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Feedback Control of Ionic Polymer ActuatorsMallavarapu, Kiran 26 July 2001 (has links)
An ionic polymer actuator consists of a thin Nafion-117 sheet plated with gold or platinum on both sides. An ionic polymer actuator undergoes large deformation in the presence of low applied voltage across its thickness and exhibits low impedance. They can also be used as large displacement sensors by bending them to induce stresses and generate a voltage response. They operate best in a humid environment. Ionic polymer actuators have been used for various practical applications such as bio-mimetic robotic propulsion, flexible low mass robotic arms, propellors for swimming robotic structures, linear and platform type robotic actuators and active catheter systems.
One of the disadvantages of ionic polymer actuators is that their settling time to a unit step voltage is on the order of 5-20 seconds in a cantilever configuration. The slow time constant of an ionic polymer limits the actuation bandwidth. The characteristics of ionic polymer actuators, low force and large displacement (as compared to other actuator technologies such as PZT or PVDF), cannot be used in applications requiring a faster response time for a given actuation signal. Due to this limitation, many applications will not be able to make use of the large displacement effectively because of the limited bandwidth of the actuator.
Another disadvantage of using an ionic polymer actuator is that the stiffness of the actuator is a function of the hydration of the polymer. Difficulties in controlling the hydration, which changes with respect to time, results in inconsistencies in the mechanical response exhibited by the polymers during continual usage.
Several physical models of ionic polymer actuators have been proposed. The physical phenomenon responsible for the bending is not completely understood and no clear set of principles have been able to explain the motion of the polymers completely. Physical phenomena like ionic motion, back diffusion of water and electrostatic force have been used to explain these models.
This research demonstrates the use of feedback control to overcome the limitation of slow settling time. First, an empirical model of the ionic polymers developed by Kanno was modified by studying the step response of these actuators. The empirical model is used to design a feedback compensator by state space modeling techniques. Since the ionic polymer actuator has a slow settling time in the open-loop, the design objectives are to minimize the settling time and constrain the control voltage to be less than a prescribed value. The controller is designed using Linear Quadratic Regulator (LQR) techniques which reduced the number of design parameters to one variable.
Simulations are performed which show settling times of 0.03 seconds for closed-loop feedback control are possible as compared to the open-loop settling time of 16-18 seconds. The maximum control voltage varied from 1.2 Volts to 3.5 Volts depending on the LQR design parameter. The controller is implemented and results obtained are consistent with the simulations. Closed-loop settling time is observed to be 4-8 seconds and the ratio of the peak response to the steady-state response is reduced by an order of magnitude.
Discrepancies between the experiment and the simulations are attributed to the inconsistencies in the resonant frequency of the actuator. Experiments demonstrate that changes in the surface hydration of the polymer result in 20\% variations in the actuator resonance. Variations in the actuator resonance require a more conservative compensator design, thus limiting the performance of the feedback control system. / Master of Science
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<b>3D PRINTED FLEXIBLE SENSORS AND SOFT PNEUMATIC ACTUATORS WITH EMBEDDED DIELECTRIC ELECTROACTIVE POLYMERS FOR GRIPPING AND REHABILITATION APPLICATIONS</b>Hernan David Moreno Rueda Sr (16929609) 23 April 2024 (has links)
