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  • About
  • The Global ETD Search service is a free service for researchers to find electronic theses and dissertations. This service is provided by the Networked Digital Library of Theses and Dissertations.
    Our metadata is collected from universities around the world. If you manage a university/consortium/country archive and want to be added, details can be found on the NDLTD website.
21

\"Avaliação do método das médias móveis no tratamento de sinais de absorção atômica de cádmio, chumbo e crômio obtidos por atomização eletrotérmica em filamento de tungstênio\" / \"Evaluation of the moving averages in the treatment of cadmium, lead and chromium atomic absorption signals from electrothermal atomization\"

Flavio de Oliveira Leme 20 December 2006 (has links)
Este trabalho teve como objetivo avaliar o uso do método das médias móveis na atomização de cádmio, crômio e chumbo utilizando filamento de tungstênio de 150 W (OSRAM) como atomizador eletrotérmico. Realizou-se um estudo sistemático da influência da altura de observação, da temperatura e taxa de aquecimento na atomização dos analitos e a viabilidade do uso do método das médias móveis no tratamento dos sinais transientes gerados na atomização. O estudo da influência da altura de observação foi realizado posicionado-se o filamento no centro (0 mm), 1 e 2 mm abaixo do feixe de radiação. A influência da temperatura e da taxa de aquecimento foi estudada utilizando temperaturas na etapa de atomização entre 1890 e 2780 °C. O método das médias móveis foi aplicado aos sinais transientes gerados na atomização, com o filamento posicionado no centro (0 mm), 1 e 2 mm e com temperatura de atomização entre 2060 e 2780 °C, utilizando fatores 0, 3, 5, 7 e 9. No estudo da temperatura e da taxa de aquecimento foram aplicadas ddps no software de controle na etapa de atomização entre 4 e 12 V. As soluções usadas no desenvolvimento deste trabalho foram preparadas em meio 0,1 % v/v HNO3. Utilizou-se como gás de proteção a mistura de 90% Ar+10 % H2. Para o cádmio, recomenda-se a utilização da altura de observação de 1 mm, para o chumbo recomenda-se 0 mm e para o crômio a altura recomendada é a de 2 mm. Os estudos comprovaram a dependência dos sinais de absorção atômica em altura de pico com a temperatura e a taxa de aquecimento. O cádmio foi o analito em que a taxa de aquecimento foi a menos crítica para a atomização, enquanto que o crômio foi o mais afetado pela variação da taxa de aquecimento. Não foi observada diferença significativa entre os sinais de cádmio com alturas de observação de 0 e 1 mm. Para o chumbo, a diferença entre os sinais com altura de observação de 0 e 1 mm foi constante em todas as taxas de aquecimento estudadas. A 2 mm a diferença entre os sinais aumentou com o aumento da taxa de aquecimento. Para o crômio, não ocorreu uma diferença significativa entre os sinais nas alturas de 1 e 2 mm com atomização até 2180 °C. Nos três analitos a sensibilidade aumentou com o aumento da taxa de aquecimento. O método das médias móveis permitiu a