Over the past two decades, organic semiconductors played a growing part as active layers in several electronic systems such as sensors, field‑effect transistors or light emitting diodes to cite a few. In fact, organic materials offer a high versatility and flexibility. However, pure organic systems often lack stability and robustness, which can be overcome by combining them with inorganic scaffolds. In this work, a conducting polymer, polypyrrole (PPy) is employed to create new sensor elements based on the combination of both inorganic and organic layers. Electrical measurements, infrared spectroscopy and current sensing atomic force microscopy provides a better understanding of the polymer behavior upon immersion in aqueous solutions. The observed discharge in water leads to a straightforward application of the device as an in‑flow sensor for several acids like HCl, H2SO4 and H3PO4. The wide range of sensing concentrations as well as the low detection limit place the present detector among the best reported so far in the literature. In a further step to turn towards lab‑in‑a‑tube devices, tubular‑shaped‑integrated microelectrodes are developed by using the rolled‑up technology. As a proof of concept, the successful integration of PPy as an active layer and its use as a gas sensor for volatile organic compounds (VOCs) is demonstrated. Finally, by adapting the rolled‑up top electrodes, as developed by Bof Bufon et al. for self‑assembled monolayers (SAMs), thin PPy films (<50 nm) are vertically contacted and their electrical characteristics measured as a function of temperature and electric field. From the transport investigations, it is observed that an insulating‑to‑metallic transition occurs in the polymeric film by increasing the bias voltage. Other molecular layers like CuPc can be incorporated in these platforms, opening the way towards emerging organic devices.

The combination of modern self-assembly techniques with well-established top-down processing methods pioneered in the electronics industry is paving the way for increasingly sophisticated devices in the future[1]. Nanomembranes, made from a variety of materials, can provide the necessary framework for a diverse range of device structures incorporating wrinkling, buckling, folding, and rolling of thin films[2, 3]. Over the past decade, an elegant symbiosis of bottom-up and top-down methods has been developed, allowing the fabrica- tion of hybrid layer systems via the controlled release and rearrangement of inherently strained layers [4]. Self-assembled rolled-up structures[4, 5] have become increasingly at- tractive in a number of fields including micro/nano uidics[6], optics[7](including metama- terial optical fibers[8]), Lab on a Chip applications[9], and micro- and nanoelectronics[10]. The use of such structures for microelectronic applications has been driven by the versatility in contacting geometries and the abundance of material combinations that these devices offer. By allowing devices to expand in the third dimension, certain obstacles that inhibit 2D structuring can be overcome in elegant ways. Similarly, recent progress in nanostructured superconducting electronic structures has been receiving increased attention[11]. The advancement of such devices has been mo- tivated by their use in quantum computation[12], high sensitivity radiation sensors[13], precision voltage standards[14] and superconducting spintronics[15] to name a few. Combining semiconductor with superconductor materials to create new hybrid geometries is advantageous because it adds the functionalities of the semiconductor, including high charge carrier mobilities, gating possibilities, and refined processing technologies. The main focus of the work presented in this thesis is the development of new methods for controlling strain behavior and its applications toward novel semiconduc- tor/superconductor heterostructures based on nanomembranes. More specifically, the goal is to integrate inherently strained semiconductor layer structures with superconducting materials to create innovative electronic devices by the controlled releasing and rearrangement of thin films. By rolling up pre-patterned semiconductor/superconductor layers, device geometries have been realized that are not feasible using any other technique. In this way, superconducting hybrid junctions, or Josephson junctions, have been created and their basic properties investigated. The Josephson effect, and junctions displaying this quantum coherent behavior, have found many essential uses in diverse areas of science and technology. Many research groups around the world