Controlled thin film etching is essential for future semiconductor devices, especially with complex high aspect ratio structures. Therefore, self-limiting atomic layer etching processes are of great interest to the semiconductor industry. In this work, a process for atomic layer etching of aluminum oxide (Al2O3) films using sequential and self-limiting thermal reactions with trimethylaluminum and hydrogen fluoride as reactants was demonstrated. The Al2O3 films were grown by atomic layer deposition using trimethylaluminum and water. The cycle-by-cycle etching was monitored throughout the entire atomic layer etching process time using in situ and in real-time spectroscopic ellipsometry. The studies revealed that the sequential surface reactions were self-limiting versus reactant exposure. Spectroscopic ellipsometry analysis also confirmed the linear removal of Al2O3. Various process pressures ranging from 50 to 200 Pa were employed for Al2O3 etching. The Al2O3 etch rates increased with process pressures: Al2O3 etch rates of 0.92, 1.14, 1.22, and 1.31 Å/cycle were obtained at 300 °C for process pressures of 50, 100, 150, and 200 Pa, respectively. The Al2O3 etch rates increased with the temperature from 0.55 Å/cycle at 250 °C to 1.38 Å/cycle at 350 °C. Furthermore, this paper examined the temperature dependence of the rivalry between the removal (Al2O3 etching) and growth (AlF3 deposition) processes using the reactants trimethylaluminum and hydrogen fluoride. The authors determined that 225 °C is the transition temperature between AlF3 atomic layer deposition and Al2O3 atomic layer etching. The high sensitivity of in vacuo x-ray photoelectron spectroscopy allowed the investigation of the interface reactions for a single etching pulse as well as the initial etch mechanism. The x-ray photoelectron spectroscopy measurements indicated that the fluorinated layer is not completely removed after each trimethylaluminum exposure. The Al2O3 atomic layer etching process mechanism may also be applicable to etch other materials such as HfO2.

Les systèmes de télécommunications requièrent de plus en plus l’utilisation des composants passifs hyperfréquences. La commercialisation de ces composants nécessite la miniaturisation de leurs tailles, l’augmentation de leurs performances et la réduction de leurs coûts. Parmi ces composants passifs, nous citons le coupleur directionnel qui est un quadripôle destiné à répartir la puissance sur deux ports de sortie, le quatrième port reste isolé. Les travaux relatés dans ce manuscrit ont pour objectifs la conception et la réalisation d’un coupleur à accès coplanaires obtenu à partir d’un résonateur auquel nous avons appliqué des lignes de couplage. Un modèle équivalent approché a été mis en évidence par un logiciel de simulation circuit. Une étude paramétrique a été réalisée à l’aide d’un logiciel électromagnétique 3D pour fixer une règle de conception qui permet un dimensionnement convenable du composant pour un intervalle de fréquences prédéfinies. Un fonctionnement bi-bandes a été exploité pour chaque raccordement de la fréquence. Une deuxième structure de couplage a été déduite en reliant directement les lignes couplées sur le résonateur. Une étude paramétrique ainsi qu’une règle de conception ont mis en évidence un fonctionnement de coupleur mono-bande de cette structure à des fréquences prédéfinies. Une troisième structure qui fonctionne en coupleur a été exploitée en remplaçant le filtre résonateur par deux circuits en méandres. Ce nouveau coupleur à méandres présente des bandes passantes assez larges ainsi qu’un fonctionnement possible en bi-bandes. Ces coupleurs mis en œuvre peuvent assurer un couplage de l’ordre de 3 ; 6 ; 8 et 10 dB et d’un déphasage entre les deux ports de sortie de 180° pour les deux premières structures et de 90° pour le coupleur à méandres. Plusieurs séries de prototypes sont ensuite fabriquées à partir des structures optimisées en simulation. Les caractérisations hyperfréquences de ces composants montrent la performance des dispositifs