Novel processes were developed that resulted in a self-packaged device during the system integration, along with a transparent lid for inspection or optical probing. A new process was developed for improving the verticality in Micro Electro Mechanical Systems (MEMS) structures using Deep Reactive Ion Etching (DRIE). A self-pattered, mask-less photolithography technique was developed to metallize these vertical structures while maintaining a transparent window, for packaging of various MEMS devices. The verticality and metallization coverage were evaluated by incorporating the MEMS structures into an optical Corner Cube Retroreflector (CCR). A low temperature, hermetic sealing technique was also developed using In-Au thermo-compression bonding at 160°C. Cross-shaped 550um deep vertical mirrors, with sidewall angles of 90.08° were etched with this new DRIE technique. This is the best reported sidewall angle for such deep structures. The typical scalloped DRIE sidewall roughness was reduced to 40nm using wet polishing. A bonded Pyrex wafer was used as the handle wafer during DRIE; it eventually forms the package window after DRIE. The metallized, vertical mirrors were bonded to a MEMS device chip to assemble and package the CCR. The MEMS device chip consisted of an array of torsion mirrors. The mirrors were designed to modulate at 6Vp-p - 20Vp-p, with the resonant frequencies ranging from 25 KHz - 50 KHz. The design and simulation results are presented. To test the hermetic seal, helium leak tests were performed on the packaged device. Leak rates of as low as 2.8x10-8 atm cc/s air were detected, which is better than the MIL-STD-883G of 5x10-8 atm cc/s air for a package volume of 7.8x10-3 CC. A microprocessor and temperature/humidity sensor was then integrated with the CCR to assemble a passive optical digital data communicator. A flexible circuit design and a folded packaging scheme were utilized to minimize the overall form factor. Flat, flexible polymer batteries were incorporated to reduce the thickness of the package to a few millimeters. The fully packaged sensor system was about 30mmx30mmx6mm. Recorder sensor data was transmitted to a remote location using the CCR, and those results are presented.

<p>In later years polymer replication techniques have become a frequently employed fabrication method for microfluidic and micro-optical devices. This thesis describes applications and further developments of microstructures replicated in polymer materials. </p><p>A novel method for homogenous amplified single-molecule detection utilizing a microfluidic readout format is presented. The method enables enumeration of single biomolecules by transforming specific molecular recognition events at nanometer dimensions to micrometer-sized DNA macromolecules. This transformation process is mediated by target specific padlock probe ligation, followed by rolling circle amplification (RCA) resulting in the creation of one rolling circle product (RCP) for each recognized target. Throughout this transformation the discrete nature of the molecular population is preserved. By hybridizing a fluorescence-labeled DNA detection oligonucleotide to each repeated sequence of the RCP, a confined cluster of fluorophores is generated, which makes optical detection and quantification possible. Spectral multiplexing is also possible since the spectral profile of each RCP can be analyzed separately. The microfluidic data acquisition process is characterized in detail and conditions that allow for quantification limited only by Poisson sampling statistics is established. The molecular characteristics of RCPs in solution are also investigated.</p><p>Furthermore a novel thermoplastic microfluidic platform is described. The platform allows for observation of the microchannels using high magnification optics and also offers the possibility of on-chip cell culture and the integration of mechanical actuators.</p><p>A novel fabrication process for the integration of polymer micro-optical elements on silicon is presented. The process is used for fabrication of a micro-optical system consisting of a laser and a movable microlens making beam steering possible. Such a micro-scanning system could potentially be used for miniaturized biochemical analysis.</p>