are involved in finding new materials and fabrication methods to tune the properties and structure of such Josephson devices further[11]. The inclusion of semi- conductors, for example, allows for a greater control of the charge carrier density within the junction area, thus allowing for "transistor-like" behavior in these superconducting devices. By rolling up the superconductor contacts using a strained semiconductor as scaffolding, the fabrication of hybrid nano-junctions is simplified drastically, removing the need for complicated processing steps such as electron-beam or nano-imprint lithography. Furthermore, the technique allows many nanometer-sized devices to be created in parallel on a single chip which has the advantage that it can be scaled up to full-wafer processing. First, post-growth processing techniques of epitaxial layers are developed in order to extend the control of hybrid device fabrication. Here, three unique concepts for controlling the rolling behavior of strained semiconductor nanomembranes are presented. First an optical method for inhibiting the rolling of the strained layers is described. Next, a selective etching method for destroying the inherent strain within the semiconductor layer is introduced. Finally, a method by which the strain gradient across a trilayer stack is altered in situ during rolling is presented. Next, the fabrication of a hybrid nanomembrane-based superconducting device is presented. Various experimental details of the fabrication process are analyzed, and the electronic properties of the completed device are investigated. The devices created here highlight the fabrication process in which nanometer-sized structures are created using self-assembly techniques and standard microelectronics fabrication methods, presenting a new method to circumvent more complicated processing techniques. References [1] G. M. Whitesides and B. Grzybowski. Self-assembly at all scales. Science 295, 2418{2421 (2002). [2] Y. G. Sun, W. M. Choi, H. Q. Jiang, Y. G. Y. Huang and J. A. Rogers. Controlled buckling of semiconductor nanoribbons for stretchable electronics. Nature Nanotechnology 1, 201{207 (2006). [3] O. G. Schmidt and K. Eberl. Nanotechnology - Thin solid films roll up into nanotubes. Nature 410, 168 (2001). [4] O. G. Schmidt, C. Deneke, Y. Nakamura, R. Zapf-Gottwick, C. Mller and N. Y. Jin-Phillipp. Nanotechnology { Bottom-up meets top-down. Advanced Solid State Physics 42, 231 (2002). [5] V. Ya. Prinz, V. A. Seleznev, A. K. Gutakovsky, A. V. Chehovskiy, V. V. Preobrazhenskii, M. A. Putyato and T. A. Gavrilova. Free-standing and overgrown InGaAs/GaAs nanotubes, nanohelices and their arrays. Physica E 6, 828 (2000). [6] D. J. Thurmer, C. Deneke, Y. F. Mei and O. G. Schmidt. Process integration of microtubes for uidic applications. Applied Physics Letters 89, 223507 (2006). [7] R. Songmuang, A. Rastelli, S. Mendach and O. G. Schmidt. SiOx/Si radial superlattices and microtube optical ring resonators. Applied Physics Letters 90, 091905 (2007). [8] E. J. Smith, Z. W. Liu, Y. F. Mei and O. G. Schmidt. Combined surface plasmon and classical waveguiding through metamaterial fiber design. Nano Letters 10, 1{5 (2010). [9] G. S. Huang, Y. F. Mei, D. J. Thurmer, E. Coric and O. G. Schmidt. Rolled-up transparent microtubes as two-dimensionally confined culture scaffolds of individual yeast cells. Lab on a Chip 9, 263{268 (2009). [10] C. C. B. Bufon, J. D. C. Gonzalez, D. J. Thurmer, D. Grimm, M. Bauer and O. G. Schmidt. Self-assembled ultra-compact energy storage elements based on hybrid nanomembranes. Nano Letters 10, 2506{2510 (2010). [11] G. Katsaros, P. Spathis, M. Stoffel, F. Fournel, M. Mongillo, V. Bouchiat, F. Lefloch, A. Rastelli, O. G. Schmidt and S. De Franceschi. Hybrid superconductor-semiconductor devices made from self-assembled SiGe nanocrystals on silicon. Nature Nanotechnology 5, 458{464 (2010). [12] Y. J. Doh, J. A. van Dam, A. L. Roest, E. P. A. M. Bakkers, L. P. Kouwenhoven and S. De Franceschi. Tunable supercurrent through semiconductor nanowires. Science 309, 272{275 (2005). [13] F. Giazotto, T. T. Heikkila, G. P. Pepe, P. Helisto, A. Luukanen and J. P. Pekola. Ultrasensitive proximity Josephson sensor with kinetic inductance readout. Applied Physics Letters 92, 162507 (2008). [14] S. P. Benz. Superconductor-normal-superconductor junctions for programmable voltage standards. Applied Physics Letters 67, 2714{2716 (1995). [15] Y. C. Tao and J. G. Hu. Superconducting spintronics: Spin-polarized transport in superconducting junctions with ferromagnetic semiconducting contact. Journal of Applied Physics 107, 041101 (2010).