réalisés / Telecommunications systems require more use of passive microwave components. The commercialization of these components requires the miniaturization of their size, increasing their performance and the reduction of their costs. Among these passive components we cited the directional coupler which is designated to spread the power between two outputs, the fourth port being isolated. The ambition of this work is to study and fabricate a coupler with coplanar access obtained from a resonator where we applied coupling lines. An equivalent approximate model was obtained using circuit simulation software. A parametric study was made using 3D electromagnetic software to fix a design rule that allows a suitable design for the component in a predefined frequency range. Dual-band operation has been exploited for each frequency. A second coupling structure was deduced by directly connecting the coupled lines to the resonator. A parametric study and a design rule have shown the operation of this structure as a single band coupler at predefined frequencies. A third structure which operates like a coupler has been exploited by replacing the resonator filter by two meandering circuits. This new meandering coupler presents a wide bandwidth and a possible operating in dual-band. These implemented couplers provided a coupling factor of 3, 6, 8 and 10 dB and a phase shift between the two output ports of 180° for the two first structures and a 90° phase shifter for the meandering coupler. Several sets of prototypes are then made. The microwave characterizations show the performance of the fabricated device

Cette thèse s'inscrit dans le cadre du projet collaboratif FUI RFID AERO dont le leader est Eurocopter. Le but de ce projet est le développement d'un système assurant la traçabilité des différentes pièces d'un aéronef. Cette thèse se focalise sur la conception d'antennes lecteur et de tags RFID UHF faible coût.Deux objectifs sont visés dans le cadre de cette thèse. Le premier est la conception d'antennes pour lecteurs RFID fonctionnant en contact ou à proximité des surfaces métalliques. Nos conceptions sont basées d'une part sur les phénomènes d'ondes constructives en plaçant une surface métallique à un quart de la longueur d'onde. D'une autre part, la conception repose sur l'utilisation de structures AMC. De plus, nous proposons une méthode de réduction de dimensions de cellules AMC. Le second objectif de la thèse est la miniaturisation de tags pour l'identification de pièces essentiellement métalliques. Nous proposons des méthodes de conception de tags miniatures durcis, non détachables ou flexibles ainsi qu'un prototype pour chacune d'entre elles.Enfin, les antennes lecteur et tags développés dans cette thèse, les lecteurs RFID et des systèmes connexes développées par d'autres partenaires ont été mis en œuvre dans un aéronef. Les tests du système complet sont satisfaisants et répond aux objectifs du projet. / This Ph.D thesis is part of the FUI RFID AERO project led by Eurocopter. The aim of this project is to provide a traceability system of the aircraft items. This work focuses on low-cost UHF RFID reader antennas and tags design.Two research axes are developed. The first one is the RFID reader antennas design for metallic surfaces. The designs are based on constructive wave phenomenon by placing a metallic plate at a quarter wavelength of the radiating element. On the other hand, the insertion of AMC structures was also studied. Furthermore, we propose a size reduction technique for AMC structures. The second goal is tag size miniaturization for metallic or non-metallic objects identification. We propose design methods of size miniaturization for hard or flexible tags. Besides, we apply these methods by designing one tag for each family.Finally, the reader antennas and tags proposed in this thesis, the RFID readers and the related systems developed by the others partners were implemented into an aircraft. Tests of the complete system are in good agreement with the expected goals.