diminuição da variação dos sinais transientes do branco e do ruído. Para o cádmio, não ocorreu uma melhora no limite de detecção do método com a aplicação das médias móveis em nenhuma condição. Para o chumbo e crômio, ocorreu uma melhora no limite de detecção do método nas alturas de observação de 0 e 1 mm. O limite de detecção instrumental apresentou uma melhora significativa para os três elementos em todas as condições estudadas. / The aim of this paper was to evaluate the use of moving averages of cadmium, chromium and lead transient atomic absorption signals generated by 150 W (OSRAM) tungsten coil electrothermal atomizer. A systematic study dealing with the influence of observation height, temperature and heating rate on atomization was carried through in order to demonstrate the viability of moving averages in the treatment of the transient signals during the atomization step. The influence of observation height was carried out with the tungsten coil in the center (0 mm), at 1 and 2 mm below the radiation beam. The influence of atomization temperature and heating rate were evaluated between 1890 °C (3.3 K.ms-1) and 2780 °C (9,3 K.ms-1). The transient moving averages were obtained by using factors 0, 3, 5, 7 and 9, with the tungsten coil in the center (0 mm), 1 and 2 mm and with atomization between 2060 and 2780 °C. For obtaining different temperatures and heating rates, an appropriate power supply was used by applying 4 to 12 V (40 to 120 W) to the atomizer during atomization and a mixture 90% Ar+10% H2 was used as purge/atomization gas. Blanks and reference solutions were prepared in 0,1% v/v HNO3. Best results for cadmium were obtained at 1 mm. For lead it is recommended 0 mm and for chromium 2 mm. The studies had proven the dependence of peak height absorbance signals with temperature and heating rate. Cadmium was the analyte where the heating rate was to less critical for the atomization, whereas chromium was affected by the variation of the heating rate. Significant differences were not observed between cadmium signals with observation heights of 0 and 1 mm. For lead, the difference between the absorbance signals with observation heights of 0 and 1 mm were constant in all tested heating rates. At 2 mm the difference between signals increased by increasing the heating rates. For chromium, a significant difference was not noticed between peak height absorbance signals at 1 and 2 mm with up to 2180 °C. As expected, sensitivity increased for all three analytes by increasing the heating rate. The moving average is a powerful mathematical treatment for minimizing unpredictable fluctuations of the base line during the chosen time interval for measuring the transient absorbance signals. With the exception of Cd, where no improvements on the method detection limit were noticed, the application of the moving average for the lead and chromium showed 3 to 4 fold improvement in the LDmet at 0 and 1 mm observation heights, respectively. The LDinstr presented a significant improvement (3 to 6 fold) for the three analytes in all studied conditions.
22