Miniaturization is a key technological approach in current times. The most prominent examples of miniaturization are personal computers and mobile phones, but we observe miniaturization in other aspects of life, with the most recent example being small portable corona test kits. In science a big part of miniaturization focuses on detectors: to make them portable, to make them integrable into bigger, multi-function systems or to enable detection of smaller and smaller samples. For many experimental techniques highly sensitive and compact devices are already available, one of the extreme examples being single photon detectors. Compared to that, miniaturization of nuclear magnetic resonance (NMR) has still a long way to go in terms of both size and sensitivity. Recently, the successful miniaturization of an NMR coil was presented: on top of a flat polymeric bilayer a metallic layout is patterned. In an aqueous solution, one polymer layer absorbs water and swells, which induces strain between the two polymeric layers. This strain is released by a self-rolling-up of the bilayer, and the metal layer transforms into a microcoil. Such microcoils were successfully used for impedimetric measurements, as antennas, and as mentioned for NMR, but their performance in the latter was far from optimal. This thesis focuses on the optimization of rolled-up microcoils (RUMs) for NMR spectroscopy, with the goal to produce high-resolution and, most importantly, high-sensitivity microcoils. The performance of the microcoil can be expressed in three parameters, namely the spectral linewidth, the (normalized) limit of detection and the damping of a nutation curve, which was not a key parameter for this thesis. Both the microcoil design and the roll-up process have an influence on the quality of a RUM. For an optimal roll-up process, the polymeric bilayer layout needed some adjustment. The rolling process itself was improved through an addition of supporting structures on top of the bilayer, which resulted in tightly rolled tubes with a well-defined diameter. The coil layout was selected from several simple layouts. This layout was then optimized with the help of experiments and simulations. For example, an improvement in resolution was achieved through a reduction of the susceptibility of the metal. Finally, the coil was embedded into a microfluidic chip. This chip allows an easy sample supply into the coil interior and protects the coil from damage. As a side effect, the chip has a positive influence on the resolution of the detector. The best RUMs have a volume of only 1.5 nl, show a linewidth of only 8 ppb and a normalized limit of detection of 0.6 nmol√Hz at 600 MHz. The achieved resolution and sensitivity allow to resolve a 1H ethanol spectrum fully in a single measurement of 6 s duration. Compared to a standard shimmed NMR detector, where the linewidth is 0.65 ppb and the nLOD 10 nmol√Hz, the RUMs linewidth still needs some improvement, but the limit of detection is already an order of magnitude smaller. Combined with the fact that the limit of detection improves with linewidth, this shows the far superior sensitivity of RUMs compared to standard setups. A comparison with literature is also very promising, where optimized RUMs compete with the best published microcoils. Additionally, RUMs can be produced en masse, with, at the moment, four coils fitting on a single 50 x 50 mm2 glass substrate, while the best other microcoils were all made for single, specific experiments one at a time. And finally, the here presented recipe for self-assembled, RUMs is easily adaptable to even smaller sample volumes and to other coil layouts. It can be used to produce matching gradient coil systems and is a guideline on how to combine NMR and other techniques while maintaining a high NMR performance.:Introduction Nuclear magnetic resonance 1 NMR principle 1.1 A single nucleus in a magnetic field 1.2 Multiple spins in external field 1.3 Spins in natura 1.4 Typical liquid state spectrum 1.5 Typical NMR setup 2 Properties of an NMR detector 2.1 Quality of rf-field 2.2 Resolution 2.3 Signal-to-noise ratio 2.4 How to optimize a microcoil 3 Existing microdetectors 3.1 Solenoids 3.2 Saddle coils 3.3 Flat coils 3.4 Striplines/Microslots 4 Comparing microdetectors 4.1 The limit of detection 4.2 Performance of published microcoils Self-assembly 5 What is self-assembly? 