<p dir="ltr">The present work expands the state of the art in the design of soft actuators and flexible sensors manufactured through fused deposition modelling (FDM) and direct ink writing (DIW). The first design consisted of flexible sensors for rehabilitation. Three different designs were tested and compared according to their sensitivity and accuracy. The flexible sensor successfully responded to deformation by changing its resistance. The first design of soft actuator was the Closed Dual Pneumatic Bellow Actuator. The soft actuator was manufactured using FDM and included an inner chamber in which the input air flows through and produces the actuation. The actuator also included dielectric electroactive polymer (DEAP) that showed response to pressure between the actuator and the object to be grasped. The electrodes of the DEAP were manufactured using commercial conductive TPU. A second soft actuator was designed with a circular shape and embedded DEAP. The electrodes in the DEAP consisted of conductive carbon grease. Previous tests were performed to assess the functionality of a DEAP structure using conductive carbon grease. The DEAP showed an increase in capacitance as pressure was applied on one side of the structure parallel to the electrodes and computational simulations validated such response. Future work using the sensors and actuators presented includes the implementation of a closed-loop system to the soft actuators, using the readouts of the sensors to adjust the input pressure and apply precise pressure on objects. The flexible sensor for rehabilitation has the potential to be implemented in each of the fingers of the hand and use the data to characterize the movement of the hand under different configurations providing feedback to patients in task-oriented therapy.</p>
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Designing Natural Haptic Interfaces and SignalsSang-Won Shim (6620390) 14 May 2019 (has links)
This thesis research is concerned with the exploration, design, and validation of novel haptic technologies and signals that feel natural and meaningful in a calm and pleasant way. Our ultimate goal is to expand the possibilities of human-machine interaction by developing a single tactile display and a set of signals through a systematic design approach. It is generally a challenge to evoke a broad range of emotions with vibrotactile stimulation, especially at low signal intensities. During the first part of this thesis research, three types of prototypes were developed and explored using novel haptic technologies. The first was a circular array braille display consisting of eight small six-pin braille modules. The forty-eight pins were arranged in a circular shape to deliver circular tactile information such as time and direction. The second was a braille stick consisting of sixteen six-pin braille modules arranged in a row. The entire display could be easily grasped in the hand so that tactile information can be easily accessible. The third was a 3-by-3 electroactive polymer actuator array driven at high voltages that gives a subtle “tapping” feel on the skin. However, each of the three prototypes suffered from a limited range of expression and was not pursued further.<br> After the initial prototyping efforts, a 2-by-2 vibrotactile display, the palmScape, was conceived and developed. Custom-designed stimulation patterns based on natural phenomena that feel calm and pleasant were designed and implemented with the palmScape. We use text labels to set the context for the vibrotactile icons that attempt to capture and expresses natural metaphors through variations in signal amplitude, frequency, duration, rhythm, modulation, spatial extent, as well as slow movements. Fourteen participants evaluated twenty vibrotactile icons by rating the perceived valence and arousal levels. The twenty stimuli included sixteen custom-designed vibrotactile icons from this thesis research and four reference patterns from two published studies. The results show that our custom-designed patterns were rated at higher valence levels than the corresponding reference signals at similar arousal ratings. Five of the sixteen vibrotactile icons from this research occupied the fourth quadrant of the valence-arousal space that corresponds to calm and pleasant signals. These findings support the validity of the palmScape display and our signal design approach for achieving a calm and pleasant experience and the possibility of reaching a broader range of expressiveness with vibrotactile signals.<br> Future studies will continue with the design of signals that can express a broader range of metaphors and emotions through the palmScape, and build an emotional evaluation database that can be combined with other modalities. Our work can be further expanded to support an immersive experience with naturalistic-feeling vibrotactile effects and broaden the expressiveness of human-computer interfaces in media consumption, gaming, and other communicative application domains.