In later years polymer replication techniques have become a frequently employed fabrication method for microfluidic and micro-optical devices. This thesis describes applications and further developments of microstructures replicated in polymer materials. A novel method for homogenous amplified single-molecule detection utilizing a microfluidic readout format is presented. The method enables enumeration of single biomolecules by transforming specific molecular recognition events at nanometer dimensions to micrometer-sized DNA macromolecules. This transformation process is mediated by target specific padlock probe ligation, followed by rolling circle amplification (RCA) resulting in the creation of one rolling circle product (RCP) for each recognized target. Throughout this transformation the discrete nature of the molecular population is preserved. By hybridizing a fluorescence-labeled DNA detection oligonucleotide to each repeated sequence of the RCP, a confined cluster of fluorophores is generated, which makes optical detection and quantification possible. Spectral multiplexing is also possible since the spectral profile of each RCP can be analyzed separately. The microfluidic data acquisition process is characterized in detail and conditions that allow for quantification limited only by Poisson sampling statistics is established. The molecular characteristics of RCPs in solution are also investigated. Furthermore a novel thermoplastic microfluidic platform is described. The platform allows for observation of the microchannels using high magnification optics and also offers the possibility of on-chip cell culture and the integration of mechanical actuators. A novel fabrication process for the integration of polymer micro-optical elements on silicon is presented. The process is used for fabrication of a micro-optical system consisting of a laser and a movable microlens making beam steering possible. Such a micro-scanning system could potentially be used for miniaturized biochemical analysis.

L’imagerie hyperspectrale, qui consiste à acquérir l'image d'une scène dans un grand nombre de bandes spectrales, permet de détecter des cibles là où l'imagerie couleur classique ne permettrait pas de conclure. Les imageurs hyperspectraux à acquisition séquentielle sont inadaptés aux applications de détection en temps réel. Dans cette thèse, nous proposons d’utiliser un imageur multispectral snapshot, capable d’acquérir simultanément un nombre réduit de bandes spectrales sur un unique détecteur matriciel. Le capteur offrant un nombre de pixels limité, il est nécessaire de réaliser un compromis en choisissant soigneusement le nombre et les profils spectraux des filtres de l'imageur afin d’optimiser la performance de détection. Dans cet objectif, nous avons développé une méthode de sélection de bandes qui peut être utilisée dans la conception d’imageurs multispectraux basés sur une matrice de filtres fixes ou accordables. Nous montrons, à partir d'images hyperspectrales issues de différentes campagnes de mesure, que la sélection des bandes spectrales à acquérir peut conduire à des imageurs multispectraux capables de détecter des cibles ou des anomalies avec une efficacité de détection proche de celle obtenue avec une résolution hyperspectrale. Nous développons conjointement un démonstrateur constitué d'une matrice de 4 filtres de Fabry-Perot accordables électroniquement en vue de son implantation sur un imageur multispectral snapshot agile. Ces filtres sont développés en technologie MOEMS (microsystèmes opto-électro-mécaniques) en partenariat avec l'Institut d'Electronique Fondamentale. Nous présentons le dimensionnement optique du dispositif ainsi qu'une étude de tolérancement qui a permis de valider sa faisabilité. / Hyperspectral imaging, which consists in acquiring the image of a scene in a large number of spectral bands, can be used to detect targets that are not visible using conventional color imaging. Hyperspectral imagers based on sequential acquisition are unsuitable for real-time detection applications. In this thesis, we propose to use a snapshot multispectral imager able to acquire simultaneously a small number of spectral bands on a single image sensor. As the sensor offers a limited number of pixels, it is necessary to achieve a trade-off by carefully choosing the number and the spectral profiles of the imager’s filters in order to optimize the detection performance. For this purpose, we developed a band selection method that can be used to design multispectral imagers based on arrays of fixed or tunable filters. We use real hyperspectral images to show that the selection of spectral bands can lead to multispectral imagers able to compete against hyperspectral imagers for target detection and anomaly detection applications while allowing snapshot acquisition and real-time detection. We jointly develop an adaptive snapshot multispectral imager based on an array of 4 electronically tunable Fabry-Perot filters. The filters are developed in MOEMS technology (Micro-Opto-Electro-Mechanical Systems) in partnership with the Institut d'Electronique Fondamentale. We present the optical design of the device and a study of tolerancing which has validated its feasibility.