\"Avaliação da espectrometria de absorção atômica com atomização eletrotérmica em filamento de tungstênio para determinação de alumínio\" / \"Evaluation of tungsten coil electrothermal atomic absorption spectrometry for aluminium determination\"

Quienly Godoi 27 October 2006 (has links)
Este trabalho teve como objetivo avaliar o filamento de tungstênio de 150 W (OSRAM) como atomizador eletrotérmico para determinação de alumínio em amostras de águas, incluindo um estudo sistemático sobre o seu comportamento eletrotérmico na presença de até 1000 mg l-1 de sódio, potássio, cálcio, magnésio e/ou da mistura destes elementos. Alguns parâmetros, como comprimento de onda, corrente da lâmpada de catodo oco, altura de observação e temperatura de atomização do alumínio foram avaliados visando à melhoria da qualidade dos resultados e do limite de detecção. Após uma primeira avaliação, fixaram-se o comprimento de onda em 309,3 nm e a corrente da lâmpada de catodo oco em 10 mA, elegendo-se altura de observação de 1,5 mm e temperatura de atomização de 2860 oC (13,0 V). No programa de aquecimento usado no desenvolvimento deste trabalho adotou-se rampa invertida de voltagem variando entre 0,65 a 0,30 V durante 50 s para secagem de 10 µl, 2,8 V durante 10 s para pirólise e 13,0 V durante 1 s para atomização. As soluções usadas no desenvolvimento deste trabalho formam preparadas, em sua maioria, em meio 0,1 % v/v HNO3. A avaliação dos potenciais interferentes Na, K, Ca, Mg e a mistura desses elementos foi realizada nas alturas de observação de 0,0 a 2,0 mm e nas composições do gás de proteção de 90% Ar/10% H2, 80% Ar/20% H2, 65% Ar/35% H2. Pode-se inferir que o aumento do hidrogênio na composição do gás de proteção não acarretou melhora significativa na ação dos interferentes na atomização do alumínio. Não foram observadas interferências significativas em até 1000 mg l-1 Na e K na atomização de 100 µg l-1 Al na altura de observação de 0,0 mm. Na mesma condição de altura de observação, a mistura dos interferentes não afetou significativamente a atomização do alumínio. Observaram-se interferências em torno de 40 % na atomização de 100 µg l-1 Al em 0,1 % v/v HNO3 na altura de observação de 0,0 mm na presença de até 100 mg l-1 de Ca e Mg. Nessa mesma condição, mas com a mistura 65 % Ar/35 % H2, a supressão do sinal de absorbância de alumínio foi da ordem 90%. Os resultados obtidos na determinação de alumínio em amostras de água foram obtidos nas condições anteriormente citadas, utilizando gás de proteção 90% Ar/ 10% H2. Nestas condições, o limite de detecção foi de 2,3 µg l-1 Al e a massa característica de 69 pg Al. Os resultados encontrados foram satisfatórios e concordantes com aqueles encontrados quando se utilizou o forno de grafite como método de comparação. Aproximadamente 500 queimas foram feitas com um único filamento de tungstênio. / The aim of this paper was to evaluate the 150 W (OSRAM) tungsten coil as electrothermal atomizer in order to determine aluminum in water samples as well as a systematic study of its electrothermal behavior in the presence of up to 1000 mg l-1 of sodium, potassium, calcium, magnesium and/or of mixture of these elements. Some parameters, such as wavelength, hollow cathode lamp current, observation height and atomization temperature were evaluated in order to improve the quality of results and the detection limit. After a first evaluation, measurements were always carried out at 309,3 nm as well as the hollow cathode lamp current at 10 mA, and it was adopted an observation height of 1,5 mm and atomization temperature at 2860 oC (13,0 V). In the heating program defined experimentally, the inverted voltage ramp was adopted for drying 10 μl of sample solution by varying the applied voltage from 0,65 to 0,30 V during 50 s, with further application of 2,8 V for 10 s in the pyrolysis step and 13,0 V for 1 s in the atomization step. Most solutions were prepared in 0,1% v/v HNO3. The evaluation of the potential interfering elements such as Na, K, Ca, Mg an the mixture of these elements, was carried out in observations heights from 0,0 to 2,0 mm at different gas compositions: 90% Ar/ 10% H2 , 80 % Ar/ 20% H2 and 65 % Ar/ 35% H2. It can be inferred that the hydrogen increase in the protection gas did not change the interference behavior of the studied concomitants on aluminum atomization. Significant interferences were not observed up to 1000 mg l-1 of Na and K in the atomization of 100 μg l-1 Al when the optical beam was intercepting the atomizer (0,0 mm observation height). In the same condition, the mixture of the interfering species did not significantly affect the aluminum atomization. In addition, 100 mg l-1 of Ca and Mg depressed the absorbance of 100 μg l-1 Al in 0,1 % v/v HNO3 by approximately 40 %. When the atomization was made in the presence of 65 % Ar/ 35 % H2, the suppression of the aluminum absorbance signal was about 90 %. The results obtained in the determination of aluminum in water samples were achieved in the conditions previously mentioned, using protection gas of 90 % / 10 % H. In these conditions, the detection limit was 2,3 μg l-1 Al and the characteristic mass was 69 pg Al. The results were reasonable and in agreement with those found by atomic absorption with graphite furnace as a comparative method. Approximately 500 firings were made with a single tungsten coil.
23