Cette thèse s’inscrit dans le cadre du projet collaboratif FUI VEADISTA. Le but de ce projet est le développement d’une solution technologique à bas coût pour la veille à distance de personnes fragiles. Cette thèse se focalise sur la conception d’antennes lecteur et d’une étiquette RFID UHF posée sur le corps humain. Deux objectifs principaux sont visés dans ces travaux de thèse. Le premier aborde la conception d’antennes pour lecteurs RFID, le second aborde la conception d’une antenne large bande, pour une étiquette RFID, adaptée au corps humain. Les objectifs à atteindre pour l’antenne lecteur sont : un champ rayonné à polarisation circulaire, un gain élevé, faible coût de fabrication et faible épaisseur. Pour atteindre ces objectifs, une topologie d’anneau fente miniaturisé par une méthode itérative de repliement d’anneau associée à un réflecteur incluant un AMC à cellules élémentaires réduites sont employés. Le second objectif de la thèse est la conception d’une antenne large bande, pour une étiquette RFID, capable de minimiser l’influence du corps humain sans sacrifier la distance de lecture tout en restant faible coût. Un modèle électromagnétique d’avant-bras humain est utilisé comme support de conception de l’antenne tag large bande. Enfin le système RFID complet incluant, l’étiquette, l’antenne lecteur et le lecteur RFID ont fait l’objet de tests fonctionnels pour préparer les tests cliniques sur patient. / This thesis was initiated within the VEADISTA project. The main goal of this project was to develop a cost effective technological remote care system for fragile person. The main focus of this thesis is on antenna design for RFID reader and also for RFID tags in contact with human body. For the reader antenna the criteria are: a circularly polarized radiated field, high gain, cost effectiveness and small thickness. To achieve these objectives, a miniaturized slot ring topology obtained by an iterative method of ring folding associated with a reflector including a reduced unit cells AMC are used. For the tag the objective is to design a broadband antenna, by minimizing the influence of human body without affecting the reading scope. The tag is needed to also be cost effective. An electromagnetic model of human forearm is used as the broadband tag antenna design support. Ultimately, the functionality of the complete system including a tag and a reader have been tested.

Les microphones à électret dédiés à l'électronique grand public et les applications médicales (les audioprothèses) ont atteint les limites de la miniaturisation. Depuis la sortie du premier microphone basé sur une technologie microsystème sur silicium (MEMS: Micro-Electro-Mechanical Systems), les microphones à électret sont progressivement remplacés par les microphones MEMS. Les MEMS utilisent le silicium car il offre des caractéristiques mécaniques exceptionnelles avec de bonnes propriétés électriques et la technologie de fabrication est maintenant bien maîtrisée. La plupart des microphones MEMS qui sont décrits dans la littérature sont constitués d’une membrane qui vibre en dehors du plan du capteur, et utilisent la transduction capacitive. La miniaturisation de tels microphones est limitée car leur sensibilité est liée à la valeur de la capacité qui dépend de la taille de la membrane. En outre, les capteurs capacitifs sont très sensibles aux capacités parasites et aux non-linéarités. Cette thèse présente une nouvelle architecture de microphone MEMS qui utilise des micro-poutres qui vibrent dans le plan capteur. La transduction du signal est réalisée par des nanojauges piézorésistives intégrées dans le microsystème et attachées aux micro-poutres. Ce système de détection original ne présente pas les inconvénients de la détection capacitive et à la différence des piézorésistors classiques intégrés dans la membrane de silicium, les nanofils suspendus permettent d’éliminer les courants de fuite. De plus, l'amélioration de la détection est possible puisque le coefficient piézo-résistif longitudinal est inversement proportionnel à la section du nanofil. Les fluctuations de pression acoustique entraînent les déviations des micro-poutres qui produisent une concentration de contraintes dans les nanogauges. Le comportement du capteur, que l’on cherche à modéliser, est lié à des phénomènes mécaniques, acoustiques et électriques qui sont couplés. En raison des dimensions micrométriques du MEMS, les effets des dissipations thermique