6 Self-assembly in microfabrication 6.1 Macroscopic self-assembly 6.2 Self-rolled tubes 7 Self-assembly of rolled-up microcoils 7.1 Working principle 7.2 Experimental methods for self-assembly 8 Encapsulating rolled-up tubes 8.1 Microfluidics 8.2 Microfluidic chip 8.3 Experimental methods for encapsulation Rolled-up microcoils 9 Fabrication 9.1 Bilayer 9.2 Coil geometry 9.3 Metal stack 9.4 Supporting elements 9.5 Rolling process 9.6 Final layout 9.7 Microfluidic integration 10 Reducing susceptibility-induced field distortions 10.1 Simulating field distortions 10.2 Influence of the coil shape 10.3 Susceptibility matching 11 NMR performance 11.1 Measurement setup 11.2 Quality of rf-field 11.3 Resolution and sensitivity 11.4 Comparison to published microcoils 12 Outlook 12.1 Further improvements to rf-field, FWHM and nLOD 12.2 New coil shapes 12.3 New applications Summary Appendix A Simulation and maths A.1 Filling factor and rf-homogeneity A.2 Nutation and rf-homogeneity A.3 FT of one-sided exponential A.4 DFT A.5 Programs B Protocols B.1 Polymeric platform B.2 Metal layers C Test protocols C.1 Wet etching D Calculations for nLODs

Following the intensive development of isolated (i.e., not coupled with on-chip waveguide) vertically rolled-up microtube ring resonators (VRU-MRRs) for both active and passive applications, a variety of microtube-based devices has been realized. These include microcavity lasers, optical sensors, directional couplers, and active elements in lab-on-a-chip devices. To provide more advanced and complex functionality, the focus of tubular geometry research is now shifting toward (i) refined vertical light transfer in 3D stacks of multiple photonic layers and (ii) to make microfluidic cooling system in the integrated optoelectronic system. Based on this motivation, this PhD research is devoted to the demonstration and the implementation of monolithic integration of VRU-MRRs with photonic waveguides for 3D photonic integration and their optofluidic applications. Prior to integration, high-quality isolated VRU-MRRs on the flat Si substrate are firstly fabricated by the controlled release of differentially strained titanium-dioxide (TiO2) bilayered nanomembranes. The fabricated microtubes support resonance modes for both telecom and visible photonics. The outcome of the isolated VRU-MRRs is a record high Q (≈3.8×10^3) in the telecom wavelength range with optimum tapered optical fiber resonator interaction. To further study the optical modes in the visible and near infrared spectral range, μPL spectroscopy is performed on the isolated VRU-MRRs, which are activated by entrapping various sizes of luminescent nanoparticles (NPs) within the windings of rolled-up nanomembranes based on a flexible, robust and economical method. Moreover, it is realized for the first time, in addition to serving as light sources that NPs-aggregated in isolated VRU-MRRs can produce an optical potential well that can be used to trap optical resonant modes. After achieving all the required parameters for creating a high-quality TiO2 VRU-MRR, the monolithic integration of VRU-MRRs with Si nanophotonic waveguides is experimentally demonstrated, exhibiting a significant step toward 3D photonic integration. The on-chip integration is realized by rolling up 2D pre-strained TiO2 nanomembranes into 3D VRU-MRRs on a microchip which seamlessly expanded over several integrated waveguides. In this intriguing vertical transmission configuration, resonant filtering of optical signals at telecom wavelengths is demonstrated based on ultra-smooth and subwavelength thick-walled VRU-MRRs. Finally, to illustrate the usefulness of the fully integrated VRU-MRRs with photonic waveguides, optofluidic functionalities of the integrated system is investigated. In this work, two methods are performed to explore optofluidic applications of the integrated system. First, the hollow core of an integrated VRU-MRR is uniquely filled with a liquid solution (purified water) by setting one end of the VRU-MRRs in contact with a droplet placed onto the photonic chip via a glass capillary. Second, the outside of an integrated VRU-MRR is fully covered with a big droplet of liquid. Both techniques lead to a significant shift in the WGMs (Δλ≈46 nm). A maximum sensitivity of 140 nm/refractive index unit, is achieved. The achievements of this PhD research open up fascinating opportunities for the realization of massively parallel optofluidic microsystems with more functionality and flexibility for analysis of biomaterials in lab-on-a-tube systems on single chips. It also demonstrates 3D photonic integration in which optical interconnects between multiple photonic layers are required.