L’imagerie multispectrale permet d’améliorer la détection et la reconnaissance de cibles dans les applications de surveillance. Elle consiste à analyser des images de la même scène acquises simultanément dans plusieurs bandes spectrales grâce à un filtrage. Cette thèse étudie la possibilité de réaliser une matrice de 4 filtres Fabry Pérot (FP) intégrés 3D et ajustables par actionnement électrostatique dans le domaine visible-proche infrarouge. Les miroirs fixes des filtres FP sont des multicouches ZnS/YF₃ déposés sur un wafer de borosilicate, et les miroirs mobiles sont des membranes multicouches PECVD SiNH/SiOH encastrées sur une structure mobile très compacte micro-usinée dans un wafer en silicium. Les performances optiques des filtres FP ont été optimisées en prenant en compte la dissymétrie et le déphasage à la réflexion des miroirs. La structure mobile a été modélisée par éléments finis pour minimiser ses déformations lors de l’actionnement. Les étapes critiques des procédés de fabrication des miroirs mobiles en technologie Si ou SOI ont été mises au point : i) la fabrication et la libération par gravures profondes DRIE et XeF₂ des membranes multicouches avec une contrainte résiduelle ajustée par recuit et une réflectance voisine de 50% dans une large gamme spectrale, ii) le contrôle des vitesse de la gravure DRIE avec des motifs temporaires permettant la gravure simultanée de motifs de largeur et de profondeur variables, et iii) la délimitation de motifs sur surfaces fortement structurées à l’aide de pochoirs alignés mécaniquement ou de films secs photosensibles. Ces travaux ouvrent la voie vers une réalisation complète d’une matrice de filtres FP intégrés 3D. / Multispectral imaging is used to improve target detection and identification in monitoring applications. It consists in analyzing images of the same scene simultaneously recorded in several spectral bands owing to a filtering. This thesis investigates the possibility to realize, an array of four 3D integrated Fabry-Perot (FP) filters that are tunable in the visible-near infrared range by electrostatic actuation. The fixed mirrors of the FP filters are ZnS/YF₃ multilayers deposited on a borosilicate wafer, and the movable mirrors are PECVD SiNH/SiOH multilayer membranes clamped in a very compact movable structure micromachined in a Si wafer. A 3rd glass wafer is used for filters packaging. Optical performances of the FP filters have been optimized by taking into account the asymmetry and the reflection phase shift of the mirrors and the mobile structure has been modeled by finite elements analysis notably to minimize its deformation during actuation. The critical steps of the movable mirrors fabrication process in Si or SOI technology have been developed : i) the fabrication and the release by DRIE and XeF₂ etching of 8 or 12 layers membranes with a residual stress tunable by annealing and a reflectance close to 50% in broad wavelength range (570-900nm), ii) the control with temporary patterns of the simultaneous deep etching of patterns with different widths and depths, and iv) various patterning techniques on highly structured surfaces based on shadow masks (with mechanical alignment) or laminated photosensitive dry films. These results open the way towards the full realization of an array of 3D integrated FP filters.