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Modification of electrostrictive polymers and their electromechanical applications / Composites à base de polymères electrostrictifs et leurs applications électromécaniqueYin, Xunqian 07 May 2015 (has links)
Les polymères électroactifs (PAE), sont des matériaux permettant de réaliser une conversion entre l'énergie électrique et mécanique. L'objet de ce travail est de proposer des procédés de modifications des terpolymères électrostrictifs par voies composites basés sur différentes approches dans le but d’améliorer les performances électromécaniques et de développer des applications à partir de ces matériaux modifiés. Dans un premier temps, un nano-composite à base de terpolymère et de noir de carbone a été préparé pour améliorer la permittivité diélectrique. Dans un deuxième temps, sur la base de la nature hétérogène de terpolymère semi-cristallin ainsi que du rôle important que la polarisation interfaciale joue sur la réponse diélectrique et électromécanique, une faible quantité d’agent plastifiant (bis (2-ethylhexyl) phalate (DEHP)) a été introduite dans le terpolymère électrostrictif afin de former un composite tout organique permettant l'amélioration des performances électromécaniques. Enfin, l’utilisation de ces matériaux modifiés dans deux applications spécifiques a été étudiée: La récupération de l'énergie mécanique et une pompe microfluidique sans valve. / Electroactive polymers (EAPs), which can realize the conversion between electrical and mechanical energy, have been emerging as one of the most interesting smart materials in the past two decades due to their low density, excellent mechanical properties, ease of processing, low price and potential applications in the fields of sensors, actuators, generators, biomimetic robots and so on. The object of this work is to modify electrostrictive terpolymers with different approaches to improve the electromechanical performances and to develop some applications based on modified terpolymers. Firstly, an organic/inorganic (terpolymer/carbon black) nanocomposite was prepared to improve the dielectric permittivity based on the percolation theory. Secondly, based on the heterogeneous nature of semi-crystalline terpolymer and the important role that interface polarization plays for dielectric and electromechanical response, small molecular plasticizer bis(2-ethylhexyl) phalate (DEHP) was introduced into electrostrictive terpolymer to form an all-organic polymer composite with improved electromechanical performances. Finally, two applications including mechanical energy harvesting and microfluidic pump based on DEHP modified terpolymers were investigated.
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Dielectric elastomer actuators in electro-responsive surfaces based on tunable wrinkling and the robotic arm for powerful and continuous movementLin, I-Ting January 2019 (has links)
Dielectric elastomer actuators (DEAs) have been used for artificial muscles for years. Recently the DEA-based deformable surfaces have demonstrated controllable microscale roughness, ease of operation, fast response, and possibilities for programmable control. DEA muscles used in bioinspired robotic arms for large deformation and strong force also become desirable for their efficiency, low manufacturing cost, high force-to-weight ratio, and noiseless operation. The DEA-based responsive surfaces in microscale roughness control, however, exhibit limited durability due to irreversible dielectric breakdown. Lowering device voltage to avoid this issue is hindered by an inadequate understanding of the electrically-induced wrinkling deformation as a function of the deformable dielectric film thickness. Also, the programmable control and geometric analysis of the structured surface deformation have not yet been fully explored. Current methods to generate anisotropic wrinkles rely on mechanical pre-loading such as stretching or bending, which complicates the fabrication and operation of the devices. With a fixed mechanical pre-loading, the device can only switch between the flat state and the preset wrinkling state. In this thesis, we overcome these shortcomings by demonstrating a simple method for fabricating fault-tolerant electro-responsive surfaces and for controlling surface wrinkling patterns. The DEA-based system can produce different reversible surface topographies (craters, irregular wrinkles, structured wrinkles) upon the geometrical design of electrode and application of voltage. It remains functional due to its ability to self-insulate breakdown faults even after multiple high voltage breakdowns, and the induced breakdown punctures can be used for amplification of local electric fields for wrinkle formation at lower applied voltages. We enhance fundamental understanding of the system by using different analytical models combined with numerical simulation to discuss the mechanism and critical conditions for wrinkle formation, and compare it with the experimental results from surface topography, critical field to induce wrinkles in films of different thickness, and wrinkling patterns quantitatively analysed by different disorder metrics. Based on the results, we demonstrate its wide applicability in adjustable transparency films, dynamic light-grating filter, molding for static surface patterns, and multi-stable mirror-diffusor-diffraction grating device. For DEAs used for macroscopic-scale deformation in robotic arms, the main issue that undermines the performance of DEA muscles is the trade-off between strong force and large displacement, which limits the durability and range of potential robotic and automation applications of DEA-driven devices. In this thesis, this challenge is tackled by using DEAs in loudspeaker configuration for independent scaling-up of force and displacement, developing a theoretical prediction to optimise the operation of such DEAs in bioinspired antagonistic system to maximise speed and power of the robotic arm, and designing a clutch-gear-shaft mechanical system collaborating with the muscles to decouple the displacement and output force. Therefore, the trade-off between force and displacement in traditional DEA muscles can be resolved. The mechanical system can also convert the short linear spurt to an unlimited rotary motion. Combining these advantages, continuous movement with high output force can be accomplished.