Optoplasmonic microtube cavities, the combination of dielectric microcavities and noble metal layers, allow for the interactions between photonic modes and surface plasmons, leading to several novel phenomena and promising applications. In this thesis, the hybrid modes with different plasmon-types of evanescent field in the optoplasmonic microtube cavities are discussed. The basic physical mechanism for the generation of plasmon-type field is comprehensively investigated based on an effective potential approach. In particular, when the cavity wall becomes ultra-thin, the plasmon-type field can be greatly enhanced, and the hybrid modes are identified as strong photon-plasmon hybrid modes which are experimentally demonstrated in the metal-coated rolled-up microtube cavities. By designing a metal nanocap onto microtube cavities, angle-dependent tuning of hybrid photon-plasmon modes are realized, in which TE and TM polarized modes exhibit inverse tuning trends due to the polarization match/mismatch. And a novel sensing scheme is proposed relying on the intensity ratio change of TE and TM modes instead of conventionally used mode shift. In addition, localized surface plasmon resonances coupled to resonant light is explored by designing a vertical metal nanogap on microtube cavities. Selective coupling of high-order axial modes is demonstrated depending on spatial-location of the metal nanogap. A modified quasi-potential well model based on perturbation theory is developed to explain the selective coupling mechanism. These researches systematically explore the design of optoplasmonic microtube cavities and the mechanism of photon-plasmon coupling therein, which provide a novel platform for the study of both fundamental and applied physics such as the enhanced light-matter interactions and label-free sensing.

The combination of modern self-assembly techniques with well-established top-down processing methods pioneered in the electronics industry is paving the way for increasingly sophisticated devices in the future[1]. Nanomembranes, made from a variety of materials, can provide the necessary framework for a diverse range of device structures incorporating wrinkling, buckling, folding, and rolling of thin films[2, 3]. Over the past decade, an elegant symbiosis of bottom-up and top-down methods has been developed, allowing the fabrica- tion of hybrid layer systems via the controlled release and rearrangement of inherently strained layers [4]. Self-assembled rolled-up structures[4, 5] have become increasingly at- tractive in a number of fields including micro/nano uidics[6], optics[7](including metama- terial optical fibers[8]), Lab on a Chip applications[9], and micro- and nanoelectronics[10]. The use of such structures for microelectronic applications has been driven by the versatility in contacting geometries and the abundance of material combinations that these devices offer. By allowing devices to expand in the third dimension, certain obstacles that inhibit 2D structuring can be overcome in elegant ways. Similarly, recent progress in nanostructured superconducting electronic structures has been receiving increased attention[11]. The advancement of such devices has been mo- tivated by their use in quantum computation[12], high sensitivity radiation sensors[13], precision voltage standards[14] and superconducting spintronics[15] to name a few. Combining semiconductor with superconductor materials to create new hybrid geometries is advantageous because it adds the functionalities of the semiconductor, including high charge carrier mobilities, gating possibilities, and refined processing technologies. The main focus of the work presented in this thesis is the development of new methods for controlling strain behavior and its applications toward novel semiconduc- tor/superconductor heterostructures based on nanomembranes. More specifically, the goal is to integrate inherently strained semiconductor layer structures with superconducting materials to create innovative electronic devices by the controlled releasing and rearrangement of thin films. By rolling up pre-patterned semiconductor/superconductor layers, device geometries have been realized that are not feasible using any other technique. In this way, superconducting hybrid junctions, or Josephson junctions, have been created and their basic properties investigated. The Josephson effect, and junctions displaying this quantum coherent behavior, have found many essential uses in diverse areas of science and technology. Many research groups around the world are involved in finding new