et visqueuse doivent être pris en compte dans le comportement acoustique. Pour prédire de façon fiable le comportement du capteur, deux modèles vibroacoustiques sont utilisés: un modèle éléments finis basé sur l'ensemble des équations de Navier-Stokes linéarisées et un modèle approché basé sur un schéma à constantes localisées (représentation par circuit électrique équivalent). Les deux modèles sont complémentaires dans le processus de conception pour déterminer la réponse en fréquence et le taux de bruit du capteur. Le travail est complété par la description des processus technologiques et les défis liés à la fabrication du prototype. Puis deux approches pour la caractérisation fonctionnelle du microphone MEMS sont présentées, la première en tube d’impédance, la seconde en champ libre. / Electret microphones dedicated to consumer electronics and medical applications (hearing aids) have reached the miniaturization limits. Since the release of the first microphone based on Silicon micromachining, electret microphones are constantly replaced by MEMS microphones. MEMS (Micro-Electro-Mechanical Systems) microphones use Silicon that provides exceptional mechanical characteristics along with good electric properties and mature fabrication technology. Regardless of the transduction principle (capacitive, piezoresistive, piezoelectric, optical), all of the MEMS microphones reported in the state of the art literature are based on a membrane deflecting out of the plane of the base wafer. Most of the reported microphones and all of the commercially available MEMS use capacitive transduction. Downscaling of capacitive microphones is problematic, since the sensitivity depends on capacitance value. Moreover capacitive sensors suffer of high sensitivity to parasitic capacitance and nonlinearity. The drawbacks of capacitive detection may be overcome with use of piezoresistive properties of Silicon nanowires. Unlike the classical piezoresistors integrated into silicon membrane, suspended nanowires do not suffer of leakage current. Further improvement of piezoresistive detection is possible since the longitudinal piezoresistive coefficient rises inversely proportional to nanowire section. This thesis presents the considerations of novel MEMS microphone architecture that uses microbeams which deflect in the plane of the base wafer. Signal transduction is achieved by piezoresistive nanogauges integrated in the microsystem and attached to the microbeams. Acoustic pressure fluctuations lead to the deflection of the microbeams which produces a stress concentration in the nanogauges. Accurate simulations of the discussed transducer couple acoustic, mechanical and electric behavior of the system. Due to micrometric dimensions of the MEMS acoustic system, thermal and viscous dissipative effects have to be taken into account. To reliably predict the sensor behavior two acoustic models are prepared: the complete Finite Element Model based on the full set of linearized Navier-Stokes equations and the approximative model based on the Lumped Elements (Equivalent Cirtuit Representation). Both models are complementary in the design process to finally retrieve the frequency response and the noise budget of the sensor. The work is completed by the description of the technological process and the challenges related to the prototype microfabrication. Then the approach to the MEMS microphone characterization in pressure-field and free-field is presented.

A área de microfabricação de dispositivos de interesse em química analítica tem se expandido muito ao longo dos últimos anos. Uma série de produtos e processos tem sido proposta, tendo como base as tecnologias da área de microeletrônica. Muito destes processos são bastante sofisticados, estando além das necessidades para produção de alguns dispositivos relativamente simples e que são bastante úteis para a química analítica. Este é o caso, por exemplo, dos microcanais para implementação de sistemas eletroforéticos ou micro sistemas em fluxo. Neste contexto, surge a proposta deste trabalho, qual seja desenvolver processos e produtos de interesse nesta área. Esse objetivo foi alcançado pelo desenvolvimento de dois processos: um para produção de microcanais em resina de poliéster através de moldagem e outro de corrosão de vidro utilizando toner de impressora laser como resiste. O primeiro partiu de fotolito para produção de molde em silício através de processo de corrosão por plasma de