estes conhecimentos, é possível controlar as propriedades ópticas de um OTC através da composição catiônica de um multi composto, por exemplo. O acoplamento entre os estados p do O e d dos cátions é a principal característica eletrônica afetada de acordo com a composição estequiométrica dos multi compostos, refletindo diretamente nas propriedades ópticas. De acordo com o modelo de geração de disparidade entre as bandas mencionado anteriormente, a mistura de M2O3-ZnO é mais vantajosa para os OTC do que a mistura In2O3-SnO2 devido ao grande acoplamento dos estados d do Zn com os estados p do O nas proximidades do máximo da banda de valência. / Transparent conducting oxides (TCO) are materials that combine electrical conductivity, with transparency around 90% in visible spectrum. Due to these characteristics, there is strong industrial interest in applying TCO in electronic devices, such as solar cells, transparent transistors, electronic displays, etc. TCO can be synthesized in crystalline or amorphous phase, however it is know that the atomic radius plays an important rule in the corundum and bixbyite crystals structures of M2O3, associated with In2O3, Ga2O3 and Al2O3, which are materials widely used. Although these oxides was deeply studied, in this thesis which use theoretical tools based on density functional theory, it is shown that the small (large) radii of Al (In) favor the crystal structure corundum (bixbyite). On the other hand, because of the intermediate radii of Ga, the hybridization between the d states of Ga and the s states of O, which is favor by the four fold site in the gallia structure, is the fundamental key to makes Ga2O3 crystallize in gallia and not in corundum or bixbyite. The crystal structures with the atomic composition are facts that determine the electronic and optical properties. It is known that In2O3 have a high transparency because the large number of forbidden dipole transition between the valence and conduction bands states, resulting in a disparity between the optical and fundamental band gaps. In this thesis it is shown that three fundamental keys are necessary to generate the disparity between the gaps: (i) crystal structure with inversion symmetry; (ii) conduction band minimum formed by cations and O s states; (iii) high coupling between the cation d states and O p states in the vicinity of valence band maximum. These three characteristics, which determine a mechanism to generate the disparity between the gaps, leads the valence and conduction band states to the same parity, resulting in dipole forbidden optical transition. The optical band gap may depend on another effect: the light intensity. Under high illumination, optical transition with small amplitude out of Γ point, which are neglected under low illumination, became more important. A directly consequence of this effect is that under high (low) illumination the \"bright\" (\"dark\") optical band gap coincide (not necessary coincide) with the fundamental band gap. Having this knowledge, it is possible to tune the optical properties of the TCO through the cation composition in the multi compounds, for example. The coupling between the O p and cations d states is the main electronic characteristic affected by the stoichiometric composition, reflecting directly in the optical properties. According to the band gap disparity mechanism, mentioned previously, the mixture of M2O3-ZnO is more advantageous for TCO than the In2O3-SnO2 mixture due to the high coupling between the Zn d states with the O p states in the vicinity of valence band maximum.

Transparent conducting oxides (TCOs) combine optical transparency in the visible region with a high electrical conductivity. In2O3 doped with Sn (widely, but somewhat misleadingly, known as indium tin oxide or ITO) is at present the most important TCO, with applications in liquid crystal displays, touch screen displays, organic photovoltaics and other optoelectronic devices. Surprisingly, many of its fundamental properties have been the subject of controversy or have until recently remained unknown, including even the nature and magnitude of the bandgap. The technological importance of the material and the renewed interest in its basic physics prompted the research described in this thesis. This thesis aims (i) to establish conditions for the growth of high-quality In2O3 nanostructures and thin films by oxygen plasma assisted molecular beam epitaxy and (ii) to conduct comprehensive investigations on both the surface physics of this material and its structural and electronic properties. It was demonstrated that highly ordered In2O3 nanoislands, nanorods and thin films can be grown epitaxially on (100), (110) and (111) oriented Y-stabilized ZrO2 substrates respectively. The mismatch with this substrate is -1.7%, with the epilayer under tensile strain. On the basis of ab initio density functional theory calculations, it was concluded that the striking influence of substrate orientation on the distinctive growth modes was linked to the fact that the surface energy for the (111) surface is much lower than for either polar (100) or non-polar (110) surfaces. The growth of In2O3(111) thin films was further explored on Y-ZrO2(111) substrates by optimizing the growth temperature and film thickness. Very thin In2O3 epilayers (35 nm) grew pseudomorphically under high tensile strain, caused by the 1.7% lattice mismatch with the substrate. The strain was gradually relaxed with increasing film thickness. High-quality films with a low carrier concentration (5.0  1017 cm-3) and high mobility (73 cm2V-1s-1) were obtained in the thickest films (420 nm) after strain relaxation. The bandgap of the thinnest In2O3 films was around 0.1 eV smaller than that of the bulk material, due to reduction of bonding-antibonding interactions associated with lattice expansion. The high-quality surfaces of the (111) films allowed us to investigate various aspects of the surface structural and electronic properties. The atomic structure of In2O3 (111) surface was determined using a combination of scanning tunnelling microscopy, analysis of intensity/voltage curves in low energy electron diffraction and first-principles ab initio calculations. The (111) termination has an essentially bulk terminated (1 × 1) surface structure, with minor relaxations normal to the surface. Good agreement was found between the experimental surface structure and that derived from ab initio density functional theory calculations. This work emphasises the benefits of a multi-technique approach to determination of surface structure. The electronic properties of In2O3(111) surfaces were probed by synchrotron-based photoemission spectroscopy using photons with energies ranging from the ultraviolet (6 eV) to the hard X-ray regime (6000 eV) to excite the spectra. It has been shown that In2O3 is a highly covalent material, with significant hybridization between O and In orbitals in both the valence and the conduction bands. A pronounced electron accumulation layer presents itself at the surfaces of undoped In2O3 films with very low carrier concentrations, which results from the fact the charge neutrality level of In2O3 lies well above the conduction band minimum. The pronounced electron accumulation associated with a downward band bending in the near surface region creates a confining potential well, which causes the electrons in the conduction band become quantized into two subband states, as observed by angle resolved photoemission spectra (ARPES) Fermi surface mapping. The accumulation of high density of electrons near to the surface region was found to shrink the surface band gap through many body interactions. Finally epitaxial growth of In2O3 thin films on α-Al2O3(0001) substrates was investigated. Both the stable body centred cubic phase and the metastable hexagonal corundum In2O3 phase can be stabilized as epitaxial thin films, despite large mismatches with the substrate. The growth mode involves matching small but different integral multiples of lattice planes of the In2O3 and the substrate in a domain matching epitaxial growth mode.