Les systèmes micro-opto-électro-mécaniques (MOEMS) représentent un atout considérable pour les technologies de demain et démontrent régulièrement leur capacité d'innovation dans tous les domaines de recherches. L'astronomie en profite déjà à travers l'optique adaptative et leur versatilité a récemment permis de développer un nouveau spectro-imageur BATMAN qui verra sa première lumière au Telescopio Nazionale Galileo (TNG) à La Palma (Iles Canaries). Le code de contrôle du MOEMS permettant l'automatisation de l'acquisition des spectres a été le point de départ de mon travail au LAM.La partie principale de ce manuscrit traite d'une seconde application imaginée en associant les MOEMS à un matériau photochromique développé à Polytecnico di Milano (Italie) qui peut prendre deux états différenciés par leur transparence. Le MOEMS, initialement utilisé pour la projection d'image, permet de moduler la dose d'énergie lumineuse projeté sur la plaque photochromique qui répond en s'éclaircissant progressivement. Ce procédé permet donc d'enregistrer des images en niveau de gris sur la plaque et notamment des hologrammes générés par ordinateur (CGH) utilisés en métrologie optique. Actuellement, les CGHs utilisés sont binaires, mais notre procédure permet d'enregistrer des CGHs quantifiés en amplitude avec une résolution de 13,68 µm et une précision inférieure à 1% en terme de transparence malgré un éclairage peu homogène. La quantification des CGHs de type Fresnel et Fourier ont été calculés, réalisés et testés avec succès. Deux nouveaux algorithmes de Fourier ont étaient imaginés, réalisés et ont montrés des performances très supérieurs au code usuel de Lee qui est un codage binaire. / Micro-opto-electro-mecanical systems (MOEMS) are primordial tools for future applications in several scientific fields as telecommunications or image display. Astronomy takes also advantage of their great adaptatbility thanks to the development of adaptative optics; a new spectro-imager called BATMAN has recently been develloped to be installed at Telescopio Nazionale Galileo (TNG) in the Canaries Islands. The control of the MOEMS allowing computerizing this processus has been the starting point of my work at the LAM.The main part of this manuscript deals with another application conceived thanks to the association of the characteristics of MOEMS and photosensitive materials developed at Politecnico di Milano (Italy). These materials can be put in two states differentiated by their transparency. The MOEMS, initially used to display images, allows controlling the dose of light projected on the photocrhomic plate which reacts by becoming more and more transparent. This process permit to record Computer Generated Holograms (CGHs) in grayscale which are used in optical metrology. Today, binary CGHs are used but our process allows to record amplitude quantified CGHs with a resolution of 13.68 µm and a precision better than 1% in term of transparency, even with a non homogeneous illumination beam. Comparative studies have shown advantages of quantified CGHs of Fresnel and Fourier families. Two new Fourier algorithms have been conceived thanks to use of the third dimension offered by the control of the transparency. They have been realized and tested succesfully, and have shown much better performances than the current binary coding, so called Lee algorithm.

La miniaturisation des systèmes d'imagerie présente aujourd'hui un fort potentiel dans plusieurs domaines, dont le développement de nouveaux dispositifs biomédicaux. Les exigences associées concernant l'imagerie demandent un effort substantiel dans le développement de composants optiques de haute qualité. Un meilleur contrôle de la propagation de la lumière ou de ses caractéristiques dans de tels systèmes est également important. Les composants doivent donc, par exemple, contenir les aberrations optiques pouvant affecter la résolution, la mise en œuvre de composants optiques dont le profil de phase continu est bien contrôlé est une voie intéressante. Ces composants devraient, de plus, être réalisés à partir de matériaux robustes en vue de leur assemblage au sein de dispositifs miniatures. Ce manuscrit de thèse de doctorat porte donc sur la conception et la fabrication parallèle de tels micro-composants optiques réfractifs réalisés en verre. Dans ce but, deux technologies ont été étudiées et optimisées, la lithographie à niveaux de gris et un procédé de soufflage de verre. En exemple, des microaxicons en verre ont été fabriqués et la génération de faisceaux de Bessel démontrée. Ce type de faisceau est caractérisé par une longue distance de propagation non-diffractive le long de l'axe optique, suivie d'une forme de faisceaux creux, qui les rend très utiles dans de nombreux domaines. Ces travaux de thèse ont été soutenus par le projet SMYLE (Small Systems for a Better Life) et le conseil Régional de Franche-Comté. / Miniaturization of imaging systems shows nowadays a strong potential for many applications, in particular, e. g., for novel biomedical devices. Related imaging specifications require a substantial effort onto the development of high quality microoptical components. better control of light propagation and features in such system sis also of particular interest. Components should then e.g. contain optical aberrations in order to reach high resolutions. In purpose of searching higher diffraction efficiencies or resolutions, optical components with well-controlled continuous phase profiles are sought. In addition, they also should be made of robust materials to handle their further assembly into miniaturized devices. Consequently, the manuscript focuses on the design and the parallel fabrication of such microoptical components made of glass. To that end, two technologies have been studied and optimized, namely gray-scale lithography and glass-blowing processes. As an example, glass-based microaxicons have been fabricated and Bessel beams generation has been demonstrated. This type of beam exhibits a long non-diffractive propagation distance along the optical axis followed by a dark hollow shape which makes them useful in many different applications. This work has been supported by the SMYLE (Smart Systems for a Better Life) European project and the Ranche-Comté Regional Council.