SF6. Peças de resina de poliéster isoftálica são produzidas por polimerização sobre este molde. Para garantir a desmoldagem não traumática e boa reprodução de detalhes, foi incorporado óleo de silicone durante a preparação da resina. Com este procedimento, foi possível obter canais com 14,0 µm de profundidade e irregularidades superficiais de 1,4 µm para um molde com 15,3 µm de elevação e 0,5 µm de irregularidades superficiais. Com o uso de uma manta flexível de silicone como contraparte, foi possível gerar microcanais cuja altura foi avaliada como sendo da ordem de 5 a 7 µm. Esta avaliação foi conseguida através de medida de condutância após o preenchimento do microcanal com solução de KCl. No segundo processo, toner de impressora laser foi utilizado como resiste para corrosão de vidrO. O layout era diretamente impresso sobre papel aditivado com maltodextrina ou papel utilizado como suporte para etiquetas autocolantes através de uma impressora HP LaserJet 6L com resolução de 600 dpi. Após a transferência térmica da imagem para lâminas de vidro alcalino de 1,0 mm de espessura, a corrosão em ácido fluorídrico permitiu obter canais com 7,1 µm de profundidade e irregularidades de 1,0 µm. Embora este segundo processo apresente desvantagens com relação à resolução tanto no plano da lâmina como na profundidade do canal, quando comparado ao primeiro, deve-se ressaltar a extrema simplicidade, rapidez e baixo custo do processo que deve ser interessante para a produção de protótipos. Já para o primeiro processo, destaca-se a adequação à produção em pequena escala de dispositivos microcanais de baixo custo. / Several processes and products have been proposed to build and use microstructures for chemical purposes. Most of these processes were adapted from microelectronic technologies, which resulted in products with excellent resolution and quality. However, there are some devices that could be generated by simpler and rougher processes. In this work, two processes were developed in order to allow producing simple devices based on microchannels. The first process is a method to produce polyester based devices. A conventional microelectronic process was used to produce a silicon matrix. This matrix was used to produce blocks of isophthalic resin by in situ polymerization. The best results were obtained by adding 1 % (w/w) silicone oil during the polyester resin preparation. This additive improves the mold relief and the smoothness of the device surface. Channels 14.0-µm depth and roughness of 1.4 µm were obtained with a mold with structure height of 15.3 µm and roughness of 0.5 µm. A flexible sheet of silicone allows forming enclosed microchannels with depth of 5-7 µm. This dimension was evaluated by conductance measurement after filling the channel with KCl solution. A process for glass corrosion, using laser printer toner as resist, was proposed. In this method, the layout is printed over a special sheet of paper using a HP LaserJet 6L laser printer. The paper is used to transfer the toner to a soda-lime glass lamina by a thermic process. Hydrofluoric acid solution was used to promote the selective glass corrosion. Channels 7.1-µm depth and roughness of 1.0 µm were obtained. Although this second method does not give the saroe resolution and aspect ratio as the first one, it is suitable to easy and fast prototyping. Gn the other hand, the first method is suitable for low-cost production of devices in small scale.

Neste trabalho são apresentados processos de microfabricação de estruturas contendo microcanais e sistemas de manipulação hidrodinâmica e eletroosmótica de fluídos. Foram desenvolvidos processos de microfabricação utilizando toner sobre poliéster, toner sobre vidro, toner como resiste, além de métodos alternativos de perfuração de lâminas e selagem de microestruturas em vidro, desenvolvimento de microestruturas para eletroforese capilar e espectrometria de massas com ionização por eletronebulização. A caracterização dos materiais e processos permitiu uma ampla visão das potencialidades e alternativas dos processos de microfabricação, tendo sido demonstrado que os dispositivos produzidos em toner-poliéster são quimicamente resistentes às substâncias tipicamente utilizadas em eletroforese capilar. Neste trabalho, um detector condutométrico sem contato foi implementado em microestruturas de toner-poliéster e a separação eletroforética de alguns metais alcalinos é demonstrada. A microestrutura foi projetada no