The global lighting source energy consumption accounts for about 22% of the total electricity generated. New high-efficiency solid-state light sources are needed to reduce the ever increasing demand for energy. Single-phased emitter-based composed of transparent conducting oxides (TCOs) nanocrystals and fluorescent dyes can potentially revolutionize the typical composition of phosphors, the processing technology founded on the binding of dye acceptors on the surface of nanocrystals, and the configurations of the light-emitting diodes (LEDs) and electroluminescence devices. The hybrid white-light-emitting nanomaterial is based on the expanded spectral range of the donor-acceptor pair (DAP) emission originated from the γ-gallium oxide nanocrystals via Förster resonance energy transfer (FRET) to the surface-anchored fluorescent dyes. The emission of the nanocrystals and the sensitized emission of the chromophore act in sync as an internal relaxation upon the excitation of the γ–gallium oxide nanocrystals. It extends the lifetime of the secondary fluorescent dye chromophore and the internal relaxation within this hybrid complex act as a sign for a quasi single chromophore. The model system of white-light-emitting nanostructure system developed based on this technology is the γ–gallium oxide nanocrystals-Rhodamine B lactone (RBL) hybrid complex. The sufficient energy transfer efficiency of 31.51% within this system allowed for the generation of white-light emission with the CIE coordinates of (0.3328, 0.3380) at 5483 K. The relative electronic energy differences of the individual components within the hybrid systems based on theoretical computation suggested that the luminance of the nanocomposite comprised of RBL is dominantly mediated by FRET. The production of white-light-emitting diode (WLED) based on this technology have been demonstrated by solution deposition of the hybrid nanomaterials to the commercially available ultraviolet (UV) LED due to the versatility and chemical compatibility of the developed phosphors.

The global lighting source energy consumption accounts for about 22% of the total electricity generated. New high-efficiency solid-state light sources are needed to reduce the ever increasing demand for energy. Single-phased emitter-based composed of transparent conducting oxides (TCOs) nanocrystals and fluorescent dyes can potentially revolutionize the typical composition of phosphors, the processing technology founded on the binding of dye acceptors on the surface of nanocrystals, and the configurations of the light-emitting diodes (LEDs) and electroluminescence devices. The hybrid white-light-emitting nanomaterial is based on the expanded spectral range of the donor-acceptor pair (DAP) emission originated from the γ-gallium oxide nanocrystals via Förster resonance energy transfer (FRET) to the surface-anchored fluorescent dyes. The emission of the nanocrystals and the sensitized emission of the chromophore act in sync as an internal relaxation upon the excitation of the γ–gallium oxide nanocrystals. It extends the lifetime of the secondary fluorescent dye chromophore and the internal relaxation within this hybrid complex act as a sign for a quasi single chromophore. The model system of white-light-emitting nanostructure system developed based on this technology is the γ–gallium oxide nanocrystals-Rhodamine B lactone (RBL) hybrid complex. The sufficient energy transfer efficiency of 31.51% within this system allowed for the generation of white-light emission with the CIE coordinates of (0.3328, 0.3380) at 5483 K. The relative electronic energy differences of the individual components within the hybrid systems based on theoretical computation suggested that the luminance of the nanocomposite comprised of RBL is dominantly mediated by FRET. The production of white-light-emitting diode (WLED) based on this technology have been demonstrated by solution deposition of the hybrid nanomaterials to the commercially available ultraviolet (UV) LED due to the versatility and chemical compatibility of the developed phosphors.