materials and fabrication methods to tune the properties and structure of such Josephson devices further[11]. The inclusion of semi- conductors, for example, allows for a greater control of the charge carrier density within the junction area, thus allowing for "transistor-like" behavior in these superconducting devices. By rolling up the superconductor contacts using a strained semiconductor as scaffolding, the fabrication of hybrid nano-junctions is simplified drastically, removing the need for complicated processing steps such as electron-beam or nano-imprint lithography. Furthermore, the technique allows many nanometer-sized devices to be created in parallel on a single chip which has the advantage that it can be scaled up to full-wafer processing. First, post-growth processing techniques of epitaxial layers are developed in order to extend the control of hybrid device fabrication. Here, three unique concepts for controlling the rolling behavior of strained semiconductor nanomembranes are presented. First an optical method for inhibiting the rolling of the strained layers is described. Next, a selective etching method for destroying the inherent strain within the semiconductor layer is introduced. Finally, a method by which the strain gradient across a trilayer stack is altered in situ during rolling is presented. Next, the fabrication of a hybrid nanomembrane-based superconducting device is presented. Various experimental details of the fabrication process are analyzed, and the electronic properties of the completed device are investigated. The devices created here highlight the fabrication process in which nanometer-sized structures are created using self-assembly techniques and standard microelectronics fabrication methods, presenting a new method to circumvent more complicated processing techniques. References [1] G. M. Whitesides and B. Grzybowski. Self-assembly at all scales. Science 295, 2418{2421 (2002). [2] Y. G. Sun, W. M. Choi, H. Q. Jiang, Y. G. Y. Huang and J. A. Rogers. Controlled buckling of semiconductor nanoribbons for stretchable electronics. Nature Nanotechnology 1, 201{207 (2006). [3] O. G. Schmidt and K. Eberl. Nanotechnology - Thin solid films roll up into nanotubes. Nature 410, 168 (2001). [4] O. G. Schmidt, C. Deneke, Y. Nakamura, R. Zapf-Gottwick, C. Mller and N. Y. Jin-Phillipp. Nanotechnology { Bottom-up meets top-down. Advanced Solid State Physics 42, 231 (2002). [5] V. Ya. Prinz, V. A. Seleznev, A. K. Gutakovsky, A. V. Chehovskiy, V. V. Preobrazhenskii, M. A. Putyato and T. A. Gavrilova. Free-standing and overgrown InGaAs/GaAs nanotubes, nanohelices and their arrays. Physica E 6, 828 (2000). [6] D. J. Thurmer, C. Deneke, Y. F. Mei and O. G. Schmidt. Process integration of microtubes for uidic applications. Applied Physics Letters 89, 223507 (2006). [7] R. Songmuang, A. Rastelli, S. Mendach and O. G. Schmidt. SiOx/Si radial superlattices and microtube optical ring resonators. Applied Physics Letters 90, 091905 (2007). [8] E. J. Smith, Z. W. Liu, Y. F. Mei and O. G. Schmidt. Combined surface plasmon and classical waveguiding through metamaterial fiber design. Nano Letters 10, 1{5 (2010). [9] G. S. Huang, Y. F. Mei, D. J. Thurmer, E. Coric and O. G. Schmidt. Rolled-up transparent microtubes as two-dimensionally confined culture scaffolds of individual yeast cells. Lab on a Chip 9, 263{268 (2009). [10] C. C. B. Bufon, J. D. C. Gonzalez, D. J. Thurmer, D. Grimm, M. Bauer and O. G. Schmidt. Self-assembled ultra-compact energy storage elements based on hybrid nanomembranes. Nano Letters 10, 2506{2510 (2010). [11] G. Katsaros, P. Spathis, M. Stoffel, F. Fournel, M. Mongillo, V. Bouchiat, F. Lefloch, A. Rastelli, O. G. Schmidt and S. De Franceschi. Hybrid superconductor-semiconductor devices made from self-assembled SiGe nanocrystals on silicon. Nature Nanotechnology 5, 458{464 (2010). [12] Y. J. Doh, J. A. van Dam, A. L. Roest, E. P. A. M. Bakkers, L. P. Kouwenhoven and S. De Franceschi. Tunable supercurrent through semiconductor nanowires. Science 309, 272{275 (2005). [13] F. Giazotto, T. T. Heikkila, G. P. Pepe, P. Helisto, A. Luukanen and J. P. Pekola. Ultrasensitive proximity Josephson sensor with kinetic inductance readout. Applied Physics Letters 92, 162507 (2008). [14] S. P. Benz. Superconductor-normal-superconductor junctions for programmable voltage standards. Applied Physics Letters 67, 2714{2716 (1995). [15] Y. C. Tao and J. G. Hu. Superconducting spintronics: Spin-polarized transport in superconducting junctions with ferromagnetic semiconducting contact. Journal of Applied Physics 107, 041101 (2010).