formato padrão em cruz, tendo o canal de separação 22 mm de comprimento, 12 µm de profundidade e largura típica. A cela condutométrica foi construída sobre o canal de separação utilizando-se fita adesiva de cobre (1 mm de largura) como eletrodos. O sinal aplicado na cela foi de 530 kHz e 10 Vpp . A separação de K+, Na+ e Li+ na concentração de 100 µmol L-1 foi efetuada em torno de 0,8 min, utilizando-se 1 kV como potencial de separação. Foram desenvolvidos microchips para análise por espectrometria de massas com introdução de amostra por eletronebulização, sendo determinado cluster do íon cloreto em concentração de 1 mmol L+. Também solução com 1 mmol/L de glucosamina em água/metanol 1: 1 (v/v), sob corrente de 100 nA gerou sinal estável e livre de descarga corona. Utilizando detecção amperométrica, obteve-se eletroferogramas mostrando a separação de iodeto (10 mmol L-1) e ascorbato (40 mmol L-1) em potencial de separação de 4,0 kV (800 V cm-1 potencial de detecção de 0,9 V (vs. Ag/AgCI), injeção com 1,0 kV/1°s, tampão borato de sódio 10 mmol L+ com CTAH 0,2 mmol L-1, pH 9,2. Obteve-se eficiência de 1,6.104 pratos/m e foi possível obter limites de detecção de 500 nmol L-1 (135 amol) e 1,8 µmol L-1 (486 amol) para iodeto e ascorbato, respectivamente. O processo de fabricação utilizando toner como material estrutural para microchips em vidro foi bem estabelecido, assim como os modos de detecção fotométrico e condutométrico foram demonstrados. Foram obtidos eletroferogramas par detecção condutométrica sem contato de solução 200 µmol L-1 de K+, Na+ e U+, em tampão histidina/ácido lático 30 mmol L-1 9:1 (v/v) água:metanol, injeção eletrocinética de 2,0 kV/5,0 s, potencial de separação de 1 kV, 530 kHz de frequência e tensão de 2,0 Vpp. Também foi implementado um sistema de detecção fotométrico para microchip operando em 660 nm, tendo sido utilizado para a detecção de azul de metileno 1,0 mmol L-1 em tampão de corrida de barato de sódio 20 mmol L-1 (pH 9,2), com o detector posicionado a 40 mm do ponto de injeção e com injeção eletrocinética a 2,0 kV por 12 s com picos bem resolvidos em menos de 1 min. / Microfabrication processes and devices for hydrodynamic and electroosmotic manipulation were developed based on toner-polyester, toner-glass and toner-as-resist techniques. Additionally, techniques to perforate glass slides and sealing of glass devices were introduced. Microdevices for capillary electrophoresis and electrospray for mass spectrometry were developed using these techniques. The characterization of the materiais and the processes demonstrated that the devices obtained by the toner-polyester process are compatible with the media used for capillary electrophoresis. The detection of alkaline ions with capillary electrophoresis with contactless conductivity detection was demonstrated. The typical cross shape microstructure was designed with a 22-mm long and 12-µm deep separation channel. The conductivity cell was implemented with 1-mm wide adhesive copper stripes. The applied signal was 530kHz and 10Vpp . The separation of 100µmo1L-1 K+, Na+, and Li+ was accomplished in 0.8 min under a voltage of 1 kV. Another toner-polyester microchip was developed to demonstrate its usefulness for electrospray/mass spectrometry. Solutions of 1 mmol L-1 potassium chloride and 1 mmol L-1 glucosamine in water/methanol 1:1 (v/v) were introduced with stable current of 100 nA without corona discharge. Capillary electrophoresis with amperometric detection was also demonstrated. The separation of iodide (10 mmol L-1) and ascorbate (40 mmol L-1) was carried out at 4.0 kV (800 V cm-1) with detection potential of 0.9 V (vs. Ag/AgCl), electrokinetic injection at 1.0 kV/10 s, running buffer of sodium borate 10 mmol L-1 with CTAH 0.2 mmol L-1 , pH 9.2. The efficiency was 1.6.104 plates/m and the limits of detection were 500 nmol L-1 (135 9mol) and 1.8 µmol L-1 (486 amol) for iodide and ascorbate, respectively. The toner-glass process was proposed and conductivity and photometric detections were demonstrated for the devices generated by this new technique. The separation of 200 pmol L-1 K+, Na+, and Li+ was achieved in buffer histidine/lactic acid 30 mmol L-1 water/methanol 9: 1 (v/v), electrokinetic injection at 2.0 kV/5.0 s, separation potential of 1 kV, and contactless conductivity detection at 530 kHz and 2.0 Vpp. The photometric detection of methylene blue at 660 nm was carried out in sodium borate 20 mmol L-1 (pH 9.2).