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Transducteurs ultra fins à base de polymères conducteurs : fabrication, caractérisation et modélisation / Ultrathin conducting polymer transducers : fabrication, characterization, and modelingNguyen, Ngoc Tan 21 September 2018 (has links)
Récemment, les actionneurs ioniques ultra-minces à base de poly (3,4-éthylènedioxythiophène) (PEDOT) ont surmonté certains obstacles initiaux pour augmenter le potentiel d'applications dans les dispositifs microfabriqués. Bien que la microfabrication d’actionneurs à trois couches, n’impliquant aucune manipulation manuelle, ait été démontrée, leurs performances mécaniques restent limitées pour des applications pratiques. Le but de cette thèse est d'optimiser les transducteurs dans la phase de fabrication des couches minces en utilisant des micro technologies, de caractériser complètement les propriétés électrochimiques des transducteurs ainsi obtenus, et de développer un modèle pour simuler leurs capacités électromécaniques bidirectionnelles (actionnement et détection). Tout d'abord, les actionneurs à trois couches ultra-minces à base de PEDOT sont fabriqués par polymérisation en phase vapeur de 3,4-éthylènedioxythiophène en réalisant un procédé de synthèse couche par couche. Le travail présenté constitue la première caractérisation complète de microactionneurs ioniques à base de PEDOT fonctionnant dans l’air d’une si faible épaisseur (17 μm) présentant une déformation en flexion et une génération de force de 1% et 12 μN respectivement. En effet, les propriétés électriques, électrochimiques et mécaniques des microactionneurs ont été minutieusement étudiées. La caractérisation non linéaire a été étendue à la dépendance de la capacité volumétrique sur une fenêtre de tension. Le coefficient d'amortissement a été caractérisé pour la première fois. Par ailleurs, un modèle multi-physique non linéaire a été proposé comme méthode de simulation des réponses en mode actionneur et capteur dans des couches multiples, représenté à l'aide d'un formalisme Bond Graph, et a été capable de mettre en œuvre tous les paramètres caractérisés. La concordance entre les simulations et les mesures a confirmé l'exactitude du modèle pour prédire le comportement dynamique non linéaire des actionneurs. En outre, les informations extraites du modèle ont également permis de mieux comprendre les paramètres critiques des actionneurs et leur incidence sur l'efficacité de l'actionneur et sur la distribution de l'énergie. Enfin, un nouveau modèle linéaire électromécanique bidirectionnel a été introduit pour simuler la capacité de détection du transducteur à trois couches et a été confirmé par des résultats expérimentaux dans les domaines fréquentiel et temporel d'un déplacement d'entrée sinusoïdal. Les actionneurs résultants et les modèles proposés sont prometteurs pour la conception, l'optimisation et le contrôle des futurs dispositifs de microsystèmes souples dans lesquels l'utilisation d'actionneurs en polymère devrait être essentielle. / Recently, ultrathin poly (3,4-ethylenedioxythiophene) (PEDOT) – based ionic actuators have overcome some initial obstacles to increase the potential for applications in microfabricateddevices. While microfabrication processing of trilayer actuators that involve no manual handling has been demonstrated, their mechanical performances remain limited for practical applications. The goal of this thesis is to optimize the transducers in thin films fabrication by micro technologies, fully characterize the electrochemomechanical properties of the resulting trilayers, and develop a model to simulate their bidirectional electromechanical ability (actuation and sensing). At first, ultrathin PEDOT-based trilayer actuators are fabricated via the vapor phase polymerization of 3,4-ethylenedioxythiophene combining with the layer by layer synthesis process. This constitutes the first full characterization of ionic PEDOT-based microactuators operating in air of such a small thickness (17 μm) having bending deformation and output force generation of 1% and 12 μN respectively. Secondly, electrical, electrochemical and mechanical properties of the resulting microactuators have been thoroughly studied. Non-linear characterization was extended to volumetric capacitance dependence on voltage window. Damping coefficient was characterized for the first time. Thirdly, a nonlinear multi-physics model was proposed as a method of simulating actuator and sensor responses in trilayers, represented using a Bond Graph formalism, and was able to implement all of the characterized parameters. The concordance between the simulations and the measurements confirmed the accuracy of the model in predicting the non-linear dynamic behavior of the actuators. In addition, the information extracted from the model also provided an insight into the critical parameters of the actuators and how they affect the actuator efficiency, as well as the energy distribution. Finally, a nouveau bidirectional electromechanical linear model was introduced to simulate the sensing ability of the trilayer transducer and was confirmed via experimental results in both frequency and time domains of a sinusoidal input displacement. The resulting actuators and the proposed models are promising for designing, optimizing, and controlling of the future soft microsystem devices where the use of polymer actuators should be essential.