Ce travail de thèse est axé sur l'utilisation de modes de Bloch lents à pertes rayonnées verticales, dans des cristaux photoniques membranaires 1D (réseau de fentes) et 2D (réseaux de trous) en InP, pour la réalisation de réflecteurs en espace libre. L'intérêt premier de tels réflecteurs réside dans leur compacité verticale (une seule couche épitaxiée), comparés aux miroirs de Bragg traditionnels, mais également dans le contrôle de la polarisation qu'ils autorisent. Les règles de conception de ces réflecteurs, ainsi que leurs procédés de fabrication et de caractérisation sont présentés. Les résultats expérimentaux obtenus sont en bon accord avec la théorie.<br /><br />Ces réflecteurs membranaires à cristaux photoniques ont ensuite été intégrés dans des cavités Fabry-Pérot verticales, où ils remplacent le miroir de Bragg supérieur. Un dispositif passif (filtre MOEMS accordable électriquement, compact et polarisé) et un dispositif actif (VCSEL à puits quantiques, émettant à 1.55µm, compact et polarisé) ont été réalisés.<br /><br />Enfin, des cavités Fabry-Pérot ultimes, uniquement à base de ces réflecteurs à CP, sont étudiées. Le concept est validé en utilisant deux échantillons différents placés en vis-à-vis à l'aide d'un montage piézo-électrique. Ensuite, un démonstrateur passif monolithique, montrant une sélectivité et une compacité verticale sans précédents.<br />En outre, une étude théorique démontre la capacité des miroirs à CP à influer très fortement sur la vitesse d'expansion latérale de la lumière dans les cavités Fabry-Pérot, ce qui ouvre la voie à de toutes nouvelles applications.

The focus of this work involves optical and RF (radio frequency) applications of novel microactuation and self-assembly techniques in MEMS (Microelectromechanical systems). The scaling of physical forces into the micro domain is favorably used to design several types of actuators that can provide large forces and large static displacements at low operation voltages. A self-assembly method based on thermally induced localized plastic deformation of microstructures has been developed to obtain truly three-dimensional structures from a planar fabrication process. RF applications include variable discrete components such as capacitors and inductors as well as tunable coupling circuits. Optical applications include scanning micromirrors with large scan angles (>90 degrees), low operation voltages (<10 Volts), and multiple degrees of freedom. One and two-dimensional periodic structures with variable periods and orientations (with respect to an incident wave) are investigated as well, and analyzed using optical phased array concepts. Throughout the research, permanent tuning via plastic deformation and power-off latching techniques are used in order to demonstrate that the optical and RF devices can exhibit zero quiescent power consumption once their geometry is set.

The focus of this work involves optical and RF (radio frequency) applications of novel microactuation and self-assembly techniques in MEMS (Microelectromechanical systems). The scaling of physical forces into the micro domain is favorably used to design several types of actuators that can provide large forces and large static displacements at low operation voltages. A self-assembly method based on thermally induced localized plastic deformation of microstructures has been developed to obtain truly three-dimensional structures from a planar fabrication process. RF applications include variable discrete components such as capacitors and inductors as well as tunable coupling circuits. Optical applications include scanning micromirrors with large scan angles (>90 degrees), low operation voltages (<10 Volts), and multiple degrees of freedom. One and two-dimensional periodic structures with variable periods and orientations (with respect to an incident wave) are investigated as well, and analyzed using optical phased array concepts. Throughout the research, permanent tuning via plastic deformation and power-off latching techniques are used in order to demonstrate that the optical and RF devices can exhibit zero quiescent power consumption once their geometry is set.