L’objectif de ces travaux est pour d’apporter des solutions innovantes à la réalisation de dispositifs passifs performants et compacts, susceptibles d’intéresser les concepteurs de circuits RF et millimétriques. Ces dispositifs sont basés notamment sur des lignes microrubans à ondes lentes sur substrat structuré, que cela soit sur PCB avec des vias borgnes pour la RF, ou nanostructurés sur membranes à nanofils pour le millimétrique. Les travaux complets comprennent (i) une analyse de la topologie, (ii) un développement du modèle équivalent validée par des simulations électromagnétiques (HFSSTM) et des mesures sur PCB et sur des membranes brésiliennes en millimétrique, (iii) des abaques de conceptions et (iv) des applications à la conception des nouveaux dispositifs passifs miniaturisés. Notre lignes offrent une grande souplesse de conception et peuvent être placées indifféremment sur le substrat structuré sans modification de leurs paramètres électriques. Un nouveau coupleur hybride miniaturisé par l’utilisation de cette ligne est présenté comme une preuve de concept. Pour aller plus loin, une étude comparable des structures de lignes microrubans couplées à ondes lentes est développée. Le principe du couplage sur substrat structuré est d’abord exposé avec une présentation de ses avantages et inconvénients, puis un modèle est également proposé dans le but de réaliser un coupleur co-directif 0-dB miniaturisé par l’utilisation de ces lignes. De plus, un des parties essentielles de ces travaux concerne l’utilisation de la structure microruban à onde lente pour la miniaturisation de dispositifs passifs non-réciproques : un nouvel isolateur microruban compact avec l’introduction de vias dans le ferrite et une nouvelle conception de circulateur miniaturisé sur le substrat ferrite-diélectrique avec un réseau de vias borgnes. / This work focuses on providing innovate solutions into the realization of high-quality and compact passive devices for designer on RF and millimeter-wave bands. These devices are based on slow-wave microstrip lines on structured substrate, either on PCB with blind vias for RF applications, or on metallic nanowire membrane. The complete works include (i) an analysis of topology, (ii) a development of equivalent model validated by the electromagnetic simulations (HFSSTM) and the measurements, (iii) design charts and (iv) applications on design of novel miniaturized passive devices. These transmission lines give the flexibility for designers and capability to be indifferently placed on structured substrate without any impact on their electrical parameters. A novel miniaturized hybrid coupler using this line is proposed, as a proof of concept. In the other hand, a comparable study on the structure of slow-wave coupled microstrip lines is developed. The principal of coupling on structured substrate is shown for their advantages and drawbacks and then an electrical model is also proposed in order to realize a miniaturized 0-dB forward-wave directional coupler using these lines. Moreover, an essential part of this thesis concerns the utilization of the slow-wave microstrip structure to miniaturize the non-reciprocal passive devices: a novel microstrip isolator with the introduction of vias inside the ferrite and a novel design of the miniaturized circulator on a ferrite-dielectric substrate with blind vias.

Le fonctionnement du cerveau repose sur la libération de molécules telles que les neurotransmetteurs et les métabolites dans le milieu interstitiel. L’étude de ces molécules est donc primordiale afin de mieux comprendre leur rôle physiologique et pathologique. Pour cela, les biocapteurs enzymatiques implantables sont un outil prometteur de par leurs capacités de détection quantitative, en temps réel et dans les tissus profonds. En fonction des dimensions du biocapteur, l’impact de l’implantation peut avoir des conséquences considérables sur la composition chimique du fluide interstitiel. De plus, chaque implantation induit localement une réaction inflammatoire dite « réaction au corps étranger ». La réduction de ces réactions est indispensable afin d’obtenir des estimations plus précises de la concentration des molécules présentes. Dans ce sens, ce manuscrit exposera deux voies de réduction de l’impact lésionnel dû à l’implantation de biocapteurs. Tout d’abord, il sera présenté la miniaturisation de biocapteurs enzymatiques jusqu’à des diamètres externes inférieurs à 15 µm. Et il sera démontré in vivo que ces biocapteurs ultra miniaturisés ont le potentiel d’être implantés dans le cerveau sans induire de dommages détectables aux tissus et aux vaisseaux sanguins. Ensuite, le développement d’une microsonde fabriquée à l’aide des technologies MEMS couplant une détection électrochimique et optique sera introduit dans le cadre du suivi du fluide