Die vorliegende Arbeit beschäftigt sich mit dem Wachstum von BaSnO3/LaInO3 (BSO/LIO) Schichten mittels Plasma-unterstützter Molekularstrahlepitaxie (PAMBE). Für die Realisierung der BSO/LIO Heterostruktur müssen zuvor Wege für ein stabiles Herstellungsverfahren sowohl der BSO als auch der LIO Schichten gefunden werden. Aus diesem Grund beschäftigt sich der erste Teil dieser Arbeit mit den Herausforderungen der Suboxidbildung und Suboxidquellen. Das Wissen um Suboxide ist alt, aber es wurde bisher nicht stark in der Anwendung der Oxid-MBE berücksichtig oder benutzt. Engagierte Studien werden in dieser Arbeit durchgeführt, die zeigen, dass bei Suboxidquellen wie z.B. der Mischung aus SnO2 und Sn sich die Einbaukinetik gegenüber einer elementaren Quelle (z.B. Zinn) vereinfacht. Die in dieser Arbeit herausgearbeitete Effizienz der Mischquellen hat bereits dazu geführt, dass weitere Oxide wie Ga2O3 und SnO mit Hilfe von Suboxid-MBE gewachsen wurden. Im zweiten Teil dieser Arbeit werden die entwickelten Quellen genutzt und die BSO und LIO Wachstumsparameter bestimmt, sowie deren Abhängigkeit im Kontext von thermodynamischen Ellinghamdiagrammen diskutiert. Die Besonderheit beim BSO Wachstum liegt dabei auf der Verwendung einer Mischquelle bestehend aus SnO2 + Sn wodurch SnO Suboxid gebildet wird, welches zum Wachstum beiträgt. Ein zwei-dimensionalen Elektronengas an der Grenzfläche der BSO/LIO Heterostruktur wird realisiert durch gezielte Grenzflächenterminierung mit Hilfe einer Zellverschlusssequenz. Durch die Kontrolle der Grenzflächenterminierung im Monolagenbereich können Ladungsträgerkonzentrationen im Bereich um 3 - 5 × 1013 cm−2 und Beweglichkeiten μ > 100 cm2/Vs zuverlässig und reproduzierbar realisiert werden. / The present work investigates the growth of BaSnO3/LaInO3 (BSO/LIO) heterostructures using plasma-assisted molecular beam epitaxy (PA-MBE). Prior to the realization of the BSO/LIO heterostructure, ways for stable and reliable growth of both BSO and LIO layers have to be developed. Therefore, the first part of this thesis addresses the challenges of suboxide formation and suboxide sources. The knowledge about suboxides is rather old, however, so far it is barely considered or used in oxide MBE. Dedicated studies performed in this thesis show that for suboxide sources such as a mixture of SnO2 and Sn the growth kinetics simplify compared to an elemental source (e.g., Sn). The efficiency of mixed sources, that is worked out in this thesis, already led to the growth of other oxides such as Ga2O3 or SnO using suboxide MBE. In the second part of this thesis growth parameters for BSO and LIO, using the developed sources, are determined and their dependence in the context of thermodynamic Ellingham diagrams is discussed. The growth of BSO is realized by the use of a mixed source consisting of SnO2 + Sn, which forms SnO suboxide that is contributed to the growth. A two-dimensional electron gas at the interface of the BSO/LIO heterostructure is realized by engineering the interface termination using a controlled cell shutter sequence. By controlling the interface termination down to mono layer precision, charge carrier densities in the range of 3 - 5 × 1013 cm−2 and mobilities μ > 100 cm2/Vs can be achieved reliably and reproducibly.

Metal oxides are of immense technological importance. Their wide variety of structural and electronic characteristics leads to a flexibility unrivalled by other groups of materials. However, there is still much debate about the fundamental properties of some of the most widely used oxides, including TiO₂ and In₂O₃. This work presents high quality, in-depth characterisation of these two oxides in pure and doped form, including soft and hard X-ray photoelectron spectroscopy and X-ray diffraction. Bulk samples as well as thin film samples were prepared analysed. For the preparation of thin films a high quality sol-gel dip-coating method was developed, which resulted in epitaxial films. In more detail the organisation of the thesis is as follows: Chapter 1 provides an introduction to key ideas related to metal oxides and presents the metal oxides investigated in this thesis, In₂O₃, Ga₂O₃, Tl₂O₃, TiO₂, and SnO₂. Chapter 2 presents background information and Chapter 3 gives the practical details of the experimental techniques employed. Chapters 4 presents reciprocal space maps of MBE-grown In₂O₃ thin films and nanorods on YSZ substrates. Chapters 5 and 6 investigate the doping of In₂O₃ bulk samples with gallium and thallium and introduce a range of solid state characterisation techniques. Chapter 7 describes the development of a dip-coating sol-gel method for the growth of thin films of TiO₂ and shows 3D reciprocal space maps of the resulting films. Chapter 8 concerns hard x-ray photoelectron spectroscopy of undoped and Sn-doped TiO₂. Chapter 9 interconnects previous chapters by presenting 2D reciprocal space maps of nano structured epitaxial samples of In₂O₃ grown by the newly developed sol-gel based method. Chapter 10 concludes this thesis with a summary of the results.