AC ELECTROTHERMAL MICROFLUIDIC TWEEZERS: CHARACTERIZATION AND APPLICATIONS

Kshitiz Gupta (12401317) 11 April 2022 (has links)
<p>Microfluidics has established itself as a key technology in a wide range of fields including pharmaceuticals, point-of-care diagnostics, thermal management, and space technology. Most of these applications involve manipulation of small quantities (micro – nanoliters) of fluids and various particles or biological cells suspended in them. These platforms employ mechanical, thermal, acoustic, magnetic, optical, electric and many other means for creating particle and fluid motion. Many biological applications require handling cells that are vulnerable to getting damaged if proper physiological conditions are not maintained or if excessive force is applied on them. The non-invasive nature of optical and electrical micro-manipulation techniques such as rapid electrokinetic patterning (REP) has proven to be of great importance in such applications. These techniques enable handling, transportation, sorting and arrangement of fragile synthetic micro/nanoparticles and biological cells without compromising their structure and surface properties.</p> <p>REP is a recently developed micro-manipulation tool that employs optically induced electrothermal vortices to create custom flow patterns. Particle suspensions are entrained in these vortices and are trapped on an electrode surface through AC electrokinetic mechanisms. This work focuses on characterizing a REP trap and discusses its potential applications in handling biological cells. Polystyrene microparticles are confined in a REP trap and a MATLAB program is used to track their motion inside the trap. The tracked particle trajectory reveals that the potential energy of the trapped particle is parabolic and hence the trap is Hookean in nature. The trap is modelled as a spring-mass system and the stiffness coefficient of that system is found to be of the order of 10<sup>-15</sup> N/μm. The origin of the restoring force in the spring-mass model is found to be the drag force created by the electrothermal vortex. The ability to exert ultra-small forces in a stable trap enables REP to be used in various non-invasive particle manipulation applications.</p> <p>The transient nature of REP is studied using numerical modeling and particle image velocimetry (PIV) analysis of a vortex created by a moving laser spot. A numerical model suggests that custom-shaped steady state REP vortices can be created via superposition of multiple axisymmetric circular shaped vortices. However, the method of superposition cannot be extended to transient traps and a more involved 3D model is required to simulate them. The laser spot is scanned back-and-forth in a line with different speeds to create transient REP vortices. The PIV analysis, in agreement with the numerical model, shows that the location of the moving vortex is undiscernible at high speeds. Moreover, the circular shaped vortex is stretched out into a line when the laser scanning frequencies are more than 15 Hz.</p> <p>The particle-electrode attraction force, which entraps the particles at the electrode surface, is characterized using particle diffusometry (PD) and defocusing particle tracking. PD is used to measure the diffusion coefficient of polystyrene particles under different electric field parameters near an electrode surface. It is found that the particle diffusivity decreases with a decrease in the electric field frequency from 150 – 30 kHz and with an increase in the applied voltage from 4 – 8 V<sub>pp</sub>. A MATLAB program is used to track the number of in-focus particles and their distance from the electrode surface. A histogram of the particles’ distance from the electrode surface shows an increase in the particle concentration near the electrode at low frequencies (30 – 60 kHz). These observations suggest that the average height of an entrapped particle decreases with a decrease in applied field frequency and an increase in applied voltage. This suggests that the attractive trapping force is significant at 30 kHz but diminishes at around 150 kHz.</p> <p>Salt and sugar-based isotonic media used for cell suspensions pose several challenges for electrokinetic mechanisms such as REP. Various solutions to overcome these challenges for bio-manipulation applications are discussed in this work. The presence of DC offset in the AC electric field is found to enhance particle entrapment in sugar-based media. The effect of DC offset on trapping performance in bio-relevant media is assessed by measuring the stability of the REP trap. This work also shows entrapment and manipulation of Mice pancreatic cancer cells (KPC2) suspended in the sugar-based isotonic media using REP. The biological applications of the REP technology are highly promising, but they have not yet been well-explored. This work lays the foundation of understanding how REP can be operated in high osmolarity media for bio-manipulation applications.</p>
24

A Computational Study of A Lithium Deuteride Fueled Electrothermal Plasma Mass Accelerator