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Polyuréthanes électrostrictifs et nanocomposites : caractérisation et analyse des mécanismes de couplages électromécaniques / Electrostrictive polyurethanes and nanocomposites : characterization and analyse of the mechanisms of electromechanical couplingsWongtimnoi, Komkrisd 19 December 2011 (has links)
Depuis quelques années on s'intéresse aux actionneurs base polymères, souvent appelés polymères électroactifs électroniques (EAPS) pour intégrer dans des microsystèmes électromécaniques (MEMS). Trois mécanismes sont à l'origine du couplage électromécanique : (i) la piézoélectricité qui apparait dans certaines phases cristallines, (ii) la force "de Maxwell" lorsqu'un champ électrique aux bornes du condensateur constitué d'un polymère souples placé entre deux électrodes, et (iii) l'électrostriction, phénomène intrinsèque aux matériaux polaires, mal connu. Les deux derniers se traduisent par une dépendance quadratique de la déformation macroscopique avec le champ électrique appliqué. Parmi les EAPs électrostrictifs, on cite souvent certains polyuréthanes (PU) qui a conduit à ce choix pour ce travail de thèse. Une première partie a consisté à analyser en détail l'électrostriction de 3 PUs, copolymères à blocs de deux types d'unités de répétition, les unes conduisant à des segments rigides très polaires, les autres à des segments souples peu polaires. La séparation de phase qui apparait lors de la mise en œuvre de ces PUs (contenant des fractions différentes de segments souples et rigides) semble propice à l'apparition de leur électrostriction. C'est ce qu'indique une modélisation récemment proposée qui prédit un facteur de près de 1000 entre forces de Maxwell (ici négligeables) et électrostriction. Le comportement des matériaux résultent clairement de la compétition entre contraintes d'origine électrostatique (dipôles des phases polaires dans un gradient de champ électrique) et contraintes mécaniques liées à la rigidité des phases. L’influence systématique de l'épaisseur des films sur leur activité électromagnétique a été rendue compte: les films minces présentent une plus faible déformation à champ électrique donné que les films plus épais. Les films obtenus par évaporation du solvant utilisé pour dissoudre les PU présentent probablement un gradient de microstructure : en surface, l'évaporation rapide limite la séparation de phase, alors qu'elle est plus avancée à cœur. C’est cohérent avec la modélisation reposant sur la présence de gradient de constante diélectrique au sein des films. Dans une dernière partie, on a cherché à augmenter encore l'électrostriction de ces matériaux en dispersant des particules conductrices à conduction électronique, de taille nanométrique (noir de carbone et nanotubes de carbone). On observe trois effets, l'un correspondant à l'augmentation de la constante diélectrique apparente (celle diverge au seuil de percolation), et un deuxième effet à une augmentation des forces d'attraction locales. En revanche, le troisième effet qui contrecarre les forces d'origine électrostatique puisqu'il résulte de l'augmentation de la rigidité dû à la présence des particules rigides. Là encore, la compétition entre contraintes électrostatique et mécanique conduit à un optimum en termes de fraction volumique de particules renforçantes. / Piezoelectric ceramics are commonly used for actuation applications. However, they suffer from several drawbacks particularly such low electric field-induced strains and difficult implementation inside microelectromechanical systems (MEMS). Recently, electroactive polymers (EAPs) have attracted considerable interest, especially following the publication of elevated electric field-induced strain values. The results have rendered EAPs very attractive for replacing the lead-based ceramics. Three mechanisms are responsible for the electromechanical coupling in electronic EAPs: (i) The piezoelectricity that appears in some crystalline phases, (ii) The “Maxwell” forces when applying