interstitiel péri- et intratumoral de glioblastomes modifiés pour émettre de la fluorescence. En intégrant deux types de détection sur une unique micro-aiguille, cette microsonde permet de réduire le nombre d’implantations. Ces deux voies de miniaturisation ouvrent la possibilité de suivre la composition chimique du fluide interstitiel de manière moins invasive, et donc de mieux préserver la physiologie des tissus étudiés dans le cerveau. / Brain function is based on the release of molecules such as neurotransmitters and metabolites into the interstitial fluid. The study of these molecules is essential to better understand their physiological and pathological role. For this purpose, implantable enzymatic biosensors are a promising tool because of their quantitative, real-time and deep tissue detection abilities. Depending on the dimensions of the biosensor, the impact of implantation may have considerable consequences on the chemical composition of the interstitial fluid. In addition, each implantation induces a local inflammatory reaction called "foreign body reaction". The reduction of these reactions is crucial in order to provide more accurate estimations of molecules concentrations present in the interstitial fluid. In this sense, this manuscript will expose two ways of reducing the lesional impact due to the implantation of biosensors. First of all, it will be presented the miniaturization of enzymatic biosensors up to external diameters less than 15 µm. And it will be demonstrated in vivo that these ultra miniaturized biosensors have the potential to be implanted in the brain without inducing detectable damage to tissues and blood vessels. Then, the development of a microprobe fabricated using MEMS technologies combining electrochemical and optical detection will be introduced as part of the monitoring of peri- and intratumoral interstitial fluid from glioblastomes modified to fluoresce. By integrating two types of detection on a single micro-needle, this microprobe reduces the number of implantations. These two miniaturization approaches open up the possibility of following the chemical composition of the interstitial fluid in a less invasive way, and thus of better preserving the physiology of the tissues studied in the brain.

The general aim of this thesis was to evaluate a newly designed and constructed miniaturized rotating disk apparatus for in vitro dissolution rate measurements of different drug substances from all of the classes in the Biopharmaceutical Classification System (BCS). The new equipment is based on a low volume flow-through cell of Plexiglas, a gold plated magnetic bar and a special designed press. The disk of drug substance (approx. 5 mg) is placed eccentrically in the bar. Rotation speeds were set with a graded magnetic stirrer. An external HPLC pump delivered a continuous flow of aqueous medium to the flow-through cell during dissolution testing. A reversed phase high-performance liquid chromatography system using diode array detection (RP-HPLC-DAD) was coupled online to the new equipment. The injections from the miniaturized rotating disk outlet into the quantifying HPLC system were controlled by a six-position switching valve. The injection volumes from the valve and the autosampler, used for the external standards, were statistically evaluated to match each other volumetrically. No analyses were longer than three minutes, using isocratic mode. A traditional USP rotating disk apparatus was used as a reference system and the two instruments were shown to be statistically dissimilar in the numerical dissolution rate values probably due to different hydrodynamics, but had approximately the same precision/repeatability. When correlating the logarithmic values of the in vitro dissolution rate (G) with the apparent solubility (S), using shake-flask methodology in the solubility studies, the two apparatuses gave the same correlation patterns. Further correlation studies were done where the media components were altered by the use of different buffer species or additives into the buffers, such as inorganic salts. Chemometric tools, e.g. orthogonal partial least squares (OPLS), were used to better evaluate the most influential factors for G and S in different media. The most significant factor for a model basic drug substance (terfenadine) was pH, followed by the ionic strength (I) and added sodium chloride in one of the media. However, the surfactants in the Fasted State Simulated Intestinal Fluid (FaSSIF-V2) were found to be insignificant for G and S in this study (using a 95% confidence interval). The new miniaturized apparatus is a promising prototype for in vitro dissolution rate measurements both for early screening purposes and in dissolution testing during drug development, but needs further instrumental improvements.