Gebhart, Gerald Edward III 13 June 2013 (has links)
Future magnetic fusion reactors such as tokamaks will need innovative, fast, deep-fueling systems to inject frozen deuterium-tritium pellets at high speeds and high repetition rates into the hot plasma core. There have been several studies and concepts for pellet injectors generated, and different devices have been proposed. In addition to fueling, recent studies show that it may be possible to disrupt edge localized mode (ELM) formation by injecting pellets or gas into the fusion plasma. The system studied is capable of doing either at a variety of plasma and pellet velocities, volumes, and repetition rates that can be controlled through the formation conditions of the plasma. In magnetic or inertial fusion reactors, hydrogen, its isotopes, and lithium are used as fusion fueling materials. Lithium is considered a fusion fuel and not an impurity in fusion reactors as it can be used to produce fusion energy and breed fusion products. Lithium hydride and lithium deuteride may serve as good ablating sleeves for plasma formation in an ablation-dominated electrothermal plasma source to propel fusion pellets. Previous studies have shown that pellet exit velocities, greater 3 km/s, are possible using low-z propellant materials. In this work, a comprehensive study of solid lithium hydride and deuteride as a pellet propellant is conducted using the ETFLOW code, and relationships between propellants, source and barrel geometry, pellet volume and aspect ratio, and pellet velocity are determined for pellets ranging in volume from 1 to 100 mm3. / Master of Science
25

Developing Engineered Thin Films for Applications in Organic Electronic and Photonic Devices.

Nemani, Srinivasa Kartik January 2018 (has links)
No description available.
26

Metodologia de projeto eletrotérmico de LEDs aplicada ao desenvolvimento de sistemas de iluminação pública / LED electrothermal design methodology applied to a street lighting system

Bender, Vitor Cristiano 23 July 2012 (has links)
Coordenação de Aperfeiçoamento de Pessoal de Nível Superior / This work presents an LED electrothermal design methodology applied to a street lighting system. The methodology aims to provide indicatives of the optimal LED operating point for lighting systems design, considering electrical, thermal and photometric system features. Different projects are developed according to the methodology, the theoretical results are compared with fluid dynamics simulation and demonstrated by experimental results. A research including luminous flux, luminous efficacy and flicker is performed considering the LED current ripple, defining acceptable levels of ripple based on the optimal operational point. The methodology is applied by developing a lighting system composed of an LED driver and a thermal dissipation system, comprising a luminaire, a heatsink and fans. The lighting system includes electrothermal feedback control. The results provide high power factor with low current harmonic distortion to the power grid. The LED operational temperature ensures the luminous flux maintenance over the system lifetime. / Este trabalho apresenta uma metodologia de projeto eletrotérmico de LEDs aplicada a um sistema de iluminação pública. A metodologia tem o objetivo de proporcionar indicativos do melhor ponto de operação do LED para o projeto de sistemas de iluminação, considerando os aspectos elétricos, térmicos e fotométricos envolvidos no sistema. Diferentes projetos são desenvolvidos utilizando a metodologia, os resultados teóricos obtidos são comparados com simulações computacionais de dinâmica dos fluidos e comprovados através de resultados experimentais. Um estudo do fluxo, eficácia e cintilação luminosa é também realizado considerando a ondulação de corrente aplicada aos LEDs, definindo os níveis aceitáveis de ondulação com base no ponto ótimo de operação. Para aplicação da metodologia é desenvolvido um sistema de iluminação pública composto por um circuito de acionamento dos LEDs e um sistema de dissipação térmica, formado por uma luminária, um dissipador de calor e ventiladores. O sistema de iluminação possui controle com realimentação eletrotérmica. Os resultados obtidos proporcionam alto fator de potência com baixa distorção harmônica ao sistema elétrico e temperatura de operação que garante a manutenção do fluxo luminoso dos LEDs durante toda a vida útil do sistema.
27

Stanovení rubidia ve vybraných rostlinných extraktech pomocí atomové absorpční spektrometrie / Determination of rubidium in selected plant extracts by atomic absorption spectrometry

Šatrová, Lucie January 2019 (has links)
In this diploma thesis, rubidium in plant material samples was determined by atomic absoption spectrometry. Determination of plant material rubidium was performed on two different atomic absorption spectrometers (GBC 933 AA and ContrAA 700) for comparison. The selection of a proper method of atomization was essential, therefore optimizations for the flame atomizer and electrothermal atomizer were performed. On the GBC 933 AA, flame atomization was tested. The flow rate of the acetylene-air, vertical and horizontal flame profile, spectral interval width was optimized for the instrument. On the ContrAA 700, the conditions for flame atomization were optimized as well as for electrothermal atomization. The optimized parameters included the acetylene-air flow rate and the vertical flame profile again. For the electrothermal atomization, the temperature dependence of pyrolysis and the temperature dependence of atomization were optimized. Under experimentally determined optimal conditions, the determination of rubidium in fruit and vegetable juice samples was performed by the method of calibration curve. Rubidium usually accompanies toher alkali metals. In the absence of essential biogenic elements iportant for plant growth, rubidium is able to help out and take on the role of potassium.
28