an electric field through a capacitor which consists of a flexible polymer film placed between two electrodes, and (iii) The electrostriction, an intrinsic phenomenon related to polar materials, which is still poorly understood. The last two mechanisms result in a quadratic dependence of the deformation with the applied electric field. Among the electrostrictive EAPs, some polyurethanes (PU) have been often cited, and have therefore guided the choice of the materials for this work. The first part was to analyze the electrostrictive behavior of three PUs, made of two partially miscible types of repeating units: the high polar hard segments and the low polar soft segments. The phase separation occurred during the elaboration process of these PU films seems favorable to the emergence of electrostrictive behavior. A model predicted recently an almost 1000 factor between the electrostriction and the Maxwell stress (here negligible). This is clearly related to the competition between the electrostatic strains (polar phases dipoles in a field gradient) and the mechanical stresses. The thickness of films was found to have a strong influence on electromechanical activity: thin films present a lower strain for a given electric field compared to thick films. Depending on the solvent evaporation during the film elaboration, the films exhibit a thickness gradient in the microstructure: Fast evaporation on the surface inhibits the phase separation, whereas it is more favored in the core. This is consistent with the modeling based on the gradient of dielectric constant in PU. In the last part, we aimed to further increase the electrostriction of PU by filling with nanoscale conductive particles (carbon black or carbon nanotubes). This normally results three effects, one corresponding to the increase of the dielectric constant in the vicinity of the percolation threshold, a second effect relates to an increase in local attractive forces which behave as internal constraints. In contrast, the third effect counteracts the electrostatic forces since it results from the increased stiffness due to the hard particles. Again, the competition between electrostatic and mechanical stress leads to an optimum induced-deformation associated to a fraction of reinforcing particles.
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Liquides ioniques électroactifs dans la composition d’électrolytes avancés pour des applications en énergieGélinas, Bruno 04 1900 (has links)
No description available.
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A multi-layered variable stiffness device based on smart form closure actuatorsHenke, M., Gerlach, G. 09 October 2019 (has links)
This contribution describes the properties and limitations of multi-layered mechanical devices with variable flexural stiffness. Such structures are supposed to be components of new smart, self-sensing and self-controlling composite materials for lightweight constructions. To enable a proper stiffness control, reliable actuators with high actuation capabilities based on smart materials are used. Those actuators are either driven by electroactive polymers (EAPs) or shape memory alloy (SMA) wires. They control the area moment of inertia of the multi-layered bending structures. To change the area moment of inertia and, hence, the flexural stiffness of an multi-layered beam within a wide range, it is necessary to stack as many layers as possible over each other. The fundamental function of this approach is demonstrated with a three-layer stack consisting of three independent layers and four form closure actuators driven by SMAs. This experimental set-up was able to change its bending stiffness k by a factor of 14.6, with a minimum and maximum stiffness of kmin = 0.11 N mm¯¹ and kmax = 1.73 N mm¯¹, respectively. The usage of four independently controllable actuators yields nine independent flexural-stiffness states of the beam. Both analytical and numerical calculations have shown good agreement with the measured stiffness values.