Following the intensive development of isolated (i.e., not coupled with on-chip waveguide) vertically rolled-up microtube ring resonators (VRU-MRRs) for both active and passive applications, a variety of microtube-based devices has been realized. These include microcavity lasers, optical sensors, directional couplers, and active elements in lab-on-a-chip devices. To provide more advanced and complex functionality, the focus of tubular geometry research is now shifting toward (i) refined vertical light transfer in 3D stacks of multiple photonic layers and (ii) to make microfluidic cooling system in the integrated optoelectronic system. Based on this motivation, this PhD research is devoted to the demonstration and the implementation of monolithic integration of VRU-MRRs with photonic waveguides for 3D photonic integration and their optofluidic applications. Prior to integration, high-quality isolated VRU-MRRs on the flat Si substrate are firstly fabricated by the controlled release of differentially strained titanium-dioxide (TiO2) bilayered nanomembranes. The fabricated microtubes support resonance modes for both telecom and visible photonics. The outcome of the isolated VRU-MRRs is a record high Q (≈3.8×10^3) in the telecom wavelength range with optimum tapered optical fiber resonator interaction. To further study the optical modes in the visible and near infrared spectral range, μPL spectroscopy is performed on the isolated VRU-MRRs, which are activated by entrapping various sizes of luminescent nanoparticles (NPs) within the windings of rolled-up nanomembranes based on a flexible, robust and economical method. Moreover, it is realized for the first time, in addition to serving as light sources that NPs-aggregated in isolated VRU-MRRs can produce an optical potential well that can be used to trap optical resonant modes. After achieving all the required parameters for creating a high-quality TiO2 VRU-MRR, the monolithic integration of VRU-MRRs with Si nanophotonic waveguides is experimentally demonstrated, exhibiting a significant step toward 3D photonic integration. The on-chip integration is realized by rolling up 2D pre-strained TiO2 nanomembranes into 3D VRU-MRRs on a microchip which seamlessly expanded over several integrated waveguides. In this intriguing vertical transmission configuration, resonant filtering of optical signals at telecom wavelengths is demonstrated based on ultra-smooth and subwavelength thick-walled VRU-MRRs. Finally, to illustrate the usefulness of the fully integrated VRU-MRRs with photonic waveguides, optofluidic functionalities of the integrated system is investigated. In this work, two methods are performed to explore optofluidic applications of the integrated system. First, the hollow core of an integrated VRU-MRR is uniquely filled with a liquid solution (purified water) by setting one end of the VRU-MRRs in contact with a droplet placed onto the photonic chip via a glass capillary. Second, the outside of an integrated VRU-MRR is fully covered with a big droplet of liquid. Both techniques lead to a significant shift in the WGMs (Δλ≈46 nm). A maximum sensitivity of 140 nm/refractive index unit, is achieved. The achievements of this PhD research open up fascinating opportunities for the realization of massively parallel optofluidic microsystems with more functionality and flexibility for analysis of biomaterials in lab-on-a-tube systems on single chips. It also demonstrates 3D photonic integration in which optical interconnects between multiple photonic layers are required.

Over the past two decades, organic semiconductors played a growing part as active layers in several electronic systems such as sensors, field‑effect transistors or light emitting diodes to cite a few. In fact, organic materials offer a high versatility and flexibility. However, pure organic systems often lack stability and robustness, which can be overcome by combining them with inorganic scaffolds. In this work, a conducting polymer, polypyrrole (PPy) is employed to create new sensor elements based on the combination of both inorganic and organic layers. Electrical measurements, infrared spectroscopy and current sensing atomic force microscopy provides a better understanding of the polymer behavior upon immersion in aqueous solutions. The observed discharge in water leads to a straightforward application of the device as an in‑flow sensor for several acids like HCl, H2SO4 and H3PO4. The wide range of sensing concentrations as well as the low detection limit place the present detector among the best reported so far in the literature. In a further step to turn towards lab‑in‑a‑tube devices, tubular‑shaped‑integrated microelectrodes are developed by using the rolled‑up technology. As a proof of concept, the successful integration of PPy as an active layer and its use as a gas sensor for volatile organic compounds (VOCs) is demonstrated. Finally, by adapting the rolled‑up top electrodes, as developed by Bof Bufon et al. for self‑assembled monolayers (SAMs), thin PPy films (<50 nm) are vertically contacted and their electrical characteristics measured as a function of temperature and electric field. From the transport investigations, it is observed that an insulating‑to‑metallic transition occurs in the polymeric film by increasing the bias voltage. Other molecular layers like CuPc can be incorporated in these platforms, opening the way towards emerging organic devices.