Improved Current-Voltage Methods for RF Transistor Characterization

Baylis, Charles Passant, II 27 February 2004 (has links)
In the development of a nonlinear transistor model, several measurements are used to extract equivalent circuit parameters. The current-voltage (IV) characteristic of a transistor is one of the measurement data sets that allows the nonlinear model parameters to be extracted. The accuracy of the IV measurement greatly influences the accuracy of the large-signal model. Numerous works have reported the inadequacy of traditional static DC IV measurements to accurately predict radio-frequency (RF) behavior for many devices. This inaccuracy results from slow processes in the device that do not have time to completely respond to the quick changes in terminal conditions when the device is operating at high frequencies; however, these slow processes respond fully to reach a new steady-state condition in the DC sweep measurement. The two dominant processes are self-heating of the device and changes in trap occupancy. One method of allowing the thermal and trap conditions to remain in a state comparable to that of RF operation is to perform pulsed IV measurements to obtain the IV curves. In addition, thermal correction can be used to adjust the IV curves to compensate for self-heating in the case that the predominant effect in the device is thermal. To gain a better understanding of pulsed IV measurement techniques, measurement waveforms of a commercially available pulsed IV analyzer are examined in the time domain. In addition, the use of bias tees with pulsed IV measurement is explored; such a setup may be desired to maintain stability or to enable simultaneous pulsed S-parameter and pulsed IV measurement. In measurements with bias tees, the pulse length setting must be long enough to allow the voltage across the inductor to change before the measurement is made. In many circumstances, it is beneficial to compare different sets of IV curves for a device. The comparison of pulsed and static IV measurements, measured and modeled IV measurements, as well as two measurements with identical settings on the same instrument (to ascertain instrument repeatability) can be performed using the proposed normalized difference unit (NDU). This unit provides a comparison that equally weights the two sets of data to be compared. Due to the normalization factor used, the value of the NDU is independent of the size of the device for which the IV curves are compared. The variety of comparisons for which this unit can be used and its ability to present differences quantitatively allow it to be used as a robust metric for comparing IV curves. Examples of the use of the NDU shown include determination of measurement repeatability, comparison of pulsed and static IV data, and a comparison of model fits. The NDU can also be used to isolate thermal and trapping processes and to give the maximum pulse length that can be used for pulsed IV measurement without contamination by each of these processes. Plotting the NDU comparing static and pulsed IV data versus pulse length shows this maximum pulse length that can be used for each effect, while a plot of the NDU comparing pulsed IV data for two quiescent bias points of equal power dissipation reveals only differences due to trapping effects. In this way, trapping effects can be distinguished from thermal effects. Electrothermal modeling has arisen as a method of correcting for self-heating processes in a device with predominantly thermal effects. A parallel RC circuit is used to model channel temperature as a function of ambient temperature and power dissipated in the channel or junction. A technique is proposed for thermal resistance measurement and compared with a technique found in the literature. It is demonstrated that the thermal time constant can be measured from a plot of the NDU versus pulse length, and the thermal capacitance is then obtained using the thermal resistance and time constant. Finally, the results obtained through the thermal resistance measurement procedures are used to thermally correct static IV curves. Because trapping effects are negligible, it is shown that IV curves corresponding to different quiescent bias points for a Si LDMOSFET can be synthesized from three sets of static IV data taken at different ambient temperatures. The results obtained from this correction process for two quiescent bias points are compared to the pulsed IV results for these quiescent bias points and found to be quite accurate. Use of the methods presented in this work for obtaining more accurate transistor IV data data should assist in allowing more accurate nonlinear models to be obtained.
29