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Self-sufficient oscillating microsystem at low Reynolds numbersAkbar, Farzin 21 December 2022 (has links)
This work is inspired by the peculiar behavior of the natural systems, namely the ability to produce self-sustained oscillations in the level of tens of Hertz in constant ambient conditions. This feature is one of the key signatures prescribed to living organisms. The firing rate of neuronal cells, a pulsating heart, or the beating of cilia and flagella are among many biological examples that possess amazing functionalities and unprecedented intelligence solely relying on bio-electro-chemical processes. Exploring shapeable polymeric technologies, new self-oscillating artificial microsystems were developed within this thesis. These microsystems rely on the novel nonlinear architecture that exhibits a negative differential resistance (NDR) within the parametric response that enables periodic oscillations. These systems are made of polymers and metals and were microfabricated in a planar fashion. The electrochemically deposited ionic electroactive polymers act as actuators of the system. Upon the self-assembly process, due to the interlayer strains, the planar device transforms into a three-dimensional soft nonlinear system that is able to perform self-sustained relaxation oscillations when subjected to a constant electric field while consuming extremely low powers (as low as several microwatts). The parameters of these systems were tuned for a high oscillation amplitude and frequency. This electro-mechanical parametric relaxation oscillator (EMPRO) can generate a rhythmic motion at stroke frequencies that are biologically relevant reaching up to ~95 Hz. The EMPRO oscillations at high frequencies generate a flow in the surrounding liquid, which was observed in the form of vortices around the micro actuators. This flow was further studied in ex-vivo conditions by measuring Doppler shifts of ultrasound waves. The EMPRO was made autonomous by integrating an electrochemical voltaic cell. Four different electrochemical batteries were tested to match the power consumption of the EMPRO system and electrochemical compatibility of the surrounding media. An Ag-Mg primary cell was then integrated with the EMPRO for autonomous operation without the need for external power sources, cables or controllers. This biomimicking self-powered self-sustaining oscillating microsystem is envisioned to be useful in novel application scenarios operating at low Reynolds numbers in biologically relevant conditions. Furthermore, as the system is electromechanical in nature, it could be integrated with electronic components such as sensors and communication devices in the next generation of autonomous microsystems.:
Table of contents
Acronyms 7
1 Introduction 8
1.1 Motivation 9
1.2 Objectives 9
1.3 Thesis organization 10
2 Background 12
2.1 A brief review on nonlinear self-oscillation 12
2.2 Self-oscillating biological systems 13
2.3 Stimuli responsive materials 15
2.3.1 Electroactive polymers in electrochemical cells 16
2.3.2 Sources of electrical field for electroactive polymers 24
2.4 Self-oscillating synthetic systems 27
2.5 Movement in low Reynolds number regime 33
3 Materials and methods 38
3.1 Deposition methods 38
3.1.1 Photolithography 38
3.1.2 Plasma sputtering 41
3.1.3 Atomic layer deposition 42
3.1.4 Electrochemical polymerization 44
3.2 Shapeable polymeric platform technology 46
3.2.1 Sacrificial layer 46
3.2.2 Hydrogel swelling layer 47
3.2.3 Polyimide reinforcing layer 48
3.3 Characterization methods 49
3.3.1 Profilometry 49
3.3.2 Scanning electron and focused ion beam microscopy 50
3.3.3 Cyclic Voltammetry 52
3.3.4 Ultrasound and Doppler shift measurements 53
4 Electromechanical Parametric Relaxation Oscillators (EMPROs) 56
4.1 Relaxation oscillation in EMPROs 56
4.2 Theory of EMPRO relaxation oscillations 61
4.3 Realization of EMPROs 67
4.3.1 Design parameters of EMPROs 67
4.3.2 EMPRO on-chip battery integration 71
4.4 Fabrication of autonomous EMPROs 76
5 EMPRO performances 84
5.1 Externally biased EMPROs 84
5.2 Autonomous EMPROs 95
6 Conclusions and outlook 98
6.1 Outlook 99
Bibliography i
List of Figures and Tables xi
Versicherung xiii
Acknowledgements xiv
Scientific publications and contributions xvi
Theses xvii
Curriculum Vitae xix
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