Microwave-assisted cloud point extraction coupled with DRC-ICP-MS for the determination of Cr, Cu, Cd and Pb in water samples

Gu, Yu-chang 08 February 2010 (has links)
none
30

Single-Chip Scanning Probe Microscopes

Sarkar, Niladri January 2013 (has links)
Scanning probe microscopes (SPMs) are the highest resolution imaging instruments available today and are among the most important tools in nanoscience. Conventional SPMs suffer from several drawbacks owing to their large and bulky construction and to the use of piezoelectric materials. Large scanners have low resonant frequencies that limit their achievable imaging bandwidth and render them susceptible to disturbance from ambient vibrations. Array approaches have been used to alleviate the bandwidth bottleneck; however as arrays are scaled upwards, the scanning speed must decline to accommodate larger payloads. In addition, the long mechanical path from the tip to the sample contributes thermal drift. Furthermore, intrinsic properties of piezoelectric materials result in creep and hysteresis, which contribute to image distortion. The tip-sample interaction signals are often measured with optical configurations that require large free-space paths, are cumbersome to align, and add to the high cost of state-of-the-art SPM systems. These shortcomings have stifled the widespread adoption of SPMs by the nanometrology community. Tiny, inexpensive, fast, stable and independent SPMs that do not incur bandwidth penalties upon array scaling would therefore be most welcome. The present research demonstrates, for the first time, that all of the mechanical and electrical components that are required for the SPM to capture an image can be scaled and integrated onto a single CMOS chip. Principles of microsystem design are applied to produce single-chip instruments that acquire images of underlying samples on their own, without the need for off-chip scanners or sensors. Furthermore, it is shown that the instruments enjoy a multitude of performance benefits that stem from CMOS-MEMS integration and volumetric scaling of scanners by a factor of 1 million. This dissertation details the design, fabrication and imaging results of the first single-chip contact-mode AFMs, with integrated piezoresistive strain sensing cantilevers and scanning in three degrees-of-freedom (DOFs). Static AFMs and quasi-static AFMs are both reported. This work also includes the development, fabrication and imaging results of the first single-chip dynamic AFMs, with integrated flexural resonant cantilevers and 3 DOF scanning. Single-chip Amplitude Modulation AFMs (AM-AFMs) and Frequency Modulation AFMs (FM-AFMs) are both shown to be capable of imaging samples without the need for any off-chip sensors or actuators. A method to increase the quality factor (Q-factor) of flexural resonators is introduced. The method relies on an internal energy pumping mechanism that is based on the interplay between electrical, mechanical, and thermal effects. To the best of the author???s knowledge, the devices that are designed to harness these effects possess the highest electromechanical Qs reported for flexural resonators operating in air; electrically measured Q is enhanced from ~50 to ~50,000 in one exemplary device. A physical explanation for the underlying mechanism is proposed. The design, fabrication, imaging, and tip-based lithographic patterning with the first single-chip Scanning Thermal Microscopes (SThMs) are also presented. In addition to 3 DOF scanning, these devices possess integrated, thermally isolated temperature sensors to detect heat transfer in the tip-sample region. Imaging is reported with thermocouple-based devices and patterning is reported with resistive heater/sensors. An ???isothermal electrothermal scanner??? is designed and fabricated, and a method to operate it is detailed. The mechanism, based on electrothermal actuation, maintains a constant temperature in a central location while positioning a payload over a range of >35??m, thereby suppressing the deleterious thermal crosstalk effects that have thus far plagued thermally actuated devices with integrated sensors. In the thesis, models are developed to guide the design of single-chip SPMs and to provide an interpretation of experimental results. The modelling efforts include lumped element model development for each component of single-chip SPMs in the electrical, thermal and mechanical domains. In addition, noise models are developed for various components of the instruments, including temperature-based position sensors, piezoresistive cantilevers, and digitally